CN103962347B - A kind of cleaning systems and method - Google Patents
A kind of cleaning systems and method Download PDFInfo
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- CN103962347B CN103962347B CN201310027464.7A CN201310027464A CN103962347B CN 103962347 B CN103962347 B CN 103962347B CN 201310027464 A CN201310027464 A CN 201310027464A CN 103962347 B CN103962347 B CN 103962347B
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- motherboard
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- 238000004140 cleaning Methods 0.000 title claims abstract description 158
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000000428 dust Substances 0.000 claims abstract description 82
- 230000003287 optical effect Effects 0.000 claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- B08B1/32—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
Landscapes
- Cleaning In General (AREA)
Abstract
The invention discloses a kind of cleaning systems and method, system comprises: the first cleaning device, optical detection apparatus and the second cleaning device, and wherein, the first cleaning device is for adopting the clean mode of gas to clean motherboard; Optical detection apparatus carries out optical detection for the motherboard after clean to gas, judges the position coordinates that whether has dust and definite dust on described motherboard; The second cleaning device, for according to the position coordinates of the definite dust of optical detection apparatus, is removed the dust at coordinate place in relevant position on described motherboard. Adopt the present invention, can effectively remove the dust on motherboard, reduce the generation of substrate bad phenomenon, improve the yield of product.
Description
Technical field
The present invention relates to dust clean technologies, relate in particular to a kind of cleaning systems and method.
Background technology
In display panels or dull and stereotyped manufacture field, conventionally with motherboard wink under Exposing Lamp of scribing in advanceBetween exposure mode, by the patterned illumination on motherboard in being coated with on the substrate of even photosensitive material, thereby makeThe character of the photosensitive material being irradiated by light changes, afterwards by chemicals by the photosensitive material being irradiated by lightWash, finally on substrate, obtain photosensitive material pattern.
In practical application, move in the process under Exposing Lamp at motherboard, conventionally have dust and drop on motherboard,Thereby cause can producing on the substrate after exposure the pattern of this dust, cause substrate bad phenomenon to occur.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of cleaning systems and method, to remove motherboardOn dust, reduce the generation of substrate bad phenomenon, improve the yield of product.
For achieving the above object, technical scheme of the present invention is achieved in that
The invention provides a kind of cleaning systems, this system comprises: the first cleaning device, optical detection apparatusWith the second cleaning device, wherein,
Described the first cleaning device, for adopting the clean mode of gas to clean motherboard;
Described optical detection apparatus, carries out optical detection for the motherboard after clean to gas, judges described motherOn plate, whether there is the position coordinates of dust and definite dust;
Described the second cleaning device, for according to the position coordinates of the definite dust of described optical detection apparatus,Remove the dust at coordinate place in relevant position on described motherboard.
Preferably, the clean mode of described gas is that malleation wind drenches mode and/or negative pressure suction.
Preferably, described the second cleaning device comprises that the second rail module, the first mobile module, second moveModule and cleaning module,
Described the second rail module is fixed on the first rail module of transmission motherboard, described the second rail moduleIdentical with the track transmission direction of described the first rail module, described the first mobile module is arranged at described secondOn rail module, described the second mobile module is arranged on described the first mobile module, and described cleaning module is establishedBe placed on described the second mobile module.
Preferably, described cleaning module comprises: electric rotating machine, leading screw, pressure sensor, rotation motor andCleaning head,
Described electric rotating machine drives described leading screw to be rotated lifting, and described leading screw lower end is provided with described pressure and passesSensor, the lower end of described pressure sensor is provided with described rotation motor, and described rotation motor drives described cleanHead is rotated.
Preferably, described cleaning head is provided with negative pressure hole.
Preferably, described cleaning head be shaped as cone or triangle body.
The present invention also provides a kind of clean method, and the method comprises:
The first cleaning device adopts the clean mode of gas to clean motherboard;
Whether the motherboard after optical detection apparatus is clean to gas carries out optical detection, judge on described motherboard and depositAt the position coordinates of dust and definite dust;
The second cleaning device, according to the position coordinates of definite dust, is removed relevant position coordinate on described motherboardThe dust at place.
Preferably, the clean mode of described gas is that malleation wind drenches mode and/or negative pressure suction.
