CN103818869B - Electromagnetic vibration things RF transceiver assembly clamped beam self-powered microsensor fishbone - Google Patents

Electromagnetic vibration things RF transceiver assembly clamped beam self-powered microsensor fishbone Download PDF

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CN103818869B
CN103818869B CN201410058498.7A CN201410058498A CN103818869B CN 103818869 B CN103818869 B CN 103818869B CN 201410058498 A CN201410058498 A CN 201410058498A CN 103818869 B CN103818869 B CN 103818869B
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beam
clamped
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pairs
rf transceiver
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CN103818869A (en
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廖小平
吴昊
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东南大学
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Abstract

本发明公开了一种物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器,该微传感器以砷化镓衬底(1)为衬底,一个固支梁(3)两端的固支梁锚区氮化硅(2)分别固定在砷化镓衬底(1)上,在固支梁(3)上的两侧分别设有三对悬臂梁(4),该悬臂梁(4)的中间一对较长,而两边两对较短且等长,外围设有整流电路(11)、第一大电容(12),第二大电容(13)、第一稳压电路(14)和第二稳压电路(15)。 The present invention discloses a radio transceiver network electromagnetic vibration assembly was clamped fishbone one kind of self-powered micro beam sensors, micro-sensor to the gallium arsenide substrate (1) is a substrate, clamped beam (3) at both ends of a beam clamped silicon nitride anchor region (2) are fixed on the gallium arsenide substrate (1), on both sides of the fixed support beam (3) are provided with three pairs of cantilever beam (4), the middle of the cantilever (4) one pair of long and short sides and two pairs of equal length, with the peripheral rectifier circuit (11), the largest capacitor (12), a second large capacitor (13), a first regulator circuit (14) and two voltage stabilizing circuit (15). 本发明解决了射频收发组件中小功率器件的自供电问题,并可以实现较宽频带范围的振动能量的收集,并提高自供电微传感器的效率,同时抑制系统结构的抖动。 The present invention solves the problem of self-powered radio transceiver assembly of small and medium power devices, and may enable the collection of a wide band vibration energy range, and increase the efficiency of the self-powered micro-sensor, while suppressing the jitter of the system configuration. 另一方面提高了射频收发组件的电磁兼容性,提高了自供电微传感器的效率。 On the other hand to improve the electromagnetic compatibility RF transceiver components, improving the efficiency of the self-powered micro sensor.

Description

物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器 Electromagnetic vibration things RF transceiver assembly clamped beam self-powered microsensor fishbone

技术领域 FIELD

[0001] 本发明提出了物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器,属于射频微电子机械系统(RF MEMS)的技术领域。 [0001] Technical Field The present invention proposes a radio transceiver IOT vibration assembly clamped beam fishbone / electromagnetic self-powered micro-sensors, microelectromechanical systems belonging to a radio frequency (RF MEMS) a.

背景技术 Background technique

[0002] 物联网是新一代信息技术的重要组成部分,利用局部网络或互联网等通信技术把传感器、控制器、机器、人员和物等通过新的方式联在一起,形成人与物、物与物相联,实现信息化、远程管理控制和智能化的网络。 [0002] IOT is an important part of the new generation of information technology, utilization of a local network or the Internet communication technology sensors, controllers, machines, and the like personnel new ways associated together to form objects, things and It was associated, information technology, remote control and intelligent network management. 随着物联网的迅速发展,为人们生活带来便利的同时,也对科学技术不断地提出挑战。 With the rapid development of the Internet of Things, for the convenience of people's lives, but also continue to challenge the science and technology. 虽然当前各种传感器的微电子产品在小尺寸、低能耗上取得了巨大的进展,但是与之相应的微型能源技术的发展却相对滞后。 Although the current microelectronics various sensors on the small size, low power consumption made tremendous progress, but with the development of corresponding micro-energy technology is relatively slow. 自供电微传感器是一种把周围环境存在的能量的一种或多种收集起来转换为电能,然后直接给电子器件供电或者存储在电容器等储能器件中的器件。 It is a self-powered micro-sensor of the presence of one kind or more of ambient energy into electrical energy collected, and direct power to the electronic device, or device is stored in the capacitor energy storage device, and the like. 在射频收发组件的环境中,不可避免的会有一些杂散波,而且另一方面振动是环境中普遍存在的一种能量形式,采集这些未被利用的能量完全可以让射频收发组件中功耗较低的电子器件正常工作。 In RF transceiver assembly environment, inevitably there will be some spurious, but on the other hand vibrations are ubiquitous in the environment of a form of energy, the energy collected can not make use of the power consumption in a radio frequency transceiver assembly lower electronic devices work properly. 通过收集振动和电磁波的能量,可以提高射频收发组件的电磁兼容性,抑制系统结构的抖动并解决射频收发组件中小功率器件的自供电问题。 By collecting vibration and electromagnetic wave energy, can improve the electromagnetic compatibility RF transceiver module, the system configuration of a jitter suppression and problem solving self-powered radio transceiver components and medium power devices. 得益于微功耗集成电路技术和MEMS技术的进步,近年来兴起的能量收集自供电技术为解决以上问题提供了参考,使得可以将基于MEMS技术的自供电微传感器集成到射频收发组件中,从而使利用MEMS技术实现物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器成为可能。 Thanks to advances in micro-power integrated circuit technology and MEMS technology, in recent years the rise of self-powered energy harvesting technology to provide a reference to solve the above problem, such that the RF transceiver may be integrated into a self-powered micro-assembly based on MEMS technology, thereby achieve vibration using MEMS technology RF transceiver IOT assembly clamped beam fishbone / electromagnetic self-powered micro sensor becomes possible.

