CN103952666A - Novel evaporation mask plate tensioning method - Google Patents
Novel evaporation mask plate tensioning method Download PDFInfo
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- CN103952666A CN103952666A CN201410161454.7A CN201410161454A CN103952666A CN 103952666 A CN103952666 A CN 103952666A CN 201410161454 A CN201410161454 A CN 201410161454A CN 103952666 A CN103952666 A CN 103952666A
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- tensioning
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Abstract
The invention discloses a novel evaporation mask plate tensioning method. The novel evaporation mask plate tensioning method comprises the following steps: 1, arranging a mask plate frame; 2, arranging longitudinal skeletons in the longitudinal direction of the mask plate frame, tensioning and then welding; 3, arranging transverse skeletons in the transverse direction of the mask plate frame, tensioning and then welding; 4, arranging sub-mask plates on the mask plate frame on which the transverse skeletons are laid, tensioning and then welding; 5, repeating the step 4 till forming the complete evaporation mask plate. The novel evaporation mask plate tensioning method has the advantages that if pixels on one sub-mask plate go wrong, the sub-mask plate can be torn down and discarded, and a new sub-mask plate is welded, so that the rejection rate of the mask plate can be greatly reduced; and before the mask plate is welded, the fine metal skeletons which are vertically and horizontally welded on the mask plate frame in an alternate mode so as to support the mask plate, so that the problem of pixel deformation caused by mask plate sinking is avoided.
Description
Technical field
The present invention relates to the production technique of OLED display panel, particularly a kind of novel evaporation mask plate tensioning method.
Background technology
In OLED display screen preparation in the market, evaporation coating technique all adopts accurate mask plate evaporation coating technique.Be about to organic materials below heating, make material evaporation or distillation, and flight is upwards, see through the breach that mask plate designs and be splashed to by evaporation substrate surface, at substrate surface, form needed organic membrane pattern.The resolving power of OLED display screen is higher, and the hole of mask plate is less, and dimensional requirement is more accurate.Evaporation mask plate is to adopt metal material, approximately 50 microns of left and right of thickness.Yet the mask plate of metal material itself has own wt, the mask plate of horizontal positioned can occur sagging under the effect that is subject to certain gravity.The size of mask plate is larger, and sagging situation is more serious.The sagging meeting of mask plate causes pattern deformation, and current high-resolution display screen mask plate used is more and more thinner, the thinlyyest can reach 35 microns, and the thinner sagging distortion of mask plate is also just more obvious; Cause large-tonnage product bad.In process of production, if mask plate has a pixel to go wrong, this mask plate will be scrapped.And mask plate itself is a kind of very expensive frock, condemnation factor increase can be increased sharply production cost, reduces the competitiveness of product in market.
Summary of the invention
The present invention addresses the above problem, and a kind of sagging distortion of mask plate that prevents is provided, and improves pixel resolution, the evaporation mask plate tensioning method that simultaneously extends the work-ing life of mask plate.
Novel evaporation mask plate tensioning method of the present invention, comprises the following steps:
The first step, mask plate framework is set;
Second step, mask plate framework longitudinally on longitudinal framework is set, and tensioning, then welding;
The 3rd step, at mask plate framework, horizontal skeleton is transversely set, and tensioning, then welding;
The 4th step, sub-mask plate is arranged on the mask plate framework that lays transverse and longitudinal skeleton, and tensioning, then welding;
The 5th step, repetition the 4th step, plate mask plate until form Zheng who completes.
Mask plate framework in the described the first step comprises mask plate chassis body, groove and mask plate framework registration holes; It is interior along upper that groove is arranged on mask plate chassis body, is at least provided with a pair of mask plate framework registration holes in longitudinal left and right sides of mask plate chassis body.
Described second step comprises the following steps: in mask plate chassis body, lay at least one longitudinal framework, a pair of longitudinal tension clips is arranged on the two ends of longitudinal framework, longitudinally tension clips clamps longitudinal framework, and longitudinally tension clips is connected with longitudinal pulling force device by tensioned thread; Longitudinal pulling force device starts, and by stretching tensioned thread, makes longitudinal framework tensioning, then by longitudinal weld, longitudinal framework and mask plate chassis body is welded together, and then unnecessary longitudinal framework is cut away.
