CN103842130A - Method for polishing board-like body, and apparatus for polishing board-like body - Google Patents
Method for polishing board-like body, and apparatus for polishing board-like body Download PDFInfo
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- CN103842130A CN103842130A CN201280007243.7A CN201280007243A CN103842130A CN 103842130 A CN103842130 A CN 103842130A CN 201280007243 A CN201280007243 A CN 201280007243A CN 103842130 A CN103842130 A CN 103842130A
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- Prior art keywords
- flatness
- mentioned
- grinding
- plate body
- polished
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
This method for polishing a board-like body is provided with: a planarity measuring step wherein planarity of a board-like body surface to be polished is measured; and a polishing step wherein the surface of which the planarity has been measured is polished by means of a polishing tool by relatively pressing and relatively rotating the surface and the polishing tool to each other. Polishing conditions in the polishing step are changed on the basis of the planarity of the surface, said planarity having been measured in the planarity measuring step.
Description
Technical field
The present invention relates to a kind of Ginding process of plate body and the lapping device of plate body.
Background technology
An example as the FPD such as liquid crystal display (Flat Panel Display/ flat-panel monitor) by the manufacture method of glass plate, the known float glass process manufacture method that has used the forming process that is called as float glass process.This manufacture method has following operation: forming process, supply with melten glass to the surface of the middle motlten metal of storing of molten metal bath (float bath), and form ribbon glass plate; Cut-out/chamfering process, cuts into above-mentioned ribbon glass plate the rectangular glass of preliminary dimension, and to cut-out and the circumference of rectangular glass carry out grinding; Grinding step, grinds the face that is polished of above-mentioned rectangular glass by lapping device, grind and remove this and be polished small concavo-convex, the ripple of face; And inspection operation, rectangular glass after clean grinding finishes, mensuration is polished the flatness (be the size of the deformation of the apparent height that causes such as small concavo-convex, the ripple that exists of surface because being polished face, be defined as the ratio (ripple height/ripple spacing) of ripple height with respect to ripple spacing) of face.Through these operations, by rectangular glass manufacture be suitable for FPD glass plate, thickness is 0.2～1.5mm and the high glass plate of flatness.
Patent documentation 1 discloses batch formula lapping device taking FPD glass plate as object.The lapping device of patent documentation 1 has film body, and this film body is made up of the film frame that adsorbs and keep the suction sheet of glass plate and set up this suction sheet.By this lapping device, between above-mentioned film body and the fixture of installation film body, supply with pressure fluid, it is upper that the face that is polished of the glass plate being kept by suction sheet absorption is pressed to grinding pad (milling tool) by pressure by pressure fluid, and make that glass plate is relative with grinding pad and rotate (rotation and/or revolution) to grind the above-mentioned face that is polished.
In addition, in above-mentioned inspection operation, check that the flatness of the face that is polished of the glass plate after grinding is whether being suitable in the FPD specification value of glass plate.The inspection of this flatness is for example carried out with disclosed existing flatness determinator in patent documentation 2.
The flatness determinator of patent documentation 2 has: light source, by the patterned illumination with light and shade periodically to glass plate; Light receiving unit, accepts the pattern that has seen through the pattern of glass plate or reflected; Flatness determination unit, with respect to the departing from of light and shade cycle of the pattern of light source, calculates the flatness of the face that is polished of glass plate according to the light and shade cycle that is subject to light image.And flatness determination unit has: equalization unit, will be subject to the light and shade equalization in size in the light image region corresponding with the light and shade cycle of pattern that is irradiated to glass plate; Processing unit, the equalization signal that utilizes equalization unit to export, output is for determining the deformation place of surface configuration and the signal of deflection of glass plate.
According to the flatness determinator of patent documentation 2, by the patterned illumination with light and shade periodically to glass plate, the pattern that acceptance has seen through the pattern of glass plate or reflected, be subject to the departing from of light and shade cycle (with respect to the departing from of light and shade cycle of pattern that is irradiated to glass plate) of light image for detecting, to be subject to the light and shade equalization in size in the light image region corresponding with the light and shade cycle of pattern that is irradiated to glass plate, according to equalization the flatness of the face that is polished of calculated signals glass plate.
Prior art document
Patent documentation
Patent documentation 1: the JP 2004-122351 of Japan communique
Patent documentation 2: No. 3411829 communique of Japan's special permission
Summary of the invention
The problem that invention will solve
In existing batch of formula lapping device, for making flatness in specification value, in grinding step, based on following reason, by actual amount of grinding set for than the amount of grinding of best amount of grinding of being estimated the flatness for meeting specification value slightly more grind.
