CN103863821B - Mask transmitting device and method - Google Patents
Mask transmitting device and method Download PDFInfo
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- CN103863821B CN103863821B CN201210528214.7A CN201210528214A CN103863821B CN 103863821 B CN103863821 B CN 103863821B CN 201210528214 A CN201210528214 A CN 201210528214A CN 103863821 B CN103863821 B CN 103863821B
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Abstract
The invention provides a kind of mask transmitting device, including the first mask plate store, second mask plate store, prealignment mechanism, first transmission mechanism and the second transmission mechanism, described mask passes through described first transmission mechanism at described first mask plate store, transmit between second mask plate store and described prealignment mechanism, described mask by described second transmission mechanism in described mask platform, transmit between described prealignment mechanism and the second mask plate store, described first transmission mechanism and described second transmission mechanism all include mechanical hand, single axial movement system and cylinder, described single axial movement system and described cylinder drive described mechanical hand to move along two mutually perpendicular directions respectively.The present invention realizes mechanical hand by the superposition use of single axial movement system and cylinder and moves in two mutually perpendicular directions, the system using multiple single-degree-of-freedom instead of multivariant mechanical hand, it is provided that the simpler efficient mask transmitting device of a kind of operation and control and method.
Description
Technical field
The present invention relates to a kind of semiconductor manufacturing equipment technical field, particularly relate to a kind of mask transmitting device and side
Method.
Background technology
At present, along with more and more higher to the requirement of semicon industry productivity, the requirement to the reliability of litho machine is the most continuous
Improve.It is known that affect the chip transmission that depends primarily on of litho machine reliability, mask transmission subsystem.Refer to Fig. 1,
It is litho machine structural representation, and mask transmission system 10 is by mask transmission to mask platform 1, and the light that illuminator sends is thrown
Shadow mask passes projection objective 2, imaging on the silicon chip of the absorption of sports platform 3.
Mask transmits the expensive cost due to mask and high accuracy, and has high reliability, the requirement of high security.
In United States Patent (USP) (patent No.: US 6,634,851 B1), mask transmitting device is by the machinery that can realize multifreedom motion
Hands takes version from mask memory block, by prealignment mechanism, is put in mask platform by the mask meeting certain repeatability requirement
It is exposed.The mechanical hand using this multifreedom motion there is problems in that
1, multivariant mechanical hand easily collides with surrounding, causes mask to damage, or mechanical hand damages；
2, Multi-freedom-degreemanipulator manipulator structure, control system is complicated, with high costs；
3, the protection mechanism of Multi-freedom-degreemanipulator manipulator is mainly consideration safety from software, this greatly reduces real
Safety.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of operation and the simpler efficient mask transmission dress of control
Put and method.
For solving this technical problem, the invention provides a kind of mask transmitting device, be used for mask and covered
Transmission between template library and mask platform, including the first mask plate store, the second mask plate store, prealignment mechanism, the first conveyer
Structure and the second transmission mechanism, described mask passes through described first transmission mechanism at described first mask plate store, the second mask
Transmit between storehouse and described prealignment mechanism, described mask by described second transmission mechanism in described mask platform, described pre-
Transmitting between aligning guide and the second mask plate store, described first transmission mechanism and described second transmission mechanism all include machinery
Hands, single axial movement system and cylinder, described single axial movement system and described cylinder drive described mechanical hand along orthogonal respectively
Both direction motion.
Described single axial movement system drives described mechanical hand to move along a straight line by a driving motor, and described cylinder is at least
Including a piston moved along a straight line, described driving motor is connected by a pedestal and described piston are fixing.
Being provided with a long guideway bottom described mechanical hand, described cylinder is provided with a cylinder guide rail along its piston movement direction,
Described long guideway is orthogonal with described cylinder guide rail to intersect, and described cylinder guide rail is provided with first passed for described long guideway
Opening, described long guideway is provided with the second opening passed for described cylinder guide rail.
Described first transmission mechanism and the second transmission mechanism the most also include that one is pitched in order to load the version of mask, described version
Fork is arranged at the end of described mechanical hand.
Version fork in described first transmission mechanism is provided with the locking for locking mask controlled by locking cylinder
Device.
Version fork in described second transmission mechanism is provided with one for the vacuum absorption device adsorbing mask.
