CN103831274A - Dust-removing apparatus - Google Patents
Dust-removing apparatus Download PDFInfo
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- CN103831274A CN103831274A CN201310264643.2A CN201310264643A CN103831274A CN 103831274 A CN103831274 A CN 103831274A CN 201310264643 A CN201310264643 A CN 201310264643A CN 103831274 A CN103831274 A CN 103831274A
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- dedusting
- jet flow
- spray nozzle
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- 239000007921 spray Substances 0.000 claims description 31
- 239000000428 dust Substances 0.000 claims description 29
- 230000000694 effects Effects 0.000 abstract description 11
- 239000002245 particle Substances 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000003556 assay Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000008713 feedback mechanism Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
Landscapes
- Cleaning In General (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Combined Means For Separation Of Solids (AREA)
Abstract
Provided is a dust-removing apparatus with which excellent dust-removing effect can be obtained through small amount of energy. A dust-removed face (Wa) of a work (W) is disposed within the transitional area (E) formed on a downstream side to an end (50) of the potential core (5) of the jet (3) from the nozzle portion (1).
Description
Technical field
The present invention relates to dust arrester.
Background technology
All the time, the LCD panel of home-use LCD TV or smart mobile phone, dull and stereotyped terminal etc. is manufactured, in order to improve accepted product percentage, in clean room in operation, make the jet flow blowing out from the spray nozzle part of clarifier head collide the substrate surface at plastics or glass etc., carry out remove (for example,, with reference to the patent documentation 1) of the foreign matters such as particulate.
Patent documentation
Patent documentation 1: Japanese kokai publication hei 11-235559 communique.
Summary of the invention
, exist such problem: be accompanied by the maximization that becomes the workpiece of dedusting object (substrate), the gas flow that is supplied to clarifier head (dust removal head) increases, and consumes very large energy (electric power).
So, the object of the invention is to, provide a kind of consumed energy that do not make to increase the good dust arrester of efficiency that just can obtain removing fully effect.
In order to reach above-mentioned purpose, dust collect plant of the present invention, being disposed in transitional region by dedusting face of workpiece, this transitional region is formed on the more downstream from the terminal of the potential core of the jet flow of spray nozzle part.
In addition, in the time the gap width size in the ejection gap of said nozzle portion being made as to S and the export department in above-mentioned ejection gap and above-mentioned spacing dimension by dedusting face are made as to H, to meet the mode of following formula 1, set above-mentioned S, be made as in above-mentioned transitional region by dedusting face above-mentioned
[formula 1] H/9≤S < H/6.
In addition, in the time that the above-mentioned maximum by the time average flow velocity of the emission direction at dedusting face place of above-mentioned jet flow is made as to Umax and the maximum of the intensity of the speed fluctuation value of the emission direction of above-mentioned jet flow is made as to V'max, be configured to and meet following formula 2 and following formula 3
[formula 2] 110 < Umax < 150 (unit: m/s)
[formula 3] 6.0≤(V'max/Umax) × 100≤12.
Can make to reduce from the air mass flow of spray nozzle part ejection, shorten the total length of (generation) potential core, will be made as the more downstream of potential core terminal by dedusting face.Like this, thus, can obtain sufficient dust removing effects with few consumed energy (flow).
Accompanying drawing explanation
Fig. 1 is the major part fracture stereogram that shows a mode of enforcement of the present invention.
Fig. 2 is the profile that shows an example of spray nozzle part.
Fig. 3 is the figure of the explanation for forming and act on.
Fig. 4 is the chart that shows the actual measured results of embodiment and comparative example.
Fig. 5 is the diagram figure that shows spacing dimension and remove the relation of rate.
Fig. 6 is the diagram figure of the maximum of displaying time mean flow rate and the relation of interior pressure.
Fig. 7 is the diagram figure of the distribution of displaying time mean flow rate.
Fig. 8 is the diagram figure of the distribution of the intensity of display speed variation value.
Fig. 9 is the diagram figure of the maximum of intensity and the relation of interior pressure of display speed variation value.
Figure 10 installs to the 1st device and the 2nd the diagram figure that compares the speed fluctuation spectrum distribution under 8kPa.