, this is because in the glass plate before grinding, the flatness of the face that is polished of each glass plate different, therefore in the time of the grinding condition abrading glass plate with identical, possibly cannot make the flatness of the face that is polished of all glass plates all in specification value.Therefore, actual amount of grinding is set for slightly more than the amount of grinding of estimating, even if the flatness of each glass plate is different, also can be made the flatness of the face that is polished of all glass plates in specification value.
In other words,, in the time of the low glass plate of the grinding condition ground flat degree the high glass plate of flatness is realized to best amount of grinding, amount of grinding is less, thereby flatness is beyond specification value.Therefore, the low glass plate of flatness is realized to the grinding condition of best amount of grinding, not only the low glass plate of ground flat degree, goes back the glass plate that ground flat degree is high, thereby makes the flatness of the face that is polished of all glass plates in specification value.
But, in above-mentioned Ginding process, there is following problem: with the high glass plate of amount of grinding ground flat degree on necessity, therefore milling time is elongated, the production efficiency step-down of glass plate.
In view of the above problems, its object is the Ginding process of the plate body that a kind of production efficiency that can improve plate body is provided and the lapping device of plate body in the present invention.
For the means of dealing with problems
For achieving the above object, the invention provides a kind of Ginding process of plate body, have: flatness is measured operation, measure the flatness of the face that is polished of plate body; And grinding step, the face that is polished of the above-mentioned plate body of flatness has been measured in grinding, in this grinding step, rotate relative with above-mentioned milling tool of the face that is polished that makes above-mentioned plate body in the face that is polished and the milling tool of the above-mentioned plate body of pushing, and grind the face that is polished of above-mentioned plate body by above-mentioned milling tool, according to the flatness of measuring the face that is polished of the above-mentioned plate body of measuring in operation in above-mentioned flatness, change the grinding condition of above-mentioned grinding step.
For achieving the above object, the invention provides a kind of lapping device of plate body, have: flatness determination unit, the flatness of the face that is polished of mensuration plate body; Grinding unit, the face that is polished of the above-mentioned plate body of flatness has been measured in grinding, this grinding unit makes rotate relative with above-mentioned milling tool of the face that is polished of above-mentioned plate body in the face that is polished and the milling tool of the above-mentioned plate body of pushing, and grinds the face that is polished of above-mentioned plate body by above-mentioned milling tool; And control module, according to the flatness of the face that is polished of the above-mentioned plate body of measuring by above-mentioned flatness determination unit, change the grinding condition of above-mentioned grinding unit.
The present invention is taking following Ginding process and lapping device as object: in the face that is polished of pushing plate body and milling tool, make rotate relative with milling tool of the face that is polished of plate body, and grinding the face that is polished of plate body by milling tool., the present invention grinds batch formula Ginding process of 1 plate body and lapping device as object so that patent documentation 1 is disclosed by 1 milling tool.; Ginding process of the present invention and lapping device be not taking following continous way Ginding process and lapping device as object: disclosed continous way Ginding process and the lapping devices such as such as Japan's JP 2007-190657 communique and International Publication 2011/074616A1 communique;; along many milling tools of direction of transfer configuration of plate body; in transmitting continuously multiple plate bodys with certain speed, grind gradually the face that is polished of plate body by many milling tools.In addition, with after the 1st rough tool corase grind, be to criticize formula by the 2nd Ginding process that fine grinding tool refines and lapping device by 1 plate body, be therefore object of the present invention.
According to the present invention, first, before grinding plate body, by flatness determination unit, each plate body is measured the flatness of the face that is polished of plate body.Then, control module calculates the best amount of grinding corresponding with above-mentioned flatness to each plate body, calculates the best grinding condition corresponding with this best amount of grinding, and the grinding condition of grinding unit is changed to above-mentioned best grinding condition.Therefore, the face that is polished of plate body is ground with the best grinding condition corresponding with flatness.So, according to the present invention, compare with existing lapping device, the production efficiency of plate body improves.
Yes for above-mentioned best amount of grinding for making the amount of grinding of flatness in specification value, is the distribution peak value (mean value) of the flatness of the face that is polished after being configured to make to grind more approaches specification value amount of grinding than the peak value of the distribution of the flatness of existing Ginding process.Thus, compared to the prior art the present invention, has shortened the milling time as one of grinding condition, thereby the production efficiency of plate body is improved.