Described the 3rd step comprises the following steps: in the mask plate chassis body of longitudinal framework, lay at least one horizontal skeleton fixing, a pair ofly think that very much tension clips is arranged on the two ends of horizontal skeleton, lateral tension folder clamps horizontal skeleton, and lateral tension folder is connected with lateral pull device by tensioned thread; Lateral pull device starts, and by stretching tensioned thread, makes horizontal skeleton tensioning, then by name a person for a particular job horizontal skeleton and mask plate chassis body of horizontal welding, welds together, and then unnecessary horizontal skeleton is cut away.
Described the 4th step comprises the following steps: a metal mask plate is cut into at least two sub-mask plates, sub-mask plate is placed in the mask plate chassis body that fixes longitudinal framework and horizontal skeleton, sub-mask plate registration holes on sub-mask plate is alignd with mask plate framework registration holes, three antithetical phrase mask plate tension clips are clamped in the two ends of sub-mask plate, sub-mask plate tension clips is connected with puller system by tensioned thread, puller system starts, by stretching tensioned thread, make sub-mask plate tensioning, after coordinating registration holes and the contraposition of photolithographic substrate mother matrix, sub-mask plate is in optimum regime, by sub-mask plate weld, sub-mask plate and mask plate chassis body are welded together, then by for sub-mask plate cut away.
In sum, evaporation mask plate tensioning method of the present invention has the following advantages:
If 1 wherein the pixel on a sub-mask plate go wrong, after can only this sub-mask plate being torn it down and scrapping, again weld a new sub-mask plate, can greatly reduce like this condemnation factor of mask plate;
2, before mask plate welding, on mask plate framework, need to weld the tiny metallic framework replacing in length and breadth, support mask plate, like this pixel deformation problem with regard to avoiding appearance to cause because mask plate is sagging.
Accompanying drawing explanation
Fig. 1 is mask plate framework Facad structure figure;
Fig. 2 is mask plate framework sectional structure chart;
Fig. 3 is the demonstration graph that mask plate framework is laid longitudinal framework;
Fig. 4 is the demonstration graph that mask plate framework is laid horizontal skeleton;
Fig. 5 is the positive demonstration graph that mask plate framework is laid sub-mask plate;
Fig. 6 is the section demonstration graph that mask plate framework is laid sub-mask plate.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the invention will be further elaborated.
Novel evaporation mask plate tensioning method of the present invention, comprises the following steps: the first step, mask plate framework is set; Mask plate framework in the described the first step comprises mask plate chassis body 1, groove 11 and mask plate framework registration holes 12; It is interior along upper that groove 11 is arranged on mask plate chassis body 1, is at least provided with a pair of mask plate framework registration holes in longitudinal left and right sides of mask plate chassis body 1.Second step, mask plate framework longitudinally on longitudinal framework is set, and tensioning, then welding; Described second step comprises the following steps: in mask plate chassis body 1, lay at least one longitudinal framework 2, a pair of longitudinal tension clips 21 is arranged on the two ends of longitudinal framework 2, longitudinally tension clips 21 clamps longitudinal framework 2, and longitudinally tension clips 21 is connected with longitudinal pulling force device 22 by tensioned thread; Longitudinal pulling force device 22 starts, and by stretching tensioned thread, makes longitudinal framework 2 tensionings, then by longitudinal weld 23, longitudinal framework 2 and mask plate chassis body 1 is welded together, and then unnecessary longitudinal framework 2 is cut away.The 3rd step, at mask plate framework, horizontal skeleton is transversely set, and tensioning, then welding; Described the 3rd step comprises the following steps: in the mask plate chassis body 1 of longitudinal framework 2, lay at least one horizontal skeleton 3 fixing, a pair ofly think that very much tension clips 31 is arranged on the two ends of horizontal skeleton 3, lateral tension folder 31 clamps horizontal skeleton 3, and lateral tension folder 31 is connected with lateral pull device 32 by tensioned thread; Lateral pull device 32 starts, and by stretching tensioned thread, makes horizontal skeleton 3 tensionings, then by horizontal welding, puts 33 horizontal skeleton 3 and mask plate chassis body 1 are welded together, and then unnecessary horizontal skeleton 3 is cut away.In mask plate chassis body 1, welding longitudinal framework 2 is sagging in order to prevent the mask plate after finished product with horizontal skeleton 3.The 4th step, sub-mask plate is arranged on the mask plate framework that lays transverse and longitudinal skeleton, and tensioning, then welding, described the 4th step comprises the following steps: a metal mask plate is cut into at least three sub-mask plates 4, sub-mask plate 4 is placed in the mask plate chassis body 1 that fixes longitudinal framework 2 and horizontal skeleton 3, sub-mask plate registration holes on sub-mask plate 4 is alignd with mask plate framework registration holes 12, three antithetical phrase mask plate tension clips 41 are clamped in the two ends of sub-mask plate 4, sub-mask plate tension clips 41 is connected with puller system 42 by tensioned thread, puller system 42 starts, by stretching tensioned thread, make sub-mask plate 4 tensionings, after coordinating registration holes 45 and 46 contrapositions of photolithographic substrate mother matrix, sub-mask plate 4 is in optimum regime, by sub-mask plate weld 43, sub-mask plate 4 and mask plate chassis body 1 are welded together, then by for sub-mask plate 4 cut away.Described sub-mask plate 4 and longitudinal framework 2 and laterally skeleton 3 materials are Invar alloy, Rhometal, nickel cobalt (alloy) or pure nickel, and thickness is also consistent, and width is all 1mm～2mm simultaneously.The 5th step, repetition the 4th step, plate mask plate until form Zheng who completes.
