CN103414372A - Two-way driving rotating ultrasonic motor - Google Patents
Two-way driving rotating ultrasonic motor Download PDFInfo
- Publication number
- CN103414372A CN103414372A CN2013103738874A CN201310373887A CN103414372A CN 103414372 A CN103414372 A CN 103414372A CN 2013103738874 A CN2013103738874 A CN 2013103738874A CN 201310373887 A CN201310373887 A CN 201310373887A CN 103414372 A CN103414372 A CN 103414372A
- Authority
- CN
- China
- Prior art keywords
- ultrasonic
- modal transformation
- ultrasonic vibration
- elliptical vibration
- elliptical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a two-way driving rotating ultrasonic motor. A rotor comprises a rotating disc and a friction layer arranged on the surface of the rotating disc. A stator comprises a support, two same ultrasonic vibration transducers, two same elliptic vibration mode convertors and two same friction driving blocks, wherein the two same ultrasonic vibration transducers are fixed through the support, and the two same friction driving blocks are arranged at the front ends of the elliptic vibration mode convertors respectively. The elliptic vibration mode convertors are arranged at the front ends of the ultrasonic vibration transducers respectively and of an inclined-wedge-shaped structure, and the elliptic vibration mode convertors can convert longitudinal ultrasonic vibration produced by the ultrasonic vibration transducers to longitudinal and bent composite ultrasonic elliptic vibration at the tail ends of the elliptic vibration mode convertors and on the friction driving blocks. When the two ultrasonic vibration transducers work alone, the two corresponding friction driving blocks drive the rotor to do unceasing rotating movement.
Description
Technical field
The present invention relates to utilize the ultrasound electric machine field of piezoelectric ceramic inverse piezoelectric effect, especially relate to a kind of bi-directional drive rotary ultrasonic motor.
Background technology
Rotary ultrasonic motor is a kind of novel electrical micro-machine that develops rapidly and apply the eighties in 20th century, to utilize the inverse piezoelectric effect of piezoelectric to realize the electric coupling apparatus that electric energy-mechanical energy is changed, by the rubbing action between stator and rotor, the macroscopic view that elastomeric micro breadth oscillation is converted to rotor rotatablely moves, and directly drives load.Because it has that volume is little, lightweight, low-speed big, noise is little, response is fast, positioning precision is high, without electromagnetic interference and the advantage such as environmental suitability is strong, in technical fields such as medical treatment, Aero-Space, robot, MEMS, obtained increasingly extensive application.
The problems such as in existing rotary-type ultrasound electric machine, mainly adopt the outer flexural vibration mode of face to be combined into the capable ripple of end face, and drive the rotor rotation at present, the ubiquity driving moment is little, and axial volume is large, the internal-and external diameter contact zone wearing and tearing difference of rotor is large; In addition, even adopted in plane vibration mode, in order to apply the radial tightening power in face, the disk of oscillator or rotor or annulus are made two semi-discs or semicircular ring, middle by spring, be connected into disk or annulus to apply the radial tightening power in face, also be difficult at present realize large torque, and functional reliability is low.At publication number, be CN101030740A, denomination of invention is in the patent documentation of " bending-rotation ultrasonic motor of single-phase driving ", the structure that discloses a kind of body is the single-phase driving standing wave rotary ultrasonic motor of taper, this motor relies on six piezoelectric ceramic pieces that are superimposed together vertically to excite the vibration of stator, and six piezoelectric ceramic pieces rely on clamp nut and last item cover to be fixed on axis.Although this motor has the advantages such as output torque is larger, but six piezoelectric ceramic pieces of motor will mutually stagger and 60 install by the polarization subregion, its complex structure, and the screw (revolving force) because of clamp nut in the compaction process of piezoelectric ceramic piece very easily causes between piezoelectric ceramic piece and misplaces, be difficult to guarantee the specification requirement of dislocation 60 degree between adjacent piezoelectric ceramic piece; In addition, between this motor stator and rotor, be not with any positioner, this makes stator and rotor contact position precision between the two be affected, and then affects the stability of motor torque and speed; Thereby there is complex structure in this type of rotary ultrasonic motor, high to the contact position required precision between stator and rotor, manufacture is installed more difficult, the defects such as poor stability of motor torque and speed.