Figure 11 installs to the 1st device and the 2nd the diagram figure that compares the speed fluctuation spectrum distribution under 11kPa.
Figure 12 installs to the 1st device and the 2nd the diagram figure that compares the speed fluctuation spectrum distribution under 14kPa.
Figure 13 is the diagram figure that shows the relation of removing rate and interior pressure.
Figure 14 is the profile of the spray nozzle part of the 2nd device.
The specific embodiment
Below, based on illustrated embodiment, describe the present invention in detail.
Dust collect plant involved in the present invention, as shown in Figure 1, possesses: clarifier head (dust removal head) 9, and it has the gas dome 11 of forced air of supply and the induction chamber 12 of negative pressure in inside; And omit illustrated pressurization and attract the blowing plant of use, it supplies air to the gas dome 11 of clarifier head 9, and, to carrying out vacuum attraction in induction chamber 12.
In addition, can utilize converter to regulate by blowing plant is supplied to the air capacity of gas dome 11 and adjusts the interior pressure P of gas dome 11.
The suction inlet 19 that clarifier head 9 has the spray nozzle part 1 for the air in gas dome 11 is sprayed to outside and outside is communicated with induction chamber 12.
And, made to be attached to being peeled off by foreign matters such as the particulates of dedusting face Wa of workpiece W of glass substrate that liquid crystal display uses etc. by the jet flow from spray nozzle part 1 (air-spray) 3, by this foreign matter via suction inlet 19 inhale chamber 12, thereby dedusting.
Spray nozzle part 1 have for by the Bas Discharged in gas dome 11 to outside spray tank 10, this spray tank 10 is along the length direction L of clarifier head 9
10form.
As shown in Figure 2, spray tank 10 has: the air inflow portion 13 of cross section linearity, and it is connected with gas dome 11; The 1st chamber portion (wide cut pars intermedia) 14 of cross section triangle, it is communicated with the downstream of air inflow portion 13, along with (ejection) side towards the outside and expand; The chamber connecting portion 15 of cross section linearity, it is communicated with the downstream of the 1st chamber portion 14; The 2nd chamber portion (wide cut pars intermedia) 16 of cross section triangle, it is communicated with the downstream of this chamber connecting portion 15, along with side towards the outside and expand; The 3rd chamber portion 17 that section is rectangular-shaped, it is communicated with the downstream of the 2nd chamber portion 16, and width is wider than connecting portion 15; And ejection gap 18, it is communicated with the downstream of the 3rd chamber portion 17 with outside.The width dimensions of air inflow portion 13 and chamber connecting portion 15 is formed as identical size.
Spray nozzle part 1, confuse and be passed to the air-flow (in chamber upstream peel off air-flow) of upstream side and impact (in chamber downstream bight) produces in downstream by the 1st chamber portion 14 and the 2nd chamber portion 16 etc., confuse by what the air-flow that is subject to this impact (whirlpool) was produced in downstream the feedback mechanism affecting, thereby air-flow is caused to the variation of high frequency.
As shown in Figure 3, from the jet flow 3 that sprays of ejection gap 18, there is unattenuated (region) 5, (certain) potential core (potential core) of speed, at disorderly transitional region (Development area) E for developing stage in more downstream of the terminal (elimination position) 50 of potential core 5 and pass through complete Development area (diffusion zone) F of the DIFFUSION IN TURBULENCE air-flow that transitional region E develops fully.In addition, the feedback mechanism that the 1st chamber portion 14 and the 2nd chamber portion 16 etc. form makes the air-flow of (speed and pressure) variation that jet flow 3 is additional high.
All the time, a large amount of air trend is sprayed well, and, nozzle is approached with respect to workpiece W and as much as possible and configure, by being disposed in potential core 5 by dedusting face Wa of workpiece W, this is suitable for dedusting.Therefore, for large-scale workpiece W, a large amount of air trend is sprayed well, this consumes very large energy.