And, said grinding condition in the present invention, when grinding pressure one timing, milling time is representational grinding condition.In the present invention, because being batch formula, so can change by plate body the milling time of multiple plate bodys that (FEEDFORWARD CONTROL) flatness differs from one another.In contrast, in above-mentioned continous way lapping device, each of the multiple plate bodys that are difficult to flatness to differ from one another is controlled milling time., this is because above-mentioned continous way lapping device is the device that transmits plate body with certain speed, in other words, is the device that milling time is certain.
In addition, grinding condition is not only milling time, also comprises that milling tool is with respect to other grinding conditions such as the relative rotation speeds of grinding pressure, milling tool and the plate body of the face that is polished of plate body, but preferably changes milling time by flatness.This be because, from the angle of apparatus structure and control system structure, change above-mentioned grinding pressure with by plate body, above-mentioned rotating speed is compared, make above-mentioned grinding pressure, that above-mentioned rotating speed necessarily and only changes milling time is comparatively easy.
And, in the Ginding process and lapping device with above-mentioned rough tool and above-mentioned fine grinding tool, control at least milling time of any one in rough tool and fine grinding tool.For example, in the time that measured flatness significantly departs from respect to specification flatness, the milling time of rough tool is changed to longer.And, when measured flatness departs from when minimum with respect to specification flatness, the milling time of rough tool is changed to the utmost point short time, and the milling time of fine grinding tool is also changed to the short time.That is, preferably, change according to measured flatness, so that total milling time of rough tool and fine grinding tool is the shortest milling time.
A kind of mode of Ginding process of the present invention is preferred, in the subsequent handling of above-mentioned grinding step, there is flatness and measure again operation, in measuring operation again, this flatness is again determined at the flatness of the face that is polished of the above-mentioned plate body after grinding in above-mentioned grinding step, according to the flatness of the face that is polished of the above-mentioned plate body of measuring, further change the grinding condition of above-mentioned grinding step in above-mentioned flatness is measured operation again.
A kind of mode of lapping device of the present invention is preferred, there is flatness determination unit again, this flatness again determination unit is measured again by the flatness of the face that is polished of the above-mentioned plate body after above-mentioned grinding unit grinding, above-mentioned control module, according to the flatness of the face that is polished by the above-mentioned flatness above-mentioned plate body that determination unit is measured again, further changes the grinding condition of above-mentioned grinding unit.
According to a kind of mode of the present invention, the flatness of the face that is polished based on by after the flatness grinding that determination unit is measured again, further changes the grinding conditions such as (FEEDBACK CONTROL) milling time.That is, in a kind of mode of the present invention, according to the flatness of the face that is polished after grinding, the milling time changing according to the flatness of the face that is polished before grinding is finely tuned, therefore can manufacture the flatness uniform plate body of little quality that fluctuates.
In addition, in the present invention, according to the difference of the surface state of the plate body before grinding, may exist the flatness of the face that is polished after grinding to depart from the plate body of specification value, preferably best amount of grinding is set for and made the frequency of this plate body that departs from specification value at below 0.5%, preferably below 0.3% of its batch (sum total) entirety.By the flatness plate body that determination unit detection departs from specification value again, preferably again grind by the grinding unit of having finely tuned milling time afterwards.The plate body that so, can make to depart from specification value is in specification value.And, for improving the production efficiency of plate body, also can after determination unit, other grinding units be set again in above-mentioned flatness, again grind by these other grinding units the plate body that departs from specification value and make flatness in specification value.,, according to by the above-mentioned flatness flatness that determination unit is measured again, set the milling time of above-mentioned other grinding units by above-mentioned control module.
A mode of Ginding process of the present invention is preferred, in above-mentioned grinding step, configure many above-mentioned milling tools, by plate body feed unit, the above-mentioned plate body of having measured flatness in above-mentioned flatness mensuration operation is distributed to 1 milling tool being supplied in above-mentioned many milling tools.
A mode of lapping device of the present invention is preferred, the above-mentioned milling tool of many above-mentioned grinding units of configuration, the lapping device of described plate body has plate body feed unit, and the above-mentioned plate body of having measured flatness by above-mentioned flatness determination unit is distributed 1 milling tool being supplied in above-mentioned many milling tools by this plate body feed unit.
According to a kind of mode of the present invention, can improve the operational efficiency of grinding step, further improve the production efficiency of plate body.And, also can in many milling tools, set respectively different milling times by milling tool, the corresponding milling time based on measure the flatness of measuring in operation in flatness, is assigned to this plate body on the milling tool corresponding with this milling time.
