CN103869459B - A kind of microscope objective lens fine motion focus control - Google Patents
A kind of microscope objective lens fine motion focus control Download PDFInfo
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- CN103869459B CN103869459B CN201410082218.6A CN201410082218A CN103869459B CN 103869459 B CN103869459 B CN 103869459B CN 201410082218 A CN201410082218 A CN 201410082218A CN 103869459 B CN103869459 B CN 103869459B
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- Microscoopes, Condenser (AREA)
- Lens Barrels (AREA)
Abstract
The invention discloses a kind of microscope objective lens fine motion focus control, comprise housing, object lens, lens barrel, object lens holder, two reeds, two skewed slots, square box, motor output shaft and 30DE0 motor, wherein two skewed slots are oblique prone triangular shape, be separately positioned on the both sides of object lens holder, the both sides of square box are respectively equipped with one with lateral vertical and through the support bar of side, and parallel with support bar side is provided with motor delivery outlet, motor output shaft is threaded with motor delivery outlet, square box is arranged on the outside of object lens holder, one end of supported on both sides bar offsets with the inclined-plane of object lens holder both sides skewed slot respectively, 30DE0 motor output shaft promotes square box by motor output shaft output displacement and produces motion, and then promote two support bar tangential movements, thus drive object lens holder to move in the direction of the optical axis by skewed slot.Structure of the present invention is simple, easy to use, can effectively improve microscopical observing effect.
Description
Technical field
The present invention relates to Ultrasonic Motor Techniques field, particularly relate to a kind of microscope objective lens fine motion focus control.
Background technology
Traditional electromagnetic machine, through the development of last 100 years, is all very ripe in theory, structural design, the manufacturing and application aspect.Along with the development of science and technology, to motor, the fields such as current Aero-Space, exact instrument, medicine equipment propose that such as compact structure, length are short, low noise, lightweight, without the requirement of more renewals such as electromagnetic interference (EMI), traditional electrical magneto generator is limited to the reason such as principle of work and version can not meet these requirements, this just requires that the motor of development of new replaces electromagnetic machine in some field, ultrasound electric machine is exactly the small and special electric machine of wherein a kind of advanced person, and its appearance compensate for the deficiency of traditional electrical magneto generator.This kind of motor uses piezoelectric as energy transducer, namely utilizes the inverse piezoelectric effect of piezoelectric to inspire the ultrasonic vibration of stator elastomeric to realize the conversion of electric energy to mechanical energy, and motion and power is passed by rubbing action.Compare with traditional electrical magneto generator, ultrasound electric machine displacement resolution is high, response is fast, it both can provide power or moment as drive source, can be used for again Direct driver and controlled motion platform to realize hi-Fix or step function.Can not generate an electromagnetic field in the ultrasound electric machine course of work and the interference of electromagnetic field can not be subject to, being very suitable for being used in the complex environments such as electromagnetism.Meanwhile, ultrasound electric machine cuts off self-lock, noise is little, structural design is flexible, can realize short, little, thin etc. feature and make it in numerous high, precision and frontier application, become the strong supplementary of traditional electrical magneto generator.
Rotary-type ultrasound electric machine belongs to the one of ultrasound electric machine, utilize the inverse piezoelectric effect of piezoelectric element and elastomeric ultrasonic vibration equally, by the rubbing action between stator and mover or gas (liquid) coupling, elastomeric micro breadth oscillation is converted to the motion of mover macroscopic view, directly promote load.Rotary-type ultrasound electric machine can directly export rotary motion and moment of torsion.But because its specific method of clamping (needing to fix at circular plate type diameter of stator bore place) makes microminiaturization comparatively difficult, studying at present and using more is all the motor of diameter at more than 30mm.
Microscopical object lens operating distance has a significant impact for microscopical observing effect, and the resolution of its object lens of existing optical microscope focusing, generally at about 0.2um, is difficult to the precision reaching below 100nm.
Summary of the invention
Technical matters to be solved by this invention is the defect for background technology, provides a kind of microscope objective lens fine motion focus control that effectively can improve observing effect based on ultrasound electric machine.
