CN103818869B - Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration electromagnetism self-powered microsensor - Google Patents
Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration electromagnetism self-powered microsensor Download PDFInfo
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- CN103818869B CN103818869B CN201410058498.7A CN201410058498A CN103818869B CN 103818869 B CN103818869 B CN 103818869B CN 201410058498 A CN201410058498 A CN 201410058498A CN 103818869 B CN103818869 B CN 103818869B
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Abstract
The invention discloses a kind of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration electromagnetism self-powered microsensor, this microsensor with gallium arsenide substrate (1) for substrate, clamped beam anchor district silicon nitride (2) at clamped beam (3) two ends is separately fixed in gallium arsenide substrate (1), both sides on clamped beam (3) are respectively equipped with three pairs of cantilever beams (4), longer a pair of the centre of this cantilever beam (4), and both sides two are to shorter and isometric, be arranged with rectification circuit (11) outward, first electric capacity (12), second largest electric capacity (13), first mu balanced circuit (14) and the second mu balanced circuit (15).The invention solves the self-powered problem of radio-frequency receiving-transmitting assembly middle low power device, and the collection of the vibrational energy of broad frequency band scope can be realized, and improve the efficiency of self-powered microsensor, suppress the shake of system architecture simultaneously.Improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly on the other hand, improve the efficiency of self-powered microsensor.
Description
Technical field
The present invention proposes Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor, belong to the technical field of microelectronic mechanical system in radio frequency (RFMEMS).
Background technology
Internet of Things is the important component part of generation information technology, utilize the communication technology such as localized network or internet that sensor, controller, machine, personnel and thing etc. are linked togather by new mode, formation people and thing, thing and thing are connected, and realize informationization, remote management and control and intelligentized network.Along with developing rapidly of Internet of Things, for people life offer convenience while, also science and technology is constantly challenged.Although the microelectronic product of current various sensor achieves huge progress in small size, low energy consumption, the development of corresponding micro power source technology but relatively lags behind.Self-powered microsensor is that a kind of one or more of energy that surrounding environment exists are collected is converted to electric energy, then directly to electronics or the device that is stored in the energy storage devices such as capacitor.In the environment of radio-frequency receiving-transmitting assembly, inevitably have some stray waves, and on the other hand vibration is ubiquitous a kind of form of energy in environment, gathers these unemployed energy and the lower electronic device of power consumption in radio-frequency receiving-transmitting assembly can be allowed completely normally to work.By collecting vibration and electromagnetic energy, can improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly, the shake of suppression system architecture also solves the self-powered problem of radio-frequency receiving-transmitting assembly middle low power device.Have benefited from the progress of micropower integrated circuit technology and MEMS technology, the collection of energy self-powered technology of rising in recent years provides reference for overcoming the above problems, make it possible to the self-powered microsensor based on MEMS technology to be integrated in radio-frequency receiving-transmitting assembly, thus make to utilize MEMS technology to realize Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor and become possibility.
Summary of the invention
Technical problem: the object of this invention is to provide a kind of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration electromagnetism self-powered microsensor, the stray wave energy in radio-frequency receiving-transmitting assembly is have collected due to antenna, reduce the electromagnetic interference to system, improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly.And vibrational energy is absorbed a part, just inhibit the shake of system architecture, improve the reliability of radio-frequency receiving-transmitting assembly.The vibration of self-powered microsensor simultaneously also makes the receive direction of wherein antenna change to some extent, can strengthen the efficiency that electromagnetic energy is collected, and improves the efficiency of self-powered microsensor.
Technical scheme: this self-powered microsensor primarily of a clamped beam, three to being produced on longer a pair of the centre of clamped beam both sides and both sides two rectification circuit to shorter and isometric cantilever beam and periphery, bulky capacitor and mu balanced circuit composition.Wherein respectively there is a piezoelectric membrane with power-on and power-off pole plate as vibration energy harvesting structure at the upper surface of clamped beam two root and the upper surface of three pairs of cantilever beams, dipole antennas is had as electromagnetic energy collection structure at the lower surface of clamped beam and three pairs of cantilever beams, after being collected by vibration/electromagnetic energy, the DC voltage stored is passed through mu balanced circuit, just can obtain galvanic current pressure, the burning voltage that self-powered microsensor obtains can be exported the low energy-consumption electronic device be supplied in Internet of Things radio-frequency receiving-transmitting assembly, thus solve the self-powered problem of radio-frequency receiving-transmitting assembly middle low power device.