Invention effect
According to the lapping device of the Ginding process of plate body of the present invention and plate body, can improve the production efficiency of plate body.
Brief description of the drawings
Fig. 1 is the stereogram of wanting portion's structure that represents the lapping device of the plate body of the 1st embodiment.
Fig. 2 is the block diagram of the structure of the lapping device shown in presentation graphs 1.
Fig. 3 is the flow chart that represents the manufacturing process of FPD glass plate.
Fig. 4 is the block diagram of the flatness of the face that is polished before the grinding of multiple glass plates of 1 batch.
Fig. 5 is the block diagram of the flatness of the face that is polished after grinding by existing Ginding process.
Fig. 6 is the block diagram of the flatness of the face that is polished after grinding by the Ginding process of embodiment.
Fig. 7 is the block diagram that represents the structure of the lapping device of the 2nd embodiment.
Detailed description of the invention
The preferred embodiment of the Ginding process of plate body of the present invention and the lapping device of plate body is described in detail in detail below, with reference to the accompanying drawings.
Fig. 1 is the stereogram of wanting portion's structure that represents the lapping device 10 of the plate body of the 1st embodiment.Fig. 2 is the block diagram of the structure of the lapping device 10 shown in presentation graphs 1.The lapping device 10 of embodiment is using 1 disclosed batch of formula lapping device of patent documentation as basic structure.Therefore, the portion's structure of only indicating in Fig. 1, Fig. 2, other apparatus structures are identical with the lapping device of patent documentation 1, and therefore the description thereof will be omitted.
Lapping device 10 is following lapping devices: will be on one side for example that more than 600mm glass plate (plate body) G grinds to form thickness, for example 0.2mm～1.5mm that FPD glass plate needs, and the face that is polished of glass plate G is ground to form to the required flatness of FPD glass plate.
As shown in Figure 2, lapping device 10 has: cut-out/facing attachment 12, the ribbon glass plate (not shown) that Xu Lenglu from float forming device (not shown) (not shown) is sent cuts into predetermined rectangular glass G (with reference to Fig. 1), and its circumference of grinding; Flatness determinator (flatness determination unit: flatness is measured operation) 14, the flatness of the face that is polished of mensuration glass plate G; Glass plate feedway 18, is supplied to grind section (grinding unit: grinding step) 16 by the glass plate G that has measured flatness; Grind section 16, grinds the face that is polished of supplying with the glass plate G coming; Flatness is determinator (flatness again determination unit, flatness is measured operation again) 20 again, cleans the glass plate G that has ground the face that is polished, and again measures the flatness of the face that is polished; And controller (control module) 22.
Controller 22 has following functions: according to the flatness of the face that is polished of the glass plate G measuring in flatness determinator 14, change the function of the milling time (grinding condition) of grind section 16; With according to the flatness of the face that is polished of the glass plate G measuring in determinator 20 again in flatness, further change the function of the milling time (grinding condition) of grind section 16.In addition, controller 22 changes the control of the milling time of grind section 16, must carry out according to the flatness of the face that is polished before the grinding of implementing in flatness determinator 14, but and needn't carry out according to the flatness of the face that is polished after the grinding of implementing in determinator 20 again in flatness.But controller 22 is controlled milling time according to the flatness of the face that is polished after grinding, this can finely tune towards specification value the amount of grinding of grind section 16, therefore preferred.In addition, flatness determinator 14 and flatness again determinator 20 are same devices, are the disclosed known devices of patent documentation 2, and therefore at this, the description thereof will be omitted.
Next, the grinding head 28 of grind section 16 is described, due to the grinding head 28 of the 1st grind section 24 and grinding head 28 structures of the 2nd grind section 26 identical, be therefore marked with identical label and describe.
Grinding head 28 has the fixture 30 of basket shape and the upper surface main shaft 32 connected vertically with fixture 30.Main shaft 32 is connected with the output shaft of not shown motor via reducing gear, transmits the driving force of above-mentioned motor, thereby makes fixture 30 rotation centered by the C1 of the axle center of main shaft 32.And, on main shaft 32, be connected with not shown revolution mechanism, by the driving force of this revolution mechanism, centered by vertical axis core C2, revolve round the sun.Further, on main shaft 32, be connected with not shown elevating mechanism, by the driving force lifting of this elevating mechanism.So, fixture 30 is mobile with respect to the grinding pad (milling tool) 34 of the 1st grind section 24 and the grinding pad (milling tool) of the 2nd grind section 26 36 advance and retreat.The lower surface of fixture 30 is provided with above-mentioned film frame.Therefore,, in the time that fixture 30 turnover are moved, upper surface is adsorbed the face that is polished and grinding pad 34,36 butts of the glass plate G of the lower surface of the above-mentioned suction sheet that remains on above-mentioned film frame.
