The manufacture method that a kind of monocrystalline cob encapsulates the poroid aluminium base of bowl
Technical field
The present invention relates to the manufacture method that a kind of monocrystalline cob encapsulates the poroid aluminium base of bowl.
Background technology
Cob (encapsulation of chip on board chip on board) is one of bare chip mounting technology, leads in field of semiconductor package
It is often that semiconductor chip handing-over is mounted on circuit base plate, the electrical connection of chip and substrate is realized with wire bonding method,
And covered with resin to guarantee reliability, but the encapsulation to LED light source chip has its particularity, is mainly setting up chip
Between, on the basis of the physical connection between chip substrate in addition it is also necessary to keep led chip reflecting rate, existing encapsulation technology, absolutely
Edge layer is using the pressing of epoxy resin prepreg, and epoxy resin layer is usually faint yellow, reflective bad, and its tg only has
140 DEG C, LED light source in use, the temperature of central point at 100 degree about, life-time service, insulating barrier can be easily yellow
Become, color burn, the light efficiency of light source will be had a strong impact on.And the processing of the poroid crystal bonding area of existing aluminium base surface bowl, it is direct
Aluminium base is fixed on workbench and is holed, so operation not only wastes the substantial amounts of time in fixing aluminium base, and
And press is aluminium base surrounding, in the middle of plate or other do not have pressurized place, however it remains fit not with work top
Closely phenomenon, the product therefore processing often occurs the portion's out-of-flatness of bowl bottom hole, has processing knife mark, in 200*300
Area in, the depth error of processing is more than the phenomenons such as +/- 0.05mm, thus it cannot be guaranteed that led chip light-emitting angle consistent
Property.
Content of the invention
The purpose of the present invention is the defect overcoming prior art to exist, and provides a kind of monocrystalline cob encapsulation poroid aluminium base of bowl
The manufacture method of plate.
The technical scheme realizing the object of the invention is: the manufacture method that a kind of monocrystalline cob encapsulates the poroid aluminium base of bowl, bag
Include following steps:
(1) aluminum-based copper-clad plate prepares;
(2) aluminium base line pattern and welding resistance make;
(3) routing bond pad surface is processed;
(4) bore datum hole;
(5) bore bowl hole;
(6) ultrasound wave cleaning and laminating protecting film;
(7) numerical control drilling-milling profile;
(8) check shipment.
As optimization, described each step is as follows respectively:
(1) aluminum-based copper-clad plate prepares:
(a) sawing sheet: with electronic shearing machine, whole aluminium is cut into and produce the dimensions needing, from southwestern Aluminum
5052h34 aluminium;
(b) brush board: use one side brush plate machine, the oxide layer of aluminium material surface is thrown and brushes off, brush roll mesh number is 320 mesh;
(c) surface degreasing: the aqueous solution soaking aluminium of the naoh with 10%~30% 10~20 minutes, temperature 20~30
DEG C, remove oxidation, the debris of oils and fatss of aluminium material surface;
(d) anodic oxidation: the aluminium after oil removing is placed on 20%~30% h2so4In aqueous solution, carry out 20~40 minutes
Anodic oxidation, 20~25 DEG C of temperature, electric current density 2~5a/dm2;
(e) cleaning, drying: with the aluminium after clean water anodic oxidation, then it is placed on and dries on dehydrator, drying temperature 80
~100 DEG C;
F () applies coupling agent: be coated in the one side of aluminium with epoxy radicals coupling agent kh-560;
G () dries: the aluminium having coated coupling agent is placed in baking oven and toasts 10 minutes, temperature is 170 DEG C;
H () lamination presses: lamination order is Copper Foil, insulating barrier, aluminium, and pressing condition is pressure 6~12kg/cm2, temperature
180~190 DEG C, the time is 120 minutes;
(i) cutting edge: according to product size, with electronic shearing machine, the pressing plate material marginal portion after pressing is removed;
J () pastes aluminum surface protective film: on the aluminium at the aluminum-based copper-clad plate back side having pressed, with laminator patch last layer protection
Film, the damage of aluminium during prevention following process;
(2) aluminium base line pattern and welding resistance make:
(a) secondary sawing sheet: with electronic shearing machine, whole aluminum-based copper-clad plate is cut into and produce the dimensions needing;
(b) secondary brush board: use one side brush plate machine, the oxide layer on copper-clad plate surface is thrown and brushes off, brush roll mesh number is 500 mesh;
C () prints wet film: with the method for silk screen printing, uniformly one layer of coating on the copper-clad plate surface Copper Foil after secondary brush board