发明内容 SUMMARY

[0003] 技术问题:本发明的目的是提供一种物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器,由于天线收集了射频收发组件中的杂散波能量,减小了对系统的电磁干扰,提高了射频收发组件的电磁兼容性。 [0003] Technical Problem: The purpose of the present invention is to provide a vibrating electromagnetic RF transceiver IOT assembly clamped fishbone self-powered micro-beam sensor, since the energy collected by the antenna of the spurious RF transceiver assembly, reduces the system electromagnetic interference, electromagnetic compatibility improved RF transceiver assembly. 而振动能量被吸收了一部分,就抑制了系统结构的抖动,提高了射频收发组件的可靠性。 And a part of vibration energy is absorbed, the jitter is suppressed system structure, improve the reliability of RF transceiver assembly. 同时自供电微传感器的振动也使得其中天线的接收方向有所改变,可以增强电磁能量收集的效率,提高自供电微传感器的效率。 While self-powered micro-vibration sensor which also makes the direction of the receiving antenna is changed, the efficiency can be enhanced to collect electromagnetic energy to improve the efficiency of the self-powered micro sensor.

[0004] 技术方案:该自供电微传感器主要由一个固支梁、三对制作在固支梁两侧的中间一对较长而两边两对较短且等长的悬臂梁以及外围的整流电路、大电容和稳压电路组成。 [0004] Technical Solution: The self-powered microsensor mainly by a fixed beam, made in the middle of three pairs of beams fixed on both sides of one pair of two pairs of long and short sides of equal length and a rectifier circuit and a peripheral cantilever , large capacitance and voltage regulator circuit. 其中在固支梁两头根部的上表面和三对悬臂梁的上表面各有一个具有上下电极板的压电薄膜作为振动能量收集结构,在固支梁和三对悬臂梁的下表面有双极子天线作为电磁能量收集结构,将振动/电磁能量收集后把储存的直流电压通过稳压电路,就可以获得稳定的直流电压,可以将自供电微传感器获得的稳定电压输出提供给物联网射频收发组件中的低功耗器件,从而解决射频收发组件中小功率器件的自供电问题。 Wherein the two beams on the surface of the root and clamped three pairs of an upper surface of each cantilever having a piezoelectric thin film as the upper and lower plates of vibration energy collection structure, bipolar Clamped to the lower surface and three pairs of cantilever beams the antenna structure as a sub-collection of electromagnetic energy, vibrational / electromagnetic energy collected and stored by the DC voltage regulator circuit, it is possible to obtain a stable DC voltage output from the stabilized power supply voltage obtained by micro-sensor may be provided to RF transceiver IOT component low-power devices, thereby solving the problem of self-powered radio transceiver components and medium power devices.