Summary of the invention
The invention provides a kind of novel bi-directional drive rotary ultrasonic motor, purpose is the deficiency existed in above-mentioned rotary ultrasonic motor in order to overcome.
The bi-directional drive rotary ultrasonic motor, comprise rotor and stator, and rotor comprises rotating disk and is arranged on the frictional layer of disc surfaces; Two identical ultrasonic vibration transducers, two identical elliptical vibration MODAL TRANSFORMATION OF A devices and two identical friction-driven pieces that described stator comprises support, fixes by support; Described ultrasonic vibration transducer outline is cylindrical, it comprises bolt and is set in successively back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt, on front shroud, be provided with and can connect with support the ring flange of use, back shroud and front shroud connect back shroud, piezoelectric ceramic piece, electrode slice and front shroud to compress by bolt, formed the power conversion part of bi-directional drive rotary ultrasonic motor, the ultrasonic electric energy of A ultrasonic-frequency power supply and the output of B ultrasonic acoustic-electric source has been converted to the ultrasonic vibrational energy of two ultrasonic vibration transducers.
Described elliptical vibration MODAL TRANSFORMATION OF A device and front shroud are made into the front end of a whole installation at front shroud, perhaps utilize an additional connection double-screw bolt elliptical vibration MODAL TRANSFORMATION OF A device to be connected in to the front end of front shroud, elliptical vibration MODAL TRANSFORMATION OF A device is the inclined wedge-shaped structure, the former integral body of inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device is cuboid, after being cut a part, ultrasonic vibration transducer axis direction one side forms the inclined wedge-shaped structure, form in two sides of inclined wedge-shaped, a cut parallel sided is not in the ultrasonic vibration transducer axis, the another side be cut becomes 3-30 degree angle with the ultrasonic vibration transducer axis.
The purpose that makes elliptical vibration MODAL TRANSFORMATION OF A device form the inclined wedge-shaped structure is in order to change the mode of oscillation of ultrasonic vibration transducer, its extensional vibration model frequency and flexural vibration mode frequency are approached or equate, existence due to inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device, the longitudinal ultrasonic vibration that the ultrasonic vibration transducer produces is after being delivered to inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device, end at inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device is decomposed into a part of extensional vibration component and a part of flexural vibrations component, and two oscillating components have certain phase difference, and then be compounded to form the elliptical orbit vibration at the end of inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device.
Described friction-driven piece is arranged on the front end of elliptical vibration MODAL TRANSFORMATION OF A device by welding, bonding or screw attachment mode, the friction-driven piece contacts with the frictional layer on rotating disk.Two ultrasonic vibration transducers are linked together by the ring flange of support and ultrasonic vibration transducer, and support is used for fixing stator and the precompression device is installed, stator is connected to formation bi-directional drive rotary ultrasonic motor in aggregates with rotor, between two ultrasonic vibration transducer axis after ring flange is fixing, angle is 20 degree ~ 160 degree.
Before not adding ultrasonic voltage signal driver, the friction-driven piece of two elliptical vibration MODAL TRANSFORMATION OF A device front ends contacts with rotor simultaneously.
During work, one of them ultrasonic vibration transducer suspends, the work of another one ultrasonic vibration transducer.Be namely: to the ultrasonic vibration transducer electrode sheet that needs suspend, send into the negative DC voltage signal, utilize piezoelectric effect to make this ultrasonic vibration transducer axial shrinkage, and then the friction-driven piece of elliptical vibration MODAL TRANSFORMATION OF A device front end is suspended on rotor.The ultrasonic vibration transducer that need drive work to another one is sent into ultrasonic sinusoidal electric signals, this ultrasonic vibration transducer namely produces ultrasonic vibration, after ultrasonic vibrational energy is delivered to elliptical vibration MODAL TRANSFORMATION OF A device end from the ultrasonic vibration transducer, be converted to extensional vibration and the compound vertical curved composite ultrasonic elliptical vibratory of flexural vibrations with certain phase difference, namely be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration MODAL TRANSFORMATION OF A device end; And drive the friction-driven piece and elliptical vibration MODAL TRANSFORMATION OF A device end is done ultrasonic elliptical vibratory together, and then drive rotor and carry out the continuous rotation motion.