Preferably, whether described motherboard after clean to gas carries out optical detection, judge on described motherboard and depositAt the position coordinates of dust and definite dust, comprising:
Motherboard after clean to gas carries out uniform optical scanning, and receives the reflection of irradiating on described motherboardLight;
The reverberation receiving is analyzed, and judged on described motherboard whether deposit according to default criterionAt dust, when judging while there is dust on described motherboard, calculate described dust on described motherboard by scanningPosition coordinates.
Preferably, described the second cleaning device comprises that the second rail module, the first mobile module, second moveModule and cleaning module;
Described the second cleaning device, according to the position coordinates of definite dust, is removed relevant position on described motherboardThe dust at coordinate place, comprising:
The position coordinates that described the second cleaning device provides according to described optical detection apparatus, controls described secondRail module, the first mobile module, the second mobile module, aim on described motherboard described cleaning moduleDust;
Electric rotating machine in described cleaning module drives described leading screw to be rotated lifting, and described cleaning head is connectTouch the dust on described motherboard, described pressure sensor detects the pressure between described cleaning head and motherboard, andAccording to the decline degree of cleaning head described in default force value control;
In the time that the pressure between described cleaning head and motherboard reaches default force value, described rotation motor drivesThe rotation of described cleaning head, by the dust adhesion on described motherboard on described cleaning head.
Preferably, described cleaning head is provided with negative pressure hole, and the method further comprises:
In the time of described cleaning head spin-cleaning motherboard, the negative pressure hole on described cleaning head sucks by negative pressureMode by the dust negative suction pipeline on described motherboard.
A kind of cleaning systems provided by the present invention and method, first adopt gas to clean by the first cleaning deviceMode cleans motherboard; Motherboard after optical detection apparatus cleans gas again carries out optical detection, sentencesOn disconnected motherboard, whether there is the position coordinates of dust and definite dust; The second cleaning device is according to definite ashThe position coordinates of dirt, removes the dust at coordinate place, relevant position on motherboard. By the present invention, can be effectively clearExcept the dust on motherboard, thus the generation of reduction substrate bad phenomenon, the yield of raising product.
Brief description of the drawings
Fig. 1 is the plan structure schematic diagram of a kind of cleaning systems of the embodiment of the present invention;
Fig. 2 is the primary structure schematic diagram of the cleaning module of the embodiment of the present invention;
Fig. 3 is the main TV structure schematic diagram of a kind of cleaning systems of the embodiment of the present invention;
Fig. 4 is the structural representation of the cleaning head of the embodiment of the present invention;
Fig. 5 is the schematic flow sheet of a kind of clean method of the embodiment of the present invention.
Description of reference numerals:
110,120 first rail modules; 210,220 second rail modules; 1 motherboard; 2 mothersGrillage; 3 cylinders; 4 first cleaning devices; 5 stuck-modules; 6 gas inputs; 7 opticsCheckout gear; 8 first mobile modules; 9 second mobile modules; 10 primary importance inductors; 11Two position sensors; 12 solenoid electric valves; 13 negative-pressure gas inputs; 14 electric rotating machines; 15Thick stick; 16 pressure sensors; 17 rotation motors; 18 cleaning heads; 19 dusts; 20 second is cleanDevice; 21 air knives; 22 negative pressure holes.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the technical solution of the present invention is further elaborated.
The structural representation of a kind of cleaning systems that the embodiment of the present invention provides, as shown in Figure 1, motherboard 1 is putBe placed on motherboard frame 2, can ensure that the position of motherboard 1 is accurate, motherboard frame 2 can be in the effect of cylinder 3At the uniform velocity move down one group of rail module of 110 and 120 compositions, first along the first rail module 110 and 120Rail module 110 and 110 provides moving track and support for motherboard frame 2; Solenoid electric valve 12 is controlled gasBreak-make, in the time that solenoid electric valve 12 is opened, is negative-pressure gas input, controls motherboard frame 2 along the first track mouldOne direction of piece 110 and 120 moves; In the time that solenoid electric valve 12 cuts out, be barotropic gas input, controlMotherboard frame 2 oppositely moves along the first rail module 110 and 120, motherboard frame when solenoid electric valve 12 is opened2 moving directions along the first rail module 110 and 120, with solenoid electric valve 12 motherboard frame 2 edges while closingThe moving direction of the first rail module 110 and 120 is contrary. Motherboard 1 in the embodiment of the present invention can be intoThe Mask plate of line mask (Mask) technique, certainly, the embodiment of the present invention is not limited only to the plate to MaskClean, in practical application, the motherboard 1 of any cleaning systems that can be applicable to the embodiment of the present invention should be allBelong to the protection domain of the embodiment of the present invention.