[0005] 本发明的物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器,其特征在于该微传感器以砷化镓衬底为衬底,一个固支梁两端的固支梁锚区氮化硅分别固定在砷化镓衬底上,在固支梁上的两侧分别设有三对悬臂梁,该悬臂梁的中间一对较长,而两边两对较短且等长,外围设有整流电路、第一大电容,第二大电容、第一稳压电路和第二稳压电路;其中在固支梁两头根部的上表面设有具有上下电极板的压电薄膜作为固支梁振动能量收集结构,在三对悬臂梁的上表面各设有一个具有上下电极板的压电薄膜作为固支梁振动能量收集结构,在固支梁和三对悬臂梁的下表面设有双极子天线作为电磁能量收集结构;对于固支梁根部和三对悬臂梁上的振动能量收集结构,设计具有三种不同固有谐振频率的梁,从而实现较宽频带范围的振动能量的收集,同时 [0005] The present invention networking electromagnetic vibration fishbone clamped beam self-powered radio transceiver assembly microsensor, characterized in that the micro-sensor is a gallium arsenide substrate to the substrate, a fixed support beams fixed at both ends of the beam nitrogen anchor region silicon on a gallium arsenide substrate are fixed, clamped at both sides of the beam are provided three pairs of cantilever, the cantilever intermediate a pair of long and short sides and two pairs of equal length, with the peripheral a rectifying circuit, a first large capacitance, the second large capacitor, a first voltage regulator circuit and a second voltage regulator circuit; wherein the piezoelectric film is provided as a plate having upper and lower electrodes of beams fixed on the surface of the vibrating beam in two root clamped energy collection structure, on the surface of each cantilever is provided with three pairs of a piezoelectric film as a vibration of the upper and lower plates clamped beam energy collection structure having a lower surface provided with a dipole clamped cantilever beam and three pairs as the electromagnetic energy collected by the antenna structure; vibrational energy collection structure for the beams with the clamped and three pairs of cantilever beam designed to have three different natural resonant frequency to enable the collection of vibration energy range wider band, while 抑制了系统结构的抖动。 Jitter suppression system configuration.

[0006]固支梁的锚区的材料是氮化硅。 [0006] Materials anchor region clamped beam is silicon nitride. 固支梁有压电薄膜的部分和三对悬臂梁都可以分为五层。 Clamped beam with a piezoelectric film portions and three pairs of cantilever can be divided into five. 最底层是做的双极子天线,其材料是金。 The bottom is made of a dipole antenna, the material is gold. 在此之上的一层是由氮化硅构成的,在氮化硅层之上附有压电材料层,并且压电材料的上表面和下表面均有金层与其接触作为电压输出的上下两个电极板。 On top of this layer is made of silicon nitride, with the piezoelectric material layer over the silicon nitride layer, and the upper and lower surfaces of the piezoelectric material are in contact with the gold layer as an upper and lower voltage output two electrode plates. 固支梁上没有压电薄膜的部分只有三层,下两层和有压电薄膜的部分一样,最上层材料是金,主要起连接压电薄膜上下表面极板的作用,每个压电材料层的上下两个极板都通过固支梁的最上层依次以串联的方式相连。 Clamped beam portion piezoelectric film not only three lower layers and as part of a piezoelectric thin film, the top material is gold, the piezoelectric thin film mainly functions as connecting upper and lower surfaces of the plate, each of the piezoelectric material upper and lower plates through the uppermost layers are sequentially connected in series clamped beams. 所有压电材料层串联后的总输出连接到外围的大电容和稳压电路。 The total output of all the layers of piezoelectric material connected in series to the periphery of a large capacitance and a voltage regulator circuit. 而双极子天线最后的输出连接到外围的整流电路后,再与大电容和稳压电路相接。 After the last dipole antenna connected to the peripheral output of the rectifier circuit, and then in contact with the bulk capacitor and voltage regulator circuitry.

