CN103944531A - Resonator element, resonator, oscillator, electronic apparatus and moving object - Google Patents
Resonator element, resonator, oscillator, electronic apparatus and moving object Download PDFInfo
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- CN103944531A CN103944531A CN201410017442.7A CN201410017442A CN103944531A CN 103944531 A CN103944531 A CN 103944531A CN 201410017442 A CN201410017442 A CN 201410017442A CN 103944531 A CN103944531 A CN 103944531A
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The invention provides a resonator element, a resonator, an oscillator, an electronic apparatus and a moving object, in order to inhibit change in vibration characteristics caused by external forces such as acceleration. The resonator element 1 has a piezoelectric substrate 2 including a vibration section 21 and a thick section 22 having a thickness which is thicker than that of the vibration section 21, and a pair of excitation electrodes 31, 32 provided on a surface and aback surface of the vibration section 21. In addition, the thick section 22 has a second thick section 24 provided along a second outer edge 213 of the vibration section 21. The second thick section 24 has an outer edge section 243 intersecting with both axes of an X axis and a Z' axis in an end portion opposite to the fixing section 29 in a plan view of the resonator element 1.
Description
Technical field
The present invention relates to vibrating elements, oscillator, oscillator, electronic equipment and moving body.
Background technology
AT cuts quartzy vibrating elements because the vibration mode of the principal oscillation encouraging is thickness shear vibration, is applicable to miniaturization, high-frequency, and frequency-temperature characteristic is excellent cubic curve, therefore, is used to the many aspects such as piezoelectric oscillator, electronic equipment.
In patent documentation 1, disclose the AT that has the vibration section of thin-walled and be located at the reversed-trapezoid structure of the all-round heavy section in vibration section and cut quartzy vibrating elements, this AT cuts quartzy vibrating elements and is fixed in encapsulation by bonding agent in an end of described heavy section.There are the following problems: cut under the state that quartzy vibrating elements supported by cantilever at AT, when AT is cut quartzy vibrating elements and applies the acceleration of thickness direction, the vibration section that is positioned at free end side vibrates (distortion), and vibration characteristics (frequency characteristic) is unstable.The AT particularly recording at patent documentation 1 cuts in quartzy vibrating elements, and owing to being formed with heavy section around vibration section whole, the weight of leading section is heavier, therefore larger on the impact of acceleration, and correspondingly, it is large that frequency offset also becomes.
Patent documentation 1: TOHKEMY 2002-198772 communique
Summary of the invention
The object of the invention is to, a kind of vibrating elements, oscillator, oscillator, electronic equipment and moving body are provided, can reduce the variation of the vibration characteristics being caused by external force such as acceleration (vibration), the vibration characteristics of playing stably.
The present invention completes at least a portion addressing the above problem just, can be used as following application examples and realizes.
［ application examples 1 ］
Vibrating elements of the present invention is characterised in that, this vibrating elements comprises:
Substrate, it comprises the 1st region and the 2nd region, wherein, and the vibration area that the 1st district inclusion vibrates in the mode of thickness shear vibration, the 2nd region and described the 1st region become one, and the 1st region is thick described in Thickness Ratio; And
Exciting electrode, it is located at respectively the 1st interarea in positive inverse relation and the 2nd interarea each other of described vibration area,
Described the 2nd district inclusion:
The 1st heavy section, it disposes the fixed part that is installed on object; And
The 2nd heavy section, it is connected with described the 1st heavy section,
Described the 2nd heavy section comprises outer edge with the end of the contrary side of described fixed part side in the time overlooking, and this outer edge and the direction of vibration of described thickness shear vibration and the direction perpendicular to the direction of vibration of described thickness shear vibration are intersected.
Thus, can obtain reducing the quality of front (side contrary to fixed part), reduce the variation of the vibration characteristics being caused by external force such as acceleration (vibration), the vibrating elements of the vibration characteristics of playing stably.
［ application examples 2 ］
In vibrating elements of the present invention, preferably,
Described the 1st district inclusion:
A pair of the 1st outer rim of intersecting with the direction of vibration of described thickness shear vibration; And
A pair of the 2nd outer rim of the direction of vibration vibrating along described thickness shear,
A side in described a pair of the 1st outer rim arranges described the 1st heavy section,
At least one party in described a pair of the 2nd outer rim arranges described the 2nd heavy section.
Thus, can obtain reducing the quality of front (side contrary to fixed part), reduce the variation of the vibration characteristics being caused by external force such as acceleration (vibration), the vibrating elements of the vibration characteristics of playing stably.
［ application examples 3 ］
In vibrating elements of the present invention, preferably, described the 2nd heavy section comprises: rake, and it is connected setting with described the 2nd outer rim, and thickness increases gradually towards the direction away from described the 2nd outer rim; And the heavy section main body of constant thickness, it is connected in described rake and the ora terminalis contrary side of described the 2nd outer rim,
Described outer edge whole installation is in described heavy section main body.
Thus, can, in guaranteeing the rigidity of vibrating elements compared with highland, reduce the quality of front.
［ application examples 4 ］
In vibrating elements of the present invention, preferably, described the 2nd heavy section comprises: rake, and it is connected setting with described the 2nd outer rim, and thickness is towards the direction away from described the 2nd outer rim and honest gradually; And the heavy section main body of constant thickness, it is connected in described rake and the ora terminalis contrary side of described the 2nd outer rim,
Across described heavy section main body and described rake, described outer edge is set.
Thus, can, in guaranteeing the rigidity of vibrating elements, further reduce the quality of front.
［ application examples 5 ］
In vibrating elements of the present invention, preferably, described the 2nd heavy section comprises: rake, and it is connected setting with described the 2nd outer rim, and thickness is towards the direction away from described the 2nd outer rim and honest gradually; And the heavy section main body of constant thickness, it is connected in described rake and the ora terminalis contrary side of described the 2nd outer rim,
Across outer edge described in described heavy section main body, described rake and the 1st region division.
Thus, can further reduce the quality of front.
［ application examples 6 ］
In vibrating elements of the present invention, preferably, when being the 1st heavy section region with described exciting electrode region arranged side by side on the direction of vibration of described thickness shear vibration that is located at described the 2nd heavy section, when the region of comparing the contrary side of described fixed part with described the 1st heavy section region is the 2nd heavy section region
Across outer edge described in described the 2nd heavy section region and described the 1st heavy section region division.
Thus, can, in guaranteeing the rigidity of vibrating elements, further reduce the quality of front.
［ application examples 7 ］
In vibrating elements of the present invention, preferably, when being the 1st heavy section region with described exciting electrode region arranged side by side on the direction of vibration of described thickness shear vibration that is located at described the 2nd heavy section, the region of comparing the contrary side of described fixed part with described the 1st heavy section region is the 2nd heavy section region, when the region of described fixed part side is the 3rd heavy section region compared with described the 1st heavy section region
Across outer edge described in described the 2nd heavy section region, described the 1st heavy section region and described the 3rd heavy section region division.
Thus, can further reduce the quality of front.
［ application examples 8 ］
In vibrating elements of the present invention, preferably, when establishing while overlooking described substrate by the ora terminalis of described the 2nd outer edge side of the described heavy section main body of described the 2nd heavy section, ora terminalis with the contrary side of described the 2nd outer rim, crossing with described exciting electrode one end on described direction of vibration and with the orthogonal straight line of described direction of vibration, and the area in and the region that with described direction of vibration orthogonal straight line surround crossing with the other end of described exciting electrode on described direction of vibration is S1, when the area that is positioned at described the 2nd heavy section in described region is S2, 0.65≤S2/S1≤0.85.
