CN103922606A - Coater chuck capable of preventing glass sticking - Google Patents
Coater chuck capable of preventing glass sticking Download PDFInfo
- Publication number
- CN103922606A CN103922606A CN201410139361.4A CN201410139361A CN103922606A CN 103922606 A CN103922606 A CN 103922606A CN 201410139361 A CN201410139361 A CN 201410139361A CN 103922606 A CN103922606 A CN 103922606A
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- Prior art keywords
- pallet
- glass substrate
- chuck
- glass
- coating machine
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Abstract
The invention discloses a coater chuck capable of preventing glass sticking. A coater comprises a fixed seat, wherein a rotating shaft is arranged on the fixed seat; a chuck used for bearing a glass substrate is arranged on the rotating shaft; the chuck is circumferentially divided into a plurality of regions according to the degree of friction between the glass substrate and the chuck, and different surface roughness is set for the plurality of regions. The coater chuck has the beneficial effects that the contact area between the chuck and the glass substrate is reduced by increasing the surface roughness of the regions with more friction between the glass substrate and the chuck, thus avoiding glass sticking; the change rate of the chuck is reduced, the service life of the chuck is prolonged, and the cost is saved.
Description
Technical field
The present invention, about a kind of coating machine pallet, refers in particular to a kind of coating machine pallet that prevents the glutinous sheet of glass.
Background technology
In the making technology of semicon industry, rotary coating machine (spin type coater) is a kind of requisite equipment of photoetching process, shown in Fig. 1, coating machine mainly comprises a permanent seat 50, permanent seat 50 is provided with a rotating shaft 60, rotating shaft 60 is provided with a coating machine pallet (coater chuck) 70, in photoetching process, glass substrate 80 is placed on and on pallet 70, carries out photoetching, after photoetching completes, by mechanical part 90, glass substrate 80 is upwards lifted and departed from after pallet 70, then carry out next step processing step.
But equipment vendor, when making coating machine pallet, for avoiding occurring between pallet 70 and glass substrate 80 situation of glutinous sheet, can arrange the surface with certain roughness on pallet 70, thereby avoids glutinous sheet to reduce pallet 70 and the contact area of glass substrate 80.But what the whole surfaceness of pallet 70 arranged in the prior art is all consistent.Shown in Fig. 2, Fig. 3, after pallet 70 bearing glass substrates 80 are of long duration, can cause the surfaceness variation of pallet 70, especially glass substrate 80 place (be generally as shown in Figure 2 pallet central zone) more with pallet 70 frictions, it is more smooth that the surface of pallet 70 can become, cause glass substrate 80 and the contact area of pallet 70 to increase, thereby cause surface when mechanical part 90 is upwards lifted disengaging pallet 70 by glass substrate 80 easily to produce glutinous sheet, cause the position of glass substrate 80 to be offset, cause and transmit extremely and fragmentation.
Summary of the invention
Because the problems referred to above, the invention provides a kind of coating machine pallet that prevents the glutinous sheet of glass, described coating machine comprises a permanent seat, described permanent seat is provided with a rotating shaft, described rotating shaft is provided with the described pallet for bearing glass substrate, friction level according between described glass substrate and described pallet, is divided into plurality of regions by described pallet by circumference, and this plurality of regions is arranged to different surfacenesses.
Further improvement of the present invention is, described pallet is divided into inner ring and Liang Ge region, outer ring.
Further improvement of the present invention is, described inner ring is 1:3 with the ratio of the area of described outer ring.
Further improvement of the present invention is, the surfaceness of described inner ring is 2～3 μ m, and the surfaceness of described outer ring is 1～2 μ m.
The coating machine pallet that prevents the glutinous sheet of glass of the present invention, the friction level according between glass substrate and pallet, is divided into plurality of regions by pallet by circumference, and this plurality of regions is arranged to different surfacenesses.By increasing friction between glass substrate and pallet, compared with the surfaceness of multizone, reduce the contact area of pallet and glass substrate, avoid glass to stick sheet.Reduce the turnover rate of pallet, extended the work-ing life of pallet, saved cost.
Accompanying drawing explanation
Fig. 1 is the pallet of coating machine and the connection diagram of glass substrate in prior art.
Fig. 2 is schematic diagram when glass substrate departs from pallet in prior art.
Fig. 3 is the schematic diagram that in prior art, after the glutinous sheet of glass substrate, position generation is offset.
Fig. 4 is a kind of embodiment schematic diagram that prevents the coating machine pallet of the glutinous sheet of glass of the present invention.
