CN103894377A - 一种紫外光和等离子体联合清洗器 - Google Patents
一种紫外光和等离子体联合清洗器 Download PDFInfo
- Publication number
- CN103894377A CN103894377A CN201310730537.9A CN201310730537A CN103894377A CN 103894377 A CN103894377 A CN 103894377A CN 201310730537 A CN201310730537 A CN 201310730537A CN 103894377 A CN103894377 A CN 103894377A
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- CN
- China
- Prior art keywords
- ultraviolet light
- plasma
- cleaning device
- generator
- ultraviolet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310730537.9A CN103894377B (zh) | 2013-12-25 | 2013-12-25 | 一种紫外光和等离子体联合清洗器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310730537.9A CN103894377B (zh) | 2013-12-25 | 2013-12-25 | 一种紫外光和等离子体联合清洗器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103894377A true CN103894377A (zh) | 2014-07-02 |
CN103894377B CN103894377B (zh) | 2017-07-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310730537.9A Active CN103894377B (zh) | 2013-12-25 | 2013-12-25 | 一种紫外光和等离子体联合清洗器 |
Country Status (1)
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CN (1) | CN103894377B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111263504A (zh) * | 2020-01-19 | 2020-06-09 | 南京嘉阳工程技术有限公司 | 等离子清洗机的冷却装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003024891A (ja) * | 2001-07-17 | 2003-01-28 | Canon Inc | 光学素子基材の洗浄方法および洗浄装置 |
CN1449872A (zh) * | 2003-04-10 | 2003-10-22 | 上海复旦辰光科技有限公司 | 一种利用微波清洁材料表面的方法及其装置 |
CN1706566A (zh) * | 2004-06-09 | 2005-12-14 | 上海国达特殊光源有限公司 | 紫外线清洗装置 |
CN101006198A (zh) * | 2004-08-20 | 2007-07-25 | 瓦里安半导体设备公司 | 用于离子注入的现场表面污染物去除 |
CN201830788U (zh) * | 2010-04-15 | 2011-05-18 | 李梦雯 | 一种太阳能自动灭虫器的药水盆托架 |
JP2012164558A (ja) * | 2011-02-08 | 2012-08-30 | Panasonic Corp | プラズマ発生装置、当該プラズマ発生装置を用いた洗浄浄化装置および小型電器機器 |
CN202787916U (zh) * | 2012-08-24 | 2013-03-13 | 于承安 | 可调式片状饰面材料粘贴工具 |
US8591659B1 (en) * | 2009-01-16 | 2013-11-26 | Novellus Systems, Inc. | Plasma clean method for deposition chamber |
-
2013
- 2013-12-25 CN CN201310730537.9A patent/CN103894377B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003024891A (ja) * | 2001-07-17 | 2003-01-28 | Canon Inc | 光学素子基材の洗浄方法および洗浄装置 |
CN1449872A (zh) * | 2003-04-10 | 2003-10-22 | 上海复旦辰光科技有限公司 | 一种利用微波清洁材料表面的方法及其装置 |
CN1706566A (zh) * | 2004-06-09 | 2005-12-14 | 上海国达特殊光源有限公司 | 紫外线清洗装置 |
CN101006198A (zh) * | 2004-08-20 | 2007-07-25 | 瓦里安半导体设备公司 | 用于离子注入的现场表面污染物去除 |
US8591659B1 (en) * | 2009-01-16 | 2013-11-26 | Novellus Systems, Inc. | Plasma clean method for deposition chamber |
CN201830788U (zh) * | 2010-04-15 | 2011-05-18 | 李梦雯 | 一种太阳能自动灭虫器的药水盆托架 |
JP2012164558A (ja) * | 2011-02-08 | 2012-08-30 | Panasonic Corp | プラズマ発生装置、当該プラズマ発生装置を用いた洗浄浄化装置および小型電器機器 |
CN202787916U (zh) * | 2012-08-24 | 2013-03-13 | 于承安 | 可调式片状饰面材料粘贴工具 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111263504A (zh) * | 2020-01-19 | 2020-06-09 | 南京嘉阳工程技术有限公司 | 等离子清洗机的冷却装置 |
Also Published As
Publication number | Publication date |
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CN103894377B (zh) | 2017-07-21 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Wei Xiaofeng Inventor after: Gao Yuyu Inventor before: Wei Xiaofeng |
|
COR | Change of bibliographic data | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171116 Address after: 536000, No. twenty-three, No. 16, Fu Fu Building, west of Beihai Avenue, the Guangxi Zhuang Autonomous Region, Beihai, E Patentee after: Guangxi Island ecology Investment Co., Ltd. Address before: Nanning City, the Guangxi Zhuang Autonomous Region Qingxiu District Chuk Yuen Road 530028 Patentee before: Wei Xiaofeng |
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TR01 | Transfer of patent right |