So, present inventor is in order to seek energy-conservation and also to seek the improvement of efficiency of dust collection simultaneously, attentively study, carry out so unique design: in the more downstream of the terminal 50 of the potential core 5 of jet flow 3 and completely in the transitional region E of the more upstream side of Development area F, arrange workpiece W by dedusting face Wa.
In addition, research is verified, if will spray the J of export department in gap 18 and be made as H[mm by the spacing dimension of the clearance G of dedusting face Wa], the length dimension of potential core 5 (length dimension from the J of export department to terminal 50) is made as to L[mm], so, in the more downstream of the terminal 50 of the potential core 5 of jet flow 3, if exceed 1.5 times of length dimension L of potential core 5, efficiency of dust collection declines., find the scope of L < H≤3L/2.
And, be conceived to the words of the relation in potential core 5 and ejection gap 18, the gap width size in ejection gap 18 is made as to S[mm], in the scope of practical 0.1mm≤S≤10mm, the length dimension L of the potential core 5 that actual measurement produces, as a result, the length dimension L of potential core 5 is 5 times ~ 6 times of gap width size S.So, by dedusting face Wa, in order to be disposed in more reliably downstream than the terminal of potential core 5 50, consider H > 6S.
As a result, make dust arrester involved in the present invention meet following formula 1, set gap width size S and spacing dimension H, will be made as in transitional region E by dedusting face Wa,
[formula 1] H/9≤S < H/6.
In addition, preferably, in the scope of 1mm≤H≤2mm, set the gap width size S that meets above-mentioned formula 1.
At this, use result of the test, illustration and the effect of embodiment and comparative example.
First, embodiment is configured to, and has the spray nozzle part 1 of Fig. 2, and making spacing dimension H is 1.5mm, and making gap width size S is 0.2mm, meets formula 1.
Then, using as have Fig. 2 spray nozzle part 1, to make spacing dimension H be 1.5mm, make gap width size S be 0.4mm and the dust arrester (in other words, being equipped with by the dust arrester of dedusting face Wa in the upstream of the terminal 50 of potential core 5) that do not meet the formation of formula 1 as a comparative example.In addition, the interior pressure P management (control) of the gas dome 11 of embodiment and comparative example is identical (14kPa).
The 3 μ m of particle and particle footpath be to(for) particle footpath are the particle of 1.6 μ m, measure and remove rate γ respectively.In the chart of Fig. 4, show the intensity of the speed fluctuation value of mean flow rate, the jet flow 3 of removing rate γ and jet flow 3.Narrate assay method below.
As apparent from Fig. 4, embodiment, for the particle of 3 μ m, for the equal rate of the removing γ of comparative example, for the particle of 1.6 μ m, remove rate γ more excellent compared with comparative example.Embodiment, because interior pressure P is identical with comparative example, gap width size S is 1/2nd, thereby flow reduces significantly compared with comparative example.That is, embodiment, compared with comparative example, air supply amount is half roughly, can be used in to the air fed device of clarifier head 9 (blowing plant) miniaturization.
Then, by have Fig. 2 spray nozzle part 1, make dust arrester that gap width size S is 0.2mm be called the 1st device, carry out making the mensuration of the rate of removing γ of situation about being left gradually from the more downstream of the terminal 50 of potential core 5 by dedusting face Wa.
In addition, in Fig. 5, shown and measured the actual measured results that makes the interior pressure P of the 1st gas dome 11 installing be changed to the variation of the rate of the removing γ of the situation of 8kPa, 11kPa, 14kPa.
As apparent from Fig. 5, if shown increase H, remove the tendency that rate γ declines.Due to S=0.2mm, thereby the scope that meets the H of formula 1 becomes 1.2mm < H≤1.8mm.If exceed 1.8mm, remove rate γ and decline sharp.
,, if comparative example described above will be disposed in potential core 5 by dedusting face Wa like that, so, even if time average flow velocity is large, the intensity of speed fluctuation value is also little, removes rate variance.And, as shown in Figure 5, if excessively left from the terminal 50 of potential core 5, so, with too small by the mean flow rate of the jet flow 3 of dedusting face Wa collision, can not obtain sufficient dust removing effects (removing rate γ declines).
