CN103959929A - Electromagnetic wave-absorbing thermal-conductive sheet and method for manufacturing electromagnetic wave-absorbing thermal-conductive sheet - Google Patents

Electromagnetic wave-absorbing thermal-conductive sheet and method for manufacturing electromagnetic wave-absorbing thermal-conductive sheet Download PDF

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Publication number
CN103959929A
CN103959929A CN201280059976.5A CN201280059976A CN103959929A CN 103959929 A CN103959929 A CN 103959929A CN 201280059976 A CN201280059976 A CN 201280059976A CN 103959929 A CN103959929 A CN 103959929A
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electromagnetic wave
coupling agent
conductive sheet
thermally
wave absorbability
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久村达雄
久保佑介
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Dexerials Corp
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Dexerials Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding
    • H05K9/0083Electromagnetic shielding materials, e.g. EMI, RFI shielding comprising electro-conductive non-fibrous particles embedded in an electrically insulating supporting structure, e.g. powder, flakes, whiskers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/08Metallic powder characterised by particles having an amorphous microstructure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/10Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00Use of pretreated ingredients
    • C08K9/04Ingredients treated with organic substances
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K9/00Use of pretreated ingredients
    • C08K9/04Ingredients treated with organic substances
    • C08K9/06Ingredients treated with organic substances with silicon-containing compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/20Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/22Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H01F1/24Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
    • H01F1/26Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated by macromolecular organic substances
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04Polysiloxanes
    • C08G77/20Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/02Elements
    • C08K3/08Metals
    • C08K2003/0856Iron
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/153Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15308Amorphous metallic alloys, e.g. glassy metals based on Fe/Ni

Abstract

Provided is an electromagnetic wave-absorbing thermal-conductive sheet having good sheet bendability, the sheet comprising a silicone rubber, a coupling agent and a magnetic metal powder which has been surface treated with a coupling agent, wherein the volume fraction of the magnetic metal powder is 50 to 85 vol%, and the coupling agent has a long-chain alkyl group having 10 to 18 carbon atoms as the organic functional group and is included in an amount by weight of 0.3 to 5 times the amount necessary for forming a monolayer of the coupling agent on the surface of the magnetic metal powder.

Description

The preparation method of electromagnetic wave absorbability thermally-conductive sheet and electromagnetic wave absorbability thermally-conductive sheet
Technical field
The present invention relates to electromagnetic wave absorbability thermally-conductive sheet that thermal conductivity or electromagnetic wave suppression characteristic are good and the preparation method of electromagnetic wave absorbability thermally-conductive sheet.
The application is to advocate priority in the Japanese patent application No. Patent 2011-265645 of application on December 5th, 2011 as basis in Japan, by quoting in this application with reference to this application.
Background technology
In recent years, electronic equipment is pursued the trend of miniaturization, on the other hand, and because the diversity of application cannot make power consumption also change like that, so the heat release countermeasure in attention equipment more.
As the heat release countermeasure of above-mentioned electronic equipment, be widely used heat liberation board, heat pipe or the fin prepared with the high metal material of the thermal conductivity such as copper or aluminium.For the heat release part of these excellent thermal conductivity, in order to seek the mitigation of the temperature in exothermal effect or equipment, so configure in the mode that approaches the electronic components such as the semiconductor device as heating part in electronic equipment.In addition, using the heat release part of these excellent thermal conductivity from extend into row configuration to low temperature place as the electronic component of heating part.
Heating part in electronic equipment is the electronic components such as the semiconductor element that current density is high.So-called current density higher position is that to can be used as electric field strength or the magnetic field intensity of composition of unnecessary radiation large.Therefore,, if the heat release part with preparation of metals is configured in near of electronic component, sometimes also can together obtain flowing through with heat the high order harmonic component composition of the signal of telecommunication in electronic component.Particularly, because heat release part is prepared with metal material, thus itself work as the antenna of high order harmonic component composition, or work as the conduction path of high order harmonic component noise composition.
Due to such background, work as antenna in order to suppress heat release part,, in order to cut off the coupling in magnetic field, heat conductive sheet has the heat conductive sheet containing magnetic material.Such electromagnetic wave absorbability thermally-conductive sheet for example has the magnetic material of high magnetic permeability by contain ferrite etc. in the macromolecular materials such as silicone based or acrylic compounds, thereby realizes both function of thermal conduction characteristic and electromagnetic wave suppression characteristic.
With regard to the thermal conductivity and electromagnetic wave suppression characteristic (the decoupling effect in magnetic field) of electromagnetic wave absorbability thermally-conductive sheet, although the material property of all types of target powder is also one of factor, the loading that increases the target powder containing in the macromolecular material as base material becomes important.
, if the wetability of target powder and macromolecular material is poor, cannot fill to greatest extent target powder herein, the flexibility of products formed also worsens.Therefore, in order to improve the wetability of base material and powder, the known method (patent documentation 1 ~ patent documentation 4) that adds the powder surface inorganic agent that is commonly referred to coupling agent.
