CN103414372B - Bi-directional drive rotary ultrasonic motor - Google Patents
Bi-directional drive rotary ultrasonic motor Download PDFInfo
- Publication number
- CN103414372B CN103414372B CN201310373887.4A CN201310373887A CN103414372B CN 103414372 B CN103414372 B CN 103414372B CN 201310373887 A CN201310373887 A CN 201310373887A CN 103414372 B CN103414372 B CN 103414372B
- Authority
- CN
- China
- Prior art keywords
- energy converter
- ultrasonic
- modal transducer
- excitation
- elliptical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of bi-directional drive rotary ultrasonic motor, rotor comprises rotating disk and is arranged on the frictional layer of disc surfaces; The single-excitation ultrasonic oval vibration energy converter that stator comprises support, fixed by support two identical, the friction-driven block that two identical elliptical vibration modal transducer are identical with being arranged on two, elliptical vibration modal transducer front end; Elliptical vibration modal transducer is arranged on the front end of single-excitation ultrasonic oval vibration energy converter, for inclined wedge-shaped structure, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter produces can be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end and friction-driven block by this elliptical vibration modal transducer, when two single-excitation ultrasonic oval vibration energy converter carry out work respectively, corresponding two friction-driven blocks drive rotor to carry out continuous rotation motion respectively.
Description
Technical field
The present invention relates to the ultrasound electric machine field utilizing piezoelectric ceramic inverse piezoelectric effect, especially relate to a kind of bi-directional drive rotary ultrasonic motor.
Background technology
Rotary ultrasonic motor is the novel electrical micro-machine of one developing rapidly and apply the eighties in 20th century, it is the electric coupling apparatus utilizing the inverse piezoelectric effect of piezoelectric to realize electric energy-mechanic to change, by the rubbing action between stators and rotators, elastomeric micro breadth oscillation is converted to macroscopical rotary motion of rotor, Direct driver load.Because it has that volume is little, lightweight, low-speed big, noise are little, response is fast, positioning precision is high, without electromagnetic interference and the advantage such as environmental suitability is strong, obtains increasingly extensive application in technical fields such as medical treatment, Aero-Space, robot, MEMS.
The problems such as in current existing rotary-type ultrasound electric machine, the flexural vibration mode outside main employing face is combined into the capable ripple of end face, and drives rotor turns, and ubiquity driving moment is little, and axial volume is large, wearing and tearing difference in the internal-and external diameter contact zone of rotor is large; In addition, even if having employed in plane vibration mode, in order to can radial tightening power in applying face, the disk of oscillator or rotor or annulus make two semi-discs or semicircular ring, middle be connected into disk or annulus with the radial tightening power in applying face by spring, also be difficult to realize large torque at present, and functional reliability is low.Be CN101030740A at publication number, denomination of invention is in the patent documentation of " bending-rotation ultrasonic motor of singlephase drive ", the structure disclosing a kind of body is the singlephase drive standing wave rotary ultrasonic motor of taper, this motor relies on six piezoelectric ceramic pieces be superimposed together vertically to excite the vibration of stator, and six piezoelectric ceramic pieces rely on clamp nut and last item cover to be fixed on axis.Although this motor has the advantages such as output torque is larger, but six of motor piezoelectric ceramic pieces will to stagger 60 installations mutually by polarization subregion, its complex structure, and misplace because the screw (revolving force) of clamp nut very easily causes between piezoelectric ceramic piece in the compaction process of piezoelectric ceramic piece, be difficult to the technical requirement ensureing dislocation 60 degree between adj acent piezoelectric potsherd; In addition, be not with any positioner between this motor stator and rotor, this makes stator and rotor contact position precision between the two be affected, and then affects the stability of motor torque and speed; Thus, there is complex structure in this type of rotary ultrasonic motor, high to the contact position required precision between stator and rotor, the defects such as making and installation is more difficult, the poor stability of motor torque and speed.
Summary of the invention
The invention provides a kind of novel bi-directional drive rotary ultrasonic motor, object is to overcome the deficiency existed in above-mentioned rotary ultrasonic motor.
Bi-directional drive rotary ultrasonic motor, comprises rotor and stator, and rotor comprises rotating disk and is arranged on the frictional layer of disc surfaces; Stator comprises support, the identical and symmetrical energy conversion device by two covers that support is fixing, often overlaps energy device and comprises a single-excitation ultrasonic oval vibration energy converter, an elliptical vibration modal transducer and a friction-driven block respectively; Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it comprises bolt and is set in back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt successively, front shroud is provided with the ring flange that can connect with support, back shroud, piezoelectric ceramic piece, electrode slice and front shroud are connected compression by bolt by back shroud and front shroud, constitute the energy conversion part of bi-directional drive rotary ultrasonic motor, the ultrasonic electric energy that A ultrasonic-frequency power supply and B ultrasonic acoustic-electric source export is converted to the ultrasonic vibrational energy of two single-excitation ultrasonic oval vibration energy converter.