In addition, the time average flow velocity by the emission direction of the jet flow 3 at dedusting face Wa place (y direction) of jet flow 3 is made as to U[m/s] and its maximum is made as to Umax[m/s], the intensity of the speed fluctuation value of the emission direction of jet flow 3 (RMS value) is made as to V'[m/s] and its maximum is made as to V'max[m/s] time, dust arrester involved in the present invention is configured to, meet following formula 2 and following formula 3
[formula 2] 110 < Umax < 150 (unit: m/s)
[formula 3] 6.0≤(V'max/Umax) × 100≤12.
More preferably, be configured to and meet following formula 4 and following formula 5,
[formula 4] 120≤Umax < 150 (unit: m/s)
[formula 5] 7.5≤(V'max/Umax) × 100≤12.
At this, using the dust arrester of spray nozzle part 1' with Figure 14 as the 2nd device, use and above-mentioned the 1st device result, illustration and effect relatively.
The spray nozzle part 1' of Figure 14, omits the 1st chamber portion 14, chamber connecting portion 15 and the 2nd chamber portion 16 from the spray nozzle part 1 of Fig. 2, air is flowed into portion 13 and the 3rd chamber portion 17 directly links.The common formation such as gap width size S portion measure-alike.
In addition, the 1st device and the 2nd device, making gap width size S is 0.2mm, making spacing dimension H is 1.5mm, both meets formula 1.In addition, make the interior pressure P of the gas dome 11 of each device be changed to 8kPa, 11kPa, 14kPa.
The measurement result of the jet flow 3 of each device is described.In addition, as shown in Figure 3, take the exit width direction middle position Jo of the J of export department that sprays gap 18 as initial point, along continuous straight runs is got X coordinate, gets Y coordinate along emission direction (in diagram, vertical is downward).
About the 1st device and the 2nd device, in Fig. 6, show the result of the mensuration of the maximum Umax of emission direction (Y-direction) the time average flow velocity of the jet flow 3 of carrying out X=0mm, Y=1.5mm.
As evident from Figure 6, show that all the maximum Umax of time average flow velocity becomes large tendency along with the increase of interior pressure P for the 1st device and the 2nd device.
Then,, in the situation that interior pressure P is 14kPa, in Fig. 7, demonstration is with the result of the distribution of the directions X of Y=1.5mm actual measurement time average flow velocity U.
As apparent from Fig. 7, the difference of the 1st device and the 2nd device almost be can't see.That is, learn, in same, depress, the average characteristic of the air-flow of jet flow 3 is not because the difference of the shape of spray nozzle part 1,1' changes.
Then,, about the intensity V' of the speed fluctuation value of the emission direction of jet flow 3, in Fig. 8, show the result of measuring the distribution of directions X with Y=1.5mm.
As apparent from Fig. 8, learn that the maximum of the intensity of speed fluctuation value does not appear at the X=0 under the peaked nozzle of instrumentation time average flow velocity, but appears near the X ≈ 0.3 peaked half-amplitude of measuring mean flow rate.Consider, in this position, the gradient of the distribution of time average flow velocity is large, because the formation of shear layer produces large speed fluctuation.
In addition, the intensity of the speed fluctuation value of the 1st device becomes than the larger result of the 2nd device.Infer and, this is because the effect that the spray nozzle part 1 of Fig. 2 has the 1st chamber portion 14 of section triangle and a structure of the 2nd chamber portion 16 becomes remarkable.
Then, in Fig. 9, shown the relation of the maximum V'max of intensity and the interior pressure P of gas dome 11 of speed fluctuation value.
As apparent from Fig. 9, with the maximum Umax of time average flow velocity similarly, exist the tendency that V'max increases along with the increase of the interior pressure of gas dome 11.In addition, the V'max of the 1st device is larger than the V'max of the 2nd device.In addition, omit diagram, but pressure oscillation is and the tendency coming to the same thing for speed fluctuation.
In addition, in Figure 10 to Figure 12, shown the diagram figure of the speed fluctuation spectrum distribution under the each interior pressure P that relatively the 1st device and the 2nd installs.