[0007] 为了能收集多种频率的振动的能量来提高自供电微传感器的效率,提高频带宽度,本发明中的三对悬臂梁具有两种不同的固有谐振频率。 [0007] In order to collect a plurality of frequencies of vibration energy to improve the efficiency of the self-powered microsensor, increase bandwidth, in the present invention, three pairs of beams have two different natural resonant frequency. 而悬臂梁的谐振频率的不同是通过悬臂梁长度上的不同来实现的。 Different resonance frequencies are different on the cantilever of the suspension beam length to achieve. 通过设计每对悬臂梁的长度,从而使得每对悬臂梁就有了不同的固有谐振频率。 By designing the length of each cantilever beam so that each pair of cantilever beams have a different natural resonant frequency. 所以对于有两种不同长度的悬臂梁以及固支梁,就有可以设计为三种不同的固有谐振频率,从而实现较宽频带范围的振动能量的收集。 And so for two cantilever beams fixed at different lengths, it may be designed to have three different natural resonant frequency, vibrational energy to achieve the collection of a wide band range. 将这三个谐振频率设计得与环境中振动强度最大的三种振动的振动频率相同,就可以使振动能量的收集效率达到最高,从而提高了自供电微传感器的效率,同时抑制了系统结构的抖动,使其对射频收发组件产生的不利影响减到最小。 These three resonance frequencies in the environment designed to the maximum oscillation frequency three kinds of vibration of the vibrating strength of the same, it is possible to collect the highest efficiency of vibration energy, thereby increasing the efficiency of the self-powered micro-sensor, while suppressing the configuration of the system jitter, so that minimize adverse effects on the generated RF transceiver assembly. 另一方面由于天线收集了射频收发组件中的杂散波能量,减小了对系统的电磁干扰,提高了射频收发组件的电磁兼容性,而振动也使得天线的接收方向有所改变,增强了杂散电磁波的能量收集效率,进而提高了自供电微传感器的效率。 On the other hand since the antenna to collect stray wave energy RF transceiver assembly, reduces the electromagnetic interference of the system, to improve the electromagnetic compatibility RF transceiver components, but also the vibration direction of the antenna so that the received change, enhance the stray electromagnetic energy collection efficiency, thereby improving the efficiency of the self-powered microsensor.

[0008] 有益效果:本发明的固支鱼刺梁振动/电磁自供电微传感器同时实现了对于机械振动能量和杂散电磁波能量这两种能量的收集,并解决了射频收发组件中低功耗器件的自供电问题。 [0008] The beneficial effects: clamped fishbone vibrating beam of the invention / magnetic self-powered micro sensors while achieving a mechanical vibration energy collector for stray electromagnetic energy, and these two energies, and to solve the low-power RF transceiver assembly device the self-powered problem. 而且本发明可以收集较宽频带范围的振动能量,同时抑制了射频收发组件结构的抖动。 Also the present invention can collect a wide frequency band than the vibration energy while suppressing the jitter of the RF transceiver module structure. 另一方面由于天线收集了射频收发组件中的杂散波能量,提高了射频收发组件的电磁兼容性,而振动又实现了天线多方向的接收。 On the other hand since the antenna to collect stray wave energy RF transceiver assembly, improved electromagnetic compatibility RF transceiver components, but also to achieve vibration multi-directional receiving antenna.

附图说明 BRIEF DESCRIPTION

[0009] 图1是物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的俯视图; [0009] FIG. 1 is a radio frequency transceiver IOT assembly clamped vibrating beam fishbone / electromagnetic self-powered microsensor plan view;

[0010] 图2是物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的A-A'剖面图; [0010] FIG. 2 is a radio frequency transceiver IOT assembly clamped vibrating beam fishbone / 'cross-sectional view of an electromagnetic self-powered microsensor A-A;

[0011] 图3是物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的B-B'剖面图; [0011] FIG. 3 is a radio frequency transceiver IOT assembly clamped vibrating beam fishbone / electromagnetic self-powered microsensor B-B 'cross-sectional view;

[0012] 图4是物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的C-C'面向上看的平面图。 [0012] FIG. 4 is a radio frequency transceiver IOT assembly clamped beam fishbone vibration / electromagnetic self-powered microsensor C-C 'as viewed in a plan view oriented.

[0013] 图中包括:砷化镓衬底1,固支梁锚区氮化硅2,固支梁3,悬臂梁4,固支梁振动能量收集结构5,双极子天线6,氮化硅介质层7,金层8,压电材料9,压电薄膜上极板10,整流电路11,第一大电容12,第二大电容13,第一稳压电路14,第二稳压电路15。 [0013] FIG comprising: a gallium arsenide substrate 1, a silicon nitride clamped beam anchoring zone 2, 3 clamped beam, cantilever 4, the vibration energy harvesting clamped beam structure 5, the dipole antenna 6, the nitride silicon dielectric layer 7, gold layer 8, 9 of piezoelectric material, the piezoelectric thin plate 10, a rectifier circuit 11, a first large capacitor 12, a second large capacitor 13, a first voltage regulator circuit 14, a second regulator circuit 15.