Thus, can, in guaranteeing the rigidity of vibrating elements, reduce the quality of front.
［ application examples 9 ］
In vibrating elements of the present invention, preferably, when establish while overlooking described substrate by the ora terminalis of described the 2nd outer edge side of the described heavy section main body of described the 2nd heavy section, with the ora terminalis of the contrary side of described the 2nd outer rim, with described the 1st one end on described direction of vibration, region crossing and with the orthogonal straight line of described direction of vibration and intersect with described the 1st other end of region on described direction of vibration and with the area in the region of the orthogonal straight line encirclement of described direction of vibration be S3, when the area that is positioned at described the 2nd heavy section in described region is S4, S4/S3≤0.75.
Thus, can fully reduce distolateral quality.
［ application examples 10 ］
In vibrating elements of the present invention, preferably, in the time overlooking described substrate, below 1/2 of area that the area in described the 1st region is described substrate.
Thus, can fully guarantee the rigidity of vibrating elements.
［ application examples 11 ］
In vibrating elements of the present invention, preferably, described the 1st outer rim being connected with described the 1st heavy section and described the 2nd outer rim being connected with described the 2nd heavy section connect by the 3rd outer rim, wherein, the 3rd outer rim is intersected with described direction of vibration with perpendicular to this both direction of direction of described direction of vibration.
The stress that thus, can relax the border of the 2nd outer rim being connected to the 1st outer rim being connected with the 1st heavy section with the 2nd heavy section is concentrated.
［ application examples 12 ］
In vibrating elements of the present invention, preferably, this vibrating elements has extraction electrode, and this extraction electrode extends from described exciting electrode, via the sidewall being connected with described the 2nd outer rim in described the 2nd region and the sidewall being connected with described the 3rd outer rim, be drawn out to the interarea in described the 2nd region.
Thus, can increase the width of extraction electrode, reduce the series resistance of extraction electrode.
［ application examples 13 ］
In vibrating elements of the present invention, preferably, can from described substrate with the interarea side of interarea opposition side that is formed with described fixed part, see background across described fixed part.
Thus, can control accurately configuration, the diameter etc. of the bonding agent contacting with fixed part.
［ application examples 14 ］
In vibrating elements of the present invention, preferably, described substrate is following quartz plate: quartzy crystallographic axis as the X-axis of electric axle, as the Y-axis of mechanical axis and the Z axis as optic axis in, using described X-axis as rotating shaft, by make described Z axis using Y-axis described in+Z side direction-axle after the mode of Y-direction rotation tilts is as Z ' axle, by make described Y-axis using Z axis described in+Y side direction+axle after the mode of Z direction rotation tilts is as Y ' axle, to comprise the face of described X-axis and described Z ' axle as interarea, will be along the direction of described Y ' axle as thickness.
Thus, can obtain the vibrating elements of excellent in temperature characteristic.
［ application examples 15 ］
Oscillator of the present invention is characterised in that, the encapsulation that this oscillator has vibrating elements of the present invention and receives described vibrating elements.
Thus, can obtain the oscillator of high reliability.
［ application examples 16 ］
Oscillator of the present invention is characterised in that, this oscillator has vibrating elements of the present invention and drives the oscillating circuit of described vibrating elements.
Thus, can obtain the oscillator of high reliability.
［ application examples 17 ］
Electronic equipment of the present invention is characterised in that, this electronic equipment has vibrating elements of the present invention.
Thus, can obtain the electronic equipment of high reliability.
［ application examples 18 ］
Moving body of the present invention is characterised in that, this moving body has vibrating elements of the present invention.
Thus, can obtain the moving body of high reliability.
Brief description of the drawings
Fig. 1 is the stereogram of the vibrating elements of the 1st execution mode of the present invention.
Fig. 2 is the vertical view of the vibrating elements shown in Fig. 1.
Fig. 3 is that explanation AT cuts the figure of the relation between quartz base plate and quartzy crystallographic axis.
Fig. 4 illustrates the end view that the vibrating elements shown in Fig. 1 is fixed on to the state after object.
Fig. 5 is the vertical view that the variation of the vibrating elements shown in Fig. 1 is shown.
Fig. 6 is the vertical view that the variation of the vibrating elements shown in Fig. 1 is shown.
Fig. 7 is the vertical view of the vibrating elements shown in Fig. 1.
Fig. 8 is the vertical view of the vibrating elements shown in Fig. 1.
Fig. 9 is the stereogram that the variation of the vibrating elements shown in Fig. 1 is shown.
Figure 10 is the curve chart that the acceleration sensitivity of the vibrating elements shown in Fig. 1 is shown.
Figure 11 is the vertical view of the vibrating elements of the 2nd execution mode of the present invention.
Figure 12 is the vertical view of the vibrating elements of the 3rd execution mode of the present invention.
Figure 13 is the vertical view of the vibrating elements of the 4th execution mode of the present invention.
Figure 14 is the vertical view of the vibrating elements of the 5th execution mode of the present invention.
Figure 15 is the vertical view that the variation of the vibrating elements shown in Figure 14 is shown.
Figure 16 is the stereogram of the vibrating elements of the 6th execution mode of the present invention.
Figure 17 is the cutaway view that the preferred implementation of oscillator of the present invention is shown.
Figure 18 is the cutaway view that the preferred implementation of oscillator of the present invention is shown.
Figure 19 is the stereogram that the structure of movable type (or notebook type) personal computer of application electronic equipment of the present invention is shown.
Figure 20 is the stereogram that the structure of the mobile phone (comprising PHS) of application electronic equipment of the present invention is shown.
Figure 21 is the stereogram that the structure of the digital still camera of application electronic equipment of the present invention is shown.
Figure 22 is the stereogram roughly illustrating as the automobile of an example of moving body of the present invention.
Figure 23 is the vertical view that the relation between vibrating elements of the present invention and frequency of oscillation is shown.
Figure 24 is the vertical view that the relation between vibrating elements of the present invention and frequency of oscillation is shown.
Figure 25 is the vertical view that the relation between vibrating elements of the present invention and frequency of oscillation is shown.
Label declaration
1, 1A, 1B, 1C, 1D, 1E ... vibrating elements 10 ... oscillator 100 ... oscillator 110 ... IC chip 120 ... internal terminal 2 ... piezoelectric substrate 21 ... vibration section 211, 212 ... the 1st outer rim 213, 214 ... the 2nd outer rim 215 ... the 3rd outer rim 216 ... the 4th outer rim 219 ... vibration area 22 ... heavy section 23 ... the 1st heavy section 231 ... rake 232 ... heavy section main body 24 ... the 2nd heavy section 241 ... rake 241a, 241b ... face 242 ... heavy section main body 242a, 242b ... ora terminalis 243 ... outer edge 243a, 243b ... end 29 ... fixed part 3 ... electrode 31, 32 ... exciting electrode 33, 34 ... pad electrode 35, 36 ... extraction electrode 91 ... bonding agent 92 ... object 4 ... encapsulation 41 ... substrate 411 ... recess 42 ... lid 451, 461 ... connecting electrode 452, 462 ... outside mounting terminal 51 ... conductive adhesive 52 ... bonding wire 1100 ... personal computer 1102 ... keyboard 1104 ... main part 1106 ... represent unit 1200 ... mobile phone 1202 ... action button 1204 ... receiving mouth 1206 ... mouth piece 1300 ... digital still camera 1302 ... housing 1304 ... light receiving unit 1306 ... shutter release button 1308 ... memory 1312 ... video signal output terminal 1314 ... input and output terminal 1430 ... televimonitor 1440 ... personal computer 1500 ... automobile 2000 ... display part L1, L2, L3, L4, L5, L6 ... straight line T21 ... middle section T22 ... front region T23 ... base end side region T1, T3, T4 ... region S ... accommodation space
Embodiment
Below, the preferred implementation shown in reference to the accompanying drawings describes vibrating elements of the present invention, oscillator, oscillator, electronic equipment and moving body in detail.
