CN103840708B - Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration electromagnetism self-powered microsensor - Google Patents
Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration electromagnetism self-powered microsensor Download PDFInfo
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- CN103840708B CN103840708B CN201410058322.1A CN201410058322A CN103840708B CN 103840708 B CN103840708 B CN 103840708B CN 201410058322 A CN201410058322 A CN 201410058322A CN 103840708 B CN103840708 B CN 103840708B
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Abstract
Perforate cantilever beam vibration electromagnetism self-powered microsensor in radio frequency transceiver of the present invention, is made up of a main boom beam, 8 secondary cantilever beams and peripheral bulky capacitor and voltage stabilizing circuit.The free margins of main boom beam both sides makes eight measure-alike secondary cantilever beams.8 secondary cantilever beams have the circular hole of different radii, spacing and quantity.The present invention not only achieves the collection of electromagnetic energy but also achieves the collection of vibrational energy.Because Antenna Construction Design is at main boom beam and secondary cantilever beam lower surface, thus expand the directional range that spurious electromagnetic waves energy collected by antenna.8 secondary cantilever beams of the present invention have 8 kinds of different natural resonance frequencies, increase frequency bandwidth, are more suitable for the Collection and use of the vibrational energy of vibration frequency vibration environment complicated and changeable.Meanwhile, because stray wave and vibrational energy are collected, improve the problem of electromagnetic compatibility, inhibit shake, the present invention can improve the performance of radio-frequency receiving-transmitting assembly greatly.
Description
Technical field
The present invention proposes Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration/electromagnetism self-powered microsensor, belong to the technical field of microelectromechanical systems.
Background technology
Developing rapidly of technology of Internet of things, the power consumption being applied to the radio-frequency receiving-transmitting assembly of Internet of Things causes increasing concern.The stray wave that in radio-frequency receiving-transmitting assembly, modal energy loss comes from assembly vibration and gives off.The Collection and use of vibrational energy and electromagnetic energy plays huge effect by the power consumption reducing radio-frequency receiving-transmitting assembly.Meanwhile, along with the requirement of Internet of things system to the integrated level of device is more and more higher, the volume of transmitting-receiving subassembly is also more and more less, and the research of the microminiaturization of energy harvester seems particularly important.Have benefited from the development of MEMS technology, energy harvester can be designed to be has less volume.Namely vibration/electromagnetism self-powered microsensor is utilize the mode of collecting vibrational energy and electromagnetic energy to provide the novel sensor of accessory power supply for operating circuit.
The collection of stray wave can design specific antenna structure to realize.And the mode that vibrational energy is converted into electric energy generally has electromagnetic type, piezoelectric type and electrostatic three kinds.Piezoelectric type has that structure simply, is not generated heat, without electromagnetic interference, clean environment firendly, the plurality of advantages such as electromechanical conversion efficiency is high, output voltage is high, thus apply the most general comparatively speaking.And for numerous piezoelectric vibration energy collection structures, cantilever beam structure development is comparatively ripe.Mainly because its structure is simple and be convenient to processing and fabricating.Under outside vibrational excitation, can there is resonance in the cantilever beam with piezoelectric of certain size, and make the piezoelectric material layer on beam that larger bending occur, the upper and lower surface of piezoelectric produces electrical potential difference, thus the Conversion of Energy of vibration in order to electric energy.Namely the present invention is the vibration/electromagnetism self-powered microsensor based on cantilever beam structure design.
Summary of the invention
Technical problem: the present invention is that energy in order to collect stray wave and vibration is to reduce energy loss unnecessary in radio-frequency receiving-transmitting component operation process, improve the problem of electromagnetic compatibility simultaneously, suppress shake, improve the performance of radio-frequency receiving-transmitting assembly, provide a kind of Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam to vibrate electromagnetism self-powered microsensor.
Technical scheme: in general, the collection of vibrational energy and the collection of electromagnetic energy realize with different structures, is unfavorable for integrated like this.Meanwhile, the natural resonance frequency of simple cantilever beam will design need consistent with the vibration frequency of environment designs longer length, is unfavorable for microminiaturization.Further, single beam resonance frequency band width is narrower, cannot work in the vibration environment that frequency change is larger.These problems are resolved all in the present invention.
Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration electromagnetism self-powered microsensor of the present invention is made up of a main boom beam and eight secondary cantilever beams, bulky capacitor and voltage stabilizing circuit is aided with in periphery, main boom Liang Mao district is fixed in gallium arsenide substrate, eight secondary cantilever beams are symmetrically distributed in the both sides of main boom beam respectively, and the anchor district of secondary cantilever beam is on the dual-side of main boom beam; Secondary cantilever beam has two row circular holes, circular hole arranges with the form of rectangular array, on same secondary cantilever beam, identical and the every a line of the radius of circular hole or each to arrange the spacing in the center of circle between adjacent circular hole identical, the natural resonance frequency of each secondary cantilever beam is different, this is the circular hole owing to secondary cantilever beam devising different-diameter or distribution, by designing the pore radius of the circular hole on different secondary cantilever beam, the spacing in the adjacent circular holes center of circle and the quantity of circular hole, can design eight kinds of different natural resonance frequencies; On 4 secondary cantilever beams of the wherein side of main boom beam, the diameter of circular hole is all 8 μm, but for these 4 secondary cantilever beams, the spacing difference in the adjacent circular holes center of circle on different secondary cantilever beam is respectively 16 μm, 18 μm, 20 μm and 22 μm; And for 4 secondary cantilever beams of main boom beam opposite side, wherein two secondary Design of Cantilever Beams diameter is the circular hole of 10 μm, on different secondary cantilever beam, the spacing in the adjacent circular holes center of circle is respectively 16 μm and 18 μm, two other secondary Design of Cantilever Beam diameter is the circular hole of 12 μm, and on different secondary cantilever beam, the spacing in the adjacent circular holes center of circle is respectively 18 μm and 20 μm; Antenna Construction Design with the main boom beam of piezoelectric material layer and secondary cantilever beam lower surface, not only realize the collection of electromagnetic energy but also realize the collection of vibrational energy.
Main boom beam and secondary cantilever beam can be divided into 5 layers.Bottom ground floor gold, is made into antenna structure.The second layer is silicon nitride layer, and third layer and layer 5 are all layer gold, the 4th layer at piezoelectric material layer, PbTiZrO selected by piezoelectric
3.Piezoelectric material layer contacts with the layer gold of lower surface with its upper surface, two battery lead plates up and down that the layer gold of upper and lower surface exports respectively as voltage.Two pole plates up and down of each piezoelectric material layer have gold thread to draw, and are connected in the mode of connecting with other piezoelectric material layer.Total output after all piezoelectric material layer series connection is connected to peripheral bulky capacitor and voltage stabilizing circuit.Wherein all lead-in wires are connected on the surface of main boom beam.When the lead-in wire of top electrode is drawn out to main boom beam surperficial, there is the lead-in wire that a section unsettled, to ensure that top electrode does not contact with the lower surface of piezoelectric.The output of the antenna structure of the bottom is drawn out to bulky capacitor and voltage stabilizing circuit by lead-in wire.
In the present invention, electromagnetic energy is that antenna by being produced on main boom beam and the secondary cantilever beam bottom is collected.Vibrational energy is collected by the resonant process of cantilever beam structure.Radio-frequency receiving-transmitting assembly in work, the vibration of generation is not the vibration of single frequency usually.In the present invention, it is identical that the natural resonance frequency of 8 secondary cantilever beams is designed to the 8 kind vibration frequencies vibrated maximum with oscillation intensity in environment respectively.Like this, can there is resonance in secondary cantilever beam under the excitation of the vibration of radio-frequency receiving-transmitting assembly, produces larger Bending Deformation, also makes the piezoelectric material layer generation deformation on beam simultaneously.Thus the upper and lower surface of piezoelectric material layer will produce electrical potential difference.And all piezoelectric material layers are all the modes of connecting to be connected, the output voltage superposition of the piezoelectric material layer therefore on each beam outputs to peripheral electric capacity and voltage stabilizing circuit.
Not being both by designing different circular hole to realize on secondary cantilever beam of the resonance frequency of 8 secondary cantilever beams in the present invention.By designing the circle hole radius on each secondary cantilever beam, the spacing in the circular hole center of circle and the quantity of circular hole, adjust the Young's modulus of each secondary cantilever beam, the value that Poisson's ratio also has density to reach required, thus make each secondary cantilever beam have different natural resonance frequencies, achieve the energy of the vibration of multi-frequency, improve frequency bandwidth, punching process simultaneously can reduce the natural resonance frequency of secondary cantilever beam.
