EP2735381B1 - Method of using a dust-removing apparatus - Google Patents
Method of using a dust-removing apparatus Download PDFInfo
- Publication number
- EP2735381B1 EP2735381B1 EP13188448.8A EP13188448A EP2735381B1 EP 2735381 B1 EP2735381 B1 EP 2735381B1 EP 13188448 A EP13188448 A EP 13188448A EP 2735381 B1 EP2735381 B1 EP 2735381B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- dust
- velocity
- formula
- jet
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 11
- 239000002245 particle Substances 0.000 description 16
- 239000000428 dust Substances 0.000 description 14
- 238000009826 distribution Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000010276 construction Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008713 feedback mechanism Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
Definitions
- a dust-removing apparatus having the nozzle portion 1 of Figure 2 and not fulfilling the formula 1 with the parting dimension H of 1.5mm and the slit width dimension S of 0.4mm, (in other words, a dust-removing apparatus in which the dust-removed face Wa is on the upstream side to the end 50 of the potential core 5) is the comparison example.
- inner pressure P in the air reserve chamber 11 is administrated (regulated) to the same (14kPa) in the embodiment and the comparison example.
- the removal ratio ⁇ of particles becomes high along with the increase of the inner pressure P.
- the removal ratio ⁇ is improved as the time average velocity becomes large.
- the removal ratio ⁇ of the first apparatus surpasses the removal ratio ⁇ of the second apparatus.
Description
- This invention relates to a method of using a dust-removing apparatus.
- Conventionally, in production of LCD panels for home-use liquid crystal TV, smart phones, tablet terminals, etc., removal of foreign matter such as particles is conducted by jet from a nozzle portion of a cleaner head toward a surface of a base such as plastic, glass, etc. in a clean room to improve non-defective ratio (refer to Japanese Patent Provisional Publication No.
H11-235559 - However, air flowing amount supplied to the cleaner head (dust-removing head) increases when the work (base) for dust removal becomes large, much energy (electricity) is consumed.
-
EP 0 682 992 A2 -
EP 0 565 811 A1 -
EP 0 513 632 A1 - Therefore, it is an object of the present invention to provide an efficient method of using a dust-removing apparatus with which sufficient dust-removing effect can be obtained without increasing consumed energy.
- This object is solved according to the present invention by a method of using a dust-removing apparatus including features of
claim 1. - The present invention will be described with reference to the accompanying drawings, in which:
-
Figure 1 is a perspective view with a section of a principal portion showing an embodiment of the present invention; -
Figure 2 is a cross-sectional view showing an example of a nozzle portion; -
Figure 3 is an explanatory view of construction and function; -
Figure 4 is a table showing measurement results of an embodiment and a comparison example; -
Figure 5 is a graph showing a relationship between a parting dimension and a removal ratio; -
Figure 6 is a graph showing a relationship between the maximum value of time average velocity and inner pressure; -
Figure 7 is a graph showing distribution of time average velocity; -
Figure 8 is a graph showing distribution of root mean square value of velocity; -
Figure 9 is a graph showing a relationship between the maximum root mean square value of velocity and inner pressure; -
Figure 10 shows graphs for comparing distributions of velocity variation spectrum in 8kPa of a first apparatus and a second apparatus; -
Figure 11 shows graphs for comparing distributions of velocity variation spectrum in 11kPa of the first apparatus and the second apparatus; -
Figure 12 shows graphs for comparing distributions of velocity variation spectrum in 14kPa of the first apparatus and the second apparatus; -
Figure 13 is a graph showing a relationship between removal ratio and inner pressure; and -
Figure 14 is a cross-sectional view of the nozzle portion of the second apparatus. - Preferred embodiments of the present invention will now be described with reference to the accompanying drawings.