Grinding pad 34 is arranged on the upper surface of grinding plate 38, is connected with the rotating shaft of not shown motor in the bottom of grinding plate 38.And grinding pad 36 is arranged on the upper surface of grinding plate 40, be connected with the rotating shaft of not shown motor in the bottom of grinding plate 40.Therefore,, by driving above-mentioned motor, make grinding plate 38,40 centered by the axle center of above-mentioned rotating shaft, rotate (rotation and/or revolution).
And, the lower surface of fixture 30 has recess (not shown), between the above-mentioned suction sheet of this recess and above-mentioned film body, form air chamber (not shown), supply with compressed-air actuated fluid supply apparatus (not shown) to this recess and be connected to fixture 30 via swivel joint (not shown).Above-mentioned compressed air is being supplied to after above-mentioned air chamber, and compressed-air actuated pressure is sent to glass plate G via above-mentioned suction sheet, by this pressure, the face that is polished of glass plate G is pressed to grinding pad 34,36 and grinds.By the abrasive action of such a grind section 16, the face that is polished of abrading glass plate G, removes small concavo-convex, the ripple of the surface existence of the face that is polished.
Fig. 3 is the flow chart that represents an example of the manufacturing process of FPD glass plate G.
According to Fig. 3, formed by following operation: forming process (S1), melten glass is supplied to the surface of the motlten metal of molten metal bath, embark on journey for ribbon glass plate; Cut-out/chamfering process (S2), is cut to ribbon glass plate by cut-out/facing attachment 12 the glass plate G of preliminary dimension the circumference of grinding glass plate G; Flatness is measured operation (S3), measures the flatness of the face that is polished of glass plate G by flatness determinator 14; Calculate the operation (S4) of the milling time of the measurement result based on flatness; The milling time of grind section 16 is changed to the operation (S5) of the milling time calculating; Grinding step (S6), with milling time after changing by the face that is polished of grind section 16 abrading glass plate G; And flatness measures operation (S7) again, clean the glass plate G after grinding, by flatness again determinator 20 again measure the flatness of the face that is polished.By the operation of S1 to S7, produced the glass plate G that is suitable for FPD glass plate G by melten glass.
Then, illustrate and utilize the Ginding process of the glass plate G of lapping device 10 as constructed as above referring to figs. 1 through Fig. 3.
First,, before abrading glass plate G, by flatness determinator 14, each glass plate G is measured the flatness (S3) of the face that is polished of glass plate G.
Then, controller 22 calculates and best amount of grinding corresponding to above-mentioned flatness each glass plate G, calculate and best milling time (S4) corresponding to this best amount of grinding, and the milling time of grind section 16 is changed to above-mentioned best milling time (S5).
Then, in grind section 16, to carry out the face that is polished (S6) of abrading glass plate G with best milling time corresponding to flatness.
Now, controller 22 is controlled at least milling time of any one in the 1st grind section 24 and the 2nd grind section 26.For example, in the time that measured flatness significantly departs from specification flatness, the milling time of the 1st grind section 24 is changed to longer.And, when measured flatness departs from when minimum with respect to specification flatness, the milling time of the 1st grind section 24 is changed to the utmost point short time, and the milling time of the 2nd grind section 26 is also changed to the short time., preferably change according to the flatness of measuring, so that total milling time of the 1st grind section 24 and the 2nd grind section 26 is the shortest milling time.
Thus, according to the lapping device 10 of embodiment, compared with being set as growing the existing lapping device of milling time for the purpose of insurance, improved the production efficiency of FPD glass plate G.
Above-mentioned best amount of grinding yes for make flatness in specification value with interior amount of grinding, be the distribution peak value (mean value) of the flatness of the face that is polished after being configured to make to grind more approaches specification value amount of grinding than the distribution peak value of the flatness of existing Ginding process.