Photosensitive wet film;
(d) preliminary drying: the copper-clad plate of printed wet film is placed and toasts in an oven, 70~80 DEG C of baking temperature, the time
For 20~30 minutes;
(e) single exposure: the circuit egative film that light in advance is painted covers in pre-baked copper-clad plate, is exposed with 8kw ultraviolet
Ray machine exposes so that the line pattern on egative film is transferred in copper-clad plate, and energy setting value is 350 MJs;
F () is once developed: the copper-clad plate after single exposure is developed through developing machine, developer solution 1%-3% Carbon Dioxide
Sodium, temperature is 28~32 DEG C, and the time is 1~2 minute, and spray pressure is 1~5kg/cm2;
G () is checked: the integrity of detection line pattern;
H () etches: eroded, with acid copper chloride etching liquid, the layers of copper not covered by wet film, retain the circuit needing
Copper Foil, the condition of etching solution: copper content is 140~180g/l, acid is measured as 2~3n, and oxidation-reduction potential is 450~550mv, temperature
Spend for 49~54 DEG C;
(i) striping: the circuit surface wet film after etching is removed clean by the sodium hydroxide solution with 3%~5%;
(j) three brush boards: use one side brush plate machine, the oxide layer on circuit base plate surface is thrown and brushes off, brush roll mesh number is 500
Mesh;
K () prints welding resistance white oil: with the method for silk screen printing, uniformly one layer of the coating of the circuit base plate surface after three brush boards
Circuit base plate surface after secondary brush board uniformly coats the photosensitive solder resist white oil of one layer of model Solar p sr2000ce800w;
(l) secondary preliminary drying: by printed welding resistance white oil circuit base plate place toast in an oven, baking temperature 70~80
DEG C, the time is 20~30 minutes;
(m) re-expose: the welding resistance egative film that light in advance is painted, cover on secondary pre-baked circuit base plate, use 8kw
Ultraviolet exposure machine exposes so that the welding resistance figure on egative film is transferred in copper-clad plate, and energy setting value is 950 MJs;
(n) redevelopment: the circuit base plate after re-expose is developed through developing machine, the anhydrous carbon of developer solution 1%~3%
Sour sodium, temperature is 28~32 DEG C, and the time is 1~2 minute, and spray pressure is 1~5kg/cm2;
(o) solidify afterwards: the circuit base plate after redevelopment is positioned over baking in baking oven, welding resistance white oil is thoroughly solidified,
150 DEG C of baking temperature, the time is 60 minutes;
(3) routing bond pad surface is processed: employs Atotech universal asf ii chemistry NiPdAu system, is beating gold
The coating surface one lamination gold plate of wire bonding disk;
(4) bore datum hole: first identify the figure of circuit location hole using full-automatic image puncher, then bore location hole,
Aperture is 2.0mm;
(5) bore bowl hole: after shop bolt plus vacuum cup co-located, with high-speed precise machine tool szx5540- and
Rough diamond single-blade milling cutter bores milling bowl shape hole, and the cutting edge of rough diamond single-blade milling cutter is horizontal by 2 ° of angles;
(6) ultrasound wave cleaning and laminating protecting film: use cleanout fluid rs-1609, cleaning in ultrasonic washing unit is drilled bowl
The substrate of cup aperture, after cleaning 30~60 seconds, takes out and washes through three-level clear water, then be more than or equal to 6kg/cm with pressure2One-level high pressure
Washing, then crosses cold wind, after 80~90 DEG C of hot-air seasoning, then in circuit surface viscosity protecting film in hot-pressing roller patch;
(7) numerical control drilling-milling profile;
(8) check shipment.
As optimization, the coupling agent that the step (f) in described step (1) applies coupling agent employing is 2%~4% epoxy radicals
The ethanol solution of coupling agent kh-560, kh-560 epoxy radicals coupling agent is coated on aluminium base surface, as aluminium base surface
Modifying agent, enhance the adhesion between aluminium base and insulating barrier.
As optimization, in step (h) the lamination pressing in described step (1), Copper Foil is the electrolytic copper foil of 35 μ m thick, absolutely
Edge layer selects bt (bismaleimide triazine, bismaleimide-triazine resin) resin prepreg, bt color of resin
It is positive white, lights after chip package, and do not interfere with the colour temperature of light source, the tg of bt resin is high, for a long time at a temperature of 100 degree
Use, variable color of will not turning to be yellow.
As optimization, the etching solution that the step (h) in described step (2) etches is copper content is 160g/l, and acid is measured and is
2.5n, oxidation-reduction potential is 475mv, and temperature is 51.6 DEG C.
The Chemical nickel and palladium plating process adopting when processing as optimization, described step (3) routing bond pad surface, thickness of coating
Ni for ni be 5~8 μm, pd be 2~8 μ ", au be 2~6 μ ".