1. vibrating elements
First, vibrating elements of the present invention is described.
< the 1st execution mode >
Fig. 1 is the stereogram of the vibrating elements of the 1st execution mode of the present invention, Fig. 2 is the vertical view of the vibrating elements shown in Fig. 1, Fig. 3 is that explanation AT cuts the figure of the relation between quartz base plate and quartzy crystallographic axis, Fig. 4 illustrates the end view that the vibrating elements shown in Fig. 1 is fixed on to the state after object, Fig. 5 and Fig. 6 are respectively the vertical views that the variation of the vibrating elements shown in Fig. 1 is shown, Fig. 7 and Fig. 8 are respectively the vertical views of the vibrating elements shown in Fig. 1, Fig. 9 is the stereogram that the variation of the vibrating elements shown in Fig. 1 is shown, Figure 10 is the curve chart that the acceleration sensitivity of the vibrating elements shown in Fig. 1 is shown.In addition, below for convenience of explanation, the right side in Fig. 2 is called to front end, left side is called cardinal extremity.
As depicted in figs. 1 and 2, vibrating elements 1 has piezoelectric substrate (substrate) 2 and is formed on the electrode 3 on piezoelectric substrate 2.
(piezoelectric substrate)
Piezoelectric substrate 2 is tabular quartz base plates.Here, belong to trigonal system as the quartz of the material of piezoelectric substrate 2, as shown in Figure 3, there is orthogonal crystallographic axis X, Y, Z.X-axis, Y-axis, Z axis are called respectively to electric axle, mechanical axis, optic axis.The piezoelectric substrate 2 of present embodiment is along the plane " the rotary Y cutting quartz base plate " that cut out of XZ face being rotated around X-axis after the angle θ of regulation, and for example, substrate when the plane behind rotation θ=35 ° 15 ' being cut out is called " AT cuts quartz base plate ".There is the vibrating elements 1 of excellent temperature characterisitic by using such quartz base plate to become.But piezoelectric substrate 2 is not limited to AT and hobs electric substrate, as long as can encourage thickness shear vibration, for example, also can use the piezoelectric substrate that BT cuts or SC cuts.
In addition, below will be made as Y ' axle and Z ' axle around the postrotational Y-axis of X-axis and Z axis accordingly with angle θ.That is, piezoelectric substrate 2 has thickness on Y ' direction of principal axis, in XZ ' face direction, has range.
Piezoelectric substrate 2 is taking the direction along X-axis as long limit, the roughly oblong-shaped that is minor face along the direction of Z ' axle in the time overlooking.In addition, piezoelectric substrate 2 general-X-directions are as front, and+X-direction is as base end side.When the maximum length of the direction along X-axis of piezoelectric substrate 2 is made as to L, while being made as W along the Breadth Maximum of the direction of Z ' axle, there is no particular limitation for L/W, but be preferably made as for example 1.1～1.4 left and right.
As depicted in figs. 1 and 2, piezoelectric substrate 2 has: vibration section (the 1st region) 21, its vibration area that comprises thin-walled (region of sealing vibrational energy) 219; And heavy section (the 2nd region) 22, itself and vibration section 21 become one, and Thickness Ratio vibration area 219 is thick.For example can by wet etching quartz base plate+form depressed part on the interarea of Y ' axle side, form thus vibration section 21.
Vibration section 21 with respect to the central authorities of piezoelectric substrate 2 close-X-direction side and-Z ' direction of principal axis side, a part for its outer rim is exposed from heavy section 22.Here, preferably, in the time overlooking vibrating elements 1, the area of vibration section 21 is below 1/2 of area of piezoelectric substrate 2.Thus, can enough form heavy section 22 thicker than vibration section 21 and that mechanical strength is high greatly, therefore can fully guarantee vibrating elements 1(vibration section 21) rigidity.Therefore, the deflection of the thickness direction of the piezoelectric substrate 2 being caused by the axial acceleration of Y ' (vibration, shock) can be effectively reduced, the sensitivity to the axial acceleration of Y ' can be reduced.In addition, can effectively reduce unwanted vibration mode etc. occurs.
Vibration section 21 has a pair of the 1st outer rim 211,212 and a pair of the 2nd outer rim 213,214, in the time overlooking vibrating elements 1, this a pair of the 1st outer rim 211,212 X-direction (thickness shear vibration direction of vibration) upper from and go up extension at Z ' direction of principal axis (direction of intersecting with X-direction), this pair of the 2nd outer rim 213,214 on Z ' direction of principal axis from and in X-direction, extend.In the 1st outer rim 211,212, the 1st be positioned at-X-axis of outer rim 211 side, the 1st be positioned at+X-axis of outer rim 212 side.In addition, in the 2nd outer rim 213,214, the 2nd be positioned at+Z ' of outer rim 213 axle side, the 2nd be positioned at-Z ' of outer rim 214 axle side.
In addition, vibration section 21 also have connect the 1st outer rim 212+end of Z ' axle side and the 2nd outer rim 213+the 3rd outer rim 215 of the end of X-axis side.The 3rd outer rim 215 is configured to intersect with X-axis and these two axles of Z ' axle.There is no particular limitation with respect to the inclination angle of X-axis for the 3rd outer rim 215, still, and preferably 30 ° of above and 65 ° of following left and right.By the 3rd such outer rim 215 is set, for example, about using the pad electrode 33 of the heavy section main body 232 of the 1st heavy section 23 as fixed part, the stress being caused by installation producing while being installed to the substrate of encapsulation etc., can relax near the stress boundary portion of the 1st outer rim 212 and the 2nd outer rim 213 and concentrate, therefore, can reduce the distortion producing in vibration section 21 being caused by stress.Therefore, can improve the vibration characteristics of vibrating elements 1.
In addition, vibration section 21 also have connect the 1st outer rim 211+end of Z ' axle side and the 2nd outer rim 213-the 4th outer rim 216 of the end of X-axis side.The 4th outer rim 216 is made up of a part for outer edge 243 described later.
As shown in Figure 1, the surface of heavy section 22 interarea of direction of principal axis side (+the Y ') be configured to compared with the surface of vibration section 21 interarea of direction of principal axis side (+the Y ') to+Y ' direction of principal axis is side-prominent.On the other hand, the back side of heavy section 22 interarea of direction of principal axis side (Y ') is arranged in the plane identical with the back side of vibration section 21 interarea of direction of principal axis side (Y ').
Heavy section 22 has the 1st heavy section 23 configuring along the 1st outer rim 212 and the 2nd heavy section 24 that configures with the 3rd outer rim 215 and be connected with the 1st heavy section 23 along the 2nd outer rim 213.Therefore, heavy section 22 has along the structure of vibration section 21 bendings in the time overlooking, and is roughly L word shape.On the other hand, in the 1st outer rim the 211, the 2nd outer rim 214 of vibration section 21 and the 4th outer rim 216, do not form heavy section 22, these outer rims 211,214,216 are exposed from heavy section 22.Like this, by heavy section 22 being arranged in the part outer rim in vibration section 21 roughly to L word shape and along the 1st outer rim the 211, the 2nd outer rim 214 and the 4th outer rim 216, heavy section 22 not being set, can keep vibrating elements 1(vibration section 21) rigidity, and reduce the quality of front of vibrating elements 1.In addition can realize, the miniaturization of vibrating elements 1.