As apparent from Figure 10 to Figure 12, can say, under the each interior pressure P of 8kPa, 11kPa, 14kPa, at the high-frequency domain of 10 ~ 20kHz, the 1st device, significantly higher than the spectrum intensity of the 2nd device, contributes to intensity poor of speed fluctuation value widely.That is, consider, the 1st chamber portion 14 and the 2nd chamber portion 16 work effectively.
And, be following result by the maximum V'max of the intensity of the speed fluctuation value of the maximum Umax of the time average flow velocity of the emission direction at dedusting face Wa place and emission direction.
The 1st device, in the situation that interior pressure P is 8kPa, Umax=116m/s, V'max=7.3m/s.The in the situation that of 11kPa, Umax=123m/s, V'max=10.4m/s.The in the situation that of 14kPa, Umax=135m/s, V'max=12.3m/s.
The 2nd device, in the situation that interior pressure P is 8kPa, Umax=111m/s, V'max=5.0m/s.The in the situation that of 11kPa, Umax=123.5m/s, V'max=5.5m/s.The in the situation that of 14kPa, Umax=132m/s, V'max=6.0m/s.
As apparent from the above results, the 1st device is the formation that meets formula 2 and formula 3, and the 2nd device is the formation that does not meet formula 2 and formula 3.
Then, in Figure 13, shown the result of removing the mensuration of rate γ with the 1st device and the silica of the 2nd device to particle footpath 3 μ m and propylene complex chemical compound particle.
As apparent from Figure 13, learn, along with the increase of interior pressure P, it is large that the rate of the removing γ of particle becomes.In other words, can say, along with time average flow velocity becomes large, remove rate γ and improve.In addition, become the rate of the removing γ of the 1st device higher than the result of the rate of the removing γ of the 2nd device.
At this, in same, depress, size and the distribution shape of the time average flow velocity of the 1st device and the 2nd device, it is poor almost to can't see.It is poor that the intensity of, speed fluctuation value can be seen.,, in the situation that time average flow velocity is identical, remove rate γ corresponding with the tendency of the intensity of speed fluctuation value.For removing of particle, except the size of the time average flow velocity of jet flow 3, the size of the intensity of speed fluctuation value is also important, and the formation that meets formula 2 and formula 3 produces good (the being best suited for dedusting) jet flow 3 of the balance of intensity of time average flow velocity and speed fluctuation value.
Even if the maximum Umax of the time average flow velocity of the 1st device is than the maximum Umax of the time average flow velocity of the 2nd device less (if situation that the interior pressure P of the situation that relatively the interior pressure P of the 1st device is 11kPa and the 2nd device is 14kPa), the 1st device (meeting the formation of formula 2 and formula 3) is for installing (not meeting the formation of formula 2 and formula 3) the more excellent rate of removing γ than the 2nd, consumed energy is few, also can obtain sufficient dust removing effects simultaneously.
In addition, in the 1st device, be the formation that does not meet formula 4 and formula 5 in the situation that interior pressure P is 8kPa, be the formation that meets formula 4 and formula 5 in the situation that interior pressure P is 11kPa, 14kPa.
As apparent from Figure 13, meet the formation of formula 4 and formula 5, the rate γ of removing exceedes 99%, brings into play very excellent dust removing effects.That is, can say, by meeting formula 4 and formula 5, thereby by dedusting, best jet flow 3 be produced.For example, set gap width size S, control the interior pressure P of (setting) gas dome 11, thus, can be met the formation of formula 4 and formula 5.
In addition, the assay method of time average flow velocity and speed fluctuation value, in the position (Y=1.5mm) of leaving 1.5mm from the exit width direction middle position Jo in ejection gap 18, I type hot-wire anemometer is set, output from I type hot-wire anemometer is recorded in digital oscilloscope, calculate time average flow velocity, and, obtain the intensity of speed fluctuation value.Measure and carry out with the interval of 0.02mm along directions X.
In addition, remove the assay method of rate γ, the glass substrate of the subsidiary chromium film that is 300mm × 400mm by thickness 0.7mm, surface area is as workpiece W.