As optimization, when described step (5) bores bowl hole, first with shop bolt, aluminium base is positioned on vacuum suction table,
With adhesive tape, the suction hole not covered by aluminium base in aluminium base surrounding and vacuum suction table is pasted again and cover, open vacuum pump, treat
When aluminium base fully fits fixing with work top, then carry out boring bowl hole.
The present invention has positive effect: bt resin is just white and tg is high, and vitrification point can reach 230 DEG C, for a long time
Use at a temperature of 100 DEG C, will not turn to be yellow variable color and affect colour temperature and the light efficiency of light source.Boring bowl hole Mohs' hardness is 10
Rough diamond single-blade milling cutter and high-speed precise machine tool szx5540- carrys out chip processing it is ensured that aluminium base machined surface smooth
No knife mark, and cutting edge is horizontal by 2 ° of angles, chip process gets final product chip removal, it is to avoid crystal bonding area occurs irregular existing
As, processed product shop bolt and vacuum cup co-located, fixation of fitting with work top tightr, bore milling bowl
The concordance of Kong Shiqi depth has obtained good control, and its depth error can control between +/- 0.015mm, the present invention
Method rational technology, practical, there is very strong market application foreground.
Specific embodiment
Realize the manufacture method that a kind of present invention monocrystalline cob encapsulates the poroid aluminium base of bowl, cob (chip on board plate
Upper chip package) it is one of bare chip mounting technology, manufacture method is as follows:
(1) aluminum-based copper-clad plate prepares:
(a) sawing sheet: with electronic shearing machine, whole aluminium is cut into and produce the dimensions needing, from southwestern Aluminum
5052h34 aluminium;
(b) brush board: use one side brush plate machine, the oxide layer of aluminium material surface is thrown and brushes off, brush roll mesh number is 320 mesh;
(c) surface degreasing: the aqueous solution soaking aluminium of the naoh with 10%~30% 10~20 minutes, temperature 20~30
DEG C, remove oxidation, the debris of oils and fatss of aluminium material surface;
(d) anodic oxidation: the aluminium after oil removing is placed on 20%~30% h2so4In aqueous solution, carry out 20~40 minutes
Anodic oxidation, 20~25 DEG C of temperature, electric current density 2~5a/dm2;
(e) cleaning, drying: with the aluminium after clean water anodic oxidation, then it is placed on and dries on dehydrator, drying temperature 80
~100 DEG C;
F () applies coupling agent: be coated in the one side of aluminium with epoxy radicals coupling agent kh-560, coupling agent is 2%~4% ring
The ethanol solution of epoxide coupling agent kh-560, kh-560 epoxy radicals coupling agent is coated on aluminium base surface, as aluminium base
The modifying agent on surface, enhances the adhesion between aluminium base and insulating barrier.;
G () dries: the aluminium having coated coupling agent is placed in baking oven and toasts 10 minutes, temperature is 170 DEG C;
H () lamination presses: lamination order is Copper Foil, insulating barrier, aluminium, and pressing condition is pressure 6~12kg/cm2, temperature
180~190 DEG C, the time is 120 minutes, and wherein Copper Foil is the electrolytic copper foil of 35 μ m thick, and insulating barrier selects bt
(bismaleimide triazine, bismaleimide-triazine resin) resin prepreg, bt color of resin is positive white,
Light after chip package, and do not interfere with the colour temperature of light source, the tg of bt resin is high, uses for a long time at a temperature of 100 degree, will not
Jaundice variable color;
(i) cutting edge: according to product size, with electronic shearing machine, the pressing plate material marginal portion after pressing is removed;
J () pastes aluminum surface protective film: on the aluminium at the aluminum-based copper-clad plate back side having pressed, with laminator patch last layer protection
Film, the damage of aluminium during prevention following process;
(2) aluminium base line pattern and welding resistance make:
(a) secondary sawing sheet: with electronic shearing machine, whole aluminum-based copper-clad plate is cut into and produce the dimensions needing;
(b) secondary brush board: use one side brush plate machine, the oxide layer on copper-clad plate surface is thrown and brushes off, brush roll mesh number is 500 mesh;
C () prints wet film: with the method for silk screen printing, uniformly one layer of coating on the copper-clad plate surface Copper Foil after secondary brush board
Photosensitive wet film;
(d) preliminary drying: the copper-clad plate of printed wet film is placed and toasts in an oven, 70~80 DEG C of baking temperature, the time
For 20~30 minutes;
(e) single exposure: the circuit egative film that light in advance is painted covers in pre-baked copper-clad plate, is exposed with 8kw ultraviolet
Ray machine exposes so that the line pattern on egative film is transferred in copper-clad plate, and energy setting value is 350 MJs;