Fig. 4 represents the block diagram of the flatness of the face that is polished before the grinding of multiple the glass plate G of 1 crowd that measure by flatness determinator 14.And Fig. 5 represents that, by the block diagram of the flatness of the face that is polished after existing Ginding process grinding, Fig. 6 represents by the block diagram of the flatness of the face that is polished after the Ginding process grinding of embodiment.In each figure, transverse axis represents that (m), the longitudinal axis represents frequency (%) to μ to flatness.And in Fig. 5, Fig. 6, the specification value of the flatness of the face that is polished after grinding is 1.0, centered by specification value, left side represents the frequency in specification value, and centered by specification value, right side represents the frequency outside specification value.That is, centered by specification value, along with towards left side, represent that milling time is elongated, and centered by specification value, along with towards right side, represent that milling time shortens.In the Ginding process of the embodiment of Fig. 6, the distribution peak value (0.92) of above-mentioned best amount of grinding being set for to the flatness of the face that is polished after making to grind more approaches specification value than the distribution peak value (0.56) of the flatness of the existing Ginding process of Fig. 5.So, the present invention compared to the prior art milling time shortens, and therefore the production efficiency of glass plate G improves.
At this, the relatively Ginding process of lapping device 10 and the Ginding process of existing lapping device of embodiment.
As shown in Figure 4, the flatness of the face that is polished before the grinding of known glass plate G 1.99～2.63 in a big way in brokenly fluctuation.For this glass plate G, under existing Ginding process, as shown in Figure 5, flatness can be improved to 0.46～1.10.But existing Ginding process is the size regardless of flatness, the method that all makes milling time grind definitely, the flatness of the face that is polished after therefore grinding is the same with the block diagram before the grinding shown in Fig. 4, be distributed in a big way in.
In contrast, in the Ginding process of embodiment, according to the flatness of the face that is polished of each glass plate G, calculating approaches amount of grinding and the milling time of specification value, and with this milling time abrading glass plate G, therefore as shown in Figure 6, the distribution peak value (0.92) of the flatness of the face that is polished after grinding be distributed near specification value (1.0) more among a small circle in.Therefore,, according to the Ginding process of embodiment, can produce the flatness uniform glass plate G of little quality that fluctuates, and from taking 1 batch as unit, compare and can shorten milling time with existing Ginding process.
The reason that milling time shortens is described.First, as shown in Figure 4, there is fluctuation in the flatness of the face that is polished of the glass plate before grinding.In existing Ginding process, for making all glass plates in specification value, carry out abrading glass plate with identical more amount of grinding.Therefore, " total milling time=grindings number × longer milling time ", consequently, milling time is elongated, and the flatness of the face that is polished of glass plate after grinding also exists fluctuation (with reference to Fig. 5).
Therefore, be to improve productivity, be just specification value as long as make flatness in specification value and make flatness.That is, make glass plate that flatness is good with less amount of grinding just in specification value, make the poor glass plate of flatness with more amount of grinding just in specification value.Make the flatness of the face that is polished of all glass plates in specification value with interior result be just, the fluctuation of flatness tail off (with reference to Fig. 6).
Further, if the fluctuation of flatness tails off, can make the stable performance of FPD.Its reason is, if little with flatness fluctuation, to there is certain surface texture glass plate at lower the manufactures FPD that necessarily creates conditions, the performance of the FPD producing is also stablized.
Therefore, in the Ginding process of embodiment, the flatness of the face that is polished of corresponding each glass plate G, just to carry out abrading glass plate G in specification value with interior amount of grinding, carry out abrading glass plate with best amount of grinding (=milling time), therefore compare with existing Ginding process, can shorten milling time, improve productivity.
And, according to the Ginding process of embodiment, the flatness of the be polished face of the controller 22 of Fig. 2 based on by after the flatness grinding that determinator 20 is measured again, the further milling time of change (FEEDBACK CONTROL) grind section 16.; according to the flatness of the face that is polished after grinding; the milling time (with amount of grinding synonym) that the flatness of the face that is polished before the grinding of measuring according to flatness determinator 14 has been changed is finely tuned, and therefore can produce the less uniform glass plate G of quality of flatness fluctuation.
; when the flatness after the grinding with certain glass plate G that grinds frontal plane degree departs from the situation of specification value slightly; in the time that grinding has other glass plates of identical grinding frontal plane degree, grind above-mentioned other glass plates with the milling time of having finely tuned, so that flatness becomes specification value.
In addition, under the Ginding process of embodiment, also can produce the glass plate G that flatness departs from specification value, preferably best amount of grinding is set for and made the frequency of this glass plate G that departs from specification value at below 0.5%, preferably below 0.3% of its batch (sum total) entirety.And, from the angle of effective shortening milling time, preferably milling time is set for the distribution peak value of flatness is present in respect to specification value in-0.15 to-0.05 scope.
By flatness again determinator 20 detection plane degree depart from the glass plate G of specification value, again grind by the 2nd grind section 26 of having finely tuned milling time after preferably.So, can make glass plate G that flatness departs from specification value in specification value.