The present invention is for solving the problems of the technologies described above by the following technical solutions:
A kind of microscope objective lens fine motion focus control, comprises housing, object lens, lens barrel, object lens holder, two reeds, two skewed slots, square box, motor output shaft and 30DE0 motors;
Described object lens are provided with external thread, and described lens barrel inwall is provided with the internal thread matched with external thread on object lens, and described object lens are threaded with lens barrel;
Described object lens holder is rectangular parallelepiped, and on it, plane is provided with the circular hole for inserting lens barrel, and described two skewed slots are oblique prone triangle, are separately positioned on the both sides of object lens holder, and described two reeds are separately positioned on the two ends up and down of object lens holder;
The both sides of described square box are respectively equipped with one with lateral vertical and through the support bar of side, and a described square box side parallel with support bar is provided with motor delivery outlet, and described motor delivery outlet is provided with internal thread;
Described housing is rectangular parallelepiped, and its upper surface is provided with the circular hole exposing lens barrel, and described object lens holder is arranged in housing, and described housing is respectively equipped with the gathering sill of a transverse direction in the both sides arranging skewed slot corresponding to object lens holder;
Described square box is arranged between described housing and described object lens holder, the both sides being provided with support bar correspond to described housing and are provided with the both sides of gathering sill, and equal one end of support bar of described square box both sides is arranged in gathering sill, the inclined-plane of the other end and skewed slot offsets;
On described motor output shaft, one end is provided with the external thread matched with internal thread on described motor delivery outlet, and be threaded with described motor delivery outlet, the other end is provided with blind hole, is connected by interference fit with the outrigger shaft of 30DE0 motor.
As the further prioritization scheme of a kind of microscope objective lens fine motion focus control of the present invention, the junction of the outrigger shaft of described motor output shaft and 30DE0 motor is provided with holding screw.
As the further prioritization scheme of a kind of microscope objective lens fine motion focus control of the present invention, the gathering sill of described housing both sides surfaceness is less than or equal to 1.25um, flatness is less than or equal to 2um.
As the further prioritization scheme of a kind of microscope objective lens fine motion focus control of the present invention, described 30DE0 motor is travelling-wave type rotary ultrasonic motor.
After the rotary-type ultrasound electric machine of 30DE0 exports a micro-displacement by output shaft, the axis of ultrasound electric machine exports and is converted to microscope objective lens movement in the direction of the optical axis by microscope objective lens fine motion focus control, thus the step pitch of ultrasound electric machine being converted to the step pitch of microscope objective lens, the focusing resolution of such microscope objective lens can reach with the identical order of magnitude of rotary-type ultrasound electric machine.
During ultrasound electric machine work, output shaft can realize forward and reverse motion, thus promotion micro objective realizes the motion in rising and decline both direction in the direction of the optical axis.
The startup of micro objective in whole process, stopping and resolution are controlled by rotary-type ultrasound electric machine completely, therefore can realize good control accuracy and high resolving power.
The present invention adopts above technical scheme compared with prior art, has following technique effect:
This device can realize the focal length fine setting of microscope objective lens Nano grade, is significant, compensate for the defect that manual focusing resolution is difficult to reach Nano grade for use observation by light microscope micro-object.