On the first rail module 110 and 120, be provided with the first cleaning device 4, its objective is on motherboard 1Slight fluctuation dust remove, the first cleaning device 4 can adopt the clean mode of gas to motherboard 1Clean, the clean mode of gas can be drenched mode for malleation wind, can be also negative pressure suction, whenSo, also can these two kinds of modes be combined with; The first cleaning device 4 is provided with stuck-module 5, fixed diePiece 5 is for being fixedly mounted on the first cleaning device 4 the first rail module 110 and 120, in addition, andOne cleaning device 4 is provided with gas input 6, for inputting gas.
On the first rail module 110 and 120, be also provided with primary importance inductor 10, when motherboard frame 2 movesDuring to primary importance inductor 10, control motherboard frame 2 and stop moving under the effect of cylinder 3, first is cleanDevice 4 can carry out gas to motherboard 1 and clean; The position of primary importance inductor 10 can be according to actual needSet, be as the criterion with respect to the best cleaning position of motherboard frame 2 to control the first cleaning device 4.
On the first rail module 110 and 120, be also provided with optical detection apparatus 7, optical detection apparatus 7 useMotherboard 1 after clean to gas carries out optical detection, judge on motherboard 1, whether have dust and definiteThe position coordinates of dust.
On the first rail module 110 and 120, be also provided with the second cleaning device, for filling according to optical detectionPut the position coordinates of 7 definite dusts, remove the dust at coordinate place, relevant position on motherboard 1; Described secondCleaning device comprises the second rail module 210 and 220, the first mobile module 8, the second mobile module 9 and clearClean module, the second rail module 210 and 220 correspondences are fixed on the first rail module 110 of transmission motherboard 1On 120, form the lateral coordinates system (or along slope coordinate system) of the second cleaning device, the second rail module210 is identical with the track transmission direction of the first rail module 110 and 120 with 220, the first mobile module 8Be arranged on the second rail module 210 and 220, form the along slope coordinate system of the second cleaning device (or laterallyCoordinate system), the first mobile module 8 can move 210 along the second rail module under the drive of servo motorBe arranged on the first mobile module 8 with 220, the second mobile modules 9, the second mobile module 9 is servo horseUnder the drive reaching, can move along the slideway on the first mobile module 8, cleaning module is arranged at second and moves mouldOn piece 9, can move with the second mobile module 9. Certainly, the first mobile module 8 and second moves mouldThe movement of piece 9 is not limited to servo motor and drives, and also can share the device identical with motherboard move mode or otherInduced way. The second cleaning device horizontal stroke, the positional information vertically moving can be carried by optical detection apparatus 7Confession, this positional information is that optical detection apparatus 7 calculates according to the position coordinates of dust; Certainly,The position coordinates of the dust that two cleaning devices also can provide according to optical detection apparatus 7, oneself calculatesThe positional information that need horizontal stroke, vertically moves.
Wherein, as shown in Figure 2, cleaning module mainly comprises the structural representation of cleaning module: electric rotating machine14, leading screw 15, pressure sensor 16, rotation motor 17 and cleaning head 18, electric rotating machine 14 is with movable wireThick stick 15 is rotated lifting, and leading screw 15 lower ends are provided with pressure sensor 16, the lower end of pressure sensor 16Be provided with rotation motor 17, rotation motor 17 drives cleaning head 18 to be rotated. The second cleaning device can rootThe position coordinates providing according to optical detection apparatus 7, controls the second rail module 210 and 220, first and movesModule 8, the second mobile module 9, make cleaning module aim at the dust 19 on motherboard 1; In cleaning moduleElectric rotating machine 14 drives leading screw 15 to be rotated, make cleaning head 18 near and away from motherboard 1, work as cleaning headWhen the dust 19 of 18 contacts on motherboards 1, pressure sensor 16 detects between cleaning head 18 and motherboard 1Pressure, and according to the decline degree of default force value control cleaning head 18; When cleaning head 18 and motherboard 1Between pressure while reaching default force value, rotation motor 17 drives cleaning head 18 to rotate, by motherboard 1On dust 19 stick on cleaning head 18. Subsequently, electric rotating machine 17 reversions reset, and complete dust19 removing.