The workpiece W purifying fully in advance by dedusting face Wa on, utilize syringe that test particle is scattered into the same.Workpiece W is fixed on to absorption workbench, and the speed conveyance by clarifier head 9 with 100mm/sec, carries out by the purification (Dust Removal Experiment) of whole of dedusting face Wa.Measure and adhere to population n before particle diffusion
0, population n after distribution
1, purify the residual population n that adheres to after (Dust Removal Experiment)
2.Particle is removed rate (dust removal efficiency) γ % and is obtained by following formula 6.In addition, by surface examining device (high and new technology company of Hitachi system: GI4830) for adhering to the counting of population, at the clean indoor measurement of grade 100.Dust removal efficiency carries out more than 3 times instrumentation for same experimental condition, adopts its mean value,
[formula 6] γ={ 100 (n
1-n
2)/(n
1-n
0).
In addition, the present invention can carry out design alteration, and chamber portion is not limited to the section shape of Fig. 2, also can be used as and grow crosswise (width is long) rectangular-shaped or below and dwindle the triangle of shape.Workpiece W is the panel bodies such as the lamellar body, plastic base, glass substrate of paper, film, metal forming etc. etc., does not limit especially.In addition, be configured to spray nozzle part 1 with respect to relatively being moved by dedusting face Wa and carrying out dedusting.For example, be configured to arbitrarily fixing clarifier head 9 and by carrying device conveyance workpiece W and carry out dedusting or be configured to as removed test fixation workpiece W and clarifier head 9 is moved and carry out dedusting or be configured to both mobile and carry out dedusting etc. simultaneously simultaneously.
As described above, dust collect plant of the present invention, because being disposed in by dedusting face Wa of workpiece W is formed in the transitional region E from the more downstream of the terminal 50 of the potential core 5 of the jet flow 3 of spray nozzle part 1, thereby can make the air mass flow spraying from spray nozzle part 1 reduce, can obtain sufficient dust removing effects with few consumed energy (electric power).Or, in the case of making the air mass flow (energy consumption is same as the prior art) same as the prior art of ejection, can make detergent power improve.Especially, can remove the atomic thin foreign matter below 2 μ m with the high rate of removing.
In addition, due to the gap width size in the ejection gap 18 of spray nozzle part 1 is made as to S and by the J of export department in ejection gap 18 when being made as H by the spacing dimension of dedusting face Wa, to meet the mode of above-mentioned formula 1, set S, to be made as in transitional region E by dedusting face Wa, thereby can obtain removing fully rate γ with few flow, can make contributions to the reduction of the operating cost of cleaning procedure.
In addition, be configured in the time that the maximum by the time average flow velocity of the emission direction at dedusting face Wa place of jet flow 3 is made as to Umax and the maximum of the intensity of the speed fluctuation value of the emission direction of jet flow is made as to V'max, meet above-mentioned formula 2 and above-mentioned formula 3, even thereby make flow velocity and interior pressure (than prior art more) low, also can obtain sufficient dust removing effects.Or, if mean flow rate (the interior pressure P of gas dome 11) is same as the prior art, can obtain the remove rate γ more excellent than prior art.
Symbol description
1 spray nozzle part
3 jet flows
5 potential core
18 ejection gaps
50 terminals
E transitional region
H spacing dimension
J export department
S gap width size
The maximum of Umax time average flow velocity
The maximum of the intensity of V'max speed fluctuation value
W workpiece
Wa is by dedusting face
Claims (3)
1. a dust arrester, it is characterized in that, being disposed in transitional region (E) by dedusting face (Wa) of workpiece (W), described transitional region (E) is formed on the more downstream from the terminal (50) of the potential core (5) of the jet flow (3) of spray nozzle part (1).
2. dust arrester according to claim 1, it is characterized in that, in the time the gap width size in the ejection gap (18) of described spray nozzle part (1) being made as to S and the export department (J) in described ejection gap (18) is made as to H with the described spacing dimension by dedusting face (Wa), to meet the mode of following formula 1, set described S, be made as in described transitional region (E) by dedusting face (Wa) described
[formula 1] H/9≤S < H/6.