Described first mask plate store and the second mask plate store all include elevating mechanism, in order to place the version box of mask, use
To fix and to unlock fixed mechanism and the protective cover of described version box, described mask is placed in described version box, described elevator
Structure controls described fixed mechanism and the lifting of version box, described elevating mechanism and described fixed mechanism are each provided in described protective cover.
Described prealignment mechanism includes measurement system and the rotation and lifting system measuring described mask position, described mask
Version is installed in described rotation and lifting system by an adsorbent equipment.
Described measurement system include facing light source that mask arranges and two be located in described rotation and lifting system with
The sensor that described light source is corresponding.
Described light source is located at a light source bracket fixing relative to position with described mask transmitting device, described light source bracket
Non-interference with described mechanical hand.
Present invention also offers a kind of mask transmission method, use the mask transmitting device that the present invention provides to mask
Version is transmitted.
When using the first transmission mechanism, mechanical hand is being preset with bottom in the driving direction of motion of single axial movement system
Position, the first prealignment station and handing-over position, first edition storehouse, mechanical hand is being preset with first edition storehouse in the air cylinder driven direction of motion
Station before front station and second edition storehouse；
When using the second transmission mechanism, mechanical hand is being preset with bottom in the driving direction of motion of single axial movement system
Position, the second prealignment station, handing-over position, second edition storehouse and mask platform handing-over position；Mechanical hand is preset in the air cylinder driven direction of motion
There is behind the second edition storehouse station before station and mask platform.
Handing-over position, described first edition storehouse, described first prealignment station and position, described bottom are arranged in order, described mask
Before handing-over position, described first edition storehouse and first edition storehouse, during station, complete the handing-over transmission between first edition storehouse and mechanical hand simultaneously,
Described mask completes mechanical hand and described prealignment system before described first prealignment station and second edition storehouse simultaneously during station
Handing-over transmission between system；
Described mask platform handing-over position, handing-over position, described second edition storehouse, described second prealignment station and position, described bottom depend on
Secondary arrangement, described mask simultaneously before described mask platform handing-over position and described mask platform station complete mask platform and mechanical hand it
Between handing-over transmission, described mask simultaneously completes machinery during station after described second prealignment station and described second edition storehouse
Handing-over transmission between hands and described pre-alignment system.
When the robot movement of the first transmission mechanism or the second transmission mechanism is to described first prealignment position, the second prealignment
When position or position, bottom, the first high-frequency signal will be triggered；When board send require that described mechanical hand moves along air cylinder driven direction time,
The second high-frequency signal will be triggered；Only when described first high-frequency signal is triggered with described second high-frequency signal simultaneously, machinery
Hands could realize moving along air cylinder driven direction.
The present invention is used by the superposition of single axial movement system and cylinder and realizes mechanical hand in two mutually perpendicular directions
On move, use the system of multiple single-degree-of-freedom to instead of multivariant mechanical hand, reduce design complexities, with
Time, use the simplest cylinder rather than another single axial movement system realize on specific direction linear
Motion, improves reliability, also reduces cost, it is provided that the simpler efficient mask transmitting device of a kind of operation and control
And method.