Beneficial effect: the present invention can not only collect electromagnetic energy, can also collect vibrational energy, effectively reduces the loss of circuit power, for circuit provides auxiliary power supply.Because vibrational energy and stray wave are absorbed, the electromagnetic compatibility problem of radio-frequency receiving-transmitting assembly improves, and inhibits unnecessary shake, is conducive to the steady operation of these radio frequency components.Meanwhile, cantilever vibration of beam also makes turning to along with vibrating of the antenna of its lower surface, thus expands antenna collection spurious electromagnetic waves Energy-orientation scope, further enhancing the efficiency that electromagnetic energy is collected.Further, the micro mechanical vibration in the present invention/electromagnetism self-powered microsensor has multiple natural resonance frequency, and the vibration bandwidth of collection, the collection efficiency of energy obtains and improves significantly
Accompanying drawing explanation
Fig. 1 is the vertical view of Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam of the present invention vibration electromagnetism self-powered microsensor,
Fig. 2 is the upward view of microsensor of the present invention,
Fig. 3 be Fig. 1 microsensor P-P ' to profile,
Fig. 4 be Fig. 1 microsensor clamped beam Q-Q ' to profile,
Figure comprises: main boom beam 1, secondary cantilever beam 2, main boom Liang Mao district 3, gallium arsenide substrate 4, silicon nitride layer 5, circular hole 6, piezoelectric material layer 7, top crown 8, bottom crown 9, lead-in wire 10, bulky capacitor and voltage stabilizing circuit 11, antenna structure 12, unsettled lead-in wire 13.
Embodiment
Primary structure of the present invention is made up of a main boom beam 1 and eight secondary cantilever beams 2, bulky capacitor and voltage stabilizing circuit 11 is aided with in periphery, main boom Liang Mao district 3 is fixed in gallium arsenide substrate 4, eight secondary cantilever beams 2 are symmetrically distributed in the both sides of main boom beam 1 respectively, and the anchor district of secondary cantilever beam 2 is on the dual-side of main boom beam 1; Secondary cantilever beam 2 has two row circular holes 6, circular hole 6 arranges with the form of rectangular array, on same secondary cantilever beam 2, the radius of circular hole 6 is identical and every a line or each row adjacent circular holes 6 center of circle spacing is identical, the natural resonance frequency of each secondary cantilever beam 2 is different, this is the circular hole 6 owing to secondary cantilever beam 2 devising different-diameter or distribution, by designing the pore radius of the circular hole 6 on different secondary cantilever beam 2, the spacing in adjacent circular holes 6 center of circle and the quantity of circular hole 6, devise eight kinds of different natural resonance frequencies; On 4 secondary cantilever beams 2 of the wherein side of main boom beam 1, the diameter of circular hole 6 is all 8 μm, but for these 4 secondary cantilever beams 2, the spacing difference in adjacent circular holes 6 center of circle on different secondary cantilever beam 2 is respectively 16 μm, 18 μm, 20 μm and 22 μm; And for 4 secondary cantilever beams 2 of main boom beam 1 opposite side, wherein two secondary cantilever beams 2 devise the circular hole 6 that diameter is 10 μm, on different secondary cantilever beam 2, the spacing in adjacent circular holes 6 center of circle is respectively 16 μm and 18 μm, two other secondary cantilever beam 2 intended diameter is the circular hole 6 of 12 μm, and on different secondary cantilever beam 2, the spacing in adjacent circular holes 6 center of circle is respectively 18 μm and 20 μm; Antenna structure 12 is located at main boom beam 1 with piezoelectric material layer 7 and secondary cantilever beam 2 lower surface, and the collection realizing electromagnetic energy realizes again the collection of vibrational energy.
Main boom beam 1 and secondary cantilever beam 2 can be divided into 5 layers.Bottom ground floor gold, forms antenna structure 12.The second layer is silicon nitride layer 5, and third layer and layer 5 are all layer gold, the 4th layer at piezoelectric material layer 7, PbTiZrO selected by piezoelectric
3.Piezoelectric material layer 7 contacts with the layer gold of lower surface with its upper surface, the top crown 8 that the layer gold of upper and lower surface exports respectively as voltage and bottom crown 9.The top crown 8 of each piezoelectric material layer 7 and bottom crown 9 leaded 10 are drawn.Total output after all piezoelectric material layer 7 series connection is connected to peripheral bulky capacitor and voltage stabilizing circuit 11.Wherein all lead-in wires 10 are all be connected on the surface of main boom beam 1.When the lead-in wire 10 of top crown 8 is drawn out to main boom beam surperficial, there is the lead-in wire 13 that a section unsettled, to ensure that top electrode 8 does not contact with the lower surface of piezoelectric material layer 7.The output of the antenna structure 12 of the bottom 10 is drawn out to bulky capacitor and voltage stabilizing circuit 11 by going between.