Here, by by the 1st heavy section 23 with respect to vibration section 21 be arranged on+X-axis side, compared with the situation of be arranged on-X-axis side, can shorten the width (length of X-direction) of rake 231 described later.Equally, by by the 2nd heavy section 24 with respect to vibration section 21 be arranged on+Z ' axle side, compared with the situation of be arranged on-Z ' axle side, can shorten the width (Z ' axial length) of rake 241 described later.Therefore,, according to such heavy section 22, can realize the miniaturization of vibrating elements 1.
The 1st heavy section 23 has: rake (residue portion) 231, and it is connected setting with the 1st outer rim 212, and thickness increases gradually towards+X-direction; And the substantially invariable heavy section main body 232 of thickness, its with rake 231+ora terminalis of X-direction side is connected.Equally, the 2nd heavy section 24 has: rake (residue portion) 241, and it is connected setting with the 2nd outer rim 213 and the 3rd outer rim 215, and thickness increases gradually towards+Z ' direction of principal axis; And the substantially invariable heavy section main body 242 of thickness, its with rake 241+ora terminalis of Z ' direction of principal axis side is connected.In addition, the 2nd heavy section 24 has outer edge 243 at its leading section, and in the time overlooking vibrating elements 1, extend in the direction of intersecting with X-axis and these two axles of Z ' axle this outer edge 243.With the be positioned at-X-axis side of cutting piezoelectric substrate 2 and+mode in the bight of Z ' axle side arranges outer edge 243.Outer edge 243 forms across heavy section main body 242, rake 241 and vibration section 21.Therefore, the end 243a of the front of outer edge 243 is positioned at vibration section 21, and as previously mentioned, a part for outer edge 243 forms the 4th outer rim 216.As described later, by thering is such outer edge 243, can obtain the sensitivity of the axial acceleration of Y ' (vibration, shock) to decline, not be vulnerable to the vibrating elements 1 of the impact of the axial acceleration of Y '.
In addition the base end side that is vibrating elements 1 on the surface of the heavy section main body 232 of the 1st heavy section 23, is provided with fixing (mount) portion 29.As shown in Figure 4, by this fixed part 29, use bonding agent 91 that vibrating elements 1 is fixed on to object 92.In addition, there is no particular limitation in the position of fixed part 29, for example, also can be located at the back side of heavy section main body 232.
(electrode)
Electrode 3 has: pair of exciting 31,32; A pair of pad electrode 33,34; And a pair of extraction electrode 35,36.Exciting electrode 31 is formed at the surface of vibration area 219.On the other hand, exciting electrode 32 and exciting electrode 31 are relatively configured in the back side of vibration area 219.Exciting electrode 31,32 is respectively taking X-direction as length direction, the essentially rectangular that Z ' direction of principal axis is Width.In addition, the area of the exciting electrode 31 of the Area Ratio face side of the exciting electrode 32 of rear side is large, and in the time overlooking vibrating elements 1, exciting electrode 31 entirety are positioned at exciting electrode 32.In addition, exciting electrode 31,32 is configured to the center of X-direction in the time overlooking vibrating elements 1 and overlaps each other.
Pad electrode 33 is formed at the surperficial fixed part 29 of heavy section main body 232.On the other hand, pad electrode 34 and pad electrode 33 are relatively formed at the back side of heavy section main body 232.
Extend extraction electrode 35 from exciting electrode 31, exciting electrode 31 and pad electrode 33 are electrically connected via this extraction electrode 35.Extraction electrode 35 is across the face 241a being connected with the 2nd outer rim 213 of rake 241, the face 241b that is connected with the 3rd outer rim 215, and is drawn out to the surface of heavy section 22 via these faces 241a, 241b.Thus, can increase the width of extraction electrode 35, therefore can reduce the resistance of extraction electrode 35.
The size of pair of exciting 31,32 differs from one another, and in the time overlooking, larger exciting electrode 32 includes less exciting electrode 31.Therefore, there is overlapping region from the extended extraction electrode 35 of less exciting electrode 31 with larger exciting electrode 32, and, in the time that the area in this region is larger, this region plays a role as the vibration area beyond the vibration area of being clamped by pair of exciting 31,32, causes producing unnecessary spuious (Spurious) near resonance frequency.Therefore, by cutting to reduce the width of join domain at exciting electrode 31 and the join domain of extraction electrode 35, thereby dwindle the area of described overlapping region.Therefore, by dwindling the area of described overlapping region, be reduced in produce near resonance frequency unnecessary spuious.
In addition, extend extraction electrode 36 from exciting electrode 32, exciting electrode 31 and pad electrode 34 are electrically connected via this extraction electrode 36.Extraction electrode 36 is provided in while overlooking not overlapping across piezoelectric substrate 2 and extraction electrode 35.Thus, can suppress the electrostatic capacitance between extraction electrode 35,36.In addition, in the time overlooking vibrating elements 1, extraction electrode 35,36 is not exceedingly invaded in fixed part 29, and in fixed part 29, (particularly edge) exists the region T1 that does not form electrode 3.In the present embodiment, in the time overlooking, middle across pad electrode 33,34 domain of the existence T1 in front and base end side.The quartz base plate that forms piezoelectric substrate 2 has light transmission, therefore, by adopting said structure, can see the background (towards the situation of vibrating elements 1 one sides) across fixed part 29 from the rear side of vibrating elements 1.Therefore, as shown in Figure 4, in the time that bonding agent 91 is contacted with fixed part 29, can see bonding agent 91 across vibrating elements 1, can control accurately the location of bonding agent 91, with contact area, the shape of bonding agent 91 etc. of bonding agent 91.
Such electrode 3 can be made up of metal covering film, and this metal covering film is at such as Cr(chromium), Ni(nickel) etc. basalis on stacked Au(gold) or taking Au(gold) form as the alloy of principal component.
Above vibrating elements 1 is illustrated.As previously mentioned, vibrating elements 1 has the 2nd heavy section 24, and the 2nd heavy section 24 has outer edge 243, can keep thus the rigidity of the front of vibrating elements 1, and reduce the quality of front.Therefore, can reduce on fixed part 29, be fixed on by bonding agent as shown in Figure 4 under the state of object the deflection of the front (free end side) of vibrating elements 1 while applying the axial angular speed of Y ' to vibrating elements 1.Consequently, can the variation of the vibration characteristics causing due to the axial acceleration of Y ' be suppressed littlely, can reduce the sensitivity of vibrating elements 1 to the axial acceleration of Y '.Therefore, no matter whether apply the axial acceleration of Y ', the vibration characteristics that vibrating elements 1 can both be played stably.Particularly as in the present embodiment, by forming outer edge 243 across heavy section main body 242, rake 241 and vibration section 21, can further reduce the quality of the front (free end side) of vibrating elements 1, above-mentioned effect is more remarkable.