Accompanying drawing explanation
Fig. 1 is litho machine structural representation；
Fig. 2 is the plan structure schematic diagram of the mask transmitting device that one embodiment of the invention provides；
Fig. 3 is the structural representation in the version storehouse that one embodiment of the invention provides；
Fig. 4 is the structural representation of the version fork of the first transmission mechanism that one embodiment of the invention provides；
Fig. 5 is the structural representation of the version fork of the second transmission mechanism that one embodiment of the invention provides；
Fig. 6 is the structural representation of the first transmission mechanism that one embodiment of the invention provides；
Fig. 7 is the structural representation of the second transmission mechanism that one embodiment of the invention provides；
Fig. 8 is the structural representation of the pre-alignment system that one embodiment of the invention provides；
Fig. 9 is the long guideway structural representation with cylinder guide rail of one embodiment of the invention offer；
Figure 10 is that the Y-direction of the first transmission mechanism of the mask transmission method that one embodiment of the invention provides is preset station and shown
It is intended to；
Figure 11 is that the Y-direction of the second transmission mechanism of the mask transmission method that one embodiment of the invention provides is preset station and shown
It is intended to；
Figure 12 is that the X of the first transmission mechanism of the mask transmission method that one embodiment of the invention provides shows to default station
It is intended to；
Figure 13 is that the X of the second transmission mechanism of the mask transmission method that one embodiment of the invention provides shows to default station
It is intended to；
Figure 14 is the Y-direction prealignment handing-over station schematic diagram of the mask transmission method that one embodiment of the invention provides；
Figure 15 is the electrical system schematic diagram of the mask transmission method that one embodiment of the invention provides；
1 mask platform in figure；2 projection objectives；3 sports platforms；10 mask transmitting devices；
8 editions forks；9 rotation and lifting systems；11 cylinders；12 mechanical hands；14 second mask plate stores；15 sensings
Device；16 adsorbent equipments；24 first mask plate stores；
13 editions boxes；19 fixed mechanisms；31 elevating mechanisms；17 protective covers；
55 locking devices；52 vacuum absorption devices；
51 pedestals；50 drive motor；
30 light sources；
41 cylinder guide rails；42 long guideways；43 first openings；44 second openings；
Position bottom 60；63a the first prealignment station；Handing-over position, 61a first edition storehouse；63b second edition storehouse joins
Position；61b the second prealignment station；62 mask platform handing-over positions；
Station before 65a first edition storehouse；Station before 66a second edition storehouse；Station before 65b mask platform；The 66b second edition
Station behind storehouse；
86 lowest orders；87 first handing-over positions；88 second handing-over positions；89 prealignment positions；
80,81,82,83 signal is triggered.
Detailed description of the invention
Below with reference to accompanying drawing, mask transmitting device and the mask transmission method of the present invention are described in detail,
It is only the present invention one preferred embodiment, it is believed that those skilled in the art can without departing from the present invention spirit and
In the range of, according to the known general knowledge of this area the present invention polished and revise.
Refer to Fig. 2, present embodiments provide a kind of mask transmitting device 10, be used for mask at mask plate store
And the transport between mask platform, including first mask plate store the 24, second mask plate store 14, prealignment mechanism, the first transmission mechanism
With the second transmission mechanism, described mask passes through described first transmission mechanism at described first mask plate store the 24, second mask
Transmit between storehouse 14 and described prealignment mechanism, described mask by described second transmission mechanism in described mask platform 1, described
Transmitting between prealignment mechanism and the second mask plate store 14, described first transmission mechanism and described second transmission mechanism all include machine
Tool hands 12, single axial movement system and cylinder 11, described single axial movement system and described cylinder 11 drive described mechanical hand 12 respectively
Move along two mutually perpendicular directions.
In the present embodiment, as in figure 2 it is shown, mechanical hand 12 described in described single axial movement system drive moves along Y direction,
Described cylinder 11 drives described mechanical hand 12 to move in the X-axis direction.X-axis and Y-axis are all located at horizontal plane.Z axis is perpendicular to X-axis Y-axis
Place plane, the coordinate axes the most vertically arranged
The present embodiment is used by the superposition of single axial movement system and cylinder 11 and realizes mechanical hand 12 mutually perpendicular two
Move on individual direction, use the system of multiple single-degree-of-freedom to instead of multivariant mechanical hand, reduce design complexity
Degree, meanwhile, uses cylinder 11 rather than another single axial movement system realizes the linear movement on specific direction, improves reliable
Property, also reduce cost, it is provided that the simpler efficient mask transmitting device of a kind of operation and control and method.
Described single axial movement system drives described mechanical hand 12 to move along a straight line by a driving motor 50, described cylinder
11 at least include a piston (not shown) moved along a straight line, and described driving motor 50 is by a pedestal 51 and described piston
Fixing connection.The present embodiment by piston and drives motor 50 to connect by pedestal 51, thus by two axial motion contacts of X, Y
Together, and then mechanical hand 12 can be moved respectively along X, Y-axis.Wherein, motor 50 is driven to may be installed on pedestal 51.
Being provided with a long guideway 42 bottom described mechanical hand 12, described cylinder 11 is provided with a cylinder along its piston movement direction
Guide rail 41, described long guideway 42 is orthogonal with described cylinder guide rail 41 to intersect, and described cylinder guide rail 41 is provided with for described length
The first opening 43 that guide rail 42 passes, described long guideway 42 is provided with the second opening 44 passed for described cylinder guide rail 41.
