CN104202011A - MEMS resonator based on insulating material vibration block - Google Patents
MEMS resonator based on insulating material vibration block Download PDFInfo
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- CN104202011A CN104202011A CN201410439227.6A CN201410439227A CN104202011A CN 104202011 A CN104202011 A CN 104202011A CN 201410439227 A CN201410439227 A CN 201410439227A CN 104202011 A CN104202011 A CN 104202011A
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- resonator
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- insulating material
- electric capacity
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Abstract
The invention provides an MEMS resonator based on an insulating material vibration block, and belongs to the technical field of electronic science. The MEMS resonator comprises the insulating material vibration block which is mounted above a substrate by use of four supporting anchor points; an inner transduction capacitor electrode is formed by depositing a conducting material on the side edge, between any two supporting anchor points, of the vibration block; each of the four supporting anchor points is provided with a DC driving voltage input end; each of four input/output ports is connected with an outer transduction capacitor electrode by use of a section of conducting material. The MEMS resonator based on the insulating material vibration block has the advantages that the vibration block is made of an insulating material so that an electric signal input by the resonator cannot be transmitted to an output end directly via a straight capacitor, and instead, goes through an electric-mechanism-electric conversion process, and therefore, the influence of the straight capacitor is reduced as much as possible, the energy conversion efficiency of the resonator is improved so that the frequency-selection characteristic of the resonator can be better, and spurious output of the resonator is inhibited. Meanwhile, each inner transduction capacitor electrode of the resonator is provided with independent driving voltage so that the driving voltage can be distributed more evenly.
Description
Technical field
The invention belongs to electronic science and technology field, relate to micro mechanical system (MEMS) device, especially MEMS resonator.
Background technology
The wide also comparatively ripe MEMS resonator types of research is at present static electricity driving capacitor formula MEMS resonator.It has that volume is little, low-power consumption, with the feature of IC process compatible, make to present fabulous development prospect in miniaturized system.The vibrating mass of this MEMS resonator adopts electric conducting material (being mainly doped polycrystalline silicon) manufacture conventionally, the input energy converting structure (electric capacity) of resonator is all directly connected with electric conducting material vibrating mass with output energy converting structure (electric capacity), therefore between the input of resonator and output, directly exist one can signal transmission capacitance structure (being conventionally referred to as to lead directly to electric capacity), its existence can make the electric power signal of part input, through resonator, be not converted to mechanical energy and be then converted into again electric power signal output, but directly from input, through straight-through electric capacity, be passed to output, reduced the energy conversion efficiency of resonator works, due to the existence of straight-through electric capacity, resonator almost allows each frequency component major part of input signal to pass through simultaneously, and such result makes the selecting frequency characteristic variation of resonator, causes the spuious amount of output to increase.When this resonator carrys out work as a part for oscillator, once straight-through electric capacity greatly to a certain extent, the needed frequency-selecting signal of signal meeting flood system without frequency-selecting, causes oscillator to work.If adopt above-mentioned resonator to construct the devices such as oscillator conventional in communication system or radar system and filter, will certainly be to being that service behaviour is made extremely adverse influence.
Summary of the invention
The object of the invention is to adopt electric conducting material to make vibrating mass for existing static electricity driving capacitor formula MEMS resonator, between input/output terminal, there is straight-through electric capacity, thereby the technical problem that resonator energy conversion efficiency is lower, selecting frequency characteristic is poor causing, provides a kind of MEMS resonator based on insulating material vibrating mass.MEMS resonator provided by the invention reduces between input/output terminal the impact of straight-through electric capacity from the physics realization of device architecture as far as possible, can improve the energy conversion efficiency of resonator, makes it have better selecting frequency characteristic, and it is spuious to suppress the output of resonator.