And, for improving the production efficiency of glass plate G, also can after determinator 20, other grind section be set again in flatness, again grind the glass plate G that departs from specification value by these other grind section, so that flatness is in specification value.That is, preferably by controller 22 according to the flatness flatness that determinator 20 is measured again, set the milling time of above-mentioned other grind section.
Fig. 7 is the block diagram that represents the structure of the lapping device 50 of the 2nd embodiment, to the same or similar parts of lapping device 10 of the 1st embodiment shown in Fig. 1, Fig. 2, be marked with same label, and the description thereof will be omitted.
Lapping device 50 possesses many (in Fig. 7 being 6) grind section 52, grind section 54, grind section 56, grind section 58, grind section 60 and grind section 62 in grind section 16.And, between grind section 16 and the mensuration platform of flatness determinator 14, be provided with and distribute feedway (plate body feed unit) 64.Further, be provided with transport unit 66 in grind section 16 and flatness between determinator 20, the glass plate G after grinding by each grind section 52～62 is sent to the flatness mensuration platform of determinator 20 again by described transport unit 66 again.
Lapping device 50 is by distributing feedway 64 that the glass plate G that has measured flatness in flatness determinator 14 is distributed and is supplied to 1 grind section empty in 6 grind section 52～62 or will arrives 1 grind section of grinding the end time.The flatness of being measured according to flatness determinator 14 by controller 22, the milling time of control grind section 52～62.
According to lapping device 50, can improve the operational efficiency of grind section 16, can further improve the production efficiency of glass plate G.
In addition, in the time that 22 of controllers are solely controlled the milling time of grind section 52～62, there is the situation that simultaneously exists multiple to grind in grind section 52～62 the glass plate G being through with.In this case, the glass plate G that transport unit 66 is through with grinding is sent to the flatness mensuration platform of determinator 20 more one by one, therefore exist and have to make grind in grind section 52～62 the glass plate G standby being through with, thus the problem that the operational efficiency of grind section 16 declines.
Therefore,, in the lapping device 50 with many grind section 52～62, need to be with difference time, exist the mode of the glass plate G that multiple grindings are through with to grind.
One example of its Ginding process is described.
Grinding condition for the flatness of the face that is polished that makes glass plate G in specification value, except milling time, also comprises the relative rotation speed of grinding pad with respect to grinding pressure, grinding pad and the glass plate G of the face that is polished of glass plate G.Therefore, controller 22 is according to the flatness of the face that is polished of the each glass plate G measuring by flatness determinator 14, each grind section 52～62 is controlled to above-mentioned grinding pressure, above-mentioned rotating speed, so that the grinding end time in grind section 52～62 is not synchronization.And controller 22 is controlled transport unit 66, make transport unit 66 standby in a grind section of grinding in the grind section 52～62 finishing in advance.
By this Ginding process, can solve the problem that makes to grind the glass plate G standby in grind section 52～62 being through with, improve the operational efficiency of grind section 16.
And, as other Ginding process, also can set respectively different milling times to each grind section 52～62, the milling time of the corresponding flatness based on measuring in flatness determinator 14, by the grind section 52～62 that this glass plate G is assigned to and this milling time is corresponding.
In addition, in the lapping device 10 of Fig. 1, Fig. 2, example there is the grind section 16 of the 1st grind section 24 and the 2nd grind section 26, but also formed the lapping device of grind section 16 by one or three above grind section.
And, in embodiment, as grind object plate body example FPD glass plate, but be not limited to this, as long as needing the glass plate of surface grinding, and be not limited to glass plate, also but need metal system and the resinous plate body of surface grinding.
Symbol description
G glass plate
10 lapping devices
12 cut-outs/facing attachment
14 flatness determinators
16 grind section
18 glass plate feedwaies
20 flatnesses determinator again
22 controllers
24 the 1st grind section
26 the 2nd grind section
28 grinding heads
30 fixtures
32 main shafts
34 grinding pads
36 grinding pads
38 grinding plates
40 grinding plates
50 lapping devices
52,54,56,58,60,62 grind section
64 distribute feedway
66 transport units
Claims (6)
1. a Ginding process for plate body,
Have: flatness is measured operation, measure the flatness of the face that is polished of plate body; With
Grinding step, the face that is polished of the above-mentioned plate body of flatness has been measured in grinding, in this grinding step, rotate relative with above-mentioned milling tool of the face that is polished that makes above-mentioned plate body in the face that is polished and the milling tool of the above-mentioned plate body of pushing, and grind the face that is polished of above-mentioned plate body by above-mentioned milling tool
According to the flatness of measuring the face that is polished of the above-mentioned plate body of measuring in operation in above-mentioned flatness, change the grinding condition of above-mentioned grinding step.