Described elliptical vibration modal transducer and front shroud are made into the front end that is integrally provided in front shroud, or utilize an additional connection stud elliptical vibration modal transducer to be connected in the front end of front shroud, elliptical vibration modal transducer is inclined wedge-shaped structure, the former entirety of inclined wedge-shaped structure elliptical vibration modal transducer is cuboid, inclined wedge-shaped structure is formed be cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction after, formed in two sides of inclined wedge-shaped, not cut side is parallel to single-excitation ultrasonic oval vibration energy converter axis, the another side be cut becomes 3-30 degree angle with single-excitation ultrasonic oval vibration energy converter axis.
The object making elliptical vibration modal transducer form inclined wedge-shaped structure is the mode of oscillation in order to change single-excitation ultrasonic oval vibration energy converter, make its longitudinal vibration mode frequency and flexural vibration mode frequency close to or equal, due to the existence of inclined wedge-shaped structure elliptical vibration modal transducer, the longitudinal ultrasonic vibration that single-excitation ultrasonic oval vibration energy converter produces is after being delivered to inclined wedge-shaped structure elliptical vibration modal transducer, be a part of extensional vibration component and a part of flexural vibrations component at the end parse of inclined wedge-shaped structure elliptical vibration modal transducer, and two oscillating components have certain phase difference, and then be compounded to form elliptic vibrations at the end of inclined wedge-shaped structure elliptical vibration modal transducer.
Described friction-driven block is arranged on the front end of elliptical vibration modal transducer by welding, bonding or screw attachment mode, and friction-driven block contacts with the frictional layer on rotating disk.Two single-excitation ultrasonic oval vibration energy converter are linked together by the ring flange of support and single-excitation ultrasonic oval vibration energy converter, and support is used for fixing stator and installs precompression device, stators and rotators is connected formation bi-directional drive rotary ultrasonic motor in aggregates, between two single-excitation ultrasonic oval vibration energy converter axis after ring flange is fixed, angle is 20 degree ~ 160 degree.
Before not adding ultrasonic voltage signal and driving, the friction-driven block of two elliptical vibration modal transducer front ends simultaneously and rotor contact.
During work, one of them single-excitation ultrasonic oval vibration energy converter suspends, and another one single-excitation ultrasonic oval vibration energy converter works.Namely: send into negative DC voltage signal to the single-excitation ultrasonic oval vibration energy converter electrode slice needing to suspend, utilize piezoelectric effect to make this single-excitation ultrasonic oval vibration energy converter axial shrinkage, and then the friction-driven block of elliptical vibration modal transducer front end is suspended on rotor.The single-excitation ultrasonic oval vibration energy converter need carrying out driving work to another one sends into ultrasonic sinusoidal electric signals, namely this single-excitation ultrasonic oval vibration energy converter produces ultrasonic vibration, after ultrasonic vibrational energy is delivered to elliptical vibration modal transducer end from single-excitation ultrasonic oval vibration energy converter, be converted to the vertical curved composite ultrasonic elliptical vibratory of extensional vibration and the flexural vibrations compound with certain phase difference, be namely converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer end; And drive friction-driven block to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer end, and then rotor is driven to carry out continuous rotation motion.
When needs rotor is to another azimuthal rotational motion, exchange the ultrasonic electric signal type of drive of two single-excitation ultrasonic oval vibration energy converter.Compare the bi-directional drive rotary ultrasonic motor that existing document is introduced, this rotary ultrasonic motor has that power capacity is large, energy conversion efficiency is high, structure is simple, easy to manufacture, cost is low, the rigidity of structure is large, control-driven system is simple and the advantage such as vibration performance is stable.
Further, two single-excitation ultrasonic oval vibration energy converter of described bi-directional drive rotary ultrasonic motor have one group of extensional vibration piezoelectric ceramic piece respectively.
Further, two single-excitation ultrasonic oval vibration energy converter of described bi-directional drive rotary ultrasonic motor need a road ultrasonic electric signal excitation respectively.