- As shown in
Figure 1 , a dust-removing apparatus of the present invention is provided with a cleaner head (dust-removing head) 9 having anair reserve chamber 11 to which pressurized air is supplied and asuction chamber 12 of negative pressure, and a blower device not shown in figures for pressurization and suction to supply air to theair reserve chamber 11 of thecleaner head 9 and to make thesuction chamber 12 vacuum. - And, inner pressure P of the
air reserve chamber 11 can be regulated by an inverter regulating the air amount supplied to theair reserve chamber 11 by the blower device. - The
cleaner head 9 has anozzle portion 1 to jet the air out of theair reserve chamber 11, and asuction hole 19 to connect thesuction chamber 12 to the outside. - And, foreign matter such as particles stuck to a dust-removed face Wa of a work W such as a glass base for liquid crystal display is exfoliated by jet (air jet) 3 from the
nozzle portion 1, and the foreign matter is sucked into thesuction chamber 12 through thesuction hole 19. - The
nozzle portion 1 has a jettinggroove 10 to exhaust the air in theair reserve chamber 11. The jettinggroove 10 is formed along a longitudinal direction L10 of thecleaner head 9. - As shown in
Figure 2 , the jettinggroove 10 has an air flow-inportion 13 connected to theair reserve chamber 11 and straight in lateral cross section, a first cavity portion 14 (wide middle portion) continuing to a downstream side of the air flow-inportion 13, expanding as goes to an outer (jet) side, and triangular in lateral cross section, acavity connecting portion 15 continuing to a downstream side of thefirst cavity portion 14 and straight in lateral cross section, a second cavity portion 16 (wide middle portion) continuing to a downstream side of thecavity connecting portion 15, expanding as goes to an outer side, and triangular in lateral cross section, athird cavity portion 17 continuing to a downstream side of thesecond cavity portion 16 and rectangular in cross section wider than the connectingportion 15, and a jetting slit 18 connecting a downstream side of thethird cavity portion 17 and the outside. The width dimensions of the air flow-inportion 13 and thecavity connecting portion 15 are formed into the same dimension. - The
nozzle portion 1 gives the air flow variations of high frequency by feedback mechanism that disturbance generated by the first andsecond cavity portions - As shown in
Figure 3 , thejet 3 jetted from the jetting slit 18 has a potential core (area) 5 not reducing velocity (constant velocity), a transitional area (developed area) E on downstream side to an end (vanishing position) 50 of thepotential core 5 in which disturbance is in a developed stage, and a perfect developed area (diffused area) F of sufficiently developed diffused disturbance through the transitional area E. And, thejet 3 is a flow to which high-frequency variation (of velocity and pressure) is added by the feedback mechanism by the first andsecond cavity portions - Conventionally, it is said that a construction, in which large amount of air is jetted with high energy, a nozzle is positioned as close as possible to the work W as to position the dust-removed face Wa of the work W within the
potential core 5, is appropriate for dust removal. Therefore, large amount of energy is consumed to jet the large amount of air with high energy to a large work W. - So the inventors of the present invention, through an eager research to improve dust-removing efficiency with saving energy, made a unique idea that the dust-removed face Wa of the work W is positioned in the transitional area E on the downstream side of the
end 50 of thepotential core 5 of thejet 3 and on the upstream side of the perfect developed area F. - And, when a parting dimension of a gap G between an outlet portion J of the jetting slit 18 and the dust-removed face Wa is H[mm], and a length dimension of the potential core 5 (a length dimension from the outlet portion J to the end 50) is L[mm], it is revealed that dust-removing efficiency decreases when the parting dimension H is beyond 1.5 times of the length dimension L of the
potential core 5 on the downstream side to theend 50 of thepotential core 5 of thejet 3. That is to say, a range of L<H≦3L/2 is discovered. - Further, considering a relationship between the
potential core 5 and the jetting slit 18, a slit width dimension of the jetting slit 18 is made S[mm], the length dimension L of thepotential core 5 generated within a practical range of 0.1mm ≦ S ≦ 10mm is measured, and the results of measurement is that the length dimension L of thepotential core 5 is 5 to 6 times of the slit width dimension S. Therefore, H > 6S is considered to certainly place the dust-removed face Wa on the downstream side to theend 50 of thepotential core 5. -
- And, it is preferable to set the slit width dimension S as to fulfill the
formula 1 above within a range of 1mm ≦ H ≦ 2mm. - Herewith function and effect are explained with test results of an embodiment and a comparison example.
