CN103985791B - A kind of full-automatic immersion type nesa coating etching device - Google Patents
A kind of full-automatic immersion type nesa coating etching device Download PDFInfo
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- CN103985791B CN103985791B CN201410244055.7A CN201410244055A CN103985791B CN 103985791 B CN103985791 B CN 103985791B CN 201410244055 A CN201410244055 A CN 201410244055A CN 103985791 B CN103985791 B CN 103985791B
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- 238000000576 coating method Methods 0.000 title claims abstract description 33
- 239000011248 coating agent Substances 0.000 title claims abstract description 32
- 238000007654 immersion Methods 0.000 title claims abstract description 32
- 238000005530 etching Methods 0.000 title claims abstract description 23
- 210000002268 wool Anatomy 0.000 claims abstract description 121
- 235000008216 herbs Nutrition 0.000 claims abstract description 119
- 239000007788 liquid Substances 0.000 claims abstract description 67
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 58
- 239000007921 spray Substances 0.000 claims abstract description 32
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000001802 infusion Methods 0.000 claims abstract description 13
- 238000001035 drying Methods 0.000 claims abstract description 11
- 230000003068 static effect Effects 0.000 claims abstract description 11
- 230000008030 elimination Effects 0.000 claims abstract description 10
- 238000003379 elimination reaction Methods 0.000 claims abstract description 10
- 230000003028 elevating effect Effects 0.000 claims abstract description 4
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 23
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 239000011521 glass Substances 0.000 description 22
- 239000003595 mist Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000002791 soaking Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000011435 rock Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 238000004064 recycling Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
- H01L31/1888—Manufacture of transparent electrodes, e.g. TCO, ITO methods for etching transparent electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of full-automatic immersion type nesa coating etching device and process for etching thereof, comprise frame, soak making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit and delivery unit, delivery unit is installed in frame, and on delivery unit, install immersion making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit successively; Soak making herbs into wool unit and comprise making herbs into wool pond, supporting bracket, elevating control structure, Woolen-making liquid infusion structure and pure water clean cycle structure.The present invention can effectively improve making herbs into wool uniformity, adopts fully automatic technique effectively to improve production capacity, avoids the unsteadiness that manual intervention causes properties of product, improve yields; Adopt the circulatory system to effectively reduce the use of Woolen-making liquid and pure water simultaneously, save production cost, economize on resources.
Description
Technical field
The present invention relates to the manufacture field of nesa coating, particularly relate to a kind of full-automatic immersion type nesa coating etching device.
Background technology
Nesa coating is part important in film solar battery structure, as electrode before thin film solar, the charge-trapping that photovoltaic effect is produced also guides to storage battery or electrical equipment use, naturally requires that nesa coating has enough low square resistance, namely higher conductivity; Simultaneously due to be in sunlight in hull cell first through part, sunlight needs just to arrive PIN junction or PN junction realizes photovoltaic generation through rear, and this just requires that nesa coating has higher light transmittance.Therefore, the nesa coating used as solar cell must possess enough low square resistance and sufficiently high sunlight transmitance simultaneously, and this requires that easily extensible is to electronic information industries such as touch-screen version, displays.
The generating efficiency of solar cell depends on the solar energy entering inside solar energy battery to a great extent, therefore, in order to farthest improve the photoelectric conversion efficiency of thin-film solar cells, battery absorbing sunlight must be improved as far as possible, require the loss reducing the sunlight entered in thin-film solar cells as far as possible, namely the transmitance entering inside solar energy battery is increased, this just requires under the prerequisite meeting square resistance, the sunlight transmitance of electrode nesa coating before fully improving.The surperficial suede technology of nesa coating improves nesa coating light transmittance further by light trapping effect, and the parameter such as mist degree, transmitance, uniformity, square resistance of nesa coating becomes the technical standard weighing nesa coating quality.The light trapping effect of surface suede produces multiple reflections by sunlight at matte, increase the light path of sunlight at nesa coating matte, improve through probability thus improve sunlight transmitance, make the sunlight of more multi-energy enter inside solar energy battery to generate electricity for photovoltaic effect, thus improve the generating efficiency of thin-film solar cells.