When the needs rotor moved to another direction rotation, the ultrasonic electric signal driver mode of two ultrasonic vibration transducers of exchange got final product.Compare the bi-directional drive rotary ultrasonic motor of existing Introduction of Literatures, this rotary ultrasonic motor has that power capacity is large, energy conversion efficiency is high, simple in structure, easy to manufacture, cost is low, the rigidity of structure is large, control-driven system is simple and the advantage such as vibration performance is stable.
Further, two of described bi-directional drive rotary ultrasonic motor ultrasonic vibration transducers have one group of extensional vibration piezoelectric ceramic piece respectively.
Further, two of described bi-directional drive rotary ultrasonic motor ultrasonic vibration transducers need a road ultrasonic electric signal excitation respectively.
The present invention has adopted mechanical oscillation MODAL TRANSFORMATION OF A mechanism the extensional vibration of ultrasonic vibration transducer to be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration MODAL TRANSFORMATION OF A device, simplified the overall structure of bi-directional drive rotary ultrasonic motor, greatly reduce the complexity of vibrational system, manufacture, assembly difficulty and production cost have been reduced, whole bi-directional drive rotary ultrasonic motor is simple in structure, easy to manufacture, and cost is low; Two of this invention equal Zhi Xu mono-road ultrasonic electric signals of ultrasonic vibration transducer encourage in addition, the control difficulty is low, avoided heterogeneous ultrasonic vibration to be compounded to form the complicated ultrasonic-frequency power supply development cost of elliptical vibration transducer, control circuit and ultrasonic-frequency power supply structure have been simplified, control circuit and ultrasonic-frequency power supply cost have been reduced, control circuit and ultrasonic-frequency power supply volume have been reduced, be easy to realize the microminiaturization of control circuit and ultrasonic-frequency power supply, integrated, improved reliability, service behaviour is more stable, has a extensive future.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is application example schematic diagram of the present invention.
Number in the figure explanation: 1. bolt, 2. back shroud, 3. piezoelectric ceramic piece, 4. electrode slice, 5. front shroud, 6. ring flange, 7. elliptical vibration MODAL TRANSFORMATION OF A device, 8. rotating disk, 9. frictional layer, 10. friction-driven piece, 11. supports, 12. A ultrasonic-frequency power supplies, 13. B ultrasonic acoustic-electric sources
Embodiment
Shown in Fig. 1,2, the bi-directional drive rotary ultrasonic motor, comprise rotor and stator, and rotor comprises rotating disk 8 and is arranged on the frictional layer 9 on rotating disk 8 surfaces; Described stator comprises support 11, passes through support 11 fixing two identical ultrasonic vibration transducers, two identical elliptical vibration MODAL TRANSFORMATION OF A devices 7 and two identical friction-driven pieces 10; Described ultrasonic vibration transducer outline is cylindrical, it comprises bolt 1 and is set in successively back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and the front shroud 5 on bolt 1, on front shroud 5, be provided with and can connect with support 11 ring flange 6 of use, back shroud 2 and front shroud 5 connect back shroud 2, piezoelectric ceramic piece 3, electrode slice 4 and front shroud 5 to compress by bolt 1, formed the power conversion part of bi-directional drive rotary ultrasonic motor, the ultrasonic electric energy of A ultrasonic- frequency power supply 12 and 13 outputs of B ultrasonic acoustic-electric source has been converted to the ultrasonic vibrational energy of two ultrasonic vibration transducers.Two ultrasonic vibration transducers of this bi-directional drive rotary ultrasonic motor have one group of extensional vibration piezoelectric ceramic piece 3 respectively, piezoelectric ceramic transducer section diameter 30mm, and piezoelectric ceramic piece 3 materials are PZT-8, are of a size of:
Ф 30 * Ф 15 * 5, the sheet number of piezoelectric ceramic piece 3 is 2.