Here, as shown in Figure 2, be located at while overlooking vibrating elements 1, the 2nd heavy section 24 and exciting electrode 31 overlapping region in X-direction is middle section (the 1st heavy section region) T21, the region that is positioned at front compared with middle section T21 is front region (the 2nd heavy section region) T22, when the region that is positioned at base end side compared with middle section T21 is base end side region (the 3rd heavy section region) T23, outer edge 243 forms across front region T22, middle section T21.In other words, the end 243b of the base end side of outer edge 243 is positioned at middle section T21.Thus, can moderately retain the part of the front of the 2nd heavy section 24, can height realize evenly vibrating elements 1(vibration section 21) the guaranteeing and the reduction of the quality of front of rigidity.Therefore, can more effectively reduce the sensitivity of vibrating elements 1 to the axial acceleration of Y '.In addition, can more effectively suppress to occur unnecessary vibration mode.
As modified embodiment of the present embodiment, as shown in Figure 5, can be also that outer edge 243 is integrally formed in front region T22.In other words, the end 243b of the base end side of outer edge 243 also can be positioned at front region T22.Thus, with respect to present embodiment, although the quality of front reduces deleterious,, rigidity guarantees that effect is improved.In addition, as shown in Figure 6, also can be across front region T22, middle section T21 and base end side region T23 and forms in outer edge 243.In other words, the end 243b of the base end side of outer edge 243 also can be positioned at base end side region T23.Thus, with respect to present embodiment, although rigidity is guaranteed deleterious,, the quality of front reduces effect and is improved.In addition, end 243b also can be positioned on the border of middle section T21 and front region T22, can also be positioned on the border of middle section T21 and base end side region T23.
For example, can suitably select the mode shown in the mode shown in present embodiment, Fig. 5, Fig. 6 according to width, the thickness etc. of the size of vibration section 21 (vibration section 21 accounts for the ratio of piezoelectric substrate 2), shape, the 2nd heavy section 24.
In addition, as shown in Figure 7, be located at while overlooking vibrating elements 1, by with heavy section main body 242-the consistent straight line L1 of the ora terminalis 242a of Z ' axle side, the straight line L2 consistent with the ora terminalis 242b of+Z ' axle side, with exciting electrode 31-the end straight line L3 crossing and that extend on Z ' direction of principal axis of X-axis side, and with exciting electrode 31+area of the region T3 that the end of X-axis side straight line L4 crossing and that extend at Z ' direction of principal axis surrounds is S1, when the area that is positioned at the heavy section main body 242 of region T3 is S2, preferably meet the relation of 0.65≤S2/S1≤0.85, more preferably meet the relation of 0.74≤S2/S1≤0.79.Thus, can retain the 2nd heavy section 24 to the front appropriateness of vibrating elements 1, can height realize evenly vibrating elements 1(vibration section 21) the guaranteeing and the reduction of the quality of front of rigidity.
In addition, as shown in Figure 8, be located at while overlooking vibrating elements 1, by straight line L1, L2, with vibration section 21-end straight line (extended line of the 1st outer rim 211) L5 crossing and that extend on Z ' direction of principal axis of X-direction and with vibration section 21+end of X-direction intersects and the area of the region T4 that straight line (extended line of the 1st outer rim 212) L6 that extends on Z ' direction of principal axis surrounds is S3, when the area that is positioned at the heavy section main body 242 of region T4 is S4, preferably meet the relation of S4/S3≤0.75, more preferably meet the relation of S4/S3≤0.69.Thus, can effectively reduce the quality of the front of vibrating elements 1.
Above vibrating elements 1 is illustrated.In the vibrating elements 1 of present embodiment, by piezoelectric substrate 2+Y ' axle side form depressed part form vibration section 21, and, heavy section 22 is made up of the 2nd heavy section 24 of the 1st heavy section 23 with respect to vibration section 21 be positioned at+X-axis side and be positioned at+Z ' axle side, but vibrating elements 1 can be also the structure being turned.That is, also can be as shown in Figure 9, by piezoelectric substrate 2-Y ' axle side forms depressed part and forms vibration section 21, and heavy section 22 is made up of the 2nd heavy section 24 of the 1st heavy section 23 with respect to vibration section 21 be positioned at+X-axis side and be positioned at-Z ' axle side.By such structure, also can bring into play the effect identical with present embodiment (particularly can reduce the effect of the width of rake 231,241).
For the vibrating elements 1 of present embodiment, use 2 samples to acceleration sensitivity (1/g × 10
-9) measure.By its result shown in table 1 and Figure 10.In addition, the frequency of the vibration applying to vibrating elements in mensuration is made as " add the f(Hz that shakes) ".
[table 1]
From table 1 and Figure 10, vibrating elements 1(the present invention) compared with the vibrating elements of type in the past, acceleration sensitivity significantly reduces.
< the 2nd execution mode >
Then, the 2nd execution mode of vibrating elements of the present invention is described.
Figure 11 is the vertical view of the vibrating elements of the 2nd execution mode of the present invention.
Below, by with the difference of aforesaid the 1st execution mode centered by the vibrating elements of the 2nd execution mode is described, to identical item, the description thereof will be omitted.
The vibrating elements of the 2nd execution mode of the present invention is except the structure difference of outer edge, identical with aforesaid the 1st execution mode.In addition, give identical label to the structure identical with aforesaid the 1st execution mode.
As shown in figure 11, in the vibrating elements 1A of present embodiment, outer edge 243 is across heavy section main body 242 and rake 241 and form.In other words, the end 243a of the front of outer edge 243 is positioned at rake 241.Thus, with respect to aforesaid the 1st execution mode, although reducing effect, the quality of front declines,, rigidity guarantees that effect is improved.
In addition, area S1, S2 preferably meet the relation of 0.65≤S2/S1≤0.85, more preferably meet the relation of 0.79≤S2/S1≤0.85.Thus, can retain the 2nd heavy section 24 to the front appropriateness of vibrating elements 1A, can high realize evenly the guaranteeing and the reduction of the quality of front of rigidity of vibrating elements 1A.
In addition, area S3, S4 preferably meet the relation of S4/S3≤0.75, more preferably meet the relation of S4/S3≤0.72.Thus, can effectively reduce the quality of the front of vibrating elements 1A.
By the 2nd such execution mode, also can bring into play the effect identical with aforesaid the 1st execution mode.In addition, in the present embodiment, as shown in Figure 5 and Figure 6, the end 243b of the base end side of outer edge 243 also can be positioned at front region T22, can also be positioned at base end side region T23.
< the 3rd execution mode >
Then, the 3rd execution mode of vibrating elements of the present invention is described.
Figure 12 is the vertical view of the vibrating elements of the 3rd execution mode of the present invention.
Below, by with the difference of aforesaid the 1st execution mode centered by the vibrating elements of the 3rd execution mode is described, to identical item, the description thereof will be omitted.
The vibrating elements of the 3rd execution mode of the present invention is except the structure difference of outer edge, identical with aforesaid the 1st execution mode.In addition, give identical label to the structure identical with aforesaid the 1st execution mode.
As shown in figure 12, in the vibrating elements 1B of present embodiment, outer edge 243 is integrally formed in heavy section main body 242.In other words, the end 243a of the front of outer edge 243 is positioned at heavy section main body 242.Thus, with respect to aforesaid the 1st execution mode and the 2nd execution mode, although reducing effect, the quality of front declines,, rigidity guarantees that effect is improved.
In addition, area S1, S2 preferably meet the relation of 0.65≤S2/S1≤0.85, more preferably meet the relation of 0.68≤S2/S1≤0.69.Thus, can retain the 2nd heavy section 24 to the front appropriateness of vibrating elements 1B, can high realize evenly the guaranteeing and the reduction of the quality of front of rigidity of vibrating elements 1B.
In addition, area S3, S4 preferably meet the relation of S4/S3≤0.75, more preferably meet the relation of S4/S3≤0.66.Thus, can effectively reduce the quality of the front of vibrating elements 1B.