Further, the criterion of matte comprises mist degree, surface uniformity and Biao Mian Cu Unfeigned degree: mist degree refers under wavelength is the irradiation by the non-matte of film of the incident light of 700nm, the ratio of the transmitance that light disperses at the matte of film and the total transmitance of incident ray; Uniformity is then refer in particular to mist degree and the uniformity coefficient of Biao Mian Cu Unfeigned degree in unit are of matte; Biao Mian Cu Unfeigned degree then refers to the root mean square Cu Unfeigned degree of matte.Therefore, nesa coating process for etching is mainly analyzed from mist degree, uniformity and roughness.
For technical point dry method and the wet method of nesa coating surface wool manufacturing, dry method is physical method, namely adopts the method such as laser, electron beam to carve on surface, and in suitability for industrialized production, realizability difficulty is large, and current application is less.And wet-method etching is mainly chemical method etching, adopts suitable acid, aqueous slkali effects on surface corrodes, producing cratering, crater or diamond shaped unevenness, is the major industrialized direction of current nesa coating surface wool manufacturing.Wet-method etching technology mainly comprises two kinds of techniques at present: spray and immersion.Although spray has production capacity advantage in serialization industrial production, but spray process is wayward in surface uniformity, mist degree, transmitance, square resistance, higher to process specifications, the industrialization large-scale production of current etching device and technology in performance parameter still difficulty meet the industries such as thin film solar to nesa coating technical requirement in square resistance, mist degree, uniformity etc.And infusion method has outstanding quality in surface uniformity, and by controls such as Woolen-making liquid soak time, temperature, can effectively improve making herbs into wool performance parameter, but due to complicated in operating process, equipment requirement is too high, automaticity is on the low side, base material turnover Woolen-making liquid not steadily or rock thus cause production capacity on the low side and percent defective is high, immersion is used for manual single-piece and produces, and greatly reduces production efficiency and rate of finished products.
Summary of the invention
The object of the present invention is to provide a kind of full-automatic immersion type nesa coating etching device, solve that tradition soaks that etching device automaticity is low, glass turnover Woolen-making liquid time steadily do not rock and reduce the large problem of making herbs into wool uniformity, Woolen-making liquid and pure water consumption.
For solving the problems of the technologies described above, the present invention adopts technical scheme as follows:
A kind of full-automatic immersion type nesa coating etching device, comprise frame, soak making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit and delivery unit, described delivery unit is installed in frame, and on delivery unit, install immersion making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit successively; Described immersion making herbs into wool unit comprises making herbs into wool pond, supporting bracket, elevating control structure, Woolen-making liquid infusion structure and pure water clean cycle structure; Described making herbs into wool pond is installed on described delivery unit; Described supporting bracket was installed on the inwall in described making herbs into wool pond, around described making herbs into wool pond inwall one week; Described supporting bracket is inclined upwardly, and is 50 ~ 70 degree of angles with the inwall in described making herbs into wool pond; Along being in same level in described supporting bracket, be positioned at described making herbs into wool pond; Described supporting bracket and described making herbs into wool Chi Neibijiechuchu seal; Described lift control system in described frame, is positioned at directly over making herbs into wool pond by support installing; Described Woolen-making liquid infusion structure and described pure water clean cycle structure installment are on described making herbs into wool pond.
Preferably, described lift control system comprises cylinder and bearing frame; Described cylinder is fixed in described frame by support, is positioned at directly over described making herbs into wool pond; Described bearing frame is connected with the power output shaft of described cylinder, is positioned at the below of described cylinder.
Preferably, described Woolen-making liquid infusion structure comprises Woolen-making liquid outlet, making herbs into wool liquid bath, Woolen-making liquid water pump; Described Woolen-making liquid outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described Woolen-making liquid outlet is connected with described making herbs into wool liquid bath by pipeline; Described making herbs into wool liquid bath is connected with described making herbs into wool pond by pipeline; Between described making herbs into wool liquid bath and described making herbs into wool pond, described Woolen-making liquid water pump is installed.
Preferably, described pure water clean cycle structure comprises pure water outlet, pure water groove, pure water water pump, spray head; Described pure water outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described pure water outlet is connected with described pure water groove by pipeline; Described pure water groove is connected with described spray head by pipeline; Between described spray head and described pure water groove, described pure water water pump is installed; Described spray head, is positioned at directly over described making herbs into wool pond by support installing in described frame.