- First, the embodiment is having the
nozzle portion 1 ofFigure 2 , and constructed as to fulfill theformula 1 with the parting dimension H of 1.5mm and the slit width dimension S of 0.2mm. - Next, a dust-removing apparatus, having the
nozzle portion 1 ofFigure 2 and not fulfilling theformula 1 with the parting dimension H of 1.5mm and the slit width dimension S of 0.4mm, (in other words, a dust-removing apparatus in which the dust-removed face Wa is on the upstream side to theend 50 of the potential core 5) is the comparison example. And, inner pressure P in theair reserve chamber 11 is administrated (regulated) to the same (14kPa) in the embodiment and the comparison example. - Removal ratio γ is measured for each of particles of which diameter is 3 µm and particles of which diameter is 1.6 µm. The removal ratio γ , average velocity of the
jet 3, and root mean square value of velocity of thejet 3 are shown in a table ofFigure 4 . The method of measurement is described later. - As clearly shown in
Figure 4 , in the embodiment, the removal ratio γ is similar to that of the comparison example relating to the particle of 3 µm, and the removal ratio γ is better than that of the comparison example relating to the particle of 1.6 µm. The flowing amount remarkably decreases in the embodiment in comparison with the comparison example because the embodiment has the inner pressure P same to that of the comparison example, and the slit width dimension S of 1/2. That is to say, in the embodiment, supplied air amount is approximately half in comparison with the comparison example, and the device to supply air to the cleaner head 9 (blower device) can be made small. - Next, with a dust-removing apparatus, having the
nozzle portion 1 ofFigure 2 and the slit width dimension S of 0.2mm, called first apparatus, the removal ratio γ is measured in a case that the dust-removed face Wa is gradually departed from the downstream side to theend 50 of thepotential core 5. - And, the measured results of change in the removal ratio γ , in a case that the inner pressure P of the
air reserve chamber 11 of the first apparatus is changed to 8kPa, 1kPa, and 14kPa, are shown inFigure 5 . - As clearly shown in
Figure 5 , the removal ratio γ shows an inclination to decrease when H is increased. The range of H to fulfill theformula 1 is 1.2mm < H ≦ 1.8mm because S=0.2mm. When H is beyond 1.8mm, the removal ratio γ rapidly decreases. - That is to say, as in the above-described comparison example, when the dust-removed face Wa is disposed within the
potential core 5, the root mean square value of velocity is small even if time average velocity is large, and the removal ratio becomes inferior. And, when the dust-removed face Wa is too far from theend 50 of thepotential core 5 as shown inFigure 5 , the average velocity of thejet 3 hitting the dust-removed face Wa becomes too low to obtain sufficient dust-removing effect (the removal ratio γ decreases). - And, when the time average velocity of the
jet 3 at the dust-removed face Wa in the jetting direction (y direction) is U[m/s], its maximum value is Umax[m/s], the root mean square value of velocity in the jetting direction of thejet 3 is V' [m/s], and its maximum value is V' max[m/s], the dust-removing apparatus relating to the present invention is constructed as to fulfill the followingformula 2 andformula 3. -
- Herewith function and effect are explained with results of comparing a second apparatus, a dust-removing apparatus having a nozzle portion 1' in
Figure 14 , with the above-described first apparatus. - In the nozzle portion 1' in
Figure 14 , thefirst cavity portion 14, thecavity connecting portion 15, and thesecond cavity portion 16 of thenozzle portion 1 inFigure 2 are omitted, and the air flow-inportion 13 and thethird cavity portion 17 are directly connected. Dimensions of common components such as the slit width dimension S are the same. - And, both of the first apparatus and the second apparatus, in which the slit width dimension S is 0.2mm and the parting dimension H is 1.5mm, fulfill the
formula 1. And, the inner pressure P of theair reserve chamber 11 is changed to 8kPa, 11kPa, and 14kPa in each of the apparatuses. - The measured results of the
jet 3 in each of the apparatuses are explained. As shown inFigure 3 , with a central position J0 in an outlet width direction of an outlet portion J of the jetting slit 18 as an origin, X coordinate is plotted in horizontal direction and Y coordinate is plotted in the jetting direction (vertically downward in figures). - The measured results of the maximum value Umax of time average velocity in the jetting direction (Y direction) of the
jet 3 when X=0mm and Y=1.5mm in the first apparatus and the second apparatus are shown inFigure 6 . - As clearly shown in
Figure 6 , the maximum value Umax of time average velocity shows an inclination to be large along with increase of the inner pressure P in both of the first apparatus and the second apparatus. - Next, the measured results of distribution of the time average velocity U in the X direction with Y=1.5mm in the case of the inner pressure P of 14kPa are shown in
Figure 7 . - As clearly shown in
Figure 7 , difference between the first apparatus and the second apparatus is hardly observed. That is to say, average characteristic of thejet 3 does not change according to the difference of configurations between thenozzle portions 1 and 1' under the same inner pressure. - Next, the measured results of distribution of the root mean square value of velocity V' in the jetting direction of the
jet 3 in the X direction with Y=1.5mm are shown inFigure 8 . - As clearly shown in
Figure 8 , the maximum value of root mean square value of velocity reveals not on X=0 directly below the nozzle where the maximum value of time average velocity is measured, but on X ≒ 0.3 where approximately half value of the maximum value of average velocity is measured. It is considered that distribution slope of the maximum value of time average velocity is steep on this position, and large velocity change may be generated by forming a shearing layer. - And the root mean square value of velocity of the first apparatus resulted to be larger than that of the second apparatus. It is considered that the effect of construction of the
nozzle portion 1 inFigure 2 having thefirst cavity portion 14 and thesecond cavity portion 16 of which cross sections are triangular becomes remarkable. - Next, the relationship between the maximum value V' max of the root mean square value of velocity and the inner pressure P of the
air reserve chamber 11 is shown inFigure 9 . - As clearly shown in
Figure 9 , similar to the maximum value Umax of the time average velocity, there is an inclination that V ' max increases along with the increase of the inner pressure of theair reserve chamber 11. And, V' max of the first apparatus is larger than V' max of the second apparatus. Although not shown in figures, pressure change has similar inclination of the result for the velocity change. - And, graphs, comparing velocity change spectral distribution in each of inner pressures P of the first apparatus and the second apparatus, are shown in
Figure 10 through Figure 12 . - As clearly shown in
Figure 10 through Figure 12 , in each of inner pressures P of 8kPa, 11kPa, and 14kPa, the first apparatus remarkably surpasses the second apparatus in spectral strength in a high frequency zone of 10 to 20kHz and contributes to the difference of the root mean square value of velocity. That is to say, it is considered that thefirst cavity portion 14 and thesecond cavity portion 16 work effectively. - And, the maximum value of the time average velocity Umax at the dust-removed face Wa in the jetting direction and the maximum value V' max of the root mean square value of velocity in the jetting direction resulted as follows.
- In the first apparatus, Umax=116m/s, and V' max=7.3m/s in the case of the inner pressure P of 8kPa. In the case of the inner pressure P of 11kPa, Umax=123m/s, and V' max=10.4m/s. And in the case of the inner pressure P of 14kPa, Umax=135m/s, and V' max=12.3m/s.
- In the second apparatus, Umax=111m/s, and V ' max=5.0m/s in the case of the inner pressure P of 8kPa. In the case of the inner pressure P of 1kPa, Umax=123.5m/s, and V' max=5.5m/s. And in the case of the inner pressure P of 14kPa, Umax=132m/s, and V' max=6.0m/s.
- As clearly shown by the results above, the first apparatus has the construction which fulfills the
formula 2 andformula 3, and the second apparatus has the construction which does not fulfill theformula 2 andformula 3. - Next, the measured results of the removal ratio γ of silica-acrylic compound particles of which diameter is 3 µm with the first apparatus and the second apparatus are shown in
Figure 13 . - As clearly shown in
Figure 13 , the removal ratio γ of particles becomes high along with the increase of the inner pressure P. In other words, the removal ratio γ is improved as the time average velocity becomes large. And, the removal ratio γ of the first apparatus surpasses the removal ratio γ of the second apparatus. - In the time average velocity of the first apparatus and the second apparatus under the same inner pressure, difference is hardly observed in value and distributional configuration. However, difference is observed in the root mean square value of velocity. That is to say, when the time average velocity is the same, the removal ratio γ corresponds to the inclination of the root mean square value of velocity. Adding to largeness of the time average velocity of the
jet 3, largeness of the root mean square value of velocity is important to remove the particles, and the construction fulfilling theformula 2 andformula 3 generates thejet 3 of well-balanced time average velocity and strength of velocity variation (optimum for dust removal). - Even if the maximum value Umax of the time average velocity of the first apparatus is smaller than the maximum value Umax of the time average velocity of the second apparatus (in comparison with the case that the inner pressure P of the first apparatus is 11kPa and the inner pressure P of the second apparatus is 14kPa), the first apparatus (fulfilling the
formula 2 and formula 3) has the removal ratio γ better than that of the second apparatus (not fulfilling theformula 2 and formula 3), sufficient dust-removing effect is obtained with small consumed energy. - And, in the first apparatus, the case that the inner pressure P is 8kPa does not fulfill the
formula 4 andformula 5, and the case that the inner pressure P is 11kPa or 14kPa fulfills theformula 4 andformula 5. - As clearly shown in
Figure 13 , the constructions which fulfill theformula 4 andformula 5 show quite excellent dust-removing effect with the removal ratio γ over 99%. That is to say, fulfilling theformula 4 andformula 5, thejet 3 optimum for dust removal is generated. For example, the construction fulfilling theformula 4 andformula 5 can be obtained by setting the slit width dimension S and regulating (setting) the inner pressure P of theair reserve chamber 11. - The measuring method of the time average velocity and the velocity variation is that a hot wire anemometer of I type is set on a position apart from the central position J0 in the outlet width direction of the jetting slit 18 for 1.5mm (Y=1.5mm), output of the hot wire anemometer of I type is recorded by a digital oscilloscope, the root mean square value of velocity is obtained with calculation of the time average velocity. The measurement is conducted with an interval of 0.02mm in the X direction.
- And, in the measuring method of the removal ratio γ, a glass base with chrome film, of which thickness is 0.7mm and of which surface area is 300mm× 400mm, is used as the work W.
- Test particles are uniformly diffused by a syringe onto the dust-removed face Wa of the work W sufficiently cleaned in advance. The work W is fixed to an adsorption table, and cleaning (dust-removing test) is conducted on the whole surface of the dust-removed face Wa by the
cleaner head 9 transferred with a speed of 100mm/sec. Number of stuck particles n0 before the diffusion of the particles, number of particles n1 after the diffusion, and number of remaining stuck particles n2 after the cleaning (dust-removing test), are measured. The particle removal ratio(dust-removal ratio) γ % is obtained by theformula 6 below. And, a surface test apparatus (GI4830 produced by Hitachi High-Technologies Corporation) is used for counting the numbers of stuck particles in aclass 100 clean room. Three or more times of measurement are conducted under the same test conditions, and the average value is adopted as the dust-removal ratio. - In the present invention, being modifiable, the cavity portion, not restricted to the cross sectional configuration in
Figure 2 , may be laterally long (long width) rectangular or triangular diminishing downward. The work W, not particularly restricted, may be a sheet body of paper, film, metal foil, etc., or a panel body of plastic base, glass base, etc. And, the apparatus may be constructed as to conduct the dust removal with thenozzle portion 1 relatively moved. For example, the apparatus may be constructed that thecleaner head 9 is fixed and the work W is transferred by a transferring device to conduct the dust removal, or, the work W is fixed and thecleaner head 9 is moved to conduct the dust removal as in the removal test, or, both of thecleaner head 9 and the work W are moved to conduct the dust removal. - As described above, with the dust-removing apparatus of the present invention, the air amount jetted from the
nozzle portion 1 can be reduced, and sufficient dust-removing effect can be obtained with small consumed energy (electricity) because the dust-removed face Wa of the work W is disposed within the transitional area E formed on the downstream side to theend 50 of thepotential core 5 of thejet 3 from thenozzle portion 1. Or, in case that the jetted air amount is the same as the conventional apparatuses (energy consumption is the same as the conventional apparatuses), cleaning ability can be improved. Especially, very fine foreign matter of which size is 2 µm or less can be removed with high removal ratio. - And, the sufficient removal ratio γ can be obtained with small air amount, and the apparatus can contribute to reduction of running cost of the cleaning process because the slit width dimension of the jetting slit 18 of the
nozzle portion 1 is S, the parting dimension between the outlet portion J of the jetting slit 18 and the dust-removed face Wa is H, and S is set as to fulfill the above-mentionedformula 1 to dispose the dust-removed face Wa within the transitional area E. - And, even when the velocity and the inner pressure are low (lower in comparison with the conventional apparatuses), sufficient dust-removing effect can be obtained because the maximum value of time average velocity of the
jet 3 in jetting direction at the dust-removed face Wa is Umax, the maximum root mean square value of velocity in the jetting direction of thejet 3 is V' max, and they fulfill the above-mentionedformula 2 andformula 3. Or, in case that the average velocity (the inner pressure P of the air reserve chamber 11) is the same as the conventional apparatuses, the removal ratio γ better than that of the conventional apparatuses can be obtained.