Internet of Things radio-frequency receiving-transmitting assembly of the present invention clamped fishbone beam vibration electromagnetism self-powered microsensor, it is characterized in that this microsensor take gallium arsenide substrate as substrate, the clamped beam anchor district silicon nitride at clamped beam two ends is separately fixed in gallium arsenide substrate, both sides on clamped beam are respectively equipped with three pairs of cantilever beams, longer a pair of the centre of this cantilever beam, and both sides two are to shorter and isometric, be arranged with rectification circuit, first electric capacity outward, second largest electric capacity, the first mu balanced circuit and the second mu balanced circuit; Wherein be provided with at the upper surface of clamped beam two root there is power-on and power-off pole plate piezoelectric membrane as clamped beam vibration energy harvesting structure, respectively be provided with a piezoelectric membrane with power-on and power-off pole plate as clamped beam vibration energy harvesting structure at the upper surface of three pairs of cantilever beams, be provided with dipole antennas as electromagnetic energy collection structure at the lower surface of clamped beam and three pairs of cantilever beams; For the vibration energy harvesting structure on clamped beam root and three pairs of cantilever beams, design has the beam of three kinds of different natural resonance frequencies, thus realizes the collection of the vibrational energy of broad frequency band scope, inhibits the shake of system architecture simultaneously.
The material in the anchor district of clamped beam is silicon nitride.Clamped beam has the part of piezoelectric membrane and three pairs of cantilever beams can be divided into five layers.The bottom is the dipole antennas done, and its material is gold.One deck on this is made up of silicon nitride, and with piezoelectric material layer on silicon nitride layer, and the upper surface of piezoelectric and lower surface all have layer gold to be in contact with it two battery lead plates up and down exported as voltage.Clamped beam does not have the part of piezoelectric membrane only have three layers, lower two-layer the same with there being the part of piezoelectric membrane, the superiors' material is gold, main plaing a part connects piezoelectric membrane upper and lower surface pole plate, and two pole plates up and down of each piezoelectric material layer are connected in the mode of series connection successively by the superiors of clamped beam.Total output after all piezoelectric material layer series connection is connected to peripheral bulky capacitor and mu balanced circuit.And after the last output of dipole antennas is connected to peripheral rectification circuit, then connect with bulky capacitor and mu balanced circuit.
In order to collect the energy of the vibration of multi-frequency to improve the efficiency of self-powered microsensor, improve frequency bandwidth, three pairs of cantilever beams in the present invention have two kinds of different natural resonance frequencies.And not being both of the resonant frequency of cantilever beam is realized by the difference in cantilever beam length.By designing the length of often pair of cantilever beam, thus often pair of cantilever beam is just had different natural resonance frequency.So for the cantilever beam and the clamped beam that have two kinds of different lengths, just have and can be designed as three kinds of different natural resonance frequencies, thus realize the collection of the vibrational energy of broad frequency band scope.The three kinds of vibration frequencies vibrated designing maximum with oscillation intensity in environment by these three resonant frequencies are identical, the collection efficiency of vibrational energy just can be made to reach the highest, thus improve the efficiency of self-powered microsensor, inhibit the shake of system architecture, the adverse effect that its radio frequency transmitting-receiving subassembly is produced reduces to minimum simultaneously.The stray wave energy in radio-frequency receiving-transmitting assembly is have collected on the other hand due to antenna, reduce the electromagnetic interference to system, improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly, and vibration also makes the receive direction of antenna change to some extent, enhance the efficiency of energy collection of spurious electromagnetic waves, and then improve the efficiency of self-powered microsensor.
Beneficial effect: clamped fishbone beam vibration/electromagnetism self-powered microsensor of the present invention achieves the collection for mechanical vibrational energy and these two kinds of energy of spurious electromagnetic waves energy simultaneously, and solves the self-powered problem of low energy-consumption electronic device in radio-frequency receiving-transmitting assembly.And the present invention can collect the vibrational energy of broad frequency band scope, inhibit the shake of radio-frequency receiving-transmitting modular construction simultaneously.Have collected the stray wave energy in radio-frequency receiving-transmitting assembly on the other hand due to antenna, improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly, and vibration achieves the multidirectional reception of antenna.
Accompanying drawing explanation
Fig. 1 is the top view of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor;
Fig. 2 is the A-A' profile of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor;
Fig. 3 is the B-B' profile of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor;
Fig. 4 is the plane that the C-C' face of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor looks up.