Preferably, described spray head has many groups, apart from described supporting bracket along place plane 10 ~ 20cm.
Preferably, also level galge is comprised; Described level galge is installed in described making herbs into wool pond.
Preferably, thermometer and PH meter is also comprised; In described making herbs into wool pond and described making herbs into wool liquid bath, described thermometer is all installed and described PH counts.
Preferably, described immersion making herbs into wool unit has multiple, walks abreast and is installed on described delivery unit.
Preferably, described supporting bracket is that acid and alkali-resistance material is made.
Preferably, also heater is comprised; In described making herbs into wool liquid bath and pure water groove, heater is installed.
Technique effect of the present invention is as follows:
A kind of full-automatic immersion type nesa coating etching device of the present invention is by effectively improve the automaticity in making herbs into wool process to the improvement of soaking making herbs into wool unit, avoid base material turnover Woolen-making liquid not steadily or rock and cause making herbs into wool process rate of finished products low, improve the stability of making herbs into wool, by the use of Woolen-making liquid infusion structure and pure water clean cycle structure, effectively can reduce Woolen-making liquid and pure water use amount, save production cost, be more conducive to environmental protection.Simultaneously PH meter, thermometer, level galge be suitable for the controllability further increasing production process.By parallel installation multiple immersion making herbs into wool unit, further increase production capacity of the present invention, enhance productivity.The present invention effectively reduces Woolen-making liquid and washes away the uneven of glass surface nesa coating, improves the uniformity of making herbs into wool, have mist degree, square resistance, light transmittance evenly advantage.
Accompanying drawing explanation
Fig. 1 is the immersion making herbs into wool cell schematics of wherein a kind of preferred version of the present invention.
Wherein 1 is making herbs into wool pond, and 2 is supporting bracket, and 3 is cylinder, and 4 is bearing frame, and 5 is Woolen-making liquid outlet, and 6 is making herbs into wool liquid bath, and 7 is Woolen-making liquid water pump, and 8 is pure water outlet, and 9 is pure water groove, and 10 is pure water water pump, and 11 is spray head.
Embodiment
Below in conjunction with accompanying drawing by embodiment, the present invention will be further described.
Embodiment
A kind of full-automatic immersion type nesa coating etching device of the present invention, base material (below for glass) for realizing treating making herbs into wool carries out nesa coating making herbs into wool, this equipment comprises frame, soaks making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit and delivery unit, described delivery unit is installed in frame, and on delivery unit, install immersion making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit successively; Described immersion making herbs into wool unit is used for the immersion making herbs into wool process of glass; Described cleaning showers unit is used for the cleaning showers process of glass; Described spray clean unit is used for the spray clean process of glass; Described drying unit is used for drying glass; Static elimination unit is for eliminating glass institute static electrification.Concrete described immersion making herbs into wool unit comprises making herbs into wool pond, supporting bracket, elevating control structure, Woolen-making liquid infusion structure and pure water clean cycle structure; Described making herbs into wool pond is positioned on the direction of transfer of delivery unit, and is installed on described delivery unit; Described supporting bracket was installed on the inwall in described making herbs into wool pond, around described making herbs into wool pond inwall one week; Described supporting bracket is inclined upwardly, and is 50 ~ 70 degree of angles with the inwall in described making herbs into wool pond; Along being in same level in described supporting bracket, be positioned at described making herbs into wool pond; Described supporting bracket preferably uses acid and alkali-resistance material; Described supporting bracket and described making herbs into wool Chi Neibijiechuchu seal, and can use glue or other modes; Described lift control system is used for moving up and down transmitting the glass put in place; Described lift control system in described frame, is positioned at directly over making herbs into wool pond by support installing; Described Woolen-making liquid infusion structure is for providing Woolen-making liquid and recycling the Woolen-making liquid soaking making herbs into wool; Described pure water clean cycle system is for providing the pure water of flushing glass top surface and recycling pure water; Described Woolen-making liquid infusion structure and described pure water clean cycle structure installment are on described making herbs into wool pond.