Accompanying drawing explanation
Fig. 1 is microscope objective lens fine motion focus control object lens partial schematic diagram;
Fig. 2 is microscope objective lens fine motion focus control object lens retained part schematic diagram;
Fig. 3 is object lens and object lens retained part scheme of installation;
Fig. 4 is microscope objective lens fine motion focus control displacement conversion portion schematic diagram;
Fig. 5 is object lens retained part and displacement conversion portion scheme of installation;
Fig. 6 is microscope objective lens fine motion focus control housing schematic diagram;
Fig. 7 is displacement conversion portion and housing scheme of installation;
Fig. 8 is housing and upper and lower end cap scheme of installation;
Fig. 9 is microscope objective lens fine motion focus control overall schematic;
In figure, 1-object lens; 2-lens barrel; 3-object lens holder; 4-reed; 5-skewed slot; 6-square box; 7-support bar; 8-30DE0 motor output shaft; 9-housing parts; 10-gathering sill; 11-upper end cover; 12-bottom end cover; 13-packing ring; The rotary-type ultrasound electric machine of 14-30DE0.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
As shown in Figure 9, the invention discloses a kind of microscope objective lens fine motion focus control, comprise housing, object lens, lens barrel, object lens holder, two reeds, two skewed slots, square box, motor output shaft and 30DE0 motors;
Described object lens are provided with external thread, and described lens barrel inwall is provided with the internal thread matched with external thread on object lens, and described object lens are threaded with lens barrel;
Described object lens holder is rectangular parallelepiped, and on it, plane is provided with the circular hole for inserting lens barrel, and described two skewed slots are oblique prone triangle, are separately positioned on the both sides of object lens holder, and described two reeds are separately positioned on the two ends up and down of object lens holder;
The both sides of described square box are respectively equipped with one with lateral vertical and through the support bar of side, and a described square box side parallel with support bar is provided with motor delivery outlet, and described motor delivery outlet is provided with internal thread;
Described housing is rectangular parallelepiped, and its upper surface is provided with the circular hole exposing lens barrel, and described object lens holder is arranged in housing, and described housing is respectively equipped with the gathering sill of a transverse direction in the both sides arranging skewed slot corresponding to object lens holder;
Described square box is arranged between described housing and described object lens holder, the both sides being provided with support bar correspond to described housing and are provided with the both sides of gathering sill, and equal one end of support bar of described square box both sides is arranged in gathering sill, the inclined-plane of the other end and skewed slot offsets;
On described motor output shaft, one end is provided with the external thread matched with internal thread on described motor delivery outlet, and be threaded with described motor delivery outlet, the other end is provided with blind hole, is connected by interference fit with the outrigger shaft of 30DE0 motor.
The junction of the outrigger shaft of described motor output shaft and 30DE0 motor is provided with holding screw.
The gathering sill of described housing both sides surfaceness is less than or equal to 1.25um, flatness is less than or equal to 2um.
Described 30DE0 motor is travelling-wave type rotary ultrasonic motor.
Each parts specifically assemble and the course of work as follows:
As shown in Figure 1, object lens are loaded in lens barrel as object lens part by screw thread;
As shown in Figure 2, two skewed slots are threaded connection the both sides being arranged on object lens holder, and match with two reeds respectively in the upper and lower end face of object lens holder, the effect of reed has been flexible support, and object lens can be moved in the direction of the optical axis;
As shown in Figure 3, inserted by lens barrel in the circular hole of object lens holder, such object lens part has just been arranged on object lens retained part;
Be illustrated in figure 4 displacement conversion portion, its effect is coordinated with the gathering sill on skewed slot and housing respectively by the support bar of both sides, and the axially-movable that motor exports is converted to object lens motion in the direction of the optical axis;
As shown in Figure 5, the assembly assembled by preceding step is put on displacement conversion portion, make inclined-plane and the support bar Cylindrical Surfaces Contact of two skewed slots, when 30DE0 motor output shaft exports a displacement, namely promote displacement conversion portion and produce a displacement, then promote skewed slot by support bar thus make object lens produce displacement in the direction of the optical axis;
Outer frame part as shown in Figure 6, this is a global facility in fact, why be decomposed into 6 parts in the design, be because gathering sill contact with support bar faced by flatness and roughness requirements very high, need to grind, therefore decomposed out and conveniently carry out follow-up grinding operation;
As shown in Figure 7, two support bars are placed on gathering sill end face, and 30DE0 motor output shaft passes through from the circular hole housing;
As shown in Figure 8, whole device is connected with upper end cover and bottom end cover finally by packing ring, by 4 screws by aggregates for whole device sealing; On, bottom end cover and foregoing outer frame part are the housing parts of this device altogether;
Be as shown in Figure 9 whole device final complete figure, the rotary-type ultrasound electric machine motor of 30DE0 by output shaft output displacement, can promote micro objective by the displacement converter device on the left side and realize bidirectional-movement in the direction of the optical axis.
Structure of the present invention is simple, easy to use, has larger practicality.