Figure comprises: gallium arsenide substrate 1, clamped beam anchor district silicon nitride 2, clamped beam 3, cantilever beam 4, clamped beam vibration energy harvesting structure 5, dipole antennas 6, silicon nitride medium layer 7, layer gold 8, piezoelectric 9, piezoelectric membrane top crown 10, rectification circuit 11, first electric capacity 12, second largest electric capacity 13, first mu balanced circuit 14, second mu balanced circuit 15.
Detailed description of the invention
The specific embodiments of Internet of Things radio-frequency receiving-transmitting assembly of the present invention clamped fishbone beam vibration/electromagnetism self-powered microsensor is as follows:
With GaAs (GaAs) for substrate, be aided with rectification circuit 11, first electric capacity 12 in periphery, second largest electric capacity 13 and the first mu balanced circuit 14, second mu balanced circuit 15.The anchor district 2 of clamped beam 3 is produced in gallium arsenide substrate 1, three cantilever beams 4 equal to interval on clamped beam 3 are made symmetrically perpendicular to edge in the both sides of clamped beam 3 upper surface, be positioned at longer a pair in the middle of clamped beam 3 in three pairs of cantilever beams 4 and two couple on both sides is shorter and isometric, anchor district is produced on the dual-side of clamped beam 3.Dipole antennas 6 is made with at the lower surface of clamped beam 3 and three pairs of cantilever beams 4.
The material in the anchor district 2 of clamped beam 3 is silicon nitrides.Clamped beam 3 has the part 5 of piezoelectric membrane and three pairs of cantilever beams 4 can be divided into five layers.The bottom is the dipole antennas 6 done, and its material is gold.One deck on this is silicon nitride medium layer 7, with piezoelectric material layer 9 on silicon nitride medium layer 7, and top crown 10 and bottom crown 8 that the upper surface of piezoelectric and lower surface all have layer gold to be in contact with it to export as voltage.Clamped beam 3 does not have the part of piezoelectric membrane only have three layers, lower two-layer the same with there being the part of piezoelectric membrane, the superiors are also layer gold 8, main plaing a part connects piezoelectric membrane upper and lower surface pole plate, the superiors 8 that two pole plates 10,8 up and down of each piezoelectric material layer all pass through clamped beam are connected in the mode of series connection successively.Total output after all piezoelectric material layer series connection is connected to peripheral first electric capacity 12 and the first mu balanced circuit 14.And after the last output of dipole antennas 6 is connected to peripheral rectification circuit 11, then connect with second largest electric capacity 13 and the second mu balanced circuit 15.
The preparation method of Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration/electromagnetism self-powered microsensor is:
1) gallium arsenide substrate 1 is prepared;
2) deposit silicon nitride, with plasma-enhanced chemical vapour deposition technique PECVD grown silicon nitride dielectric layer in gallium arsenide substrate;
3) photoetching etch nitride silicon dielectric layer, retains the silicon nitride medium floor 2 of anchor district part;
4) deposit photoetching polyimide sacrificial layer: coating polyimide sacrifice layer in gallium arsenide substrate, fill up all pits, wherein, the thickness of polyimide sacrificial layer determines the distance between MEMS clamped beam and the substrate below it; Photoetching polyimide sacrificial layer, only retains the sacrifice layer below MEMS clamped beam 3 and other three pairs of cantilever beams 4;
5) photoetching: remove the photoresist that will make dipole antennas 6 region;
6) layer gold as dipole antennas 6 is grown by evaporation titanium/gold/titanium mode;
7) deposit second layer silicon nitride;
8) photoetching etch nitride silicon dielectric layer, retains the silicon nitride medium 7 of clamped beam 3, other three pairs of cantilever beams 4 and clamped beam anchor district 2 part;
9) layer gold 8 as piezoelectric lower surface electrode is grown by evaporation titanium/gold/titanium mode;
10) apply photoresist, remove the photoresist of non-bottom crown 8 and Jin Lianxiancengchu;
11) anti-carve titanium/gold/titanium and form the bottom crown 8 of piezoelectric material layer and the golden line of clamped beam silicon nitride surface;
12) on clamped beam and other three pairs of cantilever beams, piezoelectric material layer 9 is prepared;
13) the formation top crown 10 of piezoelectric material layer and the golden line of clamped beam silicon nitride surface is anti-carved by evaporation;
14) discharge polyimide sacrificial layer: developer solution soaks, remove the polyimide sacrificial layer under each cantilever beam of MEMS, deionized water is soaked, and absolute ethyl alcohol dewaters, and volatilizees, dries, obtain clamped fishbone beam vibration/electromagnetism self-powered microsensor under normal temperature.