In order to optimize this programme further, described in concrete this programme, lift control system comprises cylinder and bearing frame; Described cylinder is fixed in described frame by support, is positioned at directly over described making herbs into wool pond; Described bearing frame is connected with the power output shaft of described cylinder, is positioned at the below of described cylinder.Described Woolen-making liquid infusion structure comprises Woolen-making liquid outlet, making herbs into wool liquid bath, Woolen-making liquid water pump; Described Woolen-making liquid outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described Woolen-making liquid outlet is connected with described making herbs into wool liquid bath by pipeline; Described making herbs into wool liquid bath is connected with described making herbs into wool pond by pipeline; Between described making herbs into wool liquid bath and described making herbs into wool pond, described Woolen-making liquid water pump is installed.Described pure water clean cycle structure comprises pure water outlet, pure water groove, pure water water pump, spray head; Described pure water outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described pure water outlet is connected with described pure water groove by pipeline; Described pure water groove is connected with described spray head by pipeline; Between described spray head and described pure water groove, described pure water water pump is installed; Described spray head, is positioned at directly over described making herbs into wool pond by support installing in described frame.Wherein, described spray head can be many groups, apart from described supporting bracket along place plane preferably 10 ~ 20cm.
In order to improve controllability and the accuracy of production process further, level galge, thermometer, PH meter, heater can also be increased; Described level galge is installed in described making herbs into wool pond; Described thermometer and described PH meter are arranged in described making herbs into wool pond and described making herbs into wool liquid bath; In described making herbs into wool liquid bath and pure water groove, heater is installed.
Owing to soaking making herbs into wool process general 20 ~ 100 seconds, relative to other processes in making herbs into wool, the used time is longer.Therefore can design multiple immersion making herbs into wool unit, walk abreast and be installed on described delivery unit.Concrete, soak making herbs into wool unit as designed 3; 3 are soaked making herbs into wool unit and walk abreast, and are all pooled to same cleaning showers unit by delivery unit; 3 are soaked the time of carrying out the glass soaking making herbs into wool in making herbs into wool unit and mutually stagger, first complete the glass soaking making herbs into wool process and be sent to cleaning showers unit by delivery unit, then the transmission successively completed below, can improve the efficiency of making herbs into wool so further, improves production capacity.
The course of work of the present invention is described as follows: open present device, regulate lift control system, control cylinder makes bearing frame be positioned at delivery unit direction of advance and maintains an equal level with delivery unit height, when glass is sent on bearing frame by delivery unit, cylinder drive bearing frame move downwardly to supporting bracket on stops along place plan range 1 ~ 2 centimetre, then by Woolen-making liquid water pump by making herbs into wool liquid bath Woolen-making liquid injection making herbs into wool pond until flood glass.Then start timing, keep soak time to be generally 20 ~ 100 seconds, soak after terminating, above supporting bracket, Woolen-making liquid is expelled to making herbs into wool liquid bath by Woolen-making liquid outlet.Control cylinder drives bearing frame to be placed in supporting bracket by glass, now lower glass surface contacts with supporting bracket and is in sealing state, pure water is extracted in pure water groove to spray head afterwards by pure water water pump, Rapid Cleaning glass top surface, due to the stop of glass, pure water can not enter the Woolen-making liquid below supporting bracket, after washing most Woolen-making liquid, open pure water outlet, pure water drains into pure water groove by pure water outlet, glass is risen to delivery unit place plane by lift control system, and glass is sent to cleaning showers unit by delivery unit; After entering cleaning showers unit, glass transfer rate can control at 1 ~ 3m/min, through spray, washes the Woolen-making liquid of glass upper and lower surface remnants, more successively by spray clean unit, drying unit, static elimination unit, last bottom sheet packaging.