具体实施方式 Detailed ways

[0014] 本发明的物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的具体实施方案如下: [0014] RF transceiver IOT assembly clamped invention fishbone beam vibration / particular embodiment of an electromagnetic self-powered microsensor as follows:

[0015] 以砷化镓(GaAs)为衬底,在外围辅以整流电路11、第一大电容12,第二大电容13以及第一稳压电路14,第二稳压电路15。 [0015] In a gallium arsenide (GaAs) is a substrate, the peripheral supplemented rectifier circuit 11, a first large capacitor 12, second capacitor 13 and a first large-regulator circuit 14, a second regulator circuit 15. 固支梁3的锚区2制作在砷化镓衬底I上,在固支梁3上表面的两侧垂直于边缘对称地做出三对在固支梁3上间隔相等的悬臂梁4,三对悬臂梁4中位于固支梁3中间的一对较长而两边的两对较短且等长,锚区制作在固支梁3的两侧边上。 Beam Fixed anchor region 3 is formed on a gallium arsenide substrate 2 I, to the edge to make three pairs of symmetrically equivalent cantilever beam 3 on a solid support in 3 spacer 4 on a solid support surface on both sides of the vertical beam, 4, three pairs of cantilever 3 located intermediate beam clamped a pair of long and short sides and two pairs of equal length, anchored on both sides of the edge regions produced beam 3 is clamped. 在固支梁3和三对悬臂梁4的下表面做有双极子天线6。 In the surface of the solid support three pairs of cantilever beam 3 and 4 have done dipole antenna 6.

[0016]固支梁3的锚区2的材料是氮化硅。 Materials [0016] 3 Beam Fixed anchor region 2 is silicon nitride. 固支梁3有压电薄膜的部分5和三对悬臂梁4都可以分为五层。 3 clamped beam piezoelectric film portions 5 and three pairs of cantilever 4 can be divided into five layers. 最底层是做的双极子天线6,其材料是金。 The bottom is made of a dipole antenna 6, which material is gold. 在此之上的一层是氮化硅介质层7,在氮化硅介质层7之上附有压电材料层9,压电材料的上表面和下表面均有金层与其接触作为电压输出的上极板10和下极板8。 On top of this layer is silicon nitride dielectric layer 7, with the piezoelectric material layer over the silicon nitride dielectric layer 79, upper and lower surfaces of the piezoelectric material are in contact with the gold layer as a voltage the upper plate 10 and lower plate 8. 固支梁3上没有压电薄膜的部分只有三层,下两层和有压电薄膜的部分一样,最上层也是金层8,主要起连接压电薄膜上下表面极板的作用,每个压电材料层的上下两个极板10,8都通过固支梁的最上层8依次以串联的方式相连。 No portion of the piezoelectric film 3 beams fixed at only three, two, and lower portions of the piezoelectric thin film as the uppermost layer is a gold layer 8, the piezoelectric thin film mainly functions as connecting upper and lower surfaces of the plate, each pressure upper and lower plates of the dielectric material layer through the uppermost fixed 10,8 beams 8 are sequentially connected in series. 所有压电材料层串联后的总输出连接到外围的第一大电容12和第一稳压电路14。 The first large capacitance and a first regulator circuit 12 outputs the total of all piezoelectric material layers 14 connected in series to the periphery. 而双极子天线6最后的输出连接到外围的整流电路11后,再与第二大电容13和第二稳压电路15相接。 The dipole antenna 6 is connected to the final output of the peripheral circuit after the rectifier 11, and then in contact with the second large capacitor 13 and the second regulator circuit 15.

[0017] 物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的制备方法为: [0017] RF transceiver IOT vibration assembly clamped beam fishbone / electromagnetic self-powered microsensor prepared as follows:

[0018] I)准备砷化镓衬底I ; [0018] I) preparing a gallium arsenide substrate I;

[0019] 2)淀积氮化硅,在砷化镓衬底上用等离子体增强型化学气相淀积法工艺PECVD生长氮化娃介质层; [0019] 2) the deposition of silicon nitride, the nitride dielectric layer was grown baby plasma enhanced chemical vapor deposition PECVD process on a gallium arsenide substrate;

[0020] 3)光刻并刻蚀氮化硅介质层,保留锚区部分的氮化硅介质层2 ; [0020] 3) lithography and etching the silicon nitride dielectric layer, a silicon nitride dielectric layer 2 to retain the anchor portion of the region;