On the first rail module 110 and 120, be also provided with second place inductor 11, when motherboard frame 2 movesDuring to second place inductor 11, under the effect of cylinder 3, control motherboard frame 2 and stop moving, second is clearClean device can carry out clear operation to the dust on motherboard 1; The position of second place inductor 11 can rootSet according to actual needs, taking control the second cleaning device with respect to the best cleaning position of motherboard frame 2 asAccurate.
In addition, the shape of cleaning head 18 and size can arrange according to actual needs, in liquid crystal display industry,Because dust granule is less, therefore to adopt cone or triangle body be good to cleaning head 18, and this shape is convenient to betterRemove dust granule.
Again as shown in Figure 3, the main TV structure schematic diagram of a kind of cleaning systems that Fig. 3 is the embodiment of the present invention,As can be seen from Figure 3 between the first cleaning device 4, optical detection apparatus 7 and the second cleaning device 20Relative position relation, wherein, the first cleaning device 4 can adopt on the first rail module 110 and 120Lower mode of simultaneously installing, all cleans motherboard 1 from the upper and lower surface of motherboard 1, certainly, also canAdopt according to actual needs single upper mounting means or single lower mounting means, only the one side of motherboard 1 cleaned,Accordingly, the second cleaning device 20 also can adopt at the first rail module 110 and 120 and install up and down simultaneouslyMode, all motherboard 1 is cleaned from the upper and lower surface of motherboard 1, certainly, also can be according to actual needAdopt single upper mounting means or single lower mounting means; Between the air knife 21 and motherboard 1 of the first cleaning device 4Angle can arrange according to actual needs, in practical application taking the angle of 30 degree as good.
Preferably, as shown in Figure 4, the structure of a kind of preferred cleaning head that Fig. 4 is the embodiment of the present invention is shownIntention also can be provided with negative pressure hole 22, at cleaning head 18 spin-cleaning motherboards 1 on cleaning head 18Time, the mode that the negative pressure hole 22 on cleaning head 18 sucks by negative pressure sucks the dust on motherboard 1In negative-pressure pipeline. Adopt in this way, can reach better cleaning effect.
Based on the cleaning systems of the invention described above embodiment, the embodiment of the present invention also provides a kind of clean method,As shown in Figure 5, the method mainly comprises:
Step 501, the first cleaning device adopts the clean mode of gas to clean motherboard.
The clean mode of gas is that malleation wind drenches mode and/or negative pressure suction.
Step 502, the motherboard after optical detection apparatus is clean to gas carries out optical detection, judges on motherboardWhether there is the position coordinates of dust and definite dust.
Concrete, the motherboard after gas is cleaned carries out uniform optical scanning, and the optics arranging by insideReceiver receives the reverberation irradiating on motherboard; The reverberation receiving is analyzed, and according to defaultWhether criterion (having the reverberation standard of dust, the reverberation standard of free from dust) judges on described motherboardThere is dust, when judging while there is dust on described motherboard, calculate described dust at described motherboard by scanningOn position coordinates.
Step 503, the second cleaning device, according to the position coordinates of definite dust, is removed corresponding positions on motherboardPut the dust at coordinate place.
The position coordinates that the second cleaning device can provide according to optical detection apparatus, calculate its lateral coordinates andThe shift position of along slope coordinate, and carry out corresponding movement according to the shift position of calculating gained; Certainly optics,Checkout gear also can according to the position coordinates of definite dust calculate the second cleaning device horizontal stroke, longitudinally moveAfter moving positional information, this positional information is offered to the second cleaning device, the second cleaning device is according to this positionThe information of putting is carried out corresponding movement.