F () is once developed: the copper-clad plate after single exposure is developed through developing machine, developer solution 1%-3% Carbon Dioxide
Sodium, temperature is 28~32 DEG C, and the time is 1~2 minute, and spray pressure is 1~5kg/cm2;
G () is checked: the integrity of detection line pattern;
H () etches: eroded, with acid copper chloride etching liquid, the layers of copper not covered by wet film, retain the circuit needing
Copper Foil, the condition of etching solution: copper content is 160g/l, acid is measured as 2.5n, and oxidation-reduction potential is 475mv, and temperature is 51.6 DEG C;
(i) striping: the circuit surface wet film after etching is removed clean by the sodium hydroxide solution with 3%~5%;
(j) three brush boards: use one side brush plate machine, the oxide layer on circuit base plate surface is thrown and brushes off, brush roll mesh number is 500
Mesh;
K () prints welding resistance white oil: with the method for silk screen printing, uniformly one layer of the coating of the circuit base plate surface after three brush boards
Circuit base plate surface after secondary brush board uniformly coats the photosensitive solder resist white oil of one layer of model Solar p sr2000ce800w;
(l) secondary preliminary drying: by printed welding resistance white oil circuit base plate place toast in an oven, baking temperature 70~80
DEG C, the time is 20~30 minutes;
(m) re-expose: the welding resistance egative film that light in advance is painted, cover on secondary pre-baked circuit base plate, use 8kw
Ultraviolet exposure machine exposes so that the welding resistance figure on egative film is transferred in copper-clad plate, and energy setting value is 950 MJs;
(n) redevelopment: the circuit base plate after re-expose is developed through developing machine, the anhydrous carbon of developer solution 1%~3%
Sour sodium, temperature is 28~32 DEG C, and the time is 1~2 minute, and spray pressure is 1~5kg/cm2;
(o) solidify afterwards: the circuit base plate after redevelopment is positioned over baking in baking oven, welding resistance white oil is thoroughly solidified,
150 DEG C of baking temperature, the time is 60 minutes;
(3) routing bond pad surface is processed: employs Atotech universal asf ii chemistry NiPdAu system, is beating gold
The coating surface one lamination gold plate of wire bonding disk, thickness of coating ni is 5~8 μm, pd is 2~8 μ ", au be 2~6 μ ";
(4) bore datum hole: first identify the figure of circuit location hole using full-automatic image puncher, then bore location hole,
Aperture is 2.0mm;
(5) bore bowl hole: after shop bolt plus vacuum cup co-located, with high-speed precise machine tool szx5540- and
Rough diamond single-blade milling cutter bores milling bowl shape hole, and the cutting edge of rough diamond single-blade milling cutter, horizontal by 2 ° of angles, bores bowl
Kong Shixian shop bolt is positioned at aluminium base on vacuum suction table, then with adhesive tape in aluminium base surrounding and vacuum suction table not by
The suction hole that aluminium base covers is pasted and is covered, and opens vacuum pump, when aluminium base fully fits fixing with work top, then carries out
Bore bowl hole.;
(6) ultrasound wave cleaning and laminating protecting film: use cleanout fluid rs-1609, cleaning in ultrasonic washing unit is drilled bowl
The substrate of cup aperture, after cleaning 30~60 seconds, takes out and washes through three-level clear water, then be more than or equal to 6kg/cm with pressure2One-level high pressure
Washing, then crosses cold wind, after 80~90 DEG C of hot-air seasoning, then in circuit surface viscosity protecting film in hot-pressing roller patch;
(7) numerical control drilling-milling profile;
(8) check shipment.
Bt resin is just white and tg is high, and vitrification point can reach 230 DEG C, uses for a long time at a temperature of 100 DEG C, will not
Jaundice variable color and affect colour temperature and the light efficiency of light source.Bore the rough diamond single-blade milling cutter that bowl hole Mohs' hardness is 10 and high speed
Precision machine tool szx5540- carrys out chip processing it is ensured that aluminium base machined surface smooth no knife mark, and cutting edge and level
Face is in 2 ° of angles, and chip process gets final product chip removal, it is to avoid irregular phenomenon, processed product shop bolt in crystal bonding area
With vacuum cup co-located, fixation of fitting with work top tightr, when boring milling bowl hole, the concordance of its depth obtains
Good control, its depth error can control between +/- 0.015mm, method of the present invention rational technology, practicality
By force, there is very strong market application foreground.
Particular embodiments described above, has carried out detailed further to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, be should be understood that the specific embodiment that the foregoing is only the present invention, be not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement done etc., should be included in the guarantor of the present invention
Within the scope of shield.