In patent documentation 1, record following technology: for silicon rubber, there is flexibility in order to improve soft ferritic fillibility, use without the silane compound of functional group and carry out surface treatment.In addition, in patent documentation 2, record following technology: for the combination of silicon rubber and magnetic metallic powder, carry out surface treatment with titanate ester or aluminium class coupling agent.In addition the silane coupler of, having recorded specific formation in the combination of silicon rubber and oxide powder in patent documentation 3 is effective.In addition, in patent documentation 4, recorded following technology: for oxide filler, the silane coupler that is 4 by the carbon number of alkyl that is bonded directly to element silicon is made as 0.2 ~ 10 % by weight.
But, if add more than needs to improve the coupling agent of powder surface as object, along with passage of time, slowly react in non-reacted parts, worsening through the flexibility as the sheet material of organosilicon products formed after long-time.
Prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2005-286190 communique
Patent documentation 2: Japanese Patent the 3719382nd
Patent documentation 3: Japanese Patent the 3290127th
Patent documentation 4: Japanese Patent the 3535805th.
Summary of the invention
Invent problem to be solved
The present invention proposes in view of so current actual conditions, and its object is, the good electromagnetic wave absorbability thermally-conductive sheet of the flexibility of sheet material and the preparation method of electromagnetic wave absorbability thermally-conductive sheet are provided.
Solve the means of problem
Electromagnetic wave absorbability thermally-conductive sheet involved in the present invention contains silicon rubber, coupling agent and carried out surface-treated magnetic metallic powder with coupling agent, the volume fraction of magnetic metallic powder is 50 ~ 85vol%, coupling agent have carbon number be 10 ~ 18 chain alkyl as organo-functional group, and contain with 0.3 ~ 5 times of weight that the surface at magnetic metallic powder forms the necessary amount of monolayer of coupling agent.
Electromagnetic wave absorbability thermally-conductive sheet involved in the present invention contains silicon rubber, coupling agent and carried out surface-treated amorphous metal powder with coupling agent, the volume fraction of amorphous metal powder is 50 ~ 85vol%, coupling agent has methacryloxy as organo-functional group, and contains with 0.3 ~ 5 times of weight that surface at amorphous metal powder forms the necessary amount of monolayer of coupling agent.
The preparation method of electromagnetic wave absorbability thermally-conductive sheet involved in the present invention has following operation: using silicon rubber, to have carbon number be that 10 ~ 18 chain alkyl mixes as coupling agent and the magnetic metallic powder of organo-functional group the agitating procedure stirring; To in agitating procedure, be shaped to sheet and curing curing process through the mixture stirring; In agitating procedure, containing magnetic metallic powder so that in the volume fraction of magnetic metallic powder is 50 ~ 85vol%, contain the coupling agent that forms 0.3 ~ 5 times of weight of the necessary amount of monolayer of coupling agent for the surface at magnetic metallic powder.
The preparation method of electromagnetic wave absorbability thermally-conductive sheet involved in the present invention has following operation: using silicon rubber, have methacryloxy and mix as the coupling agent of organo-functional group and amorphous metal powder, the agitating procedure that the mixture through mixing is stirred; To in agitating procedure, be shaped to sheet and curing curing process through the mixture stirring; In agitating procedure, containing amorphous metal powder so that in the volume fraction of amorphous metal powder is 50 ~ 85vol%, contain the coupling agent that forms 0.3 ~ 5 times of weight of the necessary amount of monolayer of coupling agent for the surface at amorphous metal powder.
The effect of invention
According to the present invention, can fill to greatest extent magnetic metallic powder, so can make the flexibility of sheet material good.
Brief description of the drawings
[Fig. 1] Fig. 1 is the figure that the SEM image of the amorphous metal powder using in the related electromagnetic wave absorbability thermally-conductive sheet of embodiments of the present invention is shown.
[Fig. 2] Fig. 2 is the figure that the SEM image of the crystallinity metal dust using in the related electromagnetic wave absorbability thermally-conductive sheet of embodiments of the present invention is shown.
[Fig. 3] Fig. 3 is the figure that the SEM image of the carbonyl iron dust using in the related electromagnetic wave absorbability thermally-conductive sheet of embodiments of the present invention is shown.
The best mode carrying out an invention
Below, for an example of the preparation method's of application electromagnetic wave absorbability thermally-conductive sheet of the present invention and electromagnetic wave absorbability thermally-conductive sheet embodiment, describe in the following order.
1. electromagnetic wave absorbability thermally-conductive sheet
1-1. magnetic metallic powder
1-2. coupling agent
1-3. thermal conductivity filler
1-4. silicon rubber
2. the preparation method of electromagnetic wave absorbability thermally-conductive sheet
3. other execution mode
4. embodiment.
(1. electromagnetic wave absorbability thermally-conductive sheet)
Embodiments of the present invention are (hereinafter referred to as present embodiment.) related electromagnetic wave absorbability thermally-conductive sheet contains magnetic metallic powder, coupling agent, thermal conductivity filler and silicon rubber.