The second cleaning device comprises the second rail module, the first mobile module, the second mobile module and clean mouldPiece, the second rail module is fixed on the first rail module of transmission motherboard, the second rail module and described theThe track transmission direction of one rail module is identical, and the first mobile module is arranged on the second rail module, and secondMobile module is arranged on the first mobile module, and cleaning module is arranged on the second mobile module; Cleaning moduleComprise: electric rotating machine, leading screw, pressure sensor, rotation motor and cleaning head, electric rotating machine connects leading screw,Leading screw lower end arranges pressure sensor, and the lower end of pressure sensor arranges rotation motor, and rotation motor connects clearClean head;
Concrete, the position coordinates that the second cleaning device provides according to optical detection apparatus, controls the second trackModule, the first mobile module, the second mobile module, make cleaning module aim at the dust on motherboard;
Electric rotating machine in cleaning module drives leading screw to be rotated, and makes the dust on cleaning head contact motherboard,Pressure sensor detects the pressure between cleaning head and motherboard, and according to default force value control cleaning headDecline degree;
In the time that the pressure between cleaning head and motherboard reaches default force value, rotation motor drives cleaning head to revolveTurn, by the dust adhesion on motherboard on cleaning head.
Preferably, cleaning head is provided with negative pressure hole, and the method further comprises: clear in cleaning head rotationWhen clean motherboard, the mode that the negative pressure hole on cleaning head sucks by negative pressure sucks the dust on motherboard negativeIn pressure pipeline.
In addition, as another kind of preferred embodiment of the present invention, can ash have been detected at optical detection apparatusDirt, and after the second cleaning device cleaned, motherboard is turned back to original position again and again carry out againThe operation of an above-mentioned steps 501 ~ 503, does not have dust until optical detection apparatus detects on motherboard.
In sum, the embodiment of the present invention first adopts the clean mode of gas to enter motherboard by the first cleaning deviceRow is clean; Whether the motherboard after optical detection apparatus is clean to gas again carries out optical detection, judge on motherboardThere is the position coordinates of dust and definite dust; The second cleaning device is according to the position coordinates of definite dust,Remove the dust at coordinate place, relevant position on motherboard. By the embodiment of the present invention, can effectively remove on motherboardDust, thereby reduce the generation of substrate bad phenomenon, improve the yield of product. In addition, the invention processThe Mask plate that example is not only applicable to field of liquid crystal display cleans, any can being applicable to originally in practical applicationThe motherboard of the cleaning systems of inventive embodiments should all belong to the protection domain of the embodiment of the present invention.
The above, be only preferred embodiment of the present invention, is not intended to limit protection model of the present inventionEnclose.
Claims (8)
1. cleaning systems, is characterized in that, this system comprises: the first cleaning device, optical detection apparatus and the second cleaning device, wherein,
Described the first cleaning device, for adopting the clean mode of gas to clean motherboard;
Described optical detection apparatus, carries out optical detection for the motherboard after clean to gas, judges the position coordinates that whether has dust and definite dust on described motherboard;
Described the second cleaning device, for according to the position coordinates of the definite dust of described optical detection apparatus, removes the dust at coordinate place in relevant position on described motherboard;
Described the second cleaning device comprises cleaning module, and wherein, described cleaning module comprises: electric rotating machine, leading screw, pressure sensor, rotation motor and cleaning head,
Described electric rotating machine drives described leading screw to be rotated lifting, and described leading screw lower end is provided with described pressure sensor, and the lower end of described pressure sensor is provided with described rotation motor, and described rotation motor drives described cleaning head to be rotated;
Described the second cleaning device also comprises the second rail module, the first mobile module, the second mobile module,
Described the second rail module is fixed on the first rail module of transmission motherboard, described the second rail module is identical with the track transmission direction of described the first rail module, described the first mobile module is arranged on described the second rail module, described the second mobile module is arranged on described the first mobile module, and described cleaning module is arranged on described the second mobile module.
2. cleaning systems according to claim 1, is characterized in that, the clean mode of described gas is that malleation wind drenches mode and/or negative pressure suction.
3. cleaning systems according to claim 1, is characterized in that, described cleaning head is provided with negative pressure hole.
4. cleaning systems according to claim 1, is characterized in that, described cleaning head be shaped as cone or triangle body.