Those of ordinary skill in the art will appreciate that, embodiment described here is in order to help reader understanding's principle of the present invention, should be understood to that protection scope of the present invention is not limited to such special statement and embodiment.Those of ordinary skill in the art can make various other various concrete distortion and combinations that do not depart from essence of the present invention according to these technology enlightenments disclosed by the invention, and these distortion and combination are still in protection scope of the present invention.
Claims (5)
1. a novel evaporation mask plate tensioning method, is characterized in that, comprises the following steps:
The first step, mask plate framework is set;
Second step, mask plate framework longitudinally on longitudinal framework is set, and tensioning, then welding;
The 3rd step, at mask plate framework, horizontal skeleton is transversely set, and tensioning, then welding;
The 4th step, sub-mask plate is arranged on the mask plate framework that lays transverse and longitudinal skeleton, and tensioning, then welding;
The 5th step, repetition the 4th step, plate mask plate until form Zheng who completes.
2. novel evaporation mask plate tensioning method as claimed in claim 1, is characterized in that: the mask plate framework in the described the first step comprises mask plate chassis body (1), groove (11) and mask plate framework registration holes (12); It is interior along upper that groove (11) is arranged on mask plate chassis body (1), is at least provided with a pair of mask plate framework registration holes in longitudinal left and right sides of mask plate chassis body (1).
3. novel evaporation mask plate tensioning method as claimed in claim 1 or 2, it is characterized in that: described second step comprises the following steps: at the upper at least one longitudinal framework (2) of laying of mask plate chassis body (1), a pair of longitudinal tension clips (21) is arranged on the two ends of longitudinal framework (2), longitudinally tension clips (21) clamps longitudinal framework (2), and longitudinally tension clips (21) is connected with longitudinal pulling force device (22) by tensioned thread; Longitudinal pulling force device (22) starts, by stretching tensioned thread, make longitudinal framework (2) tensioning, then by longitudinal weld (23), longitudinal framework (2) and mask plate chassis body (1) are welded together, then unnecessary longitudinal framework (2) is cut away.
4. novel evaporation mask plate tensioning method as claimed in claim 3, it is characterized in that: described the 3rd step comprises the following steps: at the upper at least one horizontal skeleton (3) of laying of the mask plate chassis body (1) that fixes longitudinal framework (2), a pair ofly think that very much tension clips (31) is arranged on the two ends of horizontal skeleton (3), lateral tension folder (31) clamps horizontal skeleton (3), and lateral tension folder (31) is connected with lateral pull device (32) by tensioned thread; Lateral pull device (32) starts, by stretching tensioned thread, make horizontal skeleton (3) tensioning, then by horizontal welding point (33), horizontal skeleton (3) and mask plate chassis body (1) are welded together, then unnecessary horizontal skeleton (3) is cut away.