In the present invention, electromagnetic energy is that antenna structure by being produced on main boom beam 1 and secondary cantilever beam 2 bottom is collected.Vibrational energy is that the resonance by designing cantilever beam structure is collected.We can design its natural resonance frequency according to the vibration frequency of radio-frequency receiving-transmitting assembly, make main boom beam 1 and secondary cantilever beam 2 under the excitation of the vibration of radio-frequency receiving-transmitting assembly, resonance can occur, produce larger Bending Deformation, also make the piezoelectric material layer 7 on beam that deformation occurs simultaneously, thus generation electrical potential difference, realize the conversion of vibrational energy to electric energy.And all piezoelectric material layers 7 are all the modes of connecting to be connected, the output voltage superposition of the piezoelectric material layer 7 therefore on each beam outputs to peripheral electric capacity and voltage stabilizing circuit 11.
The natural resonance frequency of each secondary cantilever beam 2 in project organization is different, and this designs different circular hole 6 and realizes on beam.By designing the radius of the circular hole 6 on each secondary cantilever beam 2, the spacing in the center of circle of circular hole 6 and the quantity of circular hole 6, adjust the Young's modulus of each secondary cantilever beam 2, the value that Poisson's ratio also has density to reach required, make each secondary cantilever beam 2 have different natural resonance frequencies, increase frequency bandwidth.Punching process simultaneously can reduce the natural resonance frequency of secondary cantilever beam 2.
The preparation method of Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration/electromagnetism self-powered microsensor comprises following step:
1) gallium arsenide substrate 4 is prepared: the semi-insulating GaAs substrate 4 selecting extension, wherein extension N
+the doping content of GaAs is 10
18cm
-3, its square resistance is 100 ~ 130 Ω/;
2) deposit silicon nitride, by plasma-enhanced chemical vapour deposition technique PECVD grown silicon nitride layer 5 in gallium arsenide substrate;
3) photoetching etch silicon nitride medium, retains the silicon nitride medium of main boom beam 1, secondary cantilever beam 2, and removes the silicon nitride medium of the puncture site on secondary cantilever beam 2;
4) layer gold as piezoelectric material layer 7 lower surface electrode is grown by evaporation titanium/gold/titanium mode;
5) apply photoresist, remove the photoresist of main boom beam 1 and secondary cantilever beam 2 not perforation;
6) anti-carve titanium/gold/titanium and form the bottom crown 9 of piezoelectric material layer 7 and the lead-in wire 10 of main boom beam 1 silicon nitride surface;
7) on main boom beam 1 and secondary cantilever beam 2, piezoelectric material layer 7 is prepared;
8) deposit photoetching polyimide sacrificial layer, only retains the sacrifice layer of unsettled lead-in wire 13 part of top crown 8;
9) the formation top crown 8 of piezoelectric material layer 7 and the lead-in wire 10 of main boom beam 1 silicon nitride surface is anti-carved by evaporation;
10) by this gallium arsenide substrate 4 thinning back side to 100 μm;
11) at the backside coating photoresist of gallium arsenide substrate 4, the photoresist of the GaAs below main boom beam 1 and secondary cantilever beam 2 is removed;
12) etch the gallium arsenide substrate 4 below main boom beam 1 and secondary cantilever beam 2, form main boom beam 1 and secondary cantilever beam 2;
13) antenna structure is made at main boom beam 1 and secondary cantilever beam 2 lower surface;
Difference with the prior art of the present invention is:
Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration/electromagnetism self-powered microsensor of the present invention can collect electromagnetic energy and vibrational energy simultaneously.Antenna structure can collect the stray wave that radio-frequency receiving-transmitting assembly produces at work, thus the loss of the electromagnetic energy reduced, improve electromagnetic compatibility problem.In vibration environment, resonance is there is in main boom beam and different secondary cantilever beams under the vibrational excitation of different frequencies, the piezoelectric of secondary cantilever beam and main boom beam is caused to bend deformation, produce electrical potential difference, thus achieve the conversion of vibrational energy to electric energy, inhibit the shake at work of radio-frequency receiving-transmitting assembly.Simultaneously, antenna structure is produced on main boom beam and secondary cantilever beam lower surface, therefore cantilever vibration of beam also makes turning to along with vibrating of the antenna of its lower surface, thus expands antenna collection spurious electromagnetic waves Energy-orientation scope, enhances the efficiency that electromagnetic energy is collected.The present invention by designing different opening approach on secondary cantilever beam, the present invention is made to have 9 different resonant frequency points, so its vibration frequency bandwidth that can collect increases, be more suitable for the collection of the vibrational energy in the vibration environment that frequency change is large, vibration mode is complicated.Because the resonance frequency of non-perforated beam is generally higher than the frequency of the vibration of environment a lot, and any frequency values the resonance frequency of the resonance frequency utilizing the method for punching can design beam when not punching from 0 to it, so punching not only can adjust the natural resonance frequency of secondary cantilever beam simply and effectively, the design of the length of secondary cantilever beam can also be avoided to affect the microminiaturization of device.