3. dust arrester according to claim 2, it is characterized in that, in the time that the maximum of the time average flow velocity of the described emission direction of being located by dedusting face (Wa) of described jet flow (3) is made as to Umax and the maximum of the intensity of the speed fluctuation value of the emission direction of described jet flow is made as to V'max, be configured to and meet following formula 2 and following formula 3
[formula 2] 110 < Umax < 150 (unit: m/s)
[formula 3] 6.0≤(V'max/Umax) × 100≤12.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012256229A JP5814902B2 (en) | 2012-11-22 | 2012-11-22 | Dust remover |
| JP2012-256229 | 2012-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103831274A true CN103831274A (en) | 2014-06-04 |
| CN103831274B CN103831274B (en) | 2017-04-26 |
Family
ID=49356274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310264643.2A Active CN103831274B (en) | 2012-11-22 | 2013-06-28 | Dust-removing apparatus |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2735381B1 (en) |
| JP (1) | JP5814902B2 (en) |
| KR (1) | KR101615543B1 (en) |
| CN (1) | CN103831274B (en) |
| TW (1) | TWI523695B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104399711A (en) * | 2014-10-30 | 2015-03-11 | 苏州德鲁森自动化系统有限公司 | Liquid crystal glass substrate dust removal method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0513632A1 (en) * | 1991-05-17 | 1992-11-19 | SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. | Device for removing liquid from the surface of a moving strip |
| US5388304A (en) * | 1992-04-13 | 1995-02-14 | Shinko Co., Ltd. | Dust removing system for panellike bodies |
| EP0682992A2 (en) * | 1994-05-16 | 1995-11-22 | Valmet Paper Machinery Inc. | Method and device in a paper machine or in a finishing device of same for cllecting and removing of dust that is separated from the web |
| JP2005259849A (en) * | 2004-03-10 | 2005-09-22 | Matsushita Electric Ind Co Ltd | Method for removing liquid on printed wiring board and device therefor |
| CN1972763A (en) * | 2004-06-22 | 2007-05-30 | 株式会社小金井 | Static charge and dust removing device |
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| JP2791257B2 (en) * | 1993-01-27 | 1998-08-27 | 株式会社東芝 | Evaluation method and apparatus for ultrasonic cleaning |
| JP3158074B2 (en) | 1997-05-09 | 2001-04-23 | 株式会社伸興 | Dust removal device |
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2012
- 2012-11-22 JP JP2012256229A patent/JP5814902B2/en active Active
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- 2013-06-03 TW TW102119626A patent/TWI523695B/en active
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- 2013-06-28 CN CN201310264643.2A patent/CN103831274B/en active Active
- 2013-10-14 EP EP13188448.8A patent/EP2735381B1/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0513632A1 (en) * | 1991-05-17 | 1992-11-19 | SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. | Device for removing liquid from the surface of a moving strip |
| US5388304A (en) * | 1992-04-13 | 1995-02-14 | Shinko Co., Ltd. | Dust removing system for panellike bodies |
| EP0682992A2 (en) * | 1994-05-16 | 1995-11-22 | Valmet Paper Machinery Inc. | Method and device in a paper machine or in a finishing device of same for cllecting and removing of dust that is separated from the web |
| JP2005259849A (en) * | 2004-03-10 | 2005-09-22 | Matsushita Electric Ind Co Ltd | Method for removing liquid on printed wiring board and device therefor |
| CN1972763A (en) * | 2004-06-22 | 2007-05-30 | 株式会社小金井 | Static charge and dust removing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104399711A (en) * | 2014-10-30 | 2015-03-11 | 苏州德鲁森自动化系统有限公司 | Liquid crystal glass substrate dust removal method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101615543B1 (en) | 2016-04-26 |
| KR20140066078A (en) | 2014-05-30 |
| CN103831274B (en) | 2017-04-26 |
| EP2735381B1 (en) | 2019-09-18 |
| TW201420200A (en) | 2014-06-01 |
| EP2735381A1 (en) | 2014-05-28 |
| JP2014100694A (en) | 2014-06-05 |
| JP5814902B2 (en) | 2015-11-17 |
| TWI523695B (en) | 2016-03-01 |
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