In the present embodiment, by arranging long guideway 42 and cylinder guide rail 41, described first opening is set thereon simultaneously
43 and second the purpose of opening 44 be to ensure that described cylinder 11 and described mechanical hand 12 are only carried out along X-axis at default station
With the displacement of Y-axis, in other cases, any movement of mechanical hand 12 all can be due to described long guideway 42 and described cylinder
The effect of guide rail 41 stops mutually and cannot realize mobile.In the present embodiment, described first opening 43 is located at 12, mechanical hand
Station 66b behind station 65b and second edition storehouse before station 66a, mask platform before station 65a, second edition storehouse before described first edition storehouse
Time cylinder guide rail 41 correspondence position；Described second opening 44 is positioned at position, described bottom 60, first for mechanical hand 12 and is directed at station
63a, handing-over position, first edition storehouse 61a, handing-over position, second edition storehouse 63b, the second prealignment station 61b and mask platform handing-over position 62 duration
The correspondence position of guide rail.Above-mentioned guide rail is set and can obtain the effect of mechanical protection.
Refer to Fig. 2, described first transmission mechanism and the second transmission mechanism the most also include one in order to load mask
Version fork 8, described version fork 8 is arranged at the end of described mechanical hand 12.Refer to Fig. 4, the version fork 8 in described first transmission mechanism sets
There is a locking device 55 for locking mask controlled by locking cylinder.Refer to Fig. 5, in described second transmission mechanism
Version fork 8 be provided with one for the vacuum absorption device 52 adsorbing mask.
Refer to Fig. 3, described first mask plate store 24 and described second mask plate store 14 all include elevating mechanism 31, in order to
Place the version box 13 of mask, in order to fix and to unlock fixed mechanism 19 and the protective cover 17 of described version box 13, described mask
Being placed in described version box 13, described elevating mechanism 31 controls described fixed mechanism 19 and the lifting of version box 13, described elevator
Structure 31 and described fixed mechanism 19 are each provided in described protective cover 17.
Described prealignment mechanism includes measurement system and the rotation and lifting system 9 measuring described mask position, described in cover
Masterplate is installed in described rotation and lifting system 9 by an adsorbent equipment 16.
Described measurement system include facing light source 30 that mask arranges and two be located in described rotation and lifting system 9
The sensor 15 corresponding with described light source 30.Described light source 30 with colimated light system, and and the sensor 15 that matches in order to
Confirm the position of mask, be connected with board, have confirmed that the deviation of itself and ideal position, and by it along X-axis, Y-axis and Rz direction
Side-play amount all feed back to board, board completes the offset compensation on Rz direction by described rotary lifting mechanism 9.
Described light source 30 is located at a light source bracket fixing relative to position with described mask transmitting device, and described light source props up
Frame is non-interference with described mechanical hand 12, to ensure that mechanical hand 12 can normal operation.
Present invention also offers a kind of mask transmission method, use the mask transmitting device 10 that the present invention provides to covering
Masterplate is transmitted.
Use the first transmission mechanism time, mechanical hand 12 in the driving direction of motion of single axial movement system (in this reality
Execute in example, i.e. in Y direction) it is preset with bottom position the 60, first prealignment station 63a and handing-over position, first edition storehouse 61a, mechanical hand
Before (in the present embodiment, i.e. X-direction on) is preset with first edition storehouse 12 driving along cylinder 11 in the direction of motion station 65a and
Station 66a before second edition storehouse；
Use the second transmission mechanism time, mechanical hand 12 in the driving direction of motion of single axial movement system (in this reality
Execute in example, i.e. in Y direction) it is preset with bottom position the 60, second prealignment station 63b, second edition storehouse handing-over position 61b and mask platform
Handing-over position 62；Mechanical hand 12 drives in the direction of motion (in the present embodiment, i.e. X-direction on) to be preset with the second edition along cylinder 11
Station 65b before station 66b and mask platform behind storehouse.