(1-1. magnetic metallic powder)
As magnetic metallic powder, can use the electromagnetic electromagnetic wave absorbent material being discharged by electronic component in order to absorb.As such magnetic metallic powder, can use amorphous metal powder or crystallinity metal dust.As amorphous metal powder, for example, can list the amorphous metal powder of Fe-Si-B-Cr class, Fe-Si-B class, Co-Si-B class, Co-Zr class, Co-Nb class, Co-Ta class.As crystallinity metal dust, for example, can list the crystallinity metal dust of pure iron, Fe class, Co class, Ni class, Fe-Ni class, Fe-Co class, Fe-Al class, Fe-Si class, Fe-Si-Al class, Fe-Ni-Si-Al class.In addition, as crystallinity metal dust, also can use and in crystallinity metal dust, add micro-N (nitrogen), C (carbon), O (oxygen), B (boron) etc. and the crystallite metal dust of refinement.In addition, as magnetic metallic powder, also can use and be mixed with the different magnetic metallic powder of material of more than two kinds or the different magnetic metallic powder of average grain diameter.
As magnetic metallic powder, from improving the viewpoint of fillibility, preferable particle size is number μ m ~ tens of μ m, spherical magnetic metallic powder.Such magnetic metallic powder for example can be prepared by atomization or by the method for metal carbonyl thermal decomposition.Atomization is following methods: have advantages of and easily prepare globular powder, motlten metal is flowed out by nozzle, the motlten metal flowing out is sprayed the injection stream of air, water, inert gas etc. and makes drop, thereby solidify the method for preparing powder.In the time preparing amorphous metal powder by atomization, in order to make motlten metal non-crystallizable, preferably making cooling rate is 10 -6(K/s) left and right.
In the situation that preparing amorphous metal powder by above-mentioned atomization, for example as shown in Figure 1, smooth state can be made in the surface of amorphous metal powder.By when amorphous metal powder concave-convex surface is few, that specific area is little is used as magnetic metallic powder in this wise, use as described below the suitableeest coupling agent, even if the coupling agent of minute quantity also can improve the compatibility with silicon rubber, improve organosilicon products formed, the i.e. flexibility of sheet material.In addition, by using such amorphous metal powder, not excessively use coupling agent, by long-term sheet material preservation in the situation that, can prevent that the flexibility of sheet material is deteriorated.
In addition, in the case of preparing by above-mentioned atomization the Fe-Si alloy powder as an example of crystallinity metal, for example as shown in Figure 2, although Fe-Si alloy powder is spherical, produce small concavo-convexly on surface, it is large that specific area becomes.In the case of such Fe-Si alloy powder is used as magnetic metallic powder, preferably reduce the loading of Fe-Si alloy powder, the loading that increases coupling agent makes corresponding with the increase of specific area.Thus, can with the flexibility that amorphous metal powder is improved in the same manner to sheet material when the magnetic metallic powder.
In addition, by the method for above-mentioned metal carbonyl thermal decomposition, for example, can prepare the iron powder that average grain diameter is 1 ~ 8 μ m and (will be called " carbonyl iron dust " by iron powder prepared by the method for metal carbonyl thermal decomposition below.)。As shown in Figure 3, carbonyl iron dust is the shape that approaches proper sphere, ganoid state, so specific area is little.In the case of by such carbonyl iron dust as magnetic metallic powder, by using the suitableeest coupling agent, even if the coupling agent of minute quantity also can improve and the compatibility of silicon rubber, improve organosilicon products formed, the i.e. flexibility of sheet material.
With respect to the rubber composition total amount that contains silicon rubber, coupling agent, magnetic metallic powder and thermal conductivity filler (being designated hereinafter simply as " total composition "), magnetic metallic powder preferred volume rate is 50 ~ 85vol%.Be more than 50vol% by making the volume fraction of magnetic metallic powder with respect to total composition, can make thermal conduction characteristic and electromagnetic wave suppression characteristic good.In addition, by the volume fraction of magnetic metallic powder is made as below 85vol% with respect to total composition, can make the flexibility of sheet material good.
(1-2. coupling agent)
For the wetability that makes magnetic metallic powder and silicon rubber well makes the fillibility of magnetic metallic powder good, thereby make the flexibility of sheet material good, use coupling agent.As coupling agent, for example, can use the silane coupler representing with general formula X-Si-MEn (OR) 3-n (n=0,1) or the silane coupler representing with general formula X-R-Si-(OR) 3-n (n=0,1).In these general formulas, " X " represents organo-functional group, and " ME " represents methyl, and " OR " represents hydrolysising group." R " represents alkyl.In above-mentioned general formula X-Si-MEn (OR) 3-n, the hydrolysising group during as n=1, for example, can list trimethoxy or triethoxy, and the hydrolysising group during as n=2 for example can list methyl dimethoxy oxygen base or methyl diethoxy.