Namely the structure meeting above condition is considered as Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration/electromagnetism self-powered microsensor of the present invention.
Claims (1)
1. an Internet of Things radio-frequency receiving-transmitting assembly perforate cantilever beam vibration electromagnetism self-powered microsensor, it is characterized in that this microsensor is made up of a main boom beam (1) and eight secondary cantilever beams (2), bulky capacitor and voltage stabilizing circuit (11) is aided with in periphery, main boom Liang Mao district (3) is fixed in gallium arsenide substrate (4), eight secondary cantilever beams (2) are symmetrically distributed in the both sides of main boom beam (1) respectively, and the anchor district of secondary cantilever beam (2) is on the dual-side of main boom beam (1), secondary cantilever beam (2) has two row circular holes (6), circular hole (6) arranges with the form of rectangular array, the radius of the upper circular hole (6) of same secondary cantilever beam (2) is identical and every a line or each row adjacent circular holes (6) center of circle spacing is identical, the natural resonance frequency of each secondary cantilever beam (2) is different, this is the circular hole (6) owing to secondary cantilever beam (2) devising different-diameter or distribution, by designing the pore radius of the circular hole (6) on different secondary cantilever beam (2), the spacing in adjacent circular holes (6) center of circle and the quantity of circular hole (6), design eight kinds of different natural resonance frequencies, the diameter of the upper circular hole (6) of 4 secondary cantilever beams (2) of the wherein side of main boom beam (1) is all 8 μm, but for these 4 secondary cantilever beams (2), the spacing difference in adjacent circular holes (6) center of circle on different secondary cantilever beam (2) is respectively 16 μm, 18 μm, 20 μm and 22 μm, and for 4 secondary cantilever beams (2) of main boom beam (1) opposite side, wherein two secondary cantilever beams (2) devise the circular hole (6) that diameter is 10 μm, the spacing in upper adjacent circular holes (6) center of circle of different secondary cantilever beam (2) is respectively 16 μm and 18 μm, two other secondary cantilever beam (2) intended diameter is the circular hole (6) of 12 μm, and the spacing in upper adjacent circular holes (6) center of circle of different secondary cantilever beam (2) is respectively 18 μm and 20 μm, antenna structure (12) is located at main boom beam (1) with piezoelectric material layer (7) and secondary cantilever beam (2) lower surface, not only realizes the collection of electromagnetic energy but also realize the collection of vibrational energy.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101174518A (en) * | 2007-11-01 | 2008-05-07 | 上海交通大学 | Minitype inertial electrical switch capable of regulating and controlling contact time |
| CN101592578A (en) * | 2009-06-25 | 2009-12-02 | 上海应用技术学院 | A kind of silicon cantilever sensor and its production and application |
| KR20100070846A (en) * | 2008-12-18 | 2010-06-28 | 한국전자통신연구원 | Hybrid power generater and method for manufacturing the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3130483B2 (en) * | 1997-03-31 | 2001-01-31 | セイコーインスツルメンツ株式会社 | Micro pump |
| US7692365B2 (en) * | 2005-11-23 | 2010-04-06 | Microstrain, Inc. | Slotted beam piezoelectric composite |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101174518A (en) * | 2007-11-01 | 2008-05-07 | 上海交通大学 | Minitype inertial electrical switch capable of regulating and controlling contact time |
| KR20100070846A (en) * | 2008-12-18 | 2010-06-28 | 한국전자통신연구원 | Hybrid power generater and method for manufacturing the same |
| CN101592578A (en) * | 2009-06-25 | 2009-12-02 | 上海应用技术学院 | A kind of silicon cantilever sensor and its production and application |
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