Described first edition storehouse handing-over position 61a, described first prealignment station 63a and position, described bottom 60 are arranged in order, institute
State mask before described first edition storehouse handing-over position 61a and first edition storehouse, during station 65a, complete first edition storehouse 24 and machinery simultaneously
Handing-over transmission between hands 12, the while of described mask before described first prealignment station 63a and the second edition storehouse during station 66a
Complete the handing-over transmission between mechanical hand 12 and described pre-alignment system；
Described mask platform handing-over position 62, described second edition storehouse handing-over position 61b, described second prealignment station 63b and described
Position 60, bottom is arranged in order, and the while of described mask, before described mask platform handing-over position 62 and described mask platform, station 65b completes
Handing-over transmission between mask platform 1 and mechanical hand 12, described mask is simultaneously at described second prealignment station 63b and described the
The handing-over transmission between mechanical hand 12 and described pre-alignment system is completed during station 66b behind two editions storehouses.
See Figure 15, when the mechanical hand 12 of the first transmission mechanism or the second transmission mechanism moves to described first prealignment position
When 63a, the second prealignment position 63b or position 60, bottom, the first high-frequency signal will be triggered；Described mechanical hand 12 is required when board sends
Along cylinder 11 driving direction move time, will trigger the second high-frequency signal；Only high with described second when described first high-frequency signal
Frequently, when signal is triggered simultaneously, mechanical hand 12 could realize moving along cylinder 11 driving direction.
The idiographic flow transmitted mask below with reference to Figure 10 to Figure 14 is described in detail.
By mask during the first mask plate store 24 transports mask platform, first, by the first transmission mechanism
Mechanical hand 12 is driven by driving motor 50 and cylinder 11, and station 65a before moving to first edition storehouse along X-axis moves to first along Y-axis
Version handing-over position, storehouse 61a, simultaneously by the first mask plate store 24 by the action of elevating mechanism 31 to corresponding position, first passes
The mechanical hand 12 of transfer mechanism stretches in the first mask plate store 24, after completing handing-over, locks mask by locking device 55, then
By driving motor 50 to make mechanical hand 12 move along Y direction, exit the first mask plate store 24, mobile to the first prealignment work
Position 63a.
By cylinder 11 along X-direction mobile manipulator 12, until station 66a before second edition storehouse, refer to Figure 14, its
In, Z axis is perpendicular to X-axis Y-axis place plane, the coordinate axes the most vertically arranged, and described rotation and lifting system 9 is by described suction
Adsorption device 16 is down to the first handing-over position 87, described first handing-over position 87 and described first prealignment station 63a and second along Z axis liter
Before version storehouse, the matched of station 66a, after being handed off to by mask on described adsorbent equipment 16, opens described adsorbent equipment 16
Adsorption function so that it is adsorb mask.
After having joined, the mechanical hand 12 of the first transmission mechanism moves to position 60, bottom along Y direction, transports along X-direction
Move station 65a before first edition storehouse, prepare to take version next time.
Described prealignment mechanism rises to prealignment position 89 along Z axis and carries out prealignment, during prealignment, by light source 30
With the effect of sensor 15, two rice font labellings on detection mask, gather position signalling, and then draw mask and reason
Think the X of the position side-play amount in, Y-direction and Rz direction, and complete the side-play amount on Rz direction by rotation and lifting system 9 and mend
Repay.
Then, the mechanical hand 12 of the second transmission mechanism is by cylinder 11 and drives motor 50, moves to second edition storehouse along X-axis
Rear station 66b, moves to the second prealignment station 63b along Y-axis, and rotation and lifting system is down to the second handing-over position 88, and described second
The matched of station 66b behind handing-over position 88 and the second prealignment station 63b and second edition storehouse, the absorption dress in prealignment mechanism
Putting 16 closedowns, mask is adsorbed by the vacuum absorption device 52 being pitched 8 ends by the version of the mechanical hand 12 of the second transmission mechanism
Complete handing-over.After having joined, rotation and lifting system 9 is down to lowest order 86.Then, by the mechanical hand of the second transmission mechanism
12 move in Y direction, complete the compensation of side-play amount in Y-direction, owing to cylinder can only move at point-to-point transmission
Cannot be carried out quantitative fine setting to move, so temporarily cannot be carried out the compensation of side-play amount on X axis.