As the silane coupler representing with general formula X-Si-MEn (OR) 3-n (n=0,1), preferably there is carbon number and is 10 ~ 18 the chain alkyl silane coupler as organo-functional group.In addition, as the silane coupler representing with general formula X-R-Si-(OR) 3-n (n=0,1), preferably there is the silane coupler of methacryloxy as organo-functional group.By using such silane coupler, can make the wetability of magnetic metallic powder and silicon rubber well make the fillibility of magnetic metallic powder good, thereby make the flexibility of sheet material good.Herein, be in 10 ~ 18 the chain alkyl silane coupler as organo-functional group thering is carbon number, by the carbon number of chain alkyl is made as more than 10, the wetability that can make magnetic metallic powder and silicon rubber is good and improve the flexibility of sheet material.In addition, by the carbon number of chain alkyl is made as below 18, the boiling point that can prevent chain alkyl is too high and make the structure of silane coupler become unstable, thereby makes the wetability variation of magnetic metallic powder and silicon rubber.
Be 10 ~ 18 the chain alkyl silane coupler as organo-functional group as thering is carbon number, for example preferably have carbon number be 10 ~ 18 chain alkyl as organo-functional group in, there is the silane coupler of methoxy or ethoxy as hydrolysising group.Particularly, can list positive decyl trimethoxy silane (n-C10H21Si (OCH3) 3), positive decyl methyl dimethoxysilane (n-C10H21SiCH3 (OCH3) 2), octadecyltriethoxy silane (CH3 (CH2) 17Si (OCH2CH3) 3), octadecyl methyl dimethoxy silane (CH3 (CH2) 17SiCH3 (OCH3) 2) etc.
In addition, as thering is the silane coupler of methacryloxy as organo-functional group, for example, can list 3-methacryloxypropyl trimethoxy silane, 3-methacryloxypropyl triethoxysilane etc.
The use amount of silane coupler preferably changes by the specific area of magnetic metallic powder and the molecular weight of silane coupler, preferably forms 0.3 ~ 5 times of weight of the necessary addition of monolayer (hereinafter referred to as " monolayer formation necessary amounts ") of silane coupler for the surface at magnetic metallic powder.Form the more than 0.3 times of necessary amounts by the amount of silane coupler being made as to monolayer, can prevent that the wetting effect of the surface treatment effect, i.e. magnetic metallic powder and the silicon rubber that are produced by silane coupler from weakening.In addition, form below 5 times of necessary amounts by the amount of silane coupler being made as to monolayer, by long-term sheet material preservation in the situation that, can prevent that the reaction of silane coupler unreacted portion from carrying out and the hardness increase of sheet material., can maintain well for a long time the flexibility of sheet material.Herein, the hardness of sheet material for example refers to the value of measuring according to JISK6301A.
The monolayer of silane coupler forms necessary amounts and for example can try to achieve by following (1) formula.
Monolayer forms necessary amounts (g)=(weight (g) of object filler) × (specific area (m2/g) of object filler)/(the minimum coating area (m2/g) of silane coupler) (1).
In above-mentioned (1) formula, object filler represents above-mentioned magnetic metallic powder or thermal conductivity filler.In addition, in (1) formula, the minimum coating area of silane coupler can be tried to achieve by following (2) formula.
Minimum coating area (m2/g)=6.02 × 10 23× 13 × 10 -20the molecular weight (2) of/silane coupler.
As mentioned above, in the case of as illustrated in fig. 1 the amorphous metal powder few concave-convex surface, specific area is little being used as magnetic metallic powder, by using the suitableeest silane coupler, even if the silane coupler of minute quantity also can improve the compatibility with silicon rubber, improve the flexibility as the sheet material of organosilicon products formed.For example, in the case of by amorphous metal powder little specific area as magnetic metallic powder, preferably use that to have carbon number be 10 ~ 18 chain alkyl or the methacryloxy silane coupler as organo-functional group.
In addition, in the situation that as illustrated in fig. 2 Fe-Si alloy powder being used as to magnetic metallic powder, preferably reduce the loading of Fe-Si alloy powder, increase the amount of silane coupler with corresponding with the increase of specific area.Thus, can with the flexibility that amorphous metal powder is improved in the same manner to sheet material when the magnetic metallic powder.
(1-3. thermal conductivity filler)
In order further to improve the thermal conductivity of sheet material, the related electromagnetic wave absorbability thermally-conductive sheet of present embodiment can contain thermal conductivity filler.As thermal conductivity filler, can use the thermal conductivity particle that thermal conductivity ratio magnetic metal particle is high (such as high thermal conduc tivity ceramics or be coated with powder of insulator etc. on copper or aluminium etc.).As high thermal conduc tivity ceramics, can list aluminium oxide, boron nitride, silicon nitride, aluminium nitride, carborundum etc.