Described elliptical vibration MODAL TRANSFORMATION OF A device 7 and front shroud 5 are made into the front end that an one-piece parts is arranged on front shroud 5, elliptical vibration MODAL TRANSFORMATION OF A device 7 integral body are the inclined wedge-shaped structure, the former integral body of inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device is cuboid, and the cross section length of side is 15
*15mm, long 40mm, after being cut a part, ultrasonic vibration transducer axis direction one side forms the inclined wedge-shaped structure, form in two sides of inclined wedge-shaped, a cut parallel sided is not in the ultrasonic vibration transducer axis, and the another side be cut becomes 10 degree angles with the ultrasonic vibration transducer axis.
Described friction-driven piece 10 is by the bonding front end that is arranged on elliptical vibration MODAL TRANSFORMATION OF A device 7, and friction-driven piece 10 contacts with the frictional layer 9 on rotating disk 8.Two ultrasonic vibration transducers are linked together by the ring flange 6 of support 11 and ultrasonic vibration transducer, and support 11 is used for fixing stator and the precompression device is installed, stator is connected to formation bi-directional drive rotary ultrasonic motor in aggregates with rotor, between two ultrasonic vibration transducer axis after ring flange 6 and support 11 is fixing, angle is 90 degree.
Two ultrasonic vibration transducer natural frequencys of bi-directional drive rotary ultrasonic motor are all 25.32KHz mutually, impedance is respectively 75 and 78 ohm, dynamic electric resistor is 18 and 16 ohm, two ultrasonic vibration transducers need a road ultrasonic electric signal excitation respectively, A ultrasonic-frequency power supply 12 and B ultrasonic acoustic-electric source 13, its output voltage range is 0-400V, current range is 0-4A, output frequency is 25.44 ± 0.01KHz, and A ultrasonic-frequency power supply 12 and B ultrasonic acoustic-electric source 13 all have the automatic frequency tracking function in designated frequency range.
Before not adding ultrasonic voltage signal driver, the friction-driven piece 10 of two elliptical vibration MODAL TRANSFORMATION OF A device 7 front ends contacts with rotor simultaneously.
During driving, to the ultrasonic vibration transducer electrode sheet 4 that needs suspend, send into negative DC voltage signal-300V, utilize piezoelectric effect to make this ultrasonic vibration transducer axial shrinkage, and then the friction-driven piece 10 of elliptical vibration MODAL TRANSFORMATION OF A device 7 front ends is suspended on rotor; The ultrasonic vibration transducer that need drive work to another one is sent into ultrasonic sinusoidal electric signals, after the ultrasonic electric signal 13 outputs of B ultrasonic acoustic-electric source is linked into the electrode slice 4 of ultrasonic vibration transducer, this ultrasonic vibration transducer namely produces ultrasonic vibration, after ultrasonic vibrational energy is delivered to elliptical vibration MODAL TRANSFORMATION OF A device 7 ends from the ultrasonic vibration transducer, be converted to extensional vibration and the compound vertical curved composite ultrasonic elliptical vibratory of flexural vibrations with certain phase difference, namely be converted to the vertical curved composite ultrasonic elliptical vibratory of elliptical vibration MODAL TRANSFORMATION OF A device 7 ends; And drive friction-driven piece 10 and elliptical vibration MODAL TRANSFORMATION OF A device 7 ends are done ultrasonic elliptical vibratory together, and then drive rotor and carry out the continuous rotation motion.The system after 10 minutes of moving reaches the stable vibration state, and the output voltage in B ultrasonic acoustic-electric source 13 is 240V, and electric current is 1.46A, and diameter is that the edge peripheral linear speed peak value of the rotating disk 8 of 40mm is 55.3mm/s.
