CN104051308A - 一种晶片剥离装置、系统及控制晶片剥离的装置 - Google Patents
一种晶片剥离装置、系统及控制晶片剥离的装置 Download PDFInfo
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- CN104051308A CN104051308A CN201410302219.7A CN201410302219A CN104051308A CN 104051308 A CN104051308 A CN 104051308A CN 201410302219 A CN201410302219 A CN 201410302219A CN 104051308 A CN104051308 A CN 104051308A
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- 238000010438 heat treatment Methods 0.000 claims abstract description 87
- 238000005516 engineering process Methods 0.000 claims abstract description 21
- 235000012431 wafers Nutrition 0.000 claims description 240
- 239000000919 ceramic Substances 0.000 claims description 35
- 230000000630 rising effect Effects 0.000 claims description 18
- 238000000926 separation method Methods 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 11
- 102000002067 Protein Subunits Human genes 0.000 claims description 6
- 108010001267 Protein Subunits Proteins 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000000725 suspension Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 20
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 238000013461 design Methods 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 12
- 238000005498 polishing Methods 0.000 description 12
- 230000001010 compromised effect Effects 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000000750 progressive effect Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910002110 ceramic alloy Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
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- 238000000227 grinding Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/799—Apparatus for disconnecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (12)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410302219.7A CN104051308B (zh) | 2014-06-27 | 2014-06-27 | 一种晶片剥离装置、系统及控制晶片剥离的装置 |
Applications Claiming Priority (1)
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CN201410302219.7A CN104051308B (zh) | 2014-06-27 | 2014-06-27 | 一种晶片剥离装置、系统及控制晶片剥离的装置 |
Publications (2)
Publication Number | Publication Date |
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CN104051308A true CN104051308A (zh) | 2014-09-17 |
CN104051308B CN104051308B (zh) | 2017-05-24 |
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CN201410302219.7A Active CN104051308B (zh) | 2014-06-27 | 2014-06-27 | 一种晶片剥离装置、系统及控制晶片剥离的装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106112192A (zh) * | 2016-07-25 | 2016-11-16 | 扬州扬杰电子科技股份有限公司 | 一种焊接空洞抑制装置及其工作方法 |
CN106847674A (zh) * | 2017-03-21 | 2017-06-13 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片加工用快速脱片装置 |
CN107785298A (zh) * | 2016-08-25 | 2018-03-09 | 苏州能讯高能半导体有限公司 | 晶圆临时键合的分离设备及方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2106421U (zh) * | 1991-08-02 | 1992-06-03 | 清华大学 | 红外快速热处理设备 |
JPH10125756A (ja) * | 1996-10-21 | 1998-05-15 | Matsushita Electric Ind Co Ltd | 回路製造装置用動作制御装置及び動作制御方法、並びに回路製造装置 |
CN1341958A (zh) * | 2000-08-04 | 2002-03-27 | 株式会社东芝 | 芯片的拾取装置及半导体装置的制造方法 |
JP2006120721A (ja) * | 2004-10-19 | 2006-05-11 | Toshiba Corp | 基板処理装置 |
CN102460677A (zh) * | 2009-04-16 | 2012-05-16 | 休斯微技术股份有限公司 | 用于临时晶片接合和剥离的改进装置 |
CN202434555U (zh) * | 2012-01-06 | 2012-09-12 | 成都旭双太阳能科技有限公司 | 一种薄膜太阳能电池组件剥离装置 |
CN203950788U (zh) * | 2014-06-27 | 2014-11-19 | 广东先导半导体材料有限公司 | 一种晶片剥离装置及系统 |
-
2014
- 2014-06-27 CN CN201410302219.7A patent/CN104051308B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2106421U (zh) * | 1991-08-02 | 1992-06-03 | 清华大学 | 红外快速热处理设备 |
JPH10125756A (ja) * | 1996-10-21 | 1998-05-15 | Matsushita Electric Ind Co Ltd | 回路製造装置用動作制御装置及び動作制御方法、並びに回路製造装置 |
CN1341958A (zh) * | 2000-08-04 | 2002-03-27 | 株式会社东芝 | 芯片的拾取装置及半导体装置的制造方法 |
JP2006120721A (ja) * | 2004-10-19 | 2006-05-11 | Toshiba Corp | 基板処理装置 |
CN102460677A (zh) * | 2009-04-16 | 2012-05-16 | 休斯微技术股份有限公司 | 用于临时晶片接合和剥离的改进装置 |
CN202434555U (zh) * | 2012-01-06 | 2012-09-12 | 成都旭双太阳能科技有限公司 | 一种薄膜太阳能电池组件剥离装置 |
CN203950788U (zh) * | 2014-06-27 | 2014-11-19 | 广东先导半导体材料有限公司 | 一种晶片剥离装置及系统 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106112192A (zh) * | 2016-07-25 | 2016-11-16 | 扬州扬杰电子科技股份有限公司 | 一种焊接空洞抑制装置及其工作方法 |
CN106112192B (zh) * | 2016-07-25 | 2018-04-03 | 扬州扬杰电子科技股份有限公司 | 一种焊接空洞抑制装置及其工作方法 |
CN107785298A (zh) * | 2016-08-25 | 2018-03-09 | 苏州能讯高能半导体有限公司 | 晶圆临时键合的分离设备及方法 |
CN107785298B (zh) * | 2016-08-25 | 2021-02-02 | 苏州能讯高能半导体有限公司 | 晶圆临时键合的分离设备及方法 |
CN106847674A (zh) * | 2017-03-21 | 2017-06-13 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片加工用快速脱片装置 |
CN106847674B (zh) * | 2017-03-21 | 2023-05-26 | 优然沃克(北京)科技有限公司 | 一种蓝宝石晶片加工用快速脱片装置 |
Also Published As
Publication number | Publication date |
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CN104051308B (zh) | 2017-05-24 |
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Address after: 510030 Guangdong city of Qingyuan province high tech Zone Industrial Park 27-9 District No. B shpucka Applicant after: Guangdong forerunner materials Limited by Share Ltd Address before: 510030 Guangdong city of Qingyuan province high tech Zone Industrial Park 27-9 District No. B shpucka Applicant before: Guangdong First Semiconductor Materials Co., Ltd. |
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Inventor after: Zhu Liu Inventor after: Liu Liu Inventor after: Wang Hua Inventor after: Xie Qun Inventor before: Zhu Liu Inventor before: Liu Liu |
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Effective date of registration: 20180428 Address after: 511875 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Patentee after: Guangdong Vital Rare Material Co., Ltd. Address before: 510030 District 27-9, B, Qingyuan high tech Industrial Park, Guangdong. Patentee before: Guangdong forerunner materials Limited by Share Ltd |
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Effective date of registration: 20180626 Address after: 404000 Chongqing Wanzhou Jing Kai District Peak Garden (Wanzhou Jing Kai District) Patentee after: Viking microelectronic Limited by Share Ltd Address before: 511875 Industrial Zone, wo Yun town, Qingxin County, Qingyuan, Guangdong (beside the fish dam road) Patentee before: Guangdong Vital Rare Material Co., Ltd. |
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