Present invention employs the vertical curved composite ultrasonic elliptical vibratory that mechanical oscillation MODAL TRANSFORMATION OF A mechanism is converted to the extensional vibration of single-excitation ultrasonic oval vibration energy converter elliptical vibration modal transducer, simplify the overall structure of bi-directional drive rotary ultrasonic motor, greatly reduce the complexity of vibrational system, reduce manufacture, assembly difficulty and production cost, whole bi-directional drive rotary ultrasonic motor structure is simple, easy to manufacture, and cost is low; Two single-excitation ultrasonic oval vibration energy converter equal Zhi Xu mono-road ultrasonic electric signals of this invention encourage in addition, control difficulty is low, avoid the complicated ultrasonic-frequency power supply development cost that heterogeneous ultrasonic vibration is compounded to form elliptical vibration transducer, simplify control circuit and ultrasonic-frequency power supply structure, reduce control circuit and ultrasonic-frequency power supply cost, reduce control circuit and ultrasonic-frequency power supply volume, be easy to the microminiaturization realizing control circuit and ultrasonic-frequency power supply, integrated, improve reliability, service behaviour is more stable, has a extensive future.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is application example schematic diagram of the present invention.
Number in the figure illustrates: 1. bolt, 2. back shroud, 3. piezoelectric ceramic piece, 4. electrode slice, 5. front shroud, 6. ring flange, 7. elliptical vibration modal transducer, 8. rotating disk, 9. frictional layer, 10. friction-driven block, 11. supports, 12.A ultrasonic-frequency power supply, 13.B ultrasonic-frequency power supply
Embodiment
Shown in composition graphs 1,2, bi-directional drive rotary ultrasonic motor, comprises rotor and stator, and rotor comprises rotating disk 8 and is arranged on the frictional layer 9 on rotating disk 8 surface; Described stator comprises support 11, the identical and symmetrical energy conversion device by two covers that support 11 is fixing, often overlaps energy device and comprises a single-excitation ultrasonic oval vibration energy converter, an elliptical vibration modal transducer 7 and a friction-driven block 10 respectively; Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it comprises bolt 1 and is set in back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and the front shroud 5 on bolt 1 successively, front shroud 5 is provided with the ring flange 6 that can connect with support 11, back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5 are connected compression by bolt 1 by back shroud 2 and front shroud 5, constitute the energy conversion part of bi-directional drive rotary ultrasonic motor, the ultrasonic electric energy that A ultrasonic-frequency power supply 12 and B ultrasonic acoustic-electric source 13 export is converted to the ultrasonic vibrational energy of two single-excitation ultrasonic oval vibration energy converter.Two single-excitation ultrasonic oval vibration energy converter of this bi-directional drive rotary ultrasonic motor have one group of extensional vibration piezoelectric ceramic piece 3 respectively, piezoelectric ceramic transducer section diameter 30mm, and piezoelectric ceramic piece 3 material is PZT-8, is of a size of:
Ф 30 × Ф 15 × 5, the sheet number of piezoelectric ceramic piece 3 is 2.
Described elliptical vibration modal transducer 7 and front shroud 5 are made into the front end that an one-piece parts is arranged on front shroud 5, elliptical vibration modal transducer 7 entirety is inclined wedge-shaped structure, the former entirety of inclined wedge-shaped structure elliptical vibration modal transducer is cuboid, and the cross section length of side is 15
×15mm, long 40mm, inclined wedge-shaped structure is formed be cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction after, formed in two sides of inclined wedge-shaped, not cut side is parallel to single-excitation ultrasonic oval vibration energy converter axis, and the another side be cut becomes 10 degree of angles with single-excitation ultrasonic oval vibration energy converter axis.
Described friction-driven block 10 is by the bonding front end being arranged on elliptical vibration modal transducer 7, and friction-driven block 10 contacts with the frictional layer 9 on rotating disk 8.Two single-excitation ultrasonic oval vibration energy converter are linked together by the ring flange 6 of support 11 and single-excitation ultrasonic oval vibration energy converter, and support 11 is used for fixing stator and installs precompression device, stators and rotators is connected formation bi-directional drive rotary ultrasonic motor in aggregates, between two single-excitation ultrasonic oval vibration energy converter axis after ring flange 6 and support 11 are fixed, angle is 90 degree.