By the 3rd such execution mode, also can bring into play the effect identical with aforesaid the 1st execution mode.In addition, in the present embodiment, as shown in Figure 5 and Figure 6, the end 243b of the base end side of outer edge 243 also can be positioned at front region T22, can also be positioned at base end side region T23.
< the 4th execution mode >
Then, the 4th execution mode of vibrating elements of the present invention is described.
Figure 13 is the vertical view of the vibrating elements of the 4th execution mode of the present invention.
Below, by with the difference of aforesaid the 1st execution mode centered by the vibrating elements of the 4th execution mode is described, to identical item, the description thereof will be omitted.
The vibrating elements of the 4th execution mode of the present invention is except the structure difference of outer edge, identical with aforesaid the 1st execution mode.In addition, give identical label to the structure identical with aforesaid the 1st execution mode.
As shown in figure 13, in the vibrating elements 1C of present embodiment, outer edge 243 is with outstanding laterally bending.Thus, can relax near stress two ends 243a, the 243b of outer edge 243 and concentrate.In addition, outer edge 243 can not be also its Zone Full bending, and only its part is bending.
By the 4th such execution mode, also can bring into play the effect identical with aforesaid the 1st execution mode.
< the 5th execution mode >
Then, the 5th execution mode of vibrating elements of the present invention is described.
Figure 14 is the vertical view of the vibrating elements of the 5th execution mode of the present invention, and Figure 15 is the vertical view that the variation of the vibrating elements shown in Figure 14 is shown.
Below, by with the difference of aforesaid the 1st execution mode centered by the vibrating elements of the 5th execution mode is described, to identical item, the description thereof will be omitted.
The vibrating elements of the 5th execution mode of the present invention is except the structure difference of heavy section, identical with aforesaid the 1st execution mode.In addition, give identical label to the structure identical with aforesaid the 1st execution mode.
As shown in figure 14, in the vibrating elements 1D of present embodiment, so that upper of Z ' direction of principal axis, the mode across vibration section 21 is formed with a pair of the 2nd heavy section 24.The structure of each the 2nd heavy section 24 is identical with aforesaid the 1st execution mode, and therefore the description thereof will be omitted.Like this, by a pair of the 2nd heavy section is set, can further improve the rigidity of vibrating elements 1D, can make vibration section 21 more be difficult to deflection.In addition, in the present embodiment, owing to being provided with a pair of the 2nd heavy section 24, therefore for example compared with aforesaid the 1st execution mode, can dwindle the width (Z ' axial length) of each the 2nd heavy section 24.
By the 5th such execution mode, also can bring into play the effect identical with aforesaid the 1st execution mode.
In addition, as shown in figure 15, can be also that the outer edge 243 that each the 2nd heavy section 24 has is with outstanding laterally mode bending.Thus, can relax near stress two ends 243a, the 243b of each outer edge 243 and concentrate.
< the 6th execution mode >
Then, the 6th execution mode of vibrating elements of the present invention is described.
Figure 16 is the stereogram of the vibrating elements of the 6th execution mode of the present invention.
Below, by with the difference of aforesaid the 1st execution mode centered by the vibrating elements of the 6th execution mode is described, to identical item, the description thereof will be omitted.
The vibrating elements of the 6th execution mode of the present invention is except the structure difference of vibration section, identical with aforesaid the 1st execution mode.In addition, give identical label to the structure identical with aforesaid the 1st execution mode.
As shown in figure 16, in the vibrating elements 1E of present embodiment, form vibration section 21 by form depressed part on two interareas of piezoelectric substrate 2.In other words, the surface of heavy section 22 interarea of direction of principal axis side (Y ') be configured to compared with the surface of vibration section 21 interarea of direction of principal axis side (+the Y ') to+Y ' direction of principal axis is side-prominent, the back side of heavy section 22 interarea of direction of principal axis side (Y ') be configured to compared with the back side of vibration section 21 interarea of direction of principal axis side (Y ') to-Y ' direction of principal axis is side-prominent.Like this, form vibration section 21 by form depressed part on two interareas of piezoelectric substrate 2, for example, compared with aforesaid the 1st execution mode, can make the etch depth of depressed part shoal.Therefore, etching can be carried out accurately, the outer shape of piezoelectric substrate 2 can be obtained more accurately.
By the 6th such execution mode, also can bring into play the effect identical with aforesaid the 1st execution mode.
In addition, by the 1st execution mode～6th execution mode, using profile is that tetragonal vibration section 21 describes the present invention, but, the profile of obvious vibration section of the present invention 21 is not limited to quadrangle, also can be ellipticity or circle shape, the outer rim of vibration section 21 be not limited to straight line, also can comprise curve.
2. oscillator
Then, the oscillator (oscillator of the present invention) of applying aforesaid vibrating elements 1 is described.
Figure 17 is the cutaway view that the preferred implementation of oscillator of the present invention is shown.
Oscillator 10 shown in Figure 17 has the encapsulation 4 of aforesaid vibrating elements 1 and storage vibrating elements 1.
(encapsulation)
Encapsulation 4 has: the box-like base 41 with recess 411 of upper surface open; And tabular lid 42, the opening of its shutoff recess 411, engages with base 41.And, in the accommodation space S by being formed by lid 42 shutoff recesses 411, be accommodated with vibrating elements 1.Accommodation space S can be decompression (vacuum) state, also can enclose the inert gases such as nitrogen, helium, argon gas.
There is no particular limitation for the constituent material of base 41, can use the various potteries of aluminium oxide etc.In addition, there is no particular limitation for the constituent material of lid 42, as long as the approximate parts of the constituent material of coefficient of linear expansion and base 41.For example, be aforementioned pottery at the constituent material of base 41, the constituent material of lid 42 preferably adopts the alloys such as kovar alloy.In addition, base 41 engages with lid 42 that there is no particular limitation, for example, can engage by bonding agent, also can the joint such as weld by seam.
Be formed with connecting electrode 451,461 in the bottom surface of the recess 411 of base 41.In addition, be formed with outside mounting terminal 452,462 at the lower surface of base 41.Connecting electrode 451 is electrically connected with outside mounting terminal 452 via the not shown through electrode that is formed at base 41, and connecting electrode 461 is electrically connected with outside mounting terminal 462 via the not shown through electrode that is formed at base 41.
The structure of connecting electrode 451,461, outside mounting terminal 452,462 is as long as have respectively conductivity, there is no particular limitation, for example, can be by Cr(chromium), W(tungsten) etc. the upper stacked Ni(nickel of metal layer (basalis)), Au(gold), Ag(silver), Cu(copper) etc. each coverlay and the metal covering film that forms forms.
Be accommodated in vibrating elements 1 in accommodation space S by surface towards base 41 sides, be fixed on base 41 by conductive adhesive 51 at fixed part 29.Conductive adhesive 51 is configured to contact with pad electrode 33 with connecting electrode 451.Thus, connecting electrode 451 and pad electrode 33 are electrically connected by conductive adhesive 51.By using conductive adhesive 51 to support vibrating elements 1 at a place (a bit), for example, can be suppressed at the stress that vibrating elements 1 produces by base 41 and the difference of the coefficient of thermal expansion of piezoelectric substrate 2.
As long as conductive adhesive 51 has conductivity and cementability, there is no particular limitation, for example, can use conductive filling is dispersed in the bonding agent of silicone, epoxies, acrylic compounds, polyimide, bismaleimide amine etc. and the bonding agent obtaining.