Finally, the mechanical hand 12 of the second transmission mechanism is driven mobile to station 65b before mask platform, along Y along X-axis by cylinder 11
Axle mobile joins position 62 to mask platform by driving motor 50 to drive, mask platform switch to the most simultaneously with mask platform before station 65b and
The handing-over position that mask platform handing-over position 62 matches, joins, closes the adsorption of vacuum absorption device 52, complete mask
Version is handed off to the operation of mask platform.After completing handing-over, the X-axis of the mask that mask platform records before reading in prealignment mechanism
Side-play amount upwards, compensates.
By mask during mask platform transports the second mask plate store 14, first, by the second transmission mechanism
Mechanical hand 12 moves along the x-axis to mask platform station 65b, moves along Y-axis and joins position 62 to mask platform, and vacuum absorption device 52 is inhaled
Attached mask, after completing handing-over, mechanical hand 12 moves along the x-axis to the second edition storehouse station 66b, then along Y-axis by driving motor
50 drive mobile to handing-over position, second edition storehouse 61b, simultaneously the elevating mechanism 31 in the second mask plate store 14 also version box is moved to
Join height accordingly, close vacuum absorption device 52, complete handing-over.
In sum, the present invention is used by the superposition of single axial movement system and cylinder and realizes mechanical hand mutually perpendicular
Move in both direction, use the system of multiple single-degree-of-freedom to instead of multivariant mechanical hand, reduce design multiple
Miscellaneous degree, meanwhile, use that the simplest cylinder of structure rather than another single axial movement system realize on specific direction is linear
Motion, improves reliability, also reduces cost, it is provided that the simpler efficient mask transmitting device of a kind of operation and control
And method.
Claims (11)
1. a mask transmitting device, has been used for mask transmission between mask plate store and mask platform, and its feature exists
In: include the first mask plate store, the second mask plate store, prealignment mechanism, the first transmission mechanism and the second transmission mechanism, described in cover
Masterplate is passed between described first mask plate store, the second mask plate store and described prealignment mechanism by described first transmission mechanism
Defeated, described mask by described second transmission mechanism described mask platform, described prealignment mechanism and the second mask plate store it
Between transmit, described first transmission mechanism and described second transmission mechanism all include mechanical hand, single axial movement system and cylinder, described
Single axial movement system and described cylinder drive described mechanical hand to move along two mutually perpendicular directions respectively；Described prealignment machine
Structure includes measurement system and the rotation and lifting system measuring described mask position, and described mask is installed by an adsorbent equipment
In described rotation and lifting system；
Described prealignment mechanism gathers position signalling, and then show that the X of described mask and ideal position is to, Y-direction and Rz direction
On side-play amount, and complete the offset compensation on Rz direction by described rotation and lifting system；Transmit by described second
The mechanical hand of mechanism moves in Y direction, completes the compensation of side-play amount in Y-direction；Complete to be handed off to cover by mask
After the operation of die station, on the X axis of the described mask that described mask platform records before reading in described prealignment mechanism
Side-play amount, compensates.
2. mask transmitting device as claimed in claim 1, it is characterised in that: described single axial movement system passes through a driving
Motor drives described mechanical hand to move along a straight line, and described cylinder at least includes a piston moved along a straight line, described driving electricity
Machine is connected by a pedestal and described piston are fixing.
3. mask transmitting device as claimed in claim 1, it is characterised in that: it is provided with a long guideway bottom described mechanical hand,
Described cylinder is provided with a cylinder guide rail, described long guideway and the described orthogonal friendship of cylinder guide rail along its piston movement direction
Fork, described cylinder guide rail is provided with the first opening passed for described long guideway, and described long guideway is provided with leads for described cylinder
The second opening that rail passes.
4. mask transmitting device as claimed in claim 1, it is characterised in that: described first transmission mechanism and the second conveyer
Structure the most also includes that one is pitched in order to load the version of mask, and described version fork is arranged on the end of described mechanical hand.
5. mask transmitting device as claimed in claim 4, it is characterised in that: the version fork in described first transmission mechanism is provided with
One locking device for locking mask controlled by locking cylinder.
6. mask transmitting device as claimed in claim 4, it is characterised in that: the version fork in described second transmission mechanism is provided with
One for adsorbing the vacuum absorption device of mask.
