CN104033395B - 真空泵 - Google Patents
真空泵 Download PDFInfo
- Publication number
- CN104033395B CN104033395B CN201410080508.7A CN201410080508A CN104033395B CN 104033395 B CN104033395 B CN 104033395B CN 201410080508 A CN201410080508 A CN 201410080508A CN 104033395 B CN104033395 B CN 104033395B
- Authority
- CN
- China
- Prior art keywords
- blade part
- wheel rim
- segmentation
- fixing blade
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-045486 | 2013-03-07 | ||
JP2013045486A JP6236806B2 (ja) | 2013-03-07 | 2013-03-07 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104033395A CN104033395A (zh) | 2014-09-10 |
CN104033395B true CN104033395B (zh) | 2017-03-01 |
Family
ID=51464323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410080508.7A Active CN104033395B (zh) | 2013-03-07 | 2014-03-04 | 真空泵 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140255153A1 (ru) |
JP (1) | JP6236806B2 (ru) |
CN (1) | CN104033395B (ru) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6660176B2 (ja) * | 2015-12-25 | 2020-03-11 | エドワーズ株式会社 | 真空ポンプ及びそれに使用される分割静翼部 |
GB2557679A (en) * | 2016-12-15 | 2018-06-27 | Edwards Ltd | Stator blade unit for a turbomolecular pump |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6334754B1 (en) * | 1998-06-23 | 2002-01-01 | Seiko Instruments Inc. | Turbomolecular pump |
JP4527966B2 (ja) * | 2003-05-01 | 2010-08-18 | 株式会社大阪真空機器製作所 | 分子ポンプ |
JP2011027049A (ja) * | 2009-07-28 | 2011-02-10 | Shimadzu Corp | ターボ分子ポンプ |
CN202091252U (zh) * | 2011-05-31 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | 用于涡轮分子泵的固定叶片 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62173594U (ru) * | 1986-03-22 | 1987-11-04 | ||
IT1241177B (it) * | 1990-02-16 | 1993-12-29 | Varian Spa | Statore per pompa turbomolecolare. |
JP4676731B2 (ja) * | 2004-09-10 | 2011-04-27 | エドワーズ株式会社 | ターボ分子ポンプ固定翼及び真空ポンプ |
DE102010052660A1 (de) * | 2010-11-26 | 2012-05-31 | Pfeiffer Vacuum Gmbh | Turbomolekularpumpe |
-
2013
- 2013-03-07 JP JP2013045486A patent/JP6236806B2/ja active Active
-
2014
- 2014-03-04 CN CN201410080508.7A patent/CN104033395B/zh active Active
- 2014-03-05 US US14/197,364 patent/US20140255153A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6334754B1 (en) * | 1998-06-23 | 2002-01-01 | Seiko Instruments Inc. | Turbomolecular pump |
JP4527966B2 (ja) * | 2003-05-01 | 2010-08-18 | 株式会社大阪真空機器製作所 | 分子ポンプ |
JP2011027049A (ja) * | 2009-07-28 | 2011-02-10 | Shimadzu Corp | ターボ分子ポンプ |
CN202091252U (zh) * | 2011-05-31 | 2011-12-28 | 埃慕迪磁电科技(上海)有限公司 | 用于涡轮分子泵的固定叶片 |
Also Published As
Publication number | Publication date |
---|---|
US20140255153A1 (en) | 2014-09-11 |
CN104033395A (zh) | 2014-09-10 |
JP2014173468A (ja) | 2014-09-22 |
JP6236806B2 (ja) | 2017-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |