CN103801824A - Automatic-focusing high-precision large-stroke precision positioning workbench - Google Patents
Automatic-focusing high-precision large-stroke precision positioning workbench Download PDFInfo
- Publication number
- CN103801824A CN103801824A CN201410064226.8A CN201410064226A CN103801824A CN 103801824 A CN103801824 A CN 103801824A CN 201410064226 A CN201410064226 A CN 201410064226A CN 103801824 A CN103801824 A CN 103801824A
- Authority
- CN
- China
- Prior art keywords
- high precision
- leading screw
- precision ball
- ball leading
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an automatic-focusing high-precision large-stroke precision positioning workbench. The automatic-focusing high-precision large-stroke precision positioning workbench comprises a motor, a high-precision ball screw, a high-precision ball screw lower support, a supporting rod, piezoelectric ceramic, a triangular laser emission device, a high-precision ball screw nut, a high-precision ball screw upper support and a platen. Compared with the prior art, the double control scheme is adopted for the automatic-focusing high-precision large-stroke precision positioning workbench in the aspect of an overall mechanical structure, the automatic-focusing high-precision large-stroke precision positioning workbench can have low cost while meeting the requirement for high precision, and meanwhile vibration produced by the direct current motor during driving is avoided. An automatic positioning system used in the automatic-focusing high-precision large-stroke precision positioning workbench is more stable than the prior art, contrast calculation carried out by a computer is not needed, and particularly, the automatic-focusing high-precision large-stroke precision positioning workbench is simple in structure, low in cost, high in rigidity, high in reliability and convenient to use, and has popularization value.
Description
Technical field
The present invention relates to a kind of precision positioning focus apparatus, relate in particular to the large stroke precision positioning table of a kind of focusing high accuracy automatically.
Background technology
Tokyo Institute of Technology has developed the one dimension linear electric motors driving ultra precise workbench with nanometer resolution, and its adopts air-float guide rail guiding, stroke 300mm, the vertical stiffness 600N/um of guide rail, horizontal rigidity 220N/um.The heavy 19.6kg of workbench, all adopts alumina ceramic material.The linear electric motors power 160N that speeds, peak acceleration 6.4m/s2, maximal rate 320mm/s.Feedback measuring system adopts laser interferometer, and the resolution ratio of laser interferometer is 0.63nm.Control system adopts the PID controller with feedforward compensation.The feature of its maximum is to have configured an electro-rheological fluid damper, static and dynamic performance that can active control system.System can realize the stepping location of 2nm.
The X-Y workbench that the linear electric motors of Sumitomo Heavy Industries Ltd company exploitation drive has rapid movement response.The step motion of 2.54mm only needs 37ms just can make position error in 10um.Response is very crucial for Laser Processing and semiconductor production fast.Component system is measured in the self-focusing that PI company of Germany produces, automated focus measnring, and optical instrument, roughness measuring instrument, German PI self-focusing is measured the miniature autofocusing laser sensor of component system and is suitable for alternative existing traditional displacement and roughness gauge head.It can carry out the measurement of rapid non-contact surface profile and roughness concentration and accurate displacement.Laser measurement light beam focuses on body surface by means of object lens.Because the position of object lens is by continuously adjustable, thereby the focus of laser beam always overlaps with body surface.
Large stroke precision focusing platform, a large amount of research has been done by domestic Duo Suo scientific research institutions, the microscope stage of Jiang Guang instrument plant transformation, the three-dimensional that its control system can realize objective table drives, but can not realize accurate location, poor repeatability, realizes take joystick as auxiliary control appliance, but can not accomplish speed Control, practical operation inconvenience: do not provide automatic search, focusing function; Nanjing Aero-Space University adopts step motor control objective table in NHIS metallic phase image automatic analysis system, proposes and realized grey level histogram gradient auto-focusing algorithm; 2002, test center of Wuhan University is successfully used the mode of " PC control card+stepper motor " to carry out automatic improving to a domestic microscope and a microscopical objective table of import, use " mode of CCD+ video frequency collection card+stepper motor " to transform autofocus system simultaneously, although objective table adopts the kind of drive of rack-and-pinion, reduce transformation difficulty, its precision is restricted, but whole system transformation obtains better achievement.The wire width measuring instrument of the unit developments such as Tsing-Hua University, in the design of microscopic system, adopt eccentric pencil method, its focusing range is 10um, focusing accuracy has reached 1.9nm. in addition, Sichuan University, BJ University of Aeronautics & Astronautics, a large amount of research has all been done to microscopical automatic improving by University Of Chongqing etc.Nanjing RGB company is devoted to the research and development of microscope automatic platform, and the exploitation of image analysis system and control software systems, has obtained great successes at present.