7. mask transmitting device as claimed in claim 1, it is characterised in that: described first mask plate store and the second mask
Storehouse all includes elevating mechanism, in order to place the version box of mask, in order to fix and to unlock fixed mechanism and the protection of described version box
Cover, described mask is placed in described version box, and described elevating mechanism controls described fixed mechanism and the lifting of version box, described liter
Descending mechanism and described fixed mechanism are each provided in described protective cover.
8. mask transmitting device as claimed in claim 1, it is characterised in that: described measurement system includes facing mask
Arrange light source and two be located at sensor corresponding with described light source in described rotation and lifting system.
9. a mask transmission method, it is characterised in that: use such as claim 1 to 8 one of arbitrarily described mask biography
Mask is transmitted by defeated device.
10. mask transmission method as claimed in claim 9, it is characterised in that: when using the first transmission mechanism, mechanical hand
Position, bottom, the first prealignment station and handing-over position, first edition storehouse it is being preset with in the driving direction of motion of single axial movement system,
Mechanical hand station before station and second edition storehouse before being preset with first edition storehouse in the air cylinder driven direction of motion；
Use the second transmission mechanism time, mechanical hand be preset with in the driving direction of motion of single axial movement system bottom position,
Second prealignment station, handing-over position, second edition storehouse and mask platform handing-over position；Mechanical hand is preset with in the air cylinder driven direction of motion
Station before station and mask platform behind second edition storehouse；
Handing-over position, described first edition storehouse, described first prealignment station and position, described bottom are arranged in order, and described mask is simultaneously
The handing-over transmission between first edition storehouse and mechanical hand is completed during station before handing-over position, described first edition storehouse and first edition storehouse, described
Mask complete during station before described first prealignment station and second edition storehouse simultaneously mechanical hand and described pre-alignment system it
Between handing-over transmission；
Described mask platform handing-over position, handing-over position, described second edition storehouse, described second prealignment station and position, described bottom are arranged successively
Row, the while of described mask, before described mask platform handing-over position and described mask platform, station completes between mask platform and mechanical hand
Handing-over transmission, described mask complete during station after described second prealignment station and described second edition storehouse simultaneously mechanical hand with
Handing-over transmission between described pre-alignment system.
11. mask transmission methods as claimed in claim 10, it is characterised in that: when the first transmission mechanism or the second conveyer
When the robot movement of structure is to described first prealignment position, the second prealignment position or position, bottom, the first high-frequency signal will be triggered；When
Board sends and requires when described mechanical hand moves along air cylinder driven direction, will trigger the second high-frequency signal；Only when described first
When high-frequency signal and described second high-frequency signal are triggered simultaneously, mechanical hand could realize moving along air cylinder driven direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210528214.7A CN103863821B (en) | 2012-12-07 | 2012-12-07 | Mask transmitting device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210528214.7A CN103863821B (en) | 2012-12-07 | 2012-12-07 | Mask transmitting device and method |
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| Publication Number | Publication Date |
|---|---|
| CN103863821A CN103863821A (en) | 2014-06-18 |
| CN103863821B true CN103863821B (en) | 2016-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210528214.7A Active CN103863821B (en) | 2012-12-07 | 2012-12-07 | Mask transmitting device and method |
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| CN (1) | CN103863821B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109388031A (en) | 2017-08-11 | 2019-02-26 | 上海微电子装备（集团）股份有限公司 | Mask Transmission system and method, lithographic equipment and method |
| CN110361936B (en) * | 2018-03-26 | 2021-03-12 | 上海微电子装备（集团）股份有限公司 | Mask thickness detection device, storage mechanism, transmission mechanism and photoetching system |
| CN110658687B (en) * | 2018-06-29 | 2021-05-07 | 上海微电子装备（集团）股份有限公司 | Mask transmission device and method |
| CN111621740B (en) * | 2019-02-28 | 2021-07-16 | 上海微电子装备（集团）股份有限公司 | Transmission device, transmission method and net-opening device |
| CN112342494A (en) * | 2019-08-07 | 2021-02-09 | 宁波星河材料科技有限公司 | High-flux discrete mask device |
| CN114280897B (en) * | 2021-12-28 | 2024-01-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Mask plate transmission assembly and lithography system |
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| CN103863821A (en) | 2014-06-18 |
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