[0021 ] 4)淀积并光刻聚酰亚胺牺牲层:在砷化镓衬底上涂覆聚酰亚胺牺牲层,填满所有凹坑,其中,聚酰亚胺牺牲层的厚度决定了MEMS固支梁与其下方的衬底之间的距离;光刻聚酰亚胺牺牲层,仅保留MEMS固支梁3和其它三对悬臂梁4下方的牺牲层; [0021] 4) depositing a sacrificial layer of polyimide and photolithography: a gallium arsenide substrate coated with a polyimide sacrificial layer to fill all of the pits, wherein the thickness of the polyimide sacrificial layer determines the distance between the substrate MEMS beam clamped thereunder; photolithography polyimide sacrificial layer, leaving only MEMS beam clamped cantilever beam 3 4, and the other three sacrificial layers;

[0022] 5)光刻:去除将要制作双极子天线6区域的光刻胶; [0022] 5) lithography: removing the photoresist to produce a dipole antenna 6 region;

[0023] 6)通过蒸发钛/金/钛方式生长作为双极子天线6的金层; [0023] 6) by evaporating titanium / gold / titanium manner as the dipole antenna grown layer 6 of gold;

[0024] 7)淀积第二层氮化硅; [0024] 7) depositing a second layer of silicon nitride;

[0025] 8)光刻并刻蚀氮化硅介质层,保留固支梁3、其它三对悬臂梁4以及固支梁锚区2部分的氮化硅介质7 ; [0025] 8) photolithography and etching the silicon nitride dielectric layer, to retain clamped beam 3, the silicon nitride and the second portion of the cantilever beams fixed at 4 anchors the other three regions 7 a medium;

[0026] 9)通过蒸发钛/金/钛方式生长作为压电材料下表面电极的金层8 ; [0026] 9) by evaporating titanium / gold / titanium-gold layer as a way of growing the piezoelectric material of the surface electrode 8;

[0027] 10)涂覆光刻胶,去除非下极板8和金连线层处的光刻胶; [0027] 10) coated with a photoresist, the photoresist except to the lower plate 8 and the wiring layer at a gold;

[0028] 11)反刻钛/金/钛形成压电材料层的下极板8和固支梁氮化硅表面的金连线; [0028] 11) Anti-engraved Ti / Au / Ti is formed in the lower plate 8 and the piezoelectric material layers of beams fixed connection nitride gold surface;

[0029] 12)在固支梁和其它三对悬臂梁上制备压电材料层9 ; [0029] 12) Preparation of piezoelectric material layers 9 on a solid support and the other three pairs of cantilever beams;

[0030] 13)通过蒸发反刻形成压电材料层的上极板10和固支梁氮化硅表面的金连线; Kim [0030] 13) forming the piezoelectric material layer is cut by the upper plate 10 and the anti-evaporation of beams fixed connection surface of silicon nitride;

[0031] 14)释放聚酰亚胺牺牲层:显影液浸泡,去除MEMS各悬臂梁下的聚酰亚胺牺牲层,去离子水浸泡,无水乙醇脱水,常温下挥发,晾干,得到固支鱼刺梁振动/电磁自供电微传感器。 [0031] 14) The polyimide sacrificial release layer: Developer soaking, removing the sacrificial layer of polyimide under the respective cantilever MEMS, soaked in deionized water, dehydrated ethanol, volatile at room temperature, dried, to give a solid vibration support beam fishbone / electromagnetic self-powered microsensor.

[0032] 区分是否为该结构的标准如下: Whether [0032] to distinguish this standard structure is as follows:

[0033] 本发明的物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器的结构主要是以砷化镓为衬底1,由一个固支梁3、三对制作在固支梁两侧的中间一对较长而两边两对较短且等长的悬臂梁4组成,其中在固支梁3两头根部的上表面和三对悬臂梁4的上表面各有一个具有上下电极板的压电薄膜作为振动能量收集结构,在固支梁3和三对悬臂梁4的下表面有双极子天线6作为电磁能量收集结构。 [0033] The present invention networking RF transceiver assembly clamped beam fishbone vibration / electromagnetic self-powered microsensor structure mainly of GaAs substrate 1 by a fixed support beam 3, three pairs of beams fixed in two production a pair of intermediate side long and short sides of equal length and two pairs of cantilever 4, where two root portion 3 in the upper surface and three pairs of cantilever beams fixed at the upper surface 4 of the upper and lower plates each having a the piezoelectric film as vibrational energy collection structure, there is a dipole antenna 6 as electromagnetic energy collection structure 3 and three pairs of cantilever beams fixed at the lower surface 4.