Thermal conductivity filler can use the thermal conductivity filler that particle diameter and magnetic metallic powder are par, but the viewpoint of the filling rate of magnetic metallic powder from further raising sheet material, the thermal conductivity filler that preferable particle size is less than magnetic metallic powder.For example, preferably to use average grain diameter be the thermal conductivity filler of 1/3 ~ 1/30 left and right with respect to magnetic metallic powder to thermal conductivity filler.
In addition, thermal conductivity filler preferred volume rate is below 30vol% with respect to total composition.Thus, can not damage the flexibility of sheet material and improve the thermal conductivity of sheet material.
In addition, thermal conductivity filler is not limited to above-mentioned thermal conductivity filler, as long as for the high material of thermal conductivity ratio magnetic metallic powder, if the average grain diameter thermal conductivity filler less than magnetic metallic powder particularly can be realized filling to greatest extent.
(1-4. silicon rubber)
As silicon rubber, without particular determination, for example, can use silicon gel or the silicon rubber of the liquid-type of two-liquid type or a liquid type, heat adds the silicon rubber of sulphur type etc.
(the 2. preparation method of electromagnetic wave absorbability thermally-conductive sheet)
The related electromagnetic wave absorbability thermally-conductive sheet of present embodiment for example has following operation: silicon rubber, silane coupler, magnetic metallic powder and thermal conductivity filler are mixed, mixture is stirred, magnetic metallic powder is carried out to surface-treated agitating procedure with silane coupler; To be shaped to sheet and curing curing process through the mixture stirring.
In agitating procedure, as mentioned above, preferably containing magnetic metallic powder so that in the volume fraction of magnetic metallic powder is 50 ~ 85vol% with respect to total composition, contain the silane coupler that forms 0.3 ~ 5 times of weight of the necessary amount of monolayer of silane coupler for the surface at magnetic metallic powder.
In addition, in agitating procedure, the stirring of the mixture of silicon rubber, silane coupler, magnetic metallic powder and thermal conductivity filler is for example preferably used de-airing mixer to carry out under vacuum state.
In agitating procedure, as the coupling processing method to magnetic metallic powder or thermal conductivity filler, for example, can use direct facture or integral blend method.As direct facture, for example, can list dry treatment method or wet treatment method.Dry treatment method is following methods: by under the state of silane coupler water or alcohol solution dilution, drip or spraying stirs on object powder.Wet treatment method is following methods: in object powder is added to water or alcohol solution, make in the raw material of pulp-like, add silane coupler stoste and stir.Integral blend method is to add silane coupler, silicon rubber and object powder and the method simultaneously processed.
In agitating procedure, particularly, in the case of the compatibility of silane coupler and magnetic metallic powder or thermal conductivity filler is good, preferably process by the following method: the stoste of silane coupler is directly dripped to the method on object powder; In advance magnetic metallic powder is implemented to silane coupler processing, add successively the method for other material; Integral blend method.
In addition, in agitating procedure, due to the method for the suitableeest silane coupler or coupling processing because of kind and the particle diameter of magnetic metallic powder or thermal conductivity filler different, so preferably by silane coupler or coupling processing Combination of Methods.
In curing process, will be shaped to sheet and solidify through the mixture stirring at agitating procedure.For example, in curing process, by by be shaped to the sheet of prescribed level through the mixture stirring in agitating procedure, under the environment of 100 DEG C, 30 minutes, be cured, thereby can prepare electromagnetic wave absorbability thermally-conductive sheet.
(3. other execution mode)
In the above description, the situation that uses a kind of silane coupler is illustrated, but also silane coupler of more than two kinds can be mixed.Like this, exercise use in the situation that plurality of silane coupling agents is mixed into, preferably in various silane couplers, there is average carbon atom number and be 10 ~ 18 chain alkyl as organo-functional group.
In the above description, the execution mode that thermal conductivity filler is carried out to coupling processing is illustrated, but is not limited to this example, also can omit the coupling processing to thermal conductivity filler.
In addition, in the above description, illustrate magnetic metallic powder and thermal conductivity filler have been used to the situation of identical silane coupler, but be not limited to this example, also can use the silane coupler different from the silane coupler that magnetic metallic powder is used to thermal conductivity filler.
In addition, in the above description, record and used magnetic metallic powder, thermal conductivity filler, silane coupler and silicon rubber to prepare the execution mode of electromagnetic wave absorbability thermally-conductive sheet, but also can in the scope characteristic not being counteracted, further contain fire proofing, coloured material etc. in order to suppress burning.
Embodiment
Below specific embodiment of the present invention is described.It should be noted that, scope of the present invention is not defined in the following example.
(embodiment 1)
In embodiment 1, by only contain the two ends of strand have the organopolysiloxane of thiazolinyl, only there is the methylhydrogenpolysi,oxane (メ チ Le Ha イ De ロ ジ ェ Application Port リ シ ロ キ サ Application) of the hydrogen atom that is bonded directly to silicon atom and the platinum group type addition reaction catalyst of less than 1% at side chain organosilicon mixture mix with magnetic metallic powder, silane coupler, stir with de-airing mixer.