Two single-excitation ultrasonic oval vibration energy converter natural frequencys of bi-directional drive rotary ultrasonic motor are all 25.32KHz mutually, impedance is respectively 75 and 78 ohm, dynamic electric resistor is 18 and 16 ohm, two single-excitation ultrasonic oval vibration energy converter need a road ultrasonic electric signal excitation respectively, A ultrasonic-frequency power supply 12 and B ultrasonic acoustic-electric source 13, its output voltage range is 0-400V, current range is 0-4A, output frequency is 25.44 ± 0.01KHz, and A ultrasonic-frequency power supply 12 and B ultrasonic acoustic-electric source 13 all have automatic frequency tracking function in designated frequency range.
Before not adding ultrasonic voltage signal and driving, the friction-driven block 10 of two elliptical vibration modal transducer 7 front ends simultaneously and rotor contact.
During driving, negative DC voltage signal-300V is sent into needing the single-excitation ultrasonic oval vibration energy converter electrode slice 4 suspended, utilize piezoelectric effect to make this single-excitation ultrasonic oval vibration energy converter axial shrinkage, and then make the friction-driven block 10 of elliptical vibration modal transducer 7 front end be suspended on rotor; The single-excitation ultrasonic oval vibration energy converter need carrying out driving work to another one sends into ultrasonic sinusoidal electric signals, after the ultrasonic electric signal that B ultrasonic acoustic-electric source 13 is exported is linked into the electrode slice 4 of single-excitation ultrasonic oval vibration energy converter, namely this single-excitation ultrasonic oval vibration energy converter produces ultrasonic vibration, after ultrasonic vibrational energy is delivered to elliptical vibration modal transducer 7 end from single-excitation ultrasonic oval vibration energy converter, be converted to the vertical curved composite ultrasonic elliptical vibratory of extensional vibration and the flexural vibrations compound with certain phase difference, be namely converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration modal transducer 7 end; And drive friction-driven block 10 to do ultrasonic elliptical vibratory together with elliptical vibration modal transducer 7 end, and then rotor is driven to carry out continuous rotation motion.System after 10 minutes of running reaches stable vibration state, and the output voltage in B ultrasonic acoustic-electric source 13 is 240V, and electric current is 1.46A, and diameter is the edge peripheral linear speed peak value of the rotating disk 8 of 40mm is 55.3mm/s.
Exchange the ultrasonic electric signal type of drive of two single-excitation ultrasonic oval vibration energy converter, running the output voltage of A ultrasonic-frequency power supply 12 after 10 minutes is 240V, electric current is 1.48A, and rotor is to another azimuthal rotational motion, and its diameter is the edge peripheral linear speed peak value of the rotating disk 8 of 40mm is 55.9mm/s.
Claims (4)
1. bi-directional drive rotary ultrasonic motor, comprises rotor and stator, it is characterized in that: rotor comprises rotating disk and is arranged on the frictional layer of disc surfaces; Stator comprises support, the identical and symmetrical energy conversion device by two covers that support is fixing, often overlaps energy device and comprises a single-excitation ultrasonic oval vibration energy converter, an elliptical vibration modal transducer and a friction-driven block respectively; Described single-excitation ultrasonic oval vibration energy converter outline is cylindrical, it comprises bolt and is set in back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt successively, front shroud is provided with the ring flange that can connect with support, back shroud, piezoelectric ceramic piece, electrode slice and front shroud are connected compression by bolt by back shroud and front shroud; Described elliptical vibration modal transducer and front shroud are made into the front end that is integrally provided in front shroud, or also comprise a connection stud, for elliptical vibration modal transducer being connected in the front end of front shroud; Described elliptical vibration modal transducer is inclined wedge-shaped structure, the former entirety of inclined wedge-shaped structure elliptical vibration modal transducer is cuboid, inclined wedge-shaped structure is formed be cut a part along its side of single-excitation ultrasonic oval vibration energy converter axis direction after, formed in two sides of inclined wedge-shaped, not cut side is parallel to single-excitation ultrasonic oval vibration energy converter axis, and the another side be cut becomes 3-30 degree angle with the axis of single-excitation ultrasonic oval vibration energy converter; Described friction-driven block is arranged on the front end of elliptical vibration modal transducer; Angle between two single-excitation ultrasonic oval vibration energy converter axis after ring flange and support are fixed is 20 degree ~ 160 degree; Two single-excitation ultrasonic oval vibration energy converter of described bi-directional drive rotary ultrasonic motor have one group of extensional vibration piezoelectric ceramic piece respectively, and two single-excitation ultrasonic oval vibration energy converter of described bi-directional drive rotary ultrasonic motor need a road ultrasonic electric signal excitation respectively.
2. bi-directional drive rotary ultrasonic motor according to claim 1, is characterized in that: described friction-driven block is arranged on the front end of elliptical vibration modal transducer by welding.