Fig. 5 is the perspective view that prevents the coating machine pallet of the glutinous sheet of glass of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Cooperation is referring to shown in Fig. 4, it is a preferred embodiment that prevents the coating machine pallet 10 of the glutinous sheet of glass of the present invention, wherein coating machine comprises a permanent seat 50, permanent seat 50 is provided with a rotating shaft 60, rotating shaft 60 is provided with the coating machine pallet 10 that prevents the glutinous sheet of glass of the present invention for bearing glass substrate 80, friction level according between glass substrate 80 and pallet 10, is divided into plurality of regions by pallet 10 by circumference, and this plurality of regions is arranged to different surfacenesses.Increase wherein between glass substrate 80 and pallet 10 friction compared with the surfaceness of multizone, reduce the contact area of pallet 10 and glass substrate 80, avoid glass substrate 80 that glutinous sheet occurs.
Cooperation is referring to shown in Fig. 5, of the present inventionly prevents that the coating machine pallet 10 of the glutinous sheet of glass is divided into inner ring 20 and 30Liang Ge region, outer ring.Described inner ring 20 is 1:3 with the ratio of the area of described outer ring 30.Friction level between described inner ring 20 and glass substrate 80 is higher than the friction level between described outer ring 30 and glass substrate 80, so the surfaceness of described inner ring 20 is set to 2～3 μ m, the surfaceness of described outer ring 30 is set to 1～2 μ m.
The above is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, yet not in order to limit the present invention, any those skilled in the art, within not departing from the scope of technical solution of the present invention, when can utilizing the technology contents of above-mentioned announcement to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (4)
1. one kind prevents that glass from sticking the coating machine pallet of sheet, described coating machine comprises a permanent seat, described permanent seat is provided with a rotating shaft, described rotating shaft is provided with the described pallet for bearing glass substrate, it is characterized in that according to the friction level between described glass substrate and described pallet, described pallet is divided into plurality of regions by circumference, and this plurality of regions is arranged to different surfacenesses.
2. the coating machine pallet that prevents the glutinous sheet of glass as claimed in claim 1, is characterized in that described pallet to be divided into inner ring and Liang Ge region, outer ring.
3. the coating machine pallet that prevents the glutinous sheet of glass as claimed in claim 2, is characterized in that described inner ring and the ratio of the area of described outer ring are 1:3.
4. the coating machine pallet that prevents as claimed in claim 2 or claim 3 the glutinous sheet of glass, the surfaceness that it is characterized in that described inner ring is 2～3 μ m, the surfaceness of described outer ring is 1～2 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410139361.4A CN103922606A (en) | 2014-04-09 | 2014-04-09 | Coater chuck capable of preventing glass sticking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410139361.4A CN103922606A (en) | 2014-04-09 | 2014-04-09 | Coater chuck capable of preventing glass sticking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103922606A true CN103922606A (en) | 2014-07-16 |
Family
ID=51141039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410139361.4A Pending CN103922606A (en) | 2014-04-09 | 2014-04-09 | Coater chuck capable of preventing glass sticking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103922606A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908866A (en) * | 2016-06-03 | 2017-06-30 | 住华科技股份有限公司 | Optical film set and method for preventing adhesion |
| CN111041452A (en) * | 2019-12-03 | 2020-04-21 | 武汉华星光电半导体显示技术有限公司 | Bottom electrode and chemical vapor deposition device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101101446A (en) * | 2006-07-03 | 2008-01-09 | 元太科技工业股份有限公司 | Photoresist coater carrying disc for preventing static assembly |
| CN101262982A (en) * | 2005-09-14 | 2008-09-10 | 株式会社荏原制作所 | Polishing platen and polishing apparatus |
| CN202257027U (en) * | 2011-10-12 | 2012-05-30 | 深圳市华星光电技术有限公司 | Bearing system of photoresist coating machine and photoresist coating machine provided with bearing system |
| CN103681484A (en) * | 2012-08-31 | 2014-03-26 | 三星显示有限公司 | Flexible display device manufacturing method and carrier substrate for manufacturing same |
-
2014
- 2014-04-09 CN CN201410139361.4A patent/CN103922606A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101262982A (en) * | 2005-09-14 | 2008-09-10 | 株式会社荏原制作所 | Polishing platen and polishing apparatus |
| CN101101446A (en) * | 2006-07-03 | 2008-01-09 | 元太科技工业股份有限公司 | Photoresist coater carrying disc for preventing static assembly |
| CN202257027U (en) * | 2011-10-12 | 2012-05-30 | 深圳市华星光电技术有限公司 | Bearing system of photoresist coating machine and photoresist coating machine provided with bearing system |
| CN103681484A (en) * | 2012-08-31 | 2014-03-26 | 三星显示有限公司 | Flexible display device manufacturing method and carrier substrate for manufacturing same |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908866A (en) * | 2016-06-03 | 2017-06-30 | 住华科技股份有限公司 | Optical film set and method for preventing adhesion |
| CN106908866B (en) * | 2016-06-03 | 2018-12-28 | 住华科技股份有限公司 | Optical film set and method for preventing adhesion |
| CN111041452A (en) * | 2019-12-03 | 2020-04-21 | 武汉华星光电半导体显示技术有限公司 | Bottom electrode and chemical vapor deposition device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140716 |