Blending spherical amorphous metal dust, so that volume fraction is 70vol% with respect to total composition.As magnetic metallic powder, using average grain diameter is the Fe-Si-B near-spherical amorphous metal powder of 25 μ m.As silane coupler, use the 3-methacryloxypropyl trimethoxy silane that is 0.06wt% with respect to the weight of spherical amorphous metal dust.
Then,, by by be shaped to the sheet of 2mm through the mixture stirring, under the environment of 100 DEG C, 30 minutes, be cured, thereby prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 2)
In embodiment 2,3-methacryloxypropyl triethoxysilane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(embodiment 3)
In embodiment 3, positive decyl trimethoxy silane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(embodiment 4)
In embodiment 4, equivalent blending is had to the mixture of positive decyl trimethoxy silane and dimethoxy-methyl octadecylsilane as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 5)
In embodiment 5, blending average grain diameter be the Fe-Si alloy powder of 35 μ m as magnetic metallic powder so that volume fraction is 60vol% with respect to total composition, the positive decyl trimethoxy silane that is 0.08wt% by the weight with respect to Fe-Si alloy powder is as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 6)
In embodiment 6, blending amorphous metal powder as magnetic metallic powder so that volume fraction is 60vol% with respect to total composition, the positive decyl trimethoxy silane that is 0.09wt% by the weight with respect to amorphous metal powder is as silane coupler, the average grain diameter that blending is 6vol% with respect to total composition is that the alumina powder of 5 μ m is as thermal conductivity filler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 7)
In embodiment 7, blending average grain diameter be the amorphous metal powder of 25 μ m as magnetic metallic powder so that volume fraction is 64vol% with respect to total composition, in addition, the carbonyl iron dust of blending 3.5 μ m is so that volume fraction is 18vol% with respect to total composition, the positive decyl trimethoxy silane that is 0.15wt% by the total weight with respect to amorphous alloy powder and carbonyl iron dust is as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 8)
In embodiment 8, blending average grain diameter be the amorphous metal powder of 25 μ m as magnetic metallic powder so that volume fraction is 60vol% with respect to total composition, in addition, the carbonyl iron dust of blending 3.5 μ m is so that volume fraction is 20vol% with respect to total composition, the dimethoxy-methyl octadecylsilane that is 0.02wt% by the total weight with respect to amorphous alloy powder and carbonyl iron dust is as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 9)
In embodiment 9, positive decyl trimethoxy silane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(embodiment 10)
In embodiment 10, positive decyl methyl dimethoxysilane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(embodiment 11)
In embodiment 11, n-octadecane ylmethyl dimethoxy silane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(embodiment 12)
In embodiment 12, under the condition identical with embodiment 5, prepare electromagnetic wave absorbability thermally-conductive sheet.
(embodiment 13)
In embodiment 13, positive decyl methyl dimethoxysilane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 5.
(embodiment 14)
In embodiment 14, n-octadecane ylmethyl dimethoxy silane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 5.
(comparative example 1)
In comparative example 1, n-octyl triethoxysilane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(comparative example 2)
In comparative example 2, vinyltriethoxysilane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(comparative example 3)
In comparative example 3, vinyltrimethoxy silane, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(comparative example 4)
In comparative example 4, alkylakoxysiloxanes, as silane coupler, in addition, is prepared to electromagnetic wave absorbability thermally-conductive sheet under the condition identical with embodiment 1.
(comparative example 5)
In comparative example 5, n-octyl triethoxysilane is used as to silane coupler, blending average grain diameter be the Fe-Si alloy powder of 35 μ m as magnetic metallic powder so that volume fraction is 60vol% with respect to total composition, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 6)
In comparative example 6, do not use silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 7)
In comparative example 7, do not use silane coupler, blending average grain diameter be the Fe-Si alloy powder of 35 μ m as magnetic metallic powder so that volume fraction is 60vol% with respect to total composition, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 8)
In comparative example 8, blending average grain diameter be the alumina powder of 3 μ m as thermal conductivity filler so that volume fraction is 6vol% with respect to total composition, the n-octyl triethoxysilane that is 0.1wt% by the weight with respect to spherical amorphous metal dust is as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 9)
In comparative example 9, the n-octyl triethoxysilane that is 0.27wt% by the weight with respect to spherical amorphous metal dust, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 8.
(comparative example 10)
In comparative example 10, the n-octyl triethoxysilane that is 0.5wt% by the weight with respect to spherical amorphous metal dust, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 8.
(comparative example 11)
In comparative example 11, the n-octyl triethoxysilane that is 0.9wt% by the weight with respect to spherical amorphous metal dust, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 8.