Whether distinguish is that the standard of this structure is as follows:
The structure of Internet of Things radio-frequency receiving-transmitting assembly of the present invention clamped fishbone beam vibration/electromagnetism self-powered microsensor is mainly substrate 1 with GaAs, by a clamped beam 3, three, to longer a pair of the centre being produced on clamped beam both sides, both sides two form shorter and isometric cantilever beam 4, wherein respectively there is a piezoelectric membrane with power-on and power-off pole plate as vibration energy harvesting structure at the upper surface of clamped beam 3 two root and the upper surface of three pairs of cantilever beams 4, have dipole antennas 6 as electromagnetic energy collection structure at the lower surface of clamped beam 3 and three pairs of cantilever beams 4.
This self-powered microsensor achieves the function for mechanical vibrational energy and these two kinds of collection of energy of spurious electromagnetic waves energy simultaneously.For the vibration energy harvesting structure on clamped beam 3 root and three pairs of cantilever beams 4, the beam with three kinds of different natural resonance frequencies can be designed, thus realize the collection of the vibrational energy of broad frequency band scope, inhibit the shake of system architecture simultaneously.Have collected on the other hand the stray wave energy in radio-frequency receiving-transmitting assembly due to antenna, improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly, and the vibration realizing multidirectional reception of antenna.
Namely the structure meeting above condition is considered as Internet of Things radio-frequency receiving-transmitting assembly of the present invention clamped fishbone beam vibration/electromagnetism self-powered microsensor.
Claims (1)
1. an Internet of Things radio-frequency receiving-transmitting assembly clamped fishbone beam vibration electromagnetism self-powered microsensor, it is characterized in that this microsensor with gallium arsenide substrate (1) for substrate, clamped beam anchor district silicon nitride (2) at clamped beam (3) two ends is separately fixed in gallium arsenide substrate (1), both sides on clamped beam (3) are respectively equipped with three pairs of cantilever beams (4), longer a pair of the centre of this cantilever beam (4), and both sides two are to shorter and isometric, be arranged with rectification circuit (11) outward, first electric capacity (12), second largest electric capacity (13), first mu balanced circuit (14) and the second mu balanced circuit (15), wherein the upper surface of clamped beam (3) two root be provided with there is power-on and power-off pole plate piezoelectric membrane as clamped beam vibration energy harvesting structure (5), respectively be provided with a piezoelectric membrane with power-on and power-off pole plate as clamped beam vibration energy harvesting structure (5) at the upper surface of three pairs of cantilever beams (4), be provided with dipole antennas (6) as electromagnetic energy collection structure at the lower surface of clamped beam (3) and three pairs of cantilever beams (4), for the vibration energy harvesting structure on clamped beam (3) root and three pairs of cantilever beams (4), design has the beam of three kinds of different natural resonance frequencies, thus realize the collection of the vibrational energy of broad frequency band scope, inhibit the shake of system architecture simultaneously, and antenna have collected the stray wave energy in radio-frequency receiving-transmitting assembly, improve the Electro Magnetic Compatibility of radio-frequency receiving-transmitting assembly, and vibration realizing antenna multidirectional reception.
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| CN102217185A (en) * | 2008-09-18 | 2011-10-12 | 马来西亚微电子系统有限公司 | An energy harvester |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
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| US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US20050062565A1 (en) * | 2003-09-18 | 2005-03-24 | Chia-Shing Chou | Method of using a metal platform for making a highly reliable and reproducible metal contact micro-relay MEMS switch |
| US7101724B2 (en) * | 2004-02-20 | 2006-09-05 | Wireless Mems, Inc. | Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| US8736145B2 (en) * | 2008-11-26 | 2014-05-27 | Freescale Semiconductor, Inc. | Electromechanical transducer device and method of forming a electromechanical transducer device |
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| CN102217185A (en) * | 2008-09-18 | 2011-10-12 | 马来西亚微电子系统有限公司 | An energy harvester |
| CN102243940A (en) * | 2011-03-28 | 2011-11-16 | 西安电子科技大学 | Buckling radio frequency micro switch by using folded beams |
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