The ultrasonic electric signal driver mode of two ultrasonic vibration transducers of exchange, moving the output voltage of A ultrasonic-frequency power supply 12 after 10 minutes is 240V, electric current is 1.48A, and rotor is to another direction rotation motion, and its diameter is that the edge peripheral linear speed peak value of the rotating disk 8 of 40mm is 55.9mm/s.
Claims (6)
1. the bi-directional drive rotary ultrasonic motor, comprise rotor and stator, it is characterized in that: rotor comprises rotating disk and is arranged on the frictional layer of disc surfaces; Two identical ultrasonic vibration transducers, two identical elliptical vibration MODAL TRANSFORMATION OF A devices and two identical friction-driven pieces that stator comprises support, fixes by support; Described ultrasonic vibration transducer outline is cylindrical, it comprises bolt and is set in successively back shroud, piezoelectric ceramic piece, electrode slice and the front shroud on bolt, on front shroud, be provided with and can connect with support the ring flange of use, back shroud and front shroud connect back shroud, piezoelectric ceramic piece, electrode slice and front shroud to compress by bolt; Described elliptical vibration MODAL TRANSFORMATION OF A device is arranged on the front end of front shroud, for the inclined wedge-shaped structure, the former integral body of inclined wedge-shaped structure elliptical vibration MODAL TRANSFORMATION OF A device is cuboid, after being cut a part, ultrasonic vibration transducer axis direction one side forms the inclined wedge-shaped structure, form in two sides of inclined wedge-shaped, a cut parallel sided is not in the ultrasonic vibration transducer axis, and the another side be cut becomes 3-30 degree angle with the ultrasonic vibration transducer axis; Described friction-driven piece is arranged on the front end of elliptical vibration MODAL TRANSFORMATION OF A device; Between two ultrasonic vibration transducer axis after ring flange and support are fixing, angle is 20 degree ~ 160 degree.
2. bi-directional drive rotary ultrasonic motor according to claim 1, it is characterized in that: described elliptical vibration MODAL TRANSFORMATION OF A device and front shroud are made into the front end of a whole installation at front shroud.
3. bi-directional drive rotary ultrasonic motor according to claim 1, is characterized in that: also comprise that connects a double-screw bolt, for elliptical vibration MODAL TRANSFORMATION OF A device being connected in to the front end of front shroud.
4. according to claim 1 or 2 or 3 described bi-directional drive rotary ultrasonic motors, it is characterized in that: described friction-driven piece is arranged on the front end of elliptical vibration MODAL TRANSFORMATION OF A device by welding.
5. according to claim 1 or 2 or 3 described bi-directional drive rotary ultrasonic motors, it is characterized in that: described friction-driven piece is by the bonding front end that is arranged on elliptical vibration MODAL TRANSFORMATION OF A device.
