CN104033395B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN104033395B
CN104033395B CN201410080508.7A CN201410080508A CN104033395B CN 104033395 B CN104033395 B CN 104033395B CN 201410080508 A CN201410080508 A CN 201410080508A CN 104033395 B CN104033395 B CN 104033395B
Authority
CN
China
Prior art keywords
blade part
wheel rim
segmentation
fixing blade
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410080508.7A
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English (en)
Chinese (zh)
Other versions
CN104033395A (zh
Inventor
住本慎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Manufacturing Co Ltd
Original Assignee
Shimadzu Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Manufacturing Co Ltd filed Critical Shimadzu Manufacturing Co Ltd
Publication of CN104033395A publication Critical patent/CN104033395A/zh
Application granted granted Critical
Publication of CN104033395B publication Critical patent/CN104033395B/zh
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201410080508.7A 2013-03-07 2014-03-04 真空泵 Active CN104033395B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-045486 2013-03-07
JP2013045486A JP6236806B2 (ja) 2013-03-07 2013-03-07 真空ポンプ

Publications (2)

Publication Number Publication Date
CN104033395A CN104033395A (zh) 2014-09-10
CN104033395B true CN104033395B (zh) 2017-03-01

Family

ID=51464323

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410080508.7A Active CN104033395B (zh) 2013-03-07 2014-03-04 真空泵

Country Status (3)

Country Link
US (1) US20140255153A1 (ru)
JP (1) JP6236806B2 (ru)
CN (1) CN104033395B (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6660176B2 (ja) * 2015-12-25 2020-03-11 エドワーズ株式会社 真空ポンプ及びそれに使用される分割静翼部
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334754B1 (en) * 1998-06-23 2002-01-01 Seiko Instruments Inc. Turbomolecular pump
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP2011027049A (ja) * 2009-07-28 2011-02-10 Shimadzu Corp ターボ分子ポンプ
CN202091252U (zh) * 2011-05-31 2011-12-28 埃慕迪磁电科技(上海)有限公司 用于涡轮分子泵的固定叶片

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62173594U (ru) * 1986-03-22 1987-11-04
IT1241177B (it) * 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
JP4676731B2 (ja) * 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
DE102010052660A1 (de) * 2010-11-26 2012-05-31 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334754B1 (en) * 1998-06-23 2002-01-01 Seiko Instruments Inc. Turbomolecular pump
JP4527966B2 (ja) * 2003-05-01 2010-08-18 株式会社大阪真空機器製作所 分子ポンプ
JP2011027049A (ja) * 2009-07-28 2011-02-10 Shimadzu Corp ターボ分子ポンプ
CN202091252U (zh) * 2011-05-31 2011-12-28 埃慕迪磁电科技(上海)有限公司 用于涡轮分子泵的固定叶片

Also Published As

Publication number Publication date
US20140255153A1 (en) 2014-09-11
CN104033395A (zh) 2014-09-10
JP2014173468A (ja) 2014-09-22
JP6236806B2 (ja) 2017-11-29

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