5. novel evaporation mask plate tensioning method as claimed in claim 4, it is characterized in that: described the 4th step comprises the following steps: a metal mask plate is cut into at least three sub-mask plates (4), sub-mask plate (4) is placed in the mask plate chassis body (1) that fixes longitudinal framework (2) and horizontal skeleton (3), sub-mask plate registration holes on sub-mask plate (4) is alignd with mask plate framework registration holes (12), three antithetical phrase mask plate tension clips (41) are clamped in the two ends of sub-mask plate (4), sub-mask plate tension clips (41) is connected with puller system (42) by tensioned thread, puller system (42) starts, by stretching tensioned thread, make sub-mask plate (4) tensioning, after coordinating registration holes (45) and photolithographic substrate mother matrix (46) contraposition, sub-mask plate (4) is in optimum regime, by sub-mask plate weld (43), sub-mask plate (4) and mask plate chassis body (1) are welded together, then by for sub-mask plate (4) cut away.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410161454.7A CN103952666B (en) | 2014-04-22 | 2014-04-22 | evaporation mask plate tensioning method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410161454.7A CN103952666B (en) | 2014-04-22 | 2014-04-22 | evaporation mask plate tensioning method |
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| CN103952666A true CN103952666A (en) | 2014-07-30 |
| CN103952666B CN103952666B (en) | 2016-02-10 |
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| CN201410161454.7A Expired - Fee Related CN103952666B (en) | 2014-04-22 | 2014-04-22 | evaporation mask plate tensioning method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105826469A (en) * | 2016-05-25 | 2016-08-03 | 唐军 | Method of making large-size mask substrate |
| CN108526729A (en) * | 2018-04-13 | 2018-09-14 | 武汉华星光电半导体显示技术有限公司 | Laser cutting device and the preparation method that mask plate is deposited |
| CN114228181A (en) * | 2022-02-24 | 2022-03-25 | 季华实验室 | Diaphragm pre-tightening device, pre-tightening system and pre-tightening method of capacitance film vacuum gauge |
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| CN1816235A (en) * | 2005-11-14 | 2006-08-09 | 深圳市允升吉电子有限公司 | Mask assembling method for organic luminescent display device |
| CN102569673A (en) * | 2010-12-20 | 2012-07-11 | 三星移动显示器株式会社 | Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display device using the mask frame assembly |
| CN103205670A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | System for mask assembly indirect alignment |
| JP2013163864A (en) * | 2012-01-12 | 2013-08-22 | Dainippon Printing Co Ltd | Vapor deposition mask, method for producing vapor deposition mask device, and method for producing organic semiconductor element |
| CN103668052A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Composite mask plate assembly |
| CN103695841A (en) * | 2013-11-28 | 2014-04-02 | 昆山允升吉光电科技有限公司 | Assembling method of mask assembly |
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2014
- 2014-04-22 CN CN201410161454.7A patent/CN103952666B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1816235A (en) * | 2005-11-14 | 2006-08-09 | 深圳市允升吉电子有限公司 | Mask assembling method for organic luminescent display device |
| CN102569673A (en) * | 2010-12-20 | 2012-07-11 | 三星移动显示器株式会社 | Mask frame assembly, method of manufacturing the same, and method of manufacturing organic light-emitting display device using the mask frame assembly |
| JP2013163864A (en) * | 2012-01-12 | 2013-08-22 | Dainippon Printing Co Ltd | Vapor deposition mask, method for producing vapor deposition mask device, and method for producing organic semiconductor element |
| CN103205670A (en) * | 2012-01-16 | 2013-07-17 | 昆山允升吉光电科技有限公司 | System for mask assembly indirect alignment |
| CN103668052A (en) * | 2012-09-07 | 2014-03-26 | 昆山允升吉光电科技有限公司 | Composite mask plate assembly |
| CN103695841A (en) * | 2013-11-28 | 2014-04-02 | 昆山允升吉光电科技有限公司 | Assembling method of mask assembly |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105826469A (en) * | 2016-05-25 | 2016-08-03 | 唐军 | Method of making large-size mask substrate |
| CN108526729A (en) * | 2018-04-13 | 2018-09-14 | 武汉华星光电半导体显示技术有限公司 | Laser cutting device and the preparation method that mask plate is deposited |
| CN114228181A (en) * | 2022-02-24 | 2022-03-25 | 季华实验室 | Diaphragm pre-tightening device, pre-tightening system and pre-tightening method of capacitance film vacuum gauge |
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| CN103952666B (en) | 2016-02-10 |
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Granted publication date: 20160210 Termination date: 20210422 |