(comparative example 12)
In comparative example 12, do not use silane coupler, in addition, under the condition identical with comparative example 8, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 13)
In comparative example 13, replace magnetic metallic powder, blending average grain diameter is that the spherical alumina powder of 5 μ m is so that volume fraction is 65vol% with respect to total composition, the vinyltriethoxysilane that is 0.09wt% by the weight with respect to spherical alumina powder is as silane coupler, in addition, under the condition identical with embodiment 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 14)
In comparative example 14, the 3-methacryloxypropyl trimethoxy silane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 15)
In comparative example 15, the 3-methacryloxypropyl triethoxysilane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 16)
In comparative example 16, the alkylakoxysiloxanes that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 17)
In comparative example 17, the positive decyl trimethoxy silane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 18)
In comparative example 18, do not use silane coupler, in addition, under the condition identical with comparative example 13, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 19)
In comparative example 19, under the condition identical with comparative example 1, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 20)
In comparative example 20, under the condition identical with comparative example 6, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 21)
In comparative example 21, under the condition identical with comparative example 5, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 22)
In comparative example 22, under the condition identical with comparative example 7, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 23)
In comparative example 23, under the condition identical with comparative example 18, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 24)
In comparative example 24, the n-octyl triethoxysilane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 25)
In comparative example 25, under the condition identical with comparative example 17, prepare electromagnetic wave absorbability thermally-conductive sheet.
(comparative example 26)
In comparative example 26, the positive decyl methyl dimethoxysilane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
(comparative example 27)
In comparative example 27, the n-octadecane ylmethyl dimethoxy silane that is 0.09wt% by the weight with respect to spherical alumina powder, as silane coupler, in addition, is prepared electromagnetic wave absorbability thermally-conductive sheet under the condition identical with comparative example 13.
By the results are summarized in table 1 ~ table 5 of above embodiment 1 ~ embodiment 12 and comparative example 1 ~ comparative example 27.In the ageing test of embodiment 6, comparative example 8 ~ comparative example 12, the sample of each electromagnetic wave absorbability thermally-conductive sheet is carried out the burin-in process of 300 hours under the condition of 125 DEG C.In each embodiment and comparative example, the hardness of sheet material is used ASKER Durometer (ア ス カ ー go system hardness Meter) C type and the level pressure dynamometer of ASKER company to try to achieve, and makes the shape of 30 × 50 × 10mm and measures overlapping sheet material.
[table 1]
In the electromagnetic wave absorbability thermally-conductive sheet obtaining in embodiment 1 ~ embodiment 8, the volume fraction of magnetic metallic powder is with respect to the satisfied 50 ~ 85vol% of total composition.In addition, silane coupler has chain alkyl that carbon number or average carbon atom number are 10 ~ 18 or methacryloxy as organo-functional group.In addition 0.3 ~ 5 times of weight that, silane coupler forms the necessary amount of monolayer of silane coupler with the surface at magnetic metallic powder contains.Therefore the electromagnetic wave absorbability thermally-conductive sheet, obtaining in embodiment 1 ~ embodiment 8 flexibility compared with the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 6,7 is good.
In addition, known according to the result of the electromagnetic wave absorbability thermally-conductive sheet obtaining in embodiment 4, containing 2 kinds of silane couplers, the chain alkyl that is 14 by average carbon atom number is as in the situation of organo-functional group, and the flexibility of sheet material is also good.
In addition, the electromagnetic wave absorbability thermally-conductive sheet obtaining in embodiment 6 flexibility of sheet material before ageing test is good, after ageing test the increase of the hardness of sheet material suppressed, flexibility is good.
The electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 1 ~ 5 is that 10 ~ 18 chain alkyl is as organo-functional group, so the flexibility of sheet material is bad because silane coupler does not have carbon number.In addition, the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 6 and comparative example 7 is owing to not containing silane coupler, so the flexibility of sheet material is bad.
[table 2]
Investigated the hardness of the sheet material of aging front and back for the sample of comparative example 8 ~ comparative example 12.Its result is illustrated in table 2.When coupling agent is few during to 0.1wt%, about equal to sample with without coupling agent of hardness, has no the curing improvement producing by adding coupling agent.In the case of increasing the amount of coupling agent, although hardness step-down, hardening after high temperature keeps test.Be 0.016wt% according to the minimum flow in order to form the necessary coupling agent of its monolayer on the surface of amorphous metal powder of the specific area of the spherical amorphous metal dust using in these samples and the calculating of coupling agent molecule amount, if do not add than the coupling agent of amount more than large 1 figure place of the minimum addition of theory, cannot improve flexibility, in addition, in this case, due to superfluous the coupling agent that contains, so non-reacted parts is with respect to passage of time and slow reaction, after high temperature ageing, the hardness of sheet material increases thus.
In comparative example 8 ~ 11, owing to being 10 ~ 18 the chain alkyl silane coupler as organo-functional group not to spherical amorphous metal dust so that with thering is carbon number, so cannot make to improve the flexibility of sheet material and keep the flexibility under long-term preservation and deposit, have no the improvement of characteristic compared with not using the comparative example 12 of coupling agent.
[table 3]
Although the silane coupler of 0.3 ~ 5 times of weight that the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 13 ~ comparative example 17 contains monolayer formation necessary amounts, owing to not containing magnetic metallic powder, so the flexibility of sheet material is bad.