Technical solution of the present invention is as follows:
MEMS resonator based on insulating material vibrating mass, its structure as shown in Figure 1 to Figure 3, comprise the vibrating mass 1 that an insulating material is made, built on stilts being arranged on substrate base of support anchor point 2-1,2-2,2-3 and 2-4 that described vibrating mass 1 adopts four diagonal angle Rotational Symmetries to distribute; Any two sides of supporting the vibrating mass 1 between anchor point deposit metal level as interior electrode 3-1,3-2,3-3 and a 3-4 of resonator input/output terminal transducing electric capacity, each supports anchor point 2-1,2-2,2-3 or 2-4 surface and is provided with resonator driving DC voltage input 5-1,5-2,5-3 or a 5-4, each resonator driving DC voltage input 5-1,5-2,5-3 or 5-4 and electrode 3-1,3-2,3-3 or 3-4 electrical connection in corresponding resonator input/output terminal transducing electric capacity; Be provided with resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or a 4-4 with the substrate surface of electrode 3-1,3-2,3-3 or 3-4 correspondence position in each resonator input/output terminal transducing electric capacity, in each resonator input/output terminal transducing electric capacity, electrode 3-1,3-2,3-3 or 3-4 form a transducing electric capacity with a corresponding resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or 4-4; Described resonator also comprises four input/output port 7-1,7-2,7-3 and 7-4, and each input/output port 7-1,7-2,7-3 or 7-4 are corresponding separately adopts one section of electric conducting material 6-1,6-2,6-3 or 6-4 to be electrically connected with corresponding resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or 4-4.
Further, the MEMS resonator of insulating material vibrating mass provided by the invention, in order to follow IC process compatible, described insulating material vibrating mass can adopt silicon dioxide or silicon nitride material to make, and its shape can be square shape or discoid; Support anchor point 2-1,2-2,2-3 and the 2-4 that described four diagonal angle Rotational Symmetries distribute can adopt silicon dioxide or silicon nitride material to make.
The invention has the beneficial effects as follows:
MEMS resonator based on insulating material vibrating mass provided by the invention, its essence is and abandon the conventional thinking that MEMS resonator vibrates piece adopts electric conducting material to make, adopt insulating material to make vibrating mass, in this case, the signal of telecommunication of resonator input cannot directly transfer to output via straight-through electric capacity, but be first converted to mechanical signal by resonator, by energy converting structure (electric capacity), be converted to signal of telecommunication output again, thereby reduce the impact of straight-through electric capacity between input/output terminal as far as possible, improve the energy conversion efficiency of resonator, make it have better selecting frequency characteristic, and the output that suppresses resonator is spuious.Simultaneously, each resonator driving DC voltage input 5-1,5-2,5-3 or 5-4 provide independent driving voltage for electrode 3-1,3-2,3-3 or 3-4 in corresponding resonator input/output terminal transducing electric capacity, driving voltage is more evenly distributed, and the active force of its generation can be more well-balanced acts on insulation vibrating mass.
Accompanying drawing explanation
Fig. 1 is the plan structure schematic diagram of the MEMS resonator based on insulating material vibrating mass provided by the invention.
Fig. 2 is A-A connection cross-section schematic diagram in Fig. 1.
Fig. 3 is B-B connection cross-section schematic diagram in Fig. 1.
Fig. 4 is the MEMS resonator power conversion circuits figure based on insulating material vibrating mass provided by the invention.
Fig. 5 is traditional resonator equivalent circuit diagram.
The equivalent circuit diagram that Fig. 6 is the MEMS resonator based on insulating material vibrating mass that provides.
In figure: 1 represents insulation vibrating mass, 2-1, 2-2, 2-3 and 2-4 represent that four are supported anchor point, 3-1, 3-2, 3-3 and 3-4 represent electrode in four resonator input/output terminal transducing electric capacity, 4-1, 4-2, 4-3 and 4-4 represent four resonator input/output terminal transducing electric capacity external electrodes, 5-1, 5-2, 5-3 and 5-4 represent four resonator driving DC voltage inputs, 6-1, 6-2, 6-3 and 6-4 represent four sections of electric conducting materials, 7-1, 7-2, 7-3 and 7-4 represent that four resonator input/output terminals are (when resonator specifically uses, four input/output terminals are used in combination in pairs, two relative ports are as resonator input, two other relative port is as resonator output).