It is to be noted; the above; be only the specific embodiment of the present invention; but protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily and replacement, all should be encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (4)
1. a microscope objective lens fine motion focus control, is characterized in that, comprises housing, object lens, lens barrel, object lens holder, two reeds, two skewed slots, square box, motor output shaft and 30DE0 motors;
Described object lens are provided with external thread, and described lens barrel inwall is provided with the internal thread matched with external thread on object lens, and described object lens are threaded with lens barrel;
Described object lens holder is rectangular parallelepiped, and on it, plane is provided with the circular hole for inserting lens barrel, and described two skewed slots are oblique prone triangle, are separately positioned on the both sides of object lens holder, and described two reeds are separately positioned on the two ends up and down of object lens holder;
The both sides of described square box are respectively equipped with one with lateral vertical and through the support bar of side, and a described square box side parallel with support bar is provided with motor delivery outlet, and described motor delivery outlet is provided with internal thread;
Described housing is rectangular parallelepiped, and its upper surface is provided with the circular hole exposing lens barrel, and described object lens holder is arranged in housing, and described housing is respectively equipped with the gathering sill of a transverse direction in the both sides arranging skewed slot corresponding to object lens holder;
Described square box is arranged between described housing and described object lens holder, the both sides being provided with support bar correspond to described housing and are provided with the both sides of gathering sill, and equal one end of support bar of described square box both sides is arranged in gathering sill, the inclined-plane of the other end and skewed slot offsets;
On described motor output shaft, one end is provided with the external thread matched with internal thread on described motor delivery outlet, and be threaded with described motor delivery outlet, the other end is provided with blind hole, is connected by interference fit with the outrigger shaft of 30DE0 motor.
2. microscope objective lens fine motion focus control according to claim 1, the junction of the outrigger shaft of described motor output shaft and 30DE0 motor is provided with holding screw.
3. microscope objective lens fine motion focus control according to claim 1, is characterized in that, the gathering sill of described housing both sides surfaceness is less than or equal to 1.25um, flatness is less than or equal to 2um.
4. microscope objective lens fine motion focus control according to claim 1, is characterized in that, described 30DE0 motor is travelling-wave type rotary ultrasonic motor.
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CN201410082218.6A CN103869459B (en) | 2014-03-07 | 2014-03-07 | A kind of microscope objective lens fine motion focus control |
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CN201410082218.6A CN103869459B (en) | 2014-03-07 | 2014-03-07 | A kind of microscope objective lens fine motion focus control |
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CN103869459B true CN103869459B (en) | 2016-01-20 |
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CN104880814A (en) * | 2015-05-07 | 2015-09-02 | 苏州大学 | Object lens driving table |
CN109211907B (en) * | 2018-10-24 | 2022-01-04 | 北京控制工程研究所 | Tool device for detecting silver ion migration |
CN112612132A (en) * | 2020-12-24 | 2021-04-06 | 核工业总医院 | Multifunctional microscope system for neurosurgery operation |
CN113064268A (en) * | 2021-04-13 | 2021-07-02 | 深圳日华自动化技术有限公司 | Micro-moving precise stroke control and adjustment device for nano platform |
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DE102011117743A1 (en) * | 2011-01-18 | 2012-07-19 | Carl Zeiss Microlmaging Gmbh | Microscope lens with at least one displaceable in the direction of the optical axis lens group |
EP2555412A2 (en) * | 2011-08-05 | 2013-02-06 | Canon Kabushiki Kaisha | Ultrasonic motor and lens apparatus including the same |
CN103529544A (en) * | 2013-11-04 | 2014-01-22 | 山东理工大学 | Nano membrane thickness measuring instrument capable of automatically positioning and focusing |
CN203759352U (en) * | 2014-03-07 | 2014-08-06 | 南京航空航天大学 | Microscope objective lens micromotion focusing apparatus |
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JP4566680B2 (en) * | 2004-10-05 | 2010-10-20 | キヤノン株式会社 | Lens movement support device |
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Patent Citations (4)
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DE102011117743A1 (en) * | 2011-01-18 | 2012-07-19 | Carl Zeiss Microlmaging Gmbh | Microscope lens with at least one displaceable in the direction of the optical axis lens group |
EP2555412A2 (en) * | 2011-08-05 | 2013-02-06 | Canon Kabushiki Kaisha | Ultrasonic motor and lens apparatus including the same |
CN103529544A (en) * | 2013-11-04 | 2014-01-22 | 山东理工大学 | Nano membrane thickness measuring instrument capable of automatically positioning and focusing |
CN203759352U (en) * | 2014-03-07 | 2014-08-06 | 南京航空航天大学 | Microscope objective lens micromotion focusing apparatus |
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