3. bi-directional drive rotary ultrasonic motor according to claim 1, is characterized in that: described friction-driven block is by the bonding front end being arranged on elliptical vibration modal transducer.
4. bi-directional drive rotary ultrasonic motor according to claim 1, is characterized in that: also comprise a joint bolt, for friction-driven block being connected in the front end of elliptical vibration modal transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310373887.4A CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310373887.4A CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103414372A CN103414372A (en) | 2013-11-27 |
| CN103414372B true CN103414372B (en) | 2015-11-25 |
Family
ID=49607364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310373887.4A Expired - Fee Related CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103414372B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104444136A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptical vibration bidirectional precision conveying device |
| CN104467520A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptic vibration bidirectional precise conveying device |
| CN104410325A (en) * | 2014-12-09 | 2015-03-11 | 苏州科技学院 | Single-excitation rotating ultrasonic motor |
| CN106953539B (en) * | 2017-04-14 | 2019-04-12 | 哈尔滨工业大学 | Vertical-curved compound creeping motion type precision piezoelectric actuator and its motivational techniques |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2598490B2 (en) * | 1987-10-21 | 1997-04-09 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Rotary or linear motor whose armature is driven by ultrasonic vibration |
| US8446068B2 (en) * | 2010-01-06 | 2013-05-21 | Olympus Corporation | Ultrasonic motor |
| CN103199735A (en) * | 2013-05-08 | 2013-07-10 | 苏州科技学院 | Bi-directional driving rotary ultrasonic motor |
| CN203406799U (en) * | 2013-08-26 | 2014-01-22 | 苏州科技学院 | Bidirectional driving rotary ultrasonic motor |
-
2013
- 2013-08-26 CN CN201310373887.4A patent/CN103414372B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2598490B2 (en) * | 1987-10-21 | 1997-04-09 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Rotary or linear motor whose armature is driven by ultrasonic vibration |
| US8446068B2 (en) * | 2010-01-06 | 2013-05-21 | Olympus Corporation | Ultrasonic motor |
| CN103199735A (en) * | 2013-05-08 | 2013-07-10 | 苏州科技学院 | Bi-directional driving rotary ultrasonic motor |
| CN203406799U (en) * | 2013-08-26 | 2014-01-22 | 苏州科技学院 | Bidirectional driving rotary ultrasonic motor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103414372A (en) | 2013-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103414373B (en) | Single stimulated rotation ultrasonic motor | |
| CN103414370B (en) | Singly encourage linear ultrasonic motor | |
| CN103401470B (en) | Bi-directional drive linear ultrasonic motor | |
| CN103208943B (en) | A kind of single stimulated rotation ultrasonic motor | |
| CN103414372B (en) | Bi-directional drive rotary ultrasonic motor | |
| CN103199731B (en) | One singly encourages linear ultrasonic motor | |
| CN103199735B (en) | A kind of bi-directional drive rotary ultrasonic motor | |
| CN103208944B (en) | A kind of single-electrical signal drives rotary ultrasonic motor | |
| CN203406799U (en) | Bidirectional driving rotary ultrasonic motor | |
| CN103199734B (en) | A kind of single-electrical signal drives two-way rotary ultrasonic motor | |
| CN103414375B (en) | Single-electrical signal drives rotary ultrasonic motor | |
| CN203457073U (en) | Bidirectionally driven linear ultrasonic motor | |
| CN204271946U (en) | A kind of single-electrical signal drives rotary ultrasonic motor | |
| CN104467529A (en) | Bi-directional driving rotation ultrasonic motor | |
| CN103227584B (en) | A kind of bi-directional drive linear ultrasonic motor | |
| CN203406800U (en) | Single excitation rotary ultrasonic motor | |
| CN203261258U (en) | Single electric signal drive-for-rotation ultrasonic motor | |
| CN203406797U (en) | Single excitation linear ultrasonic motor | |
| CN203406802U (en) | Single electric signal driving bidirectional rotary ultrasonic motor | |
| CN204271947U (en) | A kind of single stimulated rotation ultrasonic motor | |
| CN104362897A (en) | Single-electric-signal-driven rotary ultrasonic motor | |
| CN103414374B (en) | Single-electrical signal drives two-way rotary ultrasonic motor | |
| CN204271944U (en) | A kind of bi-directional drive rotary ultrasonic motor | |
| CN104410325A (en) | Single-excitation rotating ultrasonic motor | |
| CN203225676U (en) | Bidirectional driving rotary ultrasonic motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20170826 |