The pad electrode 34 of vibrating elements 1 is electrically connected with connecting electrode 461 via bonding wire 52.As previously mentioned, pad electrode 34 is configured to relative with pad electrode 33, therefore, be fixed under the state on base 41 at vibrating elements 1, pad electrode 34 be positioned at conductive adhesive 51 directly over.Therefore, can be suppressed at wire-bonded time, pad electrode 34 is leaked to vibration (ultrasonic vibration), can connect bonding wire 52 to pad electrode 34 more reliably.
3. oscillator
Then, the oscillator (oscillator of the present invention) of applying oscillator of the present invention is described.
Figure 18 is the cutaway view that the preferred implementation of oscillator of the present invention is shown.
Oscillator 100 shown in Figure 18 has oscillator 10, for driving the IC chip 110 of vibrating elements 1.Below, by with the difference of aforesaid oscillator centered by oscillator 100 is described, to same item, the description thereof will be omitted.
As shown in figure 18, in oscillator 100, on the recess 411 of base 41, be fixed with IC chip 110.IC chip 110 is electrically connected with multiple internal terminals 120 of the bottom surface that is formed at recess 411.In multiple internal terminals 120, some is connected with connecting electrode 451,461, and some is connected with outside mounting terminal 452,462.IC chip 110 has the oscillating circuit of the driving for controlling vibrating elements 1.In the time driving vibrating elements 1 by IC chip 110, can take out the signal of the frequency of regulation.
4. electronic equipment
Then, the electronic equipment (electronic equipment of the present invention) of applying oscillator of the present invention is described.
Figure 19 is the stereogram that the structure of movable type (or notebook type) personal computer of application electronic equipment of the present invention is shown.In the figure, personal computer 1100 is made up of with the display unit 1106 with display part 2000 main part 1104 with keyboard 1102, and display unit 1106 is supported on main part 1104 by hinge arrangement portion in rotating mode.Such personal computer 1100 is built-in with the oscillator 10(vibrating elements 1 playing a role as filter, resonator, reference clock etc.).
Figure 20 is the stereogram that the structure of the mobile phone (comprising PHS) of application electronic equipment of the present invention is shown.In the figure, mobile phone 1200 has multiple action buttons 1202, receiving mouth 1204 and mouth piece 1206, between action button 1202 and receiving mouth 1204, disposes display part 2000.Such mobile phone 1200 is built-in with the oscillator 10(vibrating elements 1 playing a role as filter, resonator etc.).
Figure 21 is the stereogram that the structure of the digital still camera of application electronic equipment of the present invention is shown.In addition, in the figure, also illustrate simply and being connected of external equipment.At this, common camera is by the light image exposure silver salt photographic film of subject, on the other hand, 1300 of digital still cameras are by CCD(Charge CoupledDevice: charge coupled device) etc. imaging apparatus the light image of subject is carried out to opto-electronic conversion, generate image pickup signal (picture signal).
The back side at the housing (fuselage) 1302 of digital still camera 1300 is provided with display part, shows according to the image pickup signal of CCD, and display part plays a role as the view finder that subject is shown as to electronic image.In addition, be provided with in the face side (rear side in figure) of housing 1302 light receiving unit 1304 that comprises optical lens (image pickup optical system) and CCD etc.
In the time that cameraman confirms be shown in the shot object image of display part and press shutter release button 1306, the image pickup signal transmission of CCD is now stored in memory 1308.In addition,, in this digital still camera 1300, be provided with the input and output terminal 1314 that video signal output terminal 1312 and data communication are used in the side of housing 1302.And, as shown in the figure, as required televimonitor 1430 being connected with video signal output terminal 1312, the input and output terminal 1314 that personal computer 1440 is used with data communication is connected.In addition, by the operation of regulation, the image pickup signal being stored in memory 1308 is outputed to televimonitor 1430 or personal computer 1440.Such digital still camera 1300 is built-in with the oscillator 10(vibrating elements 1 playing a role as filter, resonator etc.).
In addition, there is the electronic equipment of vibrating elements of the present invention except the personal computer of Figure 19 (mobile personal computer), the mobile phone of Figure 20, beyond the digital still camera of Figure 21, can also be applied to for example ink jet type blowoff (for example ink-jet printer), laptop personal computer, television set, video camera, video tape recorder, automobile navigation apparatus, beep-pager, electronic notebook (comprise band communication function), electronic dictionary, calculator, electronic game machine, word processor, work station, video telephone, strick precaution televimonitor, electron telescope, POS terminal, Medical Devices (for example electrothermometer, sphygmomanometer, blood-glucose meter, electrocardiogram measuring device, diagnostic ultrasound equipment, fujinon electronic video endoscope), fish finder, various sensing equipments, metrical instrument class (for example vehicle, aircraft, the metrical instrument class of boats and ships), flight simulator etc.
5. moving body
Then, the moving body (moving body of the present invention) of applying oscillator of the present invention is described.
Figure 22 is the stereogram roughly illustrating as the automobile of an example of moving body of the present invention.Automobile 1500 is equipped with oscillator 10(vibrating elements 1).Oscillator 10 can be widely used in keyless access system (Keyless Entry), anti-theft control system (Immobilizer), auto-navigation system, air conditioning for automobiles, slip control system (ABS), air bag, system for monitoring pressure in tyre (TPMS:Tire Pressure Monitoring System), engine control, the battery monitor of hybrid vehicle or electric automobile, the electronic control unit (ECU:electronic control unit) of car body attitude control system etc.
According to illustrated execution mode, vibrating elements of the present invention, oscillator, oscillator, electronic equipment and moving body are illustrated above, but the invention is not restricted to this, the structure of each portion can be replaced as the arbitrary structures with identical function.In addition, the present invention also can add other works arbitrarily.In addition, also can appropriately combined aforesaid each execution mode.
In addition, in aforesaid execution mode, use quartz base plate as piezoelectric substrate, still, also can replace and use the various piezoelectric substrates of such as lithium niobate, lithium tantalate etc.
Here, generally speaking, the frequency of oscillation of vibrating elements is higher, and the size of exciting electrode 31 is less.In addition,, along with the size decreases of exciting electrode 31, the size of vibration section 21 also diminishes.
For example, in the situation that frequency of oscillation is 100MHz～150MHz left and right, be applicable to guaranteeing the structure of very large aforementioned the 1st execution mode in vibration section 21.Thus, can form significantly exciting electrode 31.In addition, as shown in figure 23, in aforementioned the 1st execution mode, by changing the size of exciting electrode 31, can between 100MHz～150MHz, suitably set frequency of oscillation.In Figure 23, being 100MHz by the frequency shown in solid line, is 150MHz by the frequency shown in chain-dotted line.
In addition, for example, in the situation that frequency of oscillation is 150MHz～245MHz left and right, be applicable to guaranteeing the structure of larger aforementioned the 2nd execution mode in vibration section 21.Thus, can form significantly exciting electrode 31.In addition, as shown in figure 24, in aforementioned the 2nd execution mode, by changing the size of exciting electrode 31, can between 150MHz～245MHz, suitably set frequency of oscillation.In Figure 24, being 153MHz by the frequency shown in solid line, is 254MHz by the frequency shown in chain-dotted line.
In addition, for example, in the situation that frequency of oscillation is 245MHz～500MHz left and right, because exciting electrode 31 is less, therefore, be applicable to the structure of less aforementioned the 3rd execution mode in vibration section 21.In addition, as shown in figure 25, in aforementioned the 3rd execution mode, by changing the size of exciting electrode 31, can between 245MHz～500MHz, suitably set frequency of oscillation.In Figure 25, being 245MHz by the frequency shown in solid line, is 500MHz by the frequency shown in chain-dotted line.
