CN104032262A - 一种卧式生产太阳能集热板的镀膜装置 - Google Patents
一种卧式生产太阳能集热板的镀膜装置 Download PDFInfo
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- CN104032262A CN104032262A CN201310536230.5A CN201310536230A CN104032262A CN 104032262 A CN104032262 A CN 104032262A CN 201310536230 A CN201310536230 A CN 201310536230A CN 104032262 A CN104032262 A CN 104032262A
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104766814A (zh) * | 2015-03-31 | 2015-07-08 | 上海华力微电子有限公司 | 一种防止湿法清洗工艺中自然氧化膜生长的装置及方法 |
CN106906446A (zh) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN110273133A (zh) * | 2019-07-26 | 2019-09-24 | 西安拉姆达电子科技有限公司 | 一种专用于晶片镀膜的磁控溅射镀膜机 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2732757Y (zh) * | 2004-07-15 | 2005-10-12 | 北京清华阳光能源开发有限责任公司 | 太阳选择性吸收涂层连续镀膜装置 |
CN101608301A (zh) * | 2009-06-24 | 2009-12-23 | 江苏常松机械集团有限公司 | 连续真空等离子蒸发金属复合材料生产线 |
CN201473586U (zh) * | 2009-07-15 | 2010-05-19 | 仕贯真空科技股份有限公司 | 真空制程气导装置 |
CN101985737A (zh) * | 2010-12-07 | 2011-03-16 | 魏海波 | 连续式太阳能集热板芯片真空磁控溅射镀膜生产线系统 |
JP2011094188A (ja) * | 2009-10-29 | 2011-05-12 | Kobe Steel Ltd | 真空ロール搬送処理装置 |
CN102534540A (zh) * | 2012-04-06 | 2012-07-04 | 上海千达不锈钢有限公司 | 连续式镀膜设备及生产工艺 |
CN202595259U (zh) * | 2012-04-28 | 2012-12-12 | 中国科学院深圳先进技术研究院 | 磁控溅射设备 |
CN103266307A (zh) * | 2013-05-22 | 2013-08-28 | 光垒光电科技(上海)有限公司 | 反应腔 |
CN203559115U (zh) * | 2013-11-01 | 2014-04-23 | 魏海波 | 卧式生产太阳能集热板的镀膜装置 |
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2013
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Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2732757Y (zh) * | 2004-07-15 | 2005-10-12 | 北京清华阳光能源开发有限责任公司 | 太阳选择性吸收涂层连续镀膜装置 |
CN101608301A (zh) * | 2009-06-24 | 2009-12-23 | 江苏常松机械集团有限公司 | 连续真空等离子蒸发金属复合材料生产线 |
CN201473586U (zh) * | 2009-07-15 | 2010-05-19 | 仕贯真空科技股份有限公司 | 真空制程气导装置 |
JP2011094188A (ja) * | 2009-10-29 | 2011-05-12 | Kobe Steel Ltd | 真空ロール搬送処理装置 |
CN101985737A (zh) * | 2010-12-07 | 2011-03-16 | 魏海波 | 连续式太阳能集热板芯片真空磁控溅射镀膜生产线系统 |
CN102534540A (zh) * | 2012-04-06 | 2012-07-04 | 上海千达不锈钢有限公司 | 连续式镀膜设备及生产工艺 |
CN202595259U (zh) * | 2012-04-28 | 2012-12-12 | 中国科学院深圳先进技术研究院 | 磁控溅射设备 |
CN103266307A (zh) * | 2013-05-22 | 2013-08-28 | 光垒光电科技(上海)有限公司 | 反应腔 |
CN203559115U (zh) * | 2013-11-01 | 2014-04-23 | 魏海波 | 卧式生产太阳能集热板的镀膜装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104766814A (zh) * | 2015-03-31 | 2015-07-08 | 上海华力微电子有限公司 | 一种防止湿法清洗工艺中自然氧化膜生长的装置及方法 |
CN106906446A (zh) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN106906446B (zh) * | 2015-12-23 | 2019-09-03 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN110273133A (zh) * | 2019-07-26 | 2019-09-24 | 西安拉姆达电子科技有限公司 | 一种专用于晶片镀膜的磁控溅射镀膜机 |
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Inventor after: Wei Haibo Inventor after: Gong Xiaonan Inventor after: Li Dongqing Inventor before: Wei Haibo Inventor before: Gong Xiaonan |
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Effective date of registration: 20160927 Address after: Yu Liaoning city of Shenyang Province Agricultural Road 110161 Huishan agricultural high tech Development Zone No. 70 Applicant after: LIAONING EQUIPMENT MANUFACTURING VOCATIONAL AND TECHNICAL College Applicant after: Wei Haibo Applicant after: Gong Xiaonan Address before: 110034 Changjiang North Street, Yuhong District, Liaoning City, Shenyang province 62-33,1-3-2 Applicant before: Wei Haibo Applicant before: Gong Xiaonan |
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