Embodiment
MEMS resonator based on insulating material vibrating mass, its structure as shown in Figure 1 to Figure 3, comprise the vibrating mass 1 that an insulating material is made, built on stilts being arranged on substrate base of support anchor point 2-1,2-2,2-3 and 2-4 that described vibrating mass 1 adopts four diagonal angle Rotational Symmetries to distribute; Any two sides of supporting the vibrating mass 1 between anchor point deposit metal level as interior electrode 3-1,3-2,3-3 and a 3-4 of resonator input/output terminal transducing electric capacity, each supports anchor point 2-1,2-2,2-3 or 2-4 surface and is provided with resonator driving DC voltage input 5-1,5-2,5-3 or a 5-4, each resonator driving DC voltage input 5-1,5-2,5-3 or 5-4 and electrode 3-1,3-2,3-3 or 3-4 electrical connection in corresponding resonator input/output terminal transducing electric capacity; Be provided with resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or a 4-4 with the substrate surface of electrode 3-1,3-2,3-3 or 3-4 correspondence position in each resonator input/output terminal transducing electric capacity, in each resonator input/output terminal transducing electric capacity, electrode 3-1,3-2,3-3 or 3-4 form a transducing electric capacity with a corresponding resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or 4-4; Described resonator also comprises four input/output port 7-1,7-2,7-3 and 7-4, and each input/output port 7-1,7-2,7-3 or 7-4 are corresponding separately adopts one section of electric conducting material 6-1,6-2,6-3 or 6-4 to be electrically connected with corresponding resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or 4-4.
During element manufacturing, first on silicon chip, deposit a layer insulating and one deck barrier layer, make upper strata mechanical organ and substrate insulation; Then dopant deposition conductive material layer, forms four input/output port 7-1 to 7-4, four sections of electric conducting material 6-1 to 6-4 and four resonator input/output terminal transducing electric capacity external electrode 4-1,4-2,4-3 or 4-4 with ground floor mask; Then deposition of insulative material forms four and supports anchor point, deposition of sacrificial layer, at sacrifice layer table depositing insulating layer second, form insulating material vibrating mass, anchor point surface and the fast side of vibration deposits conductive material form electrode 3-1,3-2,3-3 or 3-4 in four resonator driving DC voltage input 5-1,5-2,5-3 and 5-4 and four resonator input/output terminal transducing electric capacity; Last releasing sacrificial layer, completes element manufacturing encapsulation.
MEMS resonator vibrates piece and anchor point thereof adopt insulating material to make, and remainder adopts electric conducting material to make; Definition vibrating mass 1 size (long * wide * thick) is l
s* l
s* h
1μ m; Anchor point 2-1 to the 2-4 size of vibrating mass (long * wide * thick) is l
sa* w
sa* h
2μ m (h wherein
1< h
2); Electrode 3-1 to 3-4 size in four resonator input/output terminal transducing electric capacity (long * wide * * thick) l
t* w
t* * h
3μ m (h wherein
1< h
3); Four resonator input/output terminal transducing electric capacity external electrode 4-1 to 4-4 (long * wide * thick) are l
e* w
e* h
2μ m; Four resonator driving DC voltage input 5-1 to 5-4 sizes (long * wide * * thick) l
b* w
b* * h
bμ m (l wherein
b=l
sa); Four input/output port 7-1 to 7-4 (length * wide * thickness) are l
ea* w
ea* h
2μ m; Transducing electric capacity two die openings are d.Because the size of vibrating mass in above-mentioned resonator has directly determined the vibration frequency of resonator, therefore upper, can specifically set relative dimensions according to actual user demand.
The essence of technical solution of the present invention is that the electric conducting material that adopts insulating material to substitute in traditional MENS resonator is made the vibrating mass of static driven mems resonator and supported anchor point, key is that the vibrating mass material of resonator has become insulating material by conductor, it is large that the impedance that it presents becomes, now the impedance of transducing electric capacity is in contrast less, ideally, transducing condensance even can be ignored.In this case, the signal of telecommunication of input cannot directly transfer to output via straight-through electric capacity, but be first converted to mechanical signal by resonator, by energy converting structure (electric capacity), be converted to signal of telecommunication output again, thereby reduce the impact of straight-through electric capacity between input/output terminal as far as possible, the energy conversion efficiency that improves resonator, makes it have better selecting frequency characteristic, and it is spuious to suppress the output of resonator.Simultaneously, each resonator driving DC voltage input 5-1,5-2,5-3 or 5-4 provide independent driving voltage for electrode 3-1,3-2,3-3 or 3-4 in corresponding resonator input/output terminal transducing electric capacity, driving voltage is more evenly distributed, and the active force of its generation can be more well-balanced acts on insulation vibrating mass.