[0034] 该自供电微传感器同时实现了对于机械振动能量和杂散电磁波能量这两种能量收集的功能。 [0034] The self-powered micro-sensors for mechanical vibration while achieving spurious electromagnetic energy and the energy of these two energy harvesting features. 对于固支梁3根部和三对悬臂梁4上的振动能量收集结构,可以设计具有三种不同固有谐振频率的梁,从而实现较宽频带范围的振动能量的收集,同时抑制了系统结构的抖动。 For vibration energy collected on a solid support 3, and three pairs of cantilever beams root structure 4, the beam may be designed to have three different natural resonant frequency to enable the collection of a wide band vibration energy range, while suppressing the jitter of the system configuration . 另一方面由于天线收集了射频收发组件中的杂散波能量,提高了射频收发组件的电磁兼容性,而且振动实现了天线多方向的接收。 On the other hand since the antenna stray wave energy collector assembly RF transceiver, RF transceiver improving the electromagnetic compatibility of the assembly, and vibration to achieve a multi-directional receiving antenna.

[0035] 满足以上条件的结构即视为本发明的物联网射频收发组件固支鱼刺梁振动/电磁自供电微传感器。 [0035] The configuration satisfying the above conditions according to the present invention is deemed to vibration things RF transceiver assembly clamped beam fishbone / electromagnetic self-powered microsensor.

Claims (1)

1.一种物联网射频收发组件固支鱼刺梁振动电磁自供电微传感器,其特征在于该微传感器以砷化镓衬底(I)为衬底,一个固支梁(3)两端的固支梁锚区氮化硅(2)分别固定在砷化镓衬底(I)上,在固支梁(3)上的两侧分别设有三对悬臂梁(4),该悬臂梁(4)的中间一对较长,而两边两对较短且等长,外围设有整流电路(11)、第一大电容(12),第二大电容(13)、第一稳压电路(14)和第二稳压电路(15);其中在固支梁(3)两头根部的上表面设有具有上下电极板的压电薄膜作为固支梁振动能量收集结构(5),在三对悬臂梁(4)的上表面各设有一个具有上下电极板的压电薄膜作为固支梁振动能量收集结构(5),在固支梁(3)和三对悬臂梁(4)的下表面设有双极子天线(6)作为电磁能量收集结构;对于固支梁(3)根部和三对悬臂梁(4)上的振动能量收集结构,设计具有三种不同固有谐振频率的梁,从而 An electromagnetic vibrating things RF transceiver self-powered micro-sensor assembly fishbone clamped beam, characterized in that the micro-sensor in a gallium arsenide substrate (I) is a substrate, clamped (3) at both ends of a beam clamped silicon beam anchor region (2) are fixed on a gallium arsenide substrate (the I), clamped on both sides of the beam (3) are provided with three pairs of cantilever beam (4), said cantilever beam (4) intermediate one pair of long and short sides and two pairs of equal length, with the peripheral rectifier circuit (11), the largest capacitor (12), a second large capacitor (13), a first regulator circuit (14) and a second regulator circuit (15); wherein a solid supported beam (3) on the surface of the root with 3 two cantilever beam energy collection structure (5) as a vibration clamped beam, the piezoelectric film having upper and lower electrode plates ( 4) provided on a surface of each of the upper and lower piezoelectric film collecting electrode plate as the vibration energy of beams fixed structure (5) having a lower surface provided with a double clamped beam (3) and three pairs of cantilever beam (4) pole antenna (6) as the electromagnetic energy collecting structure; the vibration energy (4) (3) clamped to the root of three pairs of cantilever beam and collection structure, design beams having three different natural resonant frequency, whereby 现较宽频带范围的振动能量的收集,同时抑制了系统结构的抖动;而天线收集了射频收发组件中的杂散波能量,提高了射频收发组件的电磁兼容性,而且振动实现了天线多方向的接收。 Now collecting a wider band of vibration energy range, while suppressing the jitter of the system configuration; the antenna stray wave energy collector assembly RF transceiver, RF transceiver improving the electromagnetic compatibility of the assembly, and vibration to achieve multi-directional antenna reception.
CN201410058498.7A 2014-02-20 2014-02-20 Electromagnetic vibration things RF transceiver assembly clamped beam self-powered microsensor fishbone CN103818869B (en)

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