2. the Ginding process of plate body according to claim 1, wherein,
In the subsequent handling of above-mentioned grinding step, there is flatness and measure again operation, in measuring operation again, this flatness is again determined at the flatness of the face that is polished of the above-mentioned plate body after grinding in above-mentioned grinding step,
According to the flatness of the face that is polished of the above-mentioned plate body of measuring, further change the grinding condition of above-mentioned grinding step in above-mentioned flatness is measured operation again.
3. the Ginding process of plate body according to claim 1 and 2, wherein,
In above-mentioned grinding step, configure many above-mentioned milling tools,
By plate body feed unit, the above-mentioned plate body of having measured flatness in above-mentioned flatness mensuration operation is distributed to 1 milling tool being supplied in above-mentioned many milling tools.
4. a lapping device for plate body, has:
Flatness determination unit, the flatness of the face that is polished of mensuration plate body;
Grinding unit, the face that is polished of the above-mentioned plate body of flatness has been measured in grinding, this grinding unit makes rotate relative with above-mentioned milling tool of the face that is polished of above-mentioned plate body in the face that is polished and the milling tool of the above-mentioned plate body of pushing, and grinds the face that is polished of above-mentioned plate body by above-mentioned milling tool; And
Control module, according to the flatness of the face that is polished of the above-mentioned plate body of measuring by above-mentioned flatness determination unit, changes the grinding condition of above-mentioned grinding unit.
5. the lapping device of plate body according to claim 4, wherein,
Have flatness determination unit again, this flatness again determination unit is measured again by the flatness of the face that is polished of the above-mentioned plate body after above-mentioned grinding unit grinding,
Above-mentioned control module, according to the flatness of the face that is polished by the above-mentioned flatness above-mentioned plate body that determination unit is measured again, further changes the grinding condition of above-mentioned grinding unit.
6. according to the lapping device of the plate body described in claim 4 or 5, wherein,
The above-mentioned milling tool of many above-mentioned grinding units of configuration,
The lapping device of described plate body has plate body feed unit, and the above-mentioned plate body of having measured flatness by above-mentioned flatness determination unit is distributed 1 milling tool being supplied in above-mentioned many milling tools by this plate body feed unit.
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| CN201610833057.9A CN106965076B (en) | 2012-09-28 | 2012-09-28 | Method and apparatus for polishing plate-like body |
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/JP2012/075136 WO2014049844A1 (en) | 2012-09-28 | 2012-09-28 | Method for polishing board-like body, and apparatus for polishing board-like body |
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| JP (1) | JPWO2014049844A1 (en) |
| KR (1) | KR102160516B1 (en) |
| CN (2) | CN106965076B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113814648A (en) * | 2021-08-03 | 2021-12-21 | 东莞市翔通光电技术有限公司 | Flange repairing method and system |
| CN114290156A (en) * | 2021-11-30 | 2022-04-08 | 浙江晶盛机电股份有限公司 | Thickness measuring method and system in silicon wafer polishing process and polishing device |
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| JP6628646B2 (en) * | 2016-03-11 | 2020-01-15 | Hoya株式会社 | Method of manufacturing substrate, method of manufacturing mask blank, and method of manufacturing transfer mask |
| TWI821887B (en) * | 2016-11-29 | 2023-11-11 | 日商東京威力科創股份有限公司 | Substrate treatment device, substrate treatment method and recording medium |
| JP7052280B2 (en) * | 2016-11-29 | 2022-04-12 | 東京エレクトロン株式会社 | Board processing equipment, board processing method and storage medium |
| CN110757324B (en) * | 2019-11-12 | 2020-12-01 | 福建金箬笠贸易有限公司 | Flexible polishing equipment for stone |
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- 2012-09-28 JP JP2013507483A patent/JPWO2014049844A1/en active Pending
- 2012-09-28 CN CN201280007243.7A patent/CN103842130A/en active Pending
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| TW201412456A (en) | 2014-04-01 |
| KR102160516B1 (en) | 2020-09-28 |
| WO2014049844A1 (en) | 2014-04-03 |
| CN106965076B (en) | 2021-01-19 |
| KR20150064641A (en) | 2015-06-11 |
| JPWO2014049844A1 (en) | 2016-08-22 |
| CN106965076A (en) | 2017-07-21 |
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Application publication date: 20140604 |