[table 4]
In the electromagnetic wave absorbability thermally-conductive sheet obtaining in embodiment 9 ~ embodiment 14, as the amorphous metal powder of magnetic metallic powder or the volume fraction of Fe-Si alloy powder with respect to the satisfied 50 ~ 85vol% of total composition.In addition, silane coupler has chain alkyl that carbon number or average carbon atom number are 10 ~ 18 as organo-functional group.In addition 0.3 ~ 5 times of weight that, silane coupler forms the necessary amount of monolayer of silane coupler with the surface at magnetic metallic powder contains.Therefore the electromagnetic wave absorbability thermally-conductive sheet, obtaining in embodiment 9 ~ embodiment 14 flexibility compared with the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 20 or comparative example 22 is good.
Because the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 19, comparative example 21 is not used, to have carbon number be 10 ~ 18 the chain alkyl silane coupler as organo-functional group, so compared with the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 20 or comparative example 22, have no the improvement of hardness.
[table 5]
Although the silane coupler of 0.3 ~ 5 times of weight that the electromagnetic wave absorbability thermally-conductive sheet obtaining in comparative example 23 ~ comparative example 27 contains monolayer formation necessary amounts, owing to not containing magnetic metallic powder, so the flexibility of sheet material is bad.

Claims (12)

1. electromagnetic wave absorbability thermally-conductive sheet, described sheet material contains silicon rubber, coupling agent and carried out surface-treated magnetic metallic powder with described coupling agent,
The volume fraction of described magnetic metallic powder is 50 ~ 85vol%,
Described coupling agent have carbon number be 10 ~ 18 chain alkyl as organo-functional group, and contain with 0.3 ~ 5 times of weight of the necessary amount of monolayer in order to form described coupling agent on the surface of described magnetic metallic powder.
2. the electromagnetic wave absorbability thermally-conductive sheet of claim 1, wherein, described magnetic metallic powder is the mixture of amorphous metal powder or amorphous metal powder and crystallinity metal dust.
3. the electromagnetic wave absorbability thermally-conductive sheet of claim 1 or 2, wherein, described coupling agent is mixed with multiple coupling agent, and the average carbon atom number of organo-functional group is 10 ~ 18.
4. the electromagnetic wave absorbability thermally-conductive sheet of any one in claim 1 ~ 3, wherein, described coupling agent has methoxy or ethoxy as hydrolysising group.
5. the electromagnetic wave absorbability thermally-conductive sheet of any one in claim 1 ~ 3, wherein, described coupling agent has dimethoxy or diethoxy as hydrolysising group.
6. the electromagnetic wave absorbability thermally-conductive sheet of claim 1, wherein, described magnetic metallic powder is crystallinity metal dust.
7. the electromagnetic wave absorbability thermally-conductive sheet of any one in claim 1 ~ 6, described sheet material further contains thermal conductivity filler.
8. electromagnetic wave absorbability thermally-conductive sheet, described sheet material contains silicon rubber, coupling agent and carried out surface-treated amorphous metal powder with described coupling agent,
The volume fraction of described amorphous metal powder is 50 ~ 85vol%,
Described coupling agent has methacryloxy as organo-functional group, and contains with 0.3 ~ 5 times of weight of the necessary amount of monolayer in order to form described coupling agent on the surface of described amorphous metal powder.
9. the electromagnetic wave absorbability thermally-conductive sheet of claim 8, wherein, described coupling agent has methoxy or ethoxy as hydrolysising group.
10. the electromagnetic wave absorbability thermally-conductive sheet of claim 8 or 9, described sheet material further contains thermal conductivity filler.
The preparation method of 11. electromagnetic wave absorbability thermally-conductive sheet, described preparation method has following operation:
Using silicon rubber, to have carbon number be that 10 ~ 18 chain alkyl mixes as coupling agent and the magnetic metallic powder of organo-functional group the agitating procedure stirring, and
To in above-mentioned agitating procedure, be shaped to sheet and curing curing process through the mixture stirring,
In described agitating procedure, containing described magnetic metallic powder so that in the volume fraction of described magnetic metallic powder is 50 ~ 85vol%, contain the described coupling agent in order to form 0.3 ~ 5 times of weight of the necessary amount of monolayer of described coupling agent on the surface of described magnetic metallic powder.
The preparation method of 12. electromagnetic wave absorbability thermally-conductive sheet, described preparation method has following operation:
Using silicon rubber, there is methacryloxy and mix as the coupling agent of organo-functional group and amorphous metal powder, the agitating procedure that the mixture through mixing is stirred, and
To in described agitating procedure, be shaped to sheet and curing curing process through the mixture stirring,
In described agitating procedure, containing described amorphous metal powder so that in the volume fraction of described amorphous metal powder is 50 ~ 85vol%, contain the described coupling agent in order to form 0.3 ~ 5 times of weight of the necessary amount of monolayer of described coupling agent on the surface of described amorphous metal powder.
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