Immediate with this technology in existing technology is a kind of initial laser processing position of Institute of Industry Technology, Chinese Academy of Sciences invention localization method of focusing automatically.Its cardinal principle is that the surface that the light beam that sends of laser instrument is incident upon workpiece to be machined through the light path system of laser Machining head forms hot spot, mobile laser Machining head, use camera Real-time Collection light spot image simultaneously, find out at the attribute that contrasts light spot image by computer the light spot image that is positioned at focal plane, then according to the displacement of the corresponding laser Machining head of this light spot image, mobile laser Machining head, focusing work completes, then, determine the position relationship between center and the spot center of processing initial point by computer, move laser Machining head according to this position relationship, thereby obtain the accurate location of initial processing position.Compared with existing technology, focusing and the location accuracy of the present invention to initial processing position is high, can meet finishing requirements.
Conventional laser focusing method comprises: burned spot method, infrared photography method, pinhole imaging system method.The accuracy of focusing in conventional motion platform is not high enough, easily produces mistake focusing; In a lot of laser processing technologies, need to have the setting accuracy on work of 0.01um.
Prior art great majority have the not strong shortcoming of focusing stability, and are easily subject to the impact of various noises in environment and hardware; As there is error in the motor of controlling lens moving, there is inertia in lens moving, hardware driving life period postpones, this just causes focusing speed not reach requirement, even if state-of-the-art technical intelligence degree and real-time also have much room for improvement, need in the prior art by computer acquisition, contrast light spot image, waste time and energy, stroke is inadequate, is difficult to meet the needs of precision engineering; In the time of laser processing workpiece, all need the vertical direction stroke of 100mm, general precision surface plate is all difficult to meet this requirement, and therefore has room for improvement.
Summary of the invention
Object of the present invention is just to provide in order to address the above problem a kind of focusing high accuracy automatically large stroke precision positioning table.
The present invention is achieved through the following technical solutions above-mentioned purpose:
The present invention includes motor, high precision ball leading screw, high precision ball leading screw lower support, support bar, piezoelectric ceramics, trigonometric expression laser beam emitting device, high precision ball feed screw nut, high precision ball leading screw upper support and platen, the rotating shaft of described motor is connected with the lower end of described high precision ball leading screw with direction straight up, described high precision ball leading screw lower support is set in the hypomere of described high precision ball leading screw, described high precision ball feed screw nut is set in the stage casing of described high precision ball leading screw, described high precision ball leading screw upper support is set in the epimere of described high precision ball leading screw, described support bar is arranged between described high precision ball leading screw upper support and described high precision ball leading screw lower support, on described high precision ball leading screw, be provided with slide rail, described platen is arranged on described high precision ball leading screw upper support, described piezoelectric ceramics is arranged at described platen inner side, described trigonometric expression laser beam emitting device is arranged at the top of described high precision ball leading screw upper support and the upper surface to described platen just.
Further, the inside of described high precision ball leading screw lower support and described high precision ball leading screw upper support is provided with crossed roller bearing; The outer race of described high precision ball feed screw nut is equipped with connected unit; Between the lower end of the rotating shaft of described motor and described high precision ball leading screw, be connected by shaft coupling.
Particularly, described trigonometric expression laser beam emitting device comprises camera lens casing, little pellicle mirror, condenser lens and large pellicle mirror, described camera lens casing is two casings that mutually run through connection, described condenser lens is arranged in one of them casing and the junction of close another one casing, described little pellicle mirror is arranged in the casing that described condenser lens is installed and is positioned at the top of casing, and described large pellicle mirror is arranged at the center in another one casing.
Beneficial effect of the present invention is:
The present invention is the large stroke precision positioning table of a kind of focusing high accuracy automatically, compared with prior art, the present invention has adopted the scheme of duplex control that platform is had under the high-precision requirement of assurance in this technology aspect overall frame for movement can also have lower cost simultaneously, and trembling of having avoided that direct current generator produces in the time driving.The automatic station-keeping system of utilizing in the present invention is more stable than existing technology, does not need the comparing calculation of computer, especially of the present invention simple in structure, cost is low, rigidity is high, reliability is high, easy to use, there is the value of popularization.
Accompanying drawing explanation
Fig. 1 is the front view of the large stroke precision positioning table of automatic focusing high accuracy of the present invention;
Fig. 2 is the side view of the large stroke precision positioning table of automatic focusing high accuracy of the present invention;
Fig. 3 is the partial sectional view in the large stroke precision positioning table of automatic focusing high accuracy of the present invention;
Fig. 4 is the structural representation of the large stroke precision positioning table of automatic focusing high accuracy of the present invention intermediate cam formula laser beam emitting device;
Fig. 5 is the optical schematic diagram of the large stroke precision positioning table of automatic focusing high accuracy of the present invention intermediate cam formula laser beam emitting device.
In figure: 1-motor, 2-shaft coupling, 3-high precision ball leading screw, 4-high precision ball leading screw lower support, 5-support bar, 6-piezoelectric ceramics, 7-slide rail, 8-trigonometric expression laser beam emitting device, 9-crossed roller bearing, 10-high precision ball feed screw nut, 11-connected unit, 12-high precision ball leading screw upper support, 13-platen, 14-camera lens casing, the little pellicle mirror of 15-, 16-condenser lens, the large pellicle mirror of 17-.