6. according to claim 1 or 2 or 3 described bi-directional drive rotary ultrasonic motors, it is characterized in that: also comprise a joint bolt, for the friction-driven piece being connected in to the front end of elliptical vibration MODAL TRANSFORMATION OF A device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310373887.4A CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310373887.4A CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103414372A true CN103414372A (en) | 2013-11-27 |
CN103414372B CN103414372B (en) | 2015-11-25 |
Family
ID=49607364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310373887.4A Expired - Fee Related CN103414372B (en) | 2013-08-26 | 2013-08-26 | Bi-directional drive rotary ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103414372B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104410325A (en) * | 2014-12-09 | 2015-03-11 | 苏州科技学院 | Single-excitation rotating ultrasonic motor |
CN104444136A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptical vibration bidirectional precision conveying device |
CN104467520A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptic vibration bidirectional precise conveying device |
CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2598490B2 (en) * | 1987-10-21 | 1997-04-09 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Rotary or linear motor whose armature is driven by ultrasonic vibration |
US8446068B2 (en) * | 2010-01-06 | 2013-05-21 | Olympus Corporation | Ultrasonic motor |
CN103199735A (en) * | 2013-05-08 | 2013-07-10 | 苏州科技学院 | Bi-directional driving rotary ultrasonic motor |
CN203406799U (en) * | 2013-08-26 | 2014-01-22 | 苏州科技学院 | Bidirectional driving rotary ultrasonic motor |
-
2013
- 2013-08-26 CN CN201310373887.4A patent/CN103414372B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2598490B2 (en) * | 1987-10-21 | 1997-04-09 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Rotary or linear motor whose armature is driven by ultrasonic vibration |
US8446068B2 (en) * | 2010-01-06 | 2013-05-21 | Olympus Corporation | Ultrasonic motor |
CN103199735A (en) * | 2013-05-08 | 2013-07-10 | 苏州科技学院 | Bi-directional driving rotary ultrasonic motor |
CN203406799U (en) * | 2013-08-26 | 2014-01-22 | 苏州科技学院 | Bidirectional driving rotary ultrasonic motor |
Non-Patent Citations (1)
Title |
---|
王应彪: ""超声椭圆振动换能器有限元动力学仿真研究"", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》, no. 2, 15 February 2012 (2012-02-15), pages 29 - 38 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104410325A (en) * | 2014-12-09 | 2015-03-11 | 苏州科技学院 | Single-excitation rotating ultrasonic motor |
CN104444136A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptical vibration bidirectional precision conveying device |
CN104467520A (en) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | Single-excitation ultrasonic elliptic vibration bidirectional precise conveying device |
CN106953539A (en) * | 2017-04-14 | 2017-07-14 | 哈尔滨工业大学 | The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques |
CN106953539B (en) * | 2017-04-14 | 2019-04-12 | 哈尔滨工业大学 | Vertical-curved compound creeping motion type precision piezoelectric actuator and its motivational techniques |
Also Published As
Publication number | Publication date |
---|---|
CN103414372B (en) | 2015-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103414373B (en) | Single stimulated rotation ultrasonic motor | |
CN103414370B (en) | Singly encourage linear ultrasonic motor | |
CN103401470B (en) | Bi-directional drive linear ultrasonic motor | |
CN103208943B (en) | A kind of single stimulated rotation ultrasonic motor | |
CN103414372B (en) | Bi-directional drive rotary ultrasonic motor | |
CN203406799U (en) | Bidirectional driving rotary ultrasonic motor | |
CN103199735B (en) | A kind of bi-directional drive rotary ultrasonic motor | |
CN103208944B (en) | A kind of single-electrical signal drives rotary ultrasonic motor | |
CN203457073U (en) | Bidirectionally driven linear ultrasonic motor | |
CN103199734B (en) | A kind of single-electrical signal drives two-way rotary ultrasonic motor | |
CN103414375B (en) | Single-electrical signal drives rotary ultrasonic motor | |
CN203406797U (en) | Single excitation linear ultrasonic motor | |
CN203261258U (en) | Single electric signal drive-for-rotation ultrasonic motor | |
CN204271946U (en) | A kind of single-electrical signal drives rotary ultrasonic motor | |
CN103227584B (en) | A kind of bi-directional drive linear ultrasonic motor | |
CN203406800U (en) | Single excitation rotary ultrasonic motor | |
CN203406802U (en) | Single electric signal driving bidirectional rotary ultrasonic motor | |
CN203225675U (en) | Bidirectional-driving linear ultrasonic motor | |
CN104467529A (en) | Bi-directional driving rotation ultrasonic motor | |
CN104362897A (en) | Single-electric-signal-driven rotary ultrasonic motor | |
CN103414374B (en) | Single-electrical signal drives two-way rotary ultrasonic motor | |
CN203225676U (en) | Bidirectional driving rotary ultrasonic motor | |
CN203406801U (en) | Single electric signal driving rotary ultrasonic motor | |
CN204271947U (en) | A kind of single stimulated rotation ultrasonic motor | |
CN203225677U (en) | Single-excitation rotary ultrasonic motor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20170826 |