Claims (8)
1. a full-automatic immersion type nesa coating etching device, comprise frame, soak making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit and delivery unit, described delivery unit is installed in frame, and on delivery unit, install immersion making herbs into wool unit, cleaning showers unit, spray clean unit, drying unit, static elimination unit successively; It is characterized in that, described immersion making herbs into wool unit comprises making herbs into wool pond, supporting bracket, elevating control structure, Woolen-making liquid infusion structure and pure water clean cycle structure; Described making herbs into wool pond is installed on described delivery unit; Described supporting bracket was installed on the inwall in described making herbs into wool pond, around described making herbs into wool pond inwall one week; Described supporting bracket is inclined upwardly, and is 50 ~ 70 degree of angles with the inwall in described making herbs into wool pond; Along being in same level in described supporting bracket, be positioned at described making herbs into wool pond; Described supporting bracket and described making herbs into wool Chi Neibijiechuchu seal; Described lift control system in described frame, is positioned at directly over making herbs into wool pond by support installing; Described Woolen-making liquid infusion structure and described pure water clean cycle structure installment are on described making herbs into wool pond; Described Woolen-making liquid infusion structure comprises Woolen-making liquid outlet, making herbs into wool liquid bath, Woolen-making liquid water pump; Described Woolen-making liquid outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described Woolen-making liquid outlet is connected with described making herbs into wool liquid bath by pipeline; Described making herbs into wool liquid bath is connected with described making herbs into wool pond by pipeline; Between described making herbs into wool liquid bath and described making herbs into wool pond, described Woolen-making liquid water pump is installed; Described pure water clean cycle structure comprises pure water outlet, pure water groove, pure water water pump, spray head; Described pure water outlet is arranged on the described making herbs into wool pond inwall above described supporting bracket and junction, described making herbs into wool pond; Described pure water outlet is connected with described pure water groove by pipeline; Described pure water groove is connected with described spray head by pipeline; Between described spray head and described pure water groove, described pure water water pump is installed; Described spray head, is positioned at directly over described making herbs into wool pond by support installing in described frame.
2. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, described lift control system comprises cylinder and bearing frame; Described cylinder is fixed in described frame by support, is positioned at directly over described making herbs into wool pond; Described bearing frame is connected with the power output shaft of described cylinder, is positioned at the below of described cylinder.
3. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, described spray head has many groups, apart from described supporting bracket along place plane 10 ~ 20cm.
4. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, also comprise level galge; Described level galge is installed in described making herbs into wool pond.
5. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, also comprises thermometer and PH meter; In described making herbs into wool pond and described making herbs into wool liquid bath, described thermometer is all installed and described PH counts.
6. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, described immersion making herbs into wool unit has multiple, walks abreast and is installed on described delivery unit.
7. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, described supporting bracket is that acid and alkali-resistance material is made.
8. one according to claim 1 full-automatic immersion type nesa coating etching device, is characterized in that, also comprise heater; In described making herbs into wool liquid bath and pure water groove, heater is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410244055.7A CN103985791B (en) | 2014-06-04 | 2014-06-04 | A kind of full-automatic immersion type nesa coating etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410244055.7A CN103985791B (en) | 2014-06-04 | 2014-06-04 | A kind of full-automatic immersion type nesa coating etching device |
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| CN103985791A CN103985791A (en) | 2014-08-13 |
| CN103985791B true CN103985791B (en) | 2016-03-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2613052Y (en) * | 2002-10-22 | 2004-04-21 | 上海交大泰阳绿色能源有限公司 | Semiautomatic silicon face texturing machine |
| CN201233901Y (en) * | 2008-07-22 | 2009-05-06 | 上海科伟达超声波科技有限公司 | Full automatic solar energy silicon chip suede making and cleaning device |
| CN101740657A (en) * | 2008-11-11 | 2010-06-16 | 徐竹林 | Leaf-type solar wool-making device and method |
| KR20110023026A (en) * | 2009-08-28 | 2011-03-08 | (유)에스엔티 | Cassette transfer apparatus for solar cell wafer and wafer texturing apparatus for solar cell using the same |
| CN101651170B (en) * | 2009-08-31 | 2012-04-18 | 北京吉阳技术股份有限公司 | Full automatic polycrystalline groove type acid treatment equipment |
| CN101667608B (en) * | 2009-09-29 | 2011-05-11 | 上海正帆半导体设备有限公司 | System and method for automatically and circularly complementing crystalline-silicon solar cell texture etch solution |
| CN102270698B (en) * | 2011-07-18 | 2013-01-30 | 索日新能源股份有限公司 | Texturing system for solar silicon wafer |
| CN103441070B (en) * | 2013-08-22 | 2015-12-09 | 常州捷佳创精密机械有限公司 | A kind of etching device of crystal silicon chip and process for etching method |
| CN203883029U (en) * | 2014-06-04 | 2014-10-15 | 江苏汇景薄膜科技有限公司 | A fully-automatic immersion type transparent conductive film texturing device |
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