Claims (1)
- A method of using a dust-removing apparatus wherein a dust-removed face (Wa) of a work (W) is disposed within a transitional area (E) formed on a downstream side to an end (50) of a potential core (5) of jet (3) from a nozzle portion (1);
a slit width dimension of a jetting slit (18) of the nozzle portion (1) is S, a parting dimension between an outlet portion (J) of the jetting slit (18) and the dust-removed face (Wa) is H, and S is set as to fulfill a formula 1 below to dispose the dust-removed face (Wa) within the transitional area (E);
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012256229A JP5814902B2 (en) | 2012-11-22 | 2012-11-22 | Dust remover |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2735381A1 EP2735381A1 (en) | 2014-05-28 |
EP2735381B1 true EP2735381B1 (en) | 2019-09-18 |
Family
ID=49356274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13188448.8A Active EP2735381B1 (en) | 2012-11-22 | 2013-10-14 | Method of using a dust-removing apparatus |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2735381B1 (en) |
JP (1) | JP5814902B2 (en) |
KR (1) | KR101615543B1 (en) |
CN (1) | CN103831274B (en) |
TW (1) | TWI523695B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104399711A (en) * | 2014-10-30 | 2015-03-11 | 苏州德鲁森自动化系统有限公司 | Liquid crystal glass substrate dust removal method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2077284T3 (en) * | 1991-05-17 | 1995-11-16 | Sundwiger Eisen Maschinen | DEVICE TO ELIMINATE LIQUID FROM THE SURFACE OF A STRAP TRANSPORTED FROM A STRAP MACHINING MACHINE. |
JP2567191Y2 (en) * | 1992-04-13 | 1998-03-30 | 株式会社伸興 | Panel body dust remover |
JP2791257B2 (en) * | 1993-01-27 | 1998-08-27 | 株式会社東芝 | Evaluation method and apparatus for ultrasonic cleaning |
FI95611C (en) * | 1994-05-16 | 1996-02-26 | Valmet Paper Machinery Inc | Method and apparatus on a paper machine or finishing apparatus for such to collect and remove dust discharging from the web |
JP3158074B2 (en) | 1997-05-09 | 2001-04-23 | 株式会社伸興 | Dust removal device |
JP2005259849A (en) * | 2004-03-10 | 2005-09-22 | Matsushita Electric Ind Co Ltd | Method for removing liquid on printed wiring board and device therefor |
JP2006007012A (en) * | 2004-06-22 | 2006-01-12 | Koganei Corp | Charge removal/dedusting apparatus |
-
2012
- 2012-11-22 JP JP2012256229A patent/JP5814902B2/en active Active
-
2013
- 2013-06-03 TW TW102119626A patent/TWI523695B/en active
- 2013-06-27 KR KR1020130074503A patent/KR101615543B1/en active IP Right Grant
- 2013-06-28 CN CN201310264643.2A patent/CN103831274B/en active Active
- 2013-10-14 EP EP13188448.8A patent/EP2735381B1/en active Active
Non-Patent Citations (1)
Title |
---|
None * |
Also Published As
Publication number | Publication date |
---|---|
TW201420200A (en) | 2014-06-01 |
TWI523695B (en) | 2016-03-01 |
JP2014100694A (en) | 2014-06-05 |
JP5814902B2 (en) | 2015-11-17 |
KR20140066078A (en) | 2014-05-30 |
KR101615543B1 (en) | 2016-04-26 |
CN103831274B (en) | 2017-04-26 |
EP2735381A1 (en) | 2014-05-28 |
CN103831274A (en) | 2014-06-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101776575B1 (en) | Blasting method and apparatus having abrasive recovery system, processing method of thin-film solar cell panel, and thin-film solar cell panel processed by the method | |
KR20140063420A (en) | Dust collector | |
KR101653222B1 (en) | Blasting method and apparatus having abrasive recovery system, processing method of thin-film solar cell panel, and thin-film solar cell panel processed by the method | |
EP3804836A1 (en) | Filter element for pulse cleaning and methods | |
EP2091631B1 (en) | System configuration of pulsed cleaned panel-style filter elements and methods | |
EP2735381B1 (en) | Method of using a dust-removing apparatus | |
JP2006346515A (en) | Dust collector | |
TWI441716B (en) | Spray nozzles for jetting | |
JP6531700B2 (en) | Foreign substance removal device | |
KR20190012584A (en) | Air knife and dust cleaning apparatus having the same | |
JP6499779B2 (en) | Bag filter air amplifying device and bag filter air amplifying system using the bag filter air amplifying device | |