5. a clean method, is characterized in that, the method comprises:
The first cleaning device adopts the clean mode of gas to clean motherboard;
Motherboard after optical detection apparatus is clean to gas carries out optical detection, judges the position coordinates that whether has dust and definite dust on described motherboard;
The second cleaning device, according to the position coordinates of definite dust, is removed the dust at coordinate place in relevant position on described motherboard;
Described the second cleaning device comprises cleaning module, and wherein, described cleaning module comprises: electric rotating machine, leading screw, pressure sensor, rotation motor and cleaning head,
Described electric rotating machine drives described leading screw to be rotated lifting, and described leading screw lower end is provided with described pressure sensor, and the lower end of described pressure sensor is provided with described rotation motor, and described rotation motor drives described cleaning head to be rotated;
Described the second cleaning device also comprises the second rail module, the first mobile module, the second mobile module;
Described the second cleaning device, according to the position coordinates of definite dust, is removed the dust at coordinate place in relevant position on described motherboard, comprising:
The position coordinates that described the second cleaning device provides according to described optical detection apparatus, controls described the second rail module, the first mobile module, the second mobile module, makes described cleaning module aim at the dust on described motherboard;
Electric rotating machine in described cleaning module drives described leading screw to be rotated lifting, make described cleaning head contact the dust on described motherboard, described pressure sensor detects the pressure between described cleaning head and motherboard, and according to the decline degree of cleaning head described in default force value control;
In the time that the pressure between described cleaning head and motherboard reaches default force value, described rotation motor drives described cleaning head rotation, by the dust adhesion on described motherboard on described cleaning head.
6. clean method according to claim 5, is characterized in that, the clean mode of described gas is that malleation wind drenches mode and/or negative pressure suction.
7. clean method according to claim 5, is characterized in that, described motherboard after clean to gas carries out optical detection, judges the position coordinates that whether has dust and definite dust on described motherboard, comprising:
Motherboard after clean to gas carries out uniform optical scanning, and receives the reverberation irradiating on described motherboard;
The reverberation receiving is analyzed, and judged on described motherboard, whether there is dust according to default criterion, when judging while there is dust on described motherboard, calculate the position coordinates of described dust on described motherboard by scanning.
8. clean method according to claim 5, is characterized in that, described cleaning head is provided with negative pressure hole, and the method further comprises:
In the time of described cleaning head spin-cleaning motherboard, the mode that the negative pressure hole on described cleaning head sucks by negative pressure is by the dust negative suction pipeline on described motherboard.
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| CN201310027464.7A CN103962347B (en) | 2013-01-24 | 2013-01-24 | A kind of cleaning systems and method |
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| CN104553251B (en) * | 2014-12-26 | 2017-01-04 | 东莞市智澳通用机械设备有限公司 | A kind of dust arrester of backlight module laminator |
| CN106216325A (en) * | 2016-07-28 | 2016-12-14 | 芜湖辉灿电子科技有限公司 | Mobile phone screen deashing device |
| CN106315113B (en) * | 2016-08-23 | 2018-10-12 | 重庆墨希科技有限公司 | The continuous device and method for automatically removing binding region graphene |
| CN109623602B (en) * | 2017-10-09 | 2021-03-09 | 上海微电子装备（集团）股份有限公司 | Automatic cleaning device and method for sucker and method for automatically identifying abnormal point of sucker |
| CN108453080A (en) * | 2018-05-15 | 2018-08-28 | 广州富森环保科技股份有限公司 | A kind of aluminum alloy pattern plate auto-cleaning method |
| CN108453079A (en) * | 2018-05-15 | 2018-08-28 | 广州富森环保科技股份有限公司 | A kind of plate cleaning device |
| CN109596635B (en) * | 2019-01-03 | 2023-12-29 | 苏州市星光精密机械有限公司 | LCM cleaning detection equipment, detection method and detection system |
| CN109580651B (en) * | 2019-01-03 | 2024-04-16 | 苏州市星光精密机械有限公司 | VR glasses detection equipment, detection method, detection system and cleaning equipment |
| CN110440853A (en) * | 2019-07-24 | 2019-11-12 | 沈阳工程学院 | A kind of monitoring dust pelletizing system |
| CN113941565A (en) * | 2021-09-27 | 2022-01-18 | 湖南财政经济学院 | Automatic ash removal device for computer keyboard |
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