Claims (18)
1. a vibrating elements, is characterized in that, this vibrating elements comprises:
Substrate, it comprises the 1st region and the 2nd region, wherein, and the vibration area that the 1st district inclusion vibrates in the mode of thickness shear vibration, the 2nd region and described the 1st region become one, and the 1st region is thick described in Thickness Ratio; And
Exciting electrode, it is located at respectively the 1st interarea in positive inverse relation and the 2nd interarea each other of described vibration area,
Described the 2nd district inclusion:
The 1st heavy section, it disposes the fixed part that is installed on object; And
The 2nd heavy section, it is connected with described the 1st heavy section,
Described the 2nd heavy section comprises outer edge with the end of the contrary side of described fixed part side in the time overlooking, and this outer edge and the direction of vibration of described thickness shear vibration and the direction perpendicular to the direction of vibration of described thickness shear vibration are intersected.
2. vibrating elements according to claim 1, wherein,
Described the 1st district inclusion:
A pair of the 1st outer rim of intersecting with the direction of vibration of described thickness shear vibration; And
A pair of the 2nd outer rim of the direction of vibration vibrating along described thickness shear,
A side in described a pair of the 1st outer rim arranges described the 1st heavy section,
At least one party in described a pair of the 2nd outer rim arranges described the 2nd heavy section.
3. vibrating elements according to claim 2, wherein,
Described the 2nd heavy section comprises:
Rake, it is connected setting with described the 2nd outer rim, and thickness is along with increasing gradually away from described the 2nd outer rim; And
The heavy section main body of constant thickness, it is rake and the ora terminalis contrary side of described the 2nd outer edge side described in being connected in while overlooking,
Described outer edge whole installation is in described heavy section main body.
4. vibrating elements according to claim 2, wherein,
Described the 2nd heavy section comprises:
Rake, it is connected setting with described the 2nd outer rim, and thickness is along with increasing gradually away from described the 2nd outer rim; And
The heavy section main body of constant thickness, it is rake and the ora terminalis contrary side of described the 2nd outer edge side described in being connected in while overlooking,
Across described heavy section main body and described rake, described outer edge is set.
5. vibrating elements according to claim 2, wherein,
Described the 2nd heavy section comprises:
Rake, it is connected setting with described the 2nd outer rim, and thickness is along with increasing gradually away from described the 2nd outer rim; And
The heavy section main body of constant thickness, it is rake and the ora terminalis contrary side of described the 2nd outer edge side described in being connected in while overlooking,
Across outer edge described in described heavy section main body, described rake and described the 1st region division.
6. according to the vibrating elements described in any one in claim 1～5, wherein,
When being the 1st thick wall area with described exciting electrode region arranged side by side on the direction of vibration of described thickness shear vibration that is located at described the 2nd heavy section, when the region of comparing the contrary side of described fixed part with described the 1st thick wall area while overlooking is the 2nd thick wall area,
Across described the 1st thick wall area and described the 2nd thick wall area, described outer edge is set.
7. according to the vibrating elements described in any one in claim 1～5, wherein,
When being the 1st thick wall area with described exciting electrode region arranged side by side on the direction of vibration of described thickness shear vibration that is located at described the 2nd heavy section, the region of comparing the contrary side of described fixed part with described the 1st thick wall area is the 2nd thick wall area, when the region of described fixed part side is the 3rd thick wall area compared with described the 1st thick wall area
Across described the 2nd thick wall area, described the 1st thick wall area and described the 3rd thick wall area, described outer edge is set.
8. according to the vibrating elements described in any one in claim 3～5, wherein,
When establish while overlooking by the ora terminalis of described the 2nd outer edge side of the described heavy section main body of described the 2nd heavy section, described heavy section main body and the ora terminalis contrary side of described the 2nd outer rim, with described exciting electrode one end on described direction of vibration crossing and with the orthogonal straight line of described direction of vibration and intersect with the other end of described exciting electrode on described direction of vibration and with the area in the region of the orthogonal straight line encirclement of described direction of vibration be S1, when the area that is positioned at described the 2nd heavy section in described region is S2
Meet the relation of 0.65≤S2/S1≤0.85.
9. according to the vibrating elements described in any one in claim 3～5, wherein,
When establish while overlooking by the ora terminalis of described the 2nd outer edge side of the described heavy section main body of described the 2nd heavy section, described heavy section main body and the ora terminalis contrary side of described the 2nd outer rim, with described the 1st one end on described direction of vibration, region crossing and with the orthogonal straight line of described direction of vibration and intersect with described the 1st other end of region on described direction of vibration and with the area in the region of the orthogonal straight line encirclement of described direction of vibration be S3, when the area that is positioned at described the 2nd heavy section in described region is S4
Meet the relation of S4/S3≤0.75.
10. according to the vibrating elements described in any one in claim 1～5, wherein,
In the time overlooking, below 1/2 of the area that the area in described the 1st region is described substrate.
11. according to the vibrating elements described in any one in claim 1～5, wherein,
Described the 1st outer rim being connected with described the 1st heavy section and described the 2nd outer rim being connected with described the 2nd heavy section connect by the 3rd outer rim, and wherein, the 3rd outer rim is intersected with described direction of vibration with perpendicular to the direction of described direction of vibration.
12. vibrating elements according to claim 11, wherein,
Described vibrating elements has extraction electrode, and this extraction electrode extends from described exciting electrode, via the sidewall being connected with described the 2nd outer rim in described the 2nd region and the sidewall being connected with described the 3rd outer rim, is drawn out to the interarea in described the 2nd region.
13. according to the vibrating elements described in any one in claim 1～5, wherein,
Can be from the interarea side of the contrary side of the interarea with disposing described fixed part of described substrate, in the time overlooking described in region between fixed part and described exciting electrode, see the background of described fixed part side.
14. according to the vibrating elements described in any one in claim 1～5, wherein,
Described substrate is following quartz plate: quartzy crystallographic axis as the X-axis of electric axle, as the Y-axis of mechanical axis and the Z axis as optic axis in, using described X-axis as rotating shaft, by make described Z axis using Y-axis described in+Z side direction-axle after the mode of Y-direction rotation tilts is as Z ' axle, by make described Y-axis using Z axis described in+Y side direction+axle after the mode of Z direction rotation tilts is as Y ' axle, to comprise the face of described X-axis and described Z ' axle as interarea, will be along the direction of described Y ' axle as thickness.
15. 1 kinds of oscillators, is characterized in that, this oscillator comprises:
Vibrating elements described in any one in claim 1～5; And
Receive the encapsulation of described vibrating elements.
16. 1 kinds of oscillators, is characterized in that, this oscillator has:
Vibrating elements described in any one in claim 1～5; And
Circuit.
17. 1 kinds of electronic equipments, is characterized in that, this electronic equipment has the vibrating elements described in any one in claim 1～5.
18. 1 kinds of moving bodys, is characterized in that, this moving body has the vibrating elements described in any one in claim 1～5.
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| JP2013-007912 | 2013-01-18 | ||
| JP2013007912A JP6051885B2 (en) | 2013-01-18 | 2013-01-18 | Vibration element, vibrator, oscillator, electronic device, and moving object |
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| CN103944531B (en) | 2018-03-16 |
| US20140203689A1 (en) | 2014-07-24 |
| JP6051885B2 (en) | 2016-12-27 |
| US9525400B2 (en) | 2016-12-20 |
| JP2014138413A (en) | 2014-07-28 |
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