WO2010024352A1 (en) | Device for cleaning sheet-like member and method for manufacturing sheet-like member | |
JP4288367B2 (en) | Inclination angle of air cleaner head outlet and air volume adjustment of air inlet | |
CN216323883U (en) | Integrated dry-type ultrasonic cleaning device | |
CN203803263U (en) | Dust removal filter and side blowing deashing device thereof | |
JP3230634U (en) | Gas discharge nozzle | |
CN215401059U (en) | Surface cleaning device and self-cleaning conveying device | |
CN217341817U (en) | Improved plate type anode electrostatic dust collector | |
JP2008194661A (en) | Jetting angle of jetting port, sucking angle of suction port, and arrangement of air cleaner head | |
CN206676540U (en) | A kind of polar curve in electric cleaner | |
RU50881U1 (en) | DEVICE FOR NON-CONTACT CLEANING OF PLANE GLASS SUBSTRATES | |
TWI449587B (en) | Dust-removing apparatus | |
JP2010517249A (en) | Discharge electrode socket | |
JPH08145561A (en) | Device for removing adhered substance such as water droplet, dust and the like | |
JP2009130346A (en) | Method of preventing chattering of air cleaner head |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20131014 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
R17P | Request for examination filed (corrected) |
Effective date: 20140709 |
|
RBV | Designated contracting states (corrected) |
Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: EXAMINATION IS IN PROGRESS |
|
17Q | First examination report despatched |
Effective date: 20170127 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: GRANT OF PATENT IS INTENDED |
|
INTG | Intention to grant announced |
Effective date: 20190514 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: UZAWA, HIROSHI Inventor name: SOEMOTO, KAZUHIKO Inventor name: WAKIMOTO, TATSURO Inventor name: KATO, KENJI |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE PATENT HAS BEEN GRANTED |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602013060616 Country of ref document: DE |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 1180694 Country of ref document: AT Kind code of ref document: T Effective date: 20191015 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: SE Ref legal event code: TRGR |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: MP Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20191218 Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20191218 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
REG | Reference to a national code |
Ref country code: LT Ref legal event code: MG4D |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20191219 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MK05 Ref document number: 1180694 Country of ref document: AT Kind code of ref document: T Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200120 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200224 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602013060616 Country of ref document: DE |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
PG2D | Information on lapse in contracting state deleted |
Ref country code: IS |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20191014 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20200119 |
|
REG | Reference to a national code |
Ref country code: BE Ref legal event code: MM Effective date: 20191031 |
|
26N | No opposition filed |
Effective date: 20200619 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20191031 Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20191014 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20191118 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20131014 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20190918 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 20230918 Year of fee payment: 11 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20231026 Year of fee payment: 11 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: IT Payment date: 20231023 Year of fee payment: 11 Ref country code: DE Payment date: 20231018 Year of fee payment: 11 Ref country code: CH Payment date: 20231102 Year of fee payment: 11 |