In device when work,, four resonator driving DC voltage input 5-1,5-2,5-3 or 5-4 provide independent driving DC voltage for electrode 3-1,3-2,3-3 or 3-4 in corresponding resonator input/output terminal transducing electric capacity; Ac-excited small-signal is carried on relative two input/output port 7-2 and 7-4; Driving DC voltage and ac-excited small-signal form the driving voltage of resonator jointly, produce the electric field force F of alternation:
In above formula, second is alternating force, and frequency is identical with input signal, for the resonance of resonator provides energy.Under the effect of this electric field force, vibrating mass produces mechanical oscillation thereupon, and the side of vibrating mass produces the displacement of sinusoidal period, and the gap that this variation is equivalent to transducing electric capacity changes.Natural frequency place at resonator, resonator change in displacement is maximum, now the electrode of resonator side loaded direct current biasing and the capacitance generating period of electric capacity that lateral electrode forms change, utilize the electric current that the variation of capacitance charge amount forms on electrode also to reach maximum, therefore obtain resonator maximum output swing.Fig. 4 is the MEMS resonator power conversion circuits figure based on insulating material vibrating mass provided by the invention.Fig. 5 is traditional resonator equivalent circuit diagram.The equivalent circuit diagram that Fig. 6 is the MEMS resonator based on insulating material vibrating mass that provides.Comparison diagram 5 and Fig. 6 are known, the present invention adopts the electric conducting material in the alternative traditional MENS resonator of insulating material to make the vibrating mass of static driven mems resonator, be equivalent to not have straight-through capacitor C 0, thereby reduced the impact of straight-through electric capacity between input/output terminal as far as possible, improved the energy conversion efficiency of resonator, make it have better selecting frequency characteristic, and it is spuious to suppress the output of resonator.
Claims (4)
1. the MEMS resonator based on insulating material vibrating mass, its structure comprises the vibrating mass (1) that an insulating material is made, built on stilts being arranged on substrate base of support anchor point (2-1,2-2,2-3 and 2-4) that described vibrating mass (1) adopts four diagonal angle Rotational Symmetries to distribute; Any two sides of supporting the vibrating mass (1) between anchor point deposit metal level as an interior electrode (3-1,3-2,3-3 and 3-4) of resonator input/output terminal transducing electric capacity, each supports anchor point (2-1,2-2,2-3 or 2-4) surface and is provided with a resonator driving DC voltage input (5-1,5-2,5-3 or 5-4), each resonator driving DC voltage input (5-1,5-2,5-3 or 5-4) and electrode (3-1,3-2,3-3 or 3-4) electrical connection in corresponding resonator input/output terminal transducing electric capacity; Be provided with a resonator input/output terminal transducing electric capacity external electrode (4-1,4-2,4-3 or 4-4) with the substrate surface of electrode (3-1,3-2,3-3 or 3-4) correspondence position in each resonator input/output terminal transducing electric capacity, in each resonator input/output terminal transducing electric capacity, electrode (3-1,3-2,3-3 or 3-4) forms a transducing electric capacity with a corresponding resonator input/output terminal transducing electric capacity external electrode (4-1,4-2,4-3 or 4-4); Described resonator also comprises four input/output ports (7-1,7-2,7-3 and 7-4), and each input/output port (7-1,7-2,7-3 or 7-4) the separately corresponding one section of electric conducting material (6-1,6-2,6-3 or 6-4) that adopts is electrically connected with corresponding resonator input/output terminal transducing electric capacity external electrode (4-1,4-2,4-3 or 4-4).
2. the MEMS resonator based on insulating material vibrating mass according to claim 1, is characterized in that, described insulating material vibrating mass adopts silicon dioxide or silicon nitride material to make.
3. the MEMS resonator based on insulating material vibrating mass according to claim 1, is characterized in that, described insulating material vibrating mass be shaped as square shape or discoid.
4. the MEMS resonator based on insulating material vibrating mass according to claim 1, is characterized in that, the support anchor point (2-1,2-2,2-3 and 2-4) that described four diagonal angle Rotational Symmetries distribute adopts silicon dioxide or silicon nitride material to make.
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| CN106992768A (en) * | 2017-03-23 | 2017-07-28 | 电子科技大学 | A kind of capacitive MEMS resonator with multipair driving induction electrode |
| CN111294011A (en) * | 2020-03-18 | 2020-06-16 | 开元通信技术（厦门）有限公司 | Solid assembled resonator and preparation method thereof |
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Application publication date: 20141210 |