The specific embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Figure 1 to Figure 3: the present invention includes motor 1, high precision ball leading screw 3, high precision ball leading screw lower support 4, support bar 5, piezoelectric ceramics 6, trigonometric expression laser beam emitting device 8, high precision ball feed screw nut 10, high precision ball leading screw upper support 12 and platen 13, the rotating shaft of motor 1 is connected with the lower end of high precision ball leading screw 3 with direction straight up, high precision ball leading screw lower support 4 is set in the hypomere of high precision ball leading screw 3, high precision ball feed screw nut 10 is set in the stage casing of high precision ball leading screw 3, high precision ball leading screw upper support 12 is set in the epimere of high precision ball leading screw 3, support bar 5 is arranged between high precision ball leading screw upper support 12 and high precision ball leading screw lower support 4, on high precision ball leading screw 3, be provided with slide rail 7, platen 13 is arranged on high precision ball leading screw upper support 12, piezoelectric ceramics 6 is arranged at platen 13 inner sides, trigonometric expression laser beam emitting device 8 is arranged at the top of high precision ball leading screw upper support 12 and the upper surface to platen 13 just.
As shown in Figure 1 to Figure 3: the inside of high precision ball leading screw lower support 4 and high precision ball leading screw upper support 12 is provided with crossed roller bearing 9; The outer race of high precision ball feed screw nut 10 is equipped with connected unit 11; Between the lower end of the rotating shaft of motor 1 and high precision ball leading screw 3, be connected by shaft coupling 2.
As shown in Figure 4: trigonometric expression laser beam emitting device 8 comprises camera lens casing 14, smaller part lens 15, condenser lens 16 and large pellicle mirror 17, camera lens casing 14 is two casings that mutually run through connection, condenser lens 16 is arranged in one of them casing and the junction of close another one casing, smaller part lens 15 are arranged in the casing that condenser lens 16 is installed and are positioned at the top of casing, and large pellicle mirror 17 is arranged at the center in another one casing.
As shown in Figure 1 to Figure 3: the present invention adopts motor and machine driving electrically driven (operated) duplex type of drive of pressurizeing, so-called duplex type of drive is exactly that two kinds or two or more type of drive are used simultaneously, and they are carried out to corresponding Parallel Control.Can make like this platen 13 there is larger stroke and very high precision.And at the two ends of leading screw application crossed roller bearing 9, improve and transmit precision, reduce the injury of periodic non uniformity load to bearing.The Z direction course of work is, motor receives that signal rotates and drives ball-screw to rotate together, so just rectilinear motion up and down of ball-screw nut.The present invention mainly carries out the movement of large stroke fast to platform; High-precision micro displacement system is mainly carried out the microdisplacement of platen 13, makes the global displacement precision of platen 13 reach desired precision.
As shown in Figure 3: in the present invention, apply crossed roller bearing 9, because roller is cross arrangement, therefore only just can bear the load of all directions with 1 cover crossed roller bearing 9, compared with traditional model, rigidity improves 3-4 doubly.Meanwhile, because crossed roller bearing 9 inner rings or outer ring are two structures of cutting apart, bearing clearance capable of regulating, even if be applied in preloadingly, also can obtain accurately and rotatablely move.Crossed roller bearing 9 has outstanding running accuracy, and operation is installed simple, bears larger axial and radial load.
As shown in Figure 5: the present invention adopts trigonometric expression laser beam emitting device 8, learn in incident method at skew ray, incident ray and testee surface normal have angle, laser beam incides the A point in the M plane with certain roughness along the direction that is parallel to lens L, after tested object plane diffuse reflection, no longer include definite direction, after receiver lens L assembles, luminous point A is imaged on to the A ' point on the one-dimensional PSD face that is parallel to lens.Scioptics imaging can calculate the position of luminous point accurately.The primary optical axis of supposing light beam i and lens intersects at the O point being positioned in M plane, claims that M plane is zero reference planes, and the picture point of O point on picture screen is O ' point.According to Similar Principle of Triangle, can calculate the A o'clock displacement with respect to zero reference planes M object from the displacement meter of O ' point and A ' point and come.The 800nm light beam emitting from generating laser (not shown) has gone half through large pellicle mirror 17 gears, and remaining light beam projects detected body surface after the effect of condenser lens 16 becomes directional light.If system has been focused, laser just focuses on testee surface.Light beam after focusing, there is reflection in the surface at testee, reflection ray projects CCD through the focussing force of condenser lens 16 and detects in screen (not shown), is exactly a luminous point if detected material surface just in focal spot, is projected in that CCD detects on screen; If the top of object to be detected in focus point, will detect the hot spot of a right semi-circle at detection screen, otherwise there is the hot spot of a left semicircle.Suppose that visible ray obtains the most clearly when image, laser just focuses in detected material surface, if system generation out of focus, CCD detects the hot spot of a semicircle, and wherein the diameter of defocusing amount and hot spot is linear.Z>0 when out of focus in system, Rx>0, produces upper semi-circle; Instantly when out of focus at z<0, Rx<0, produces lower semi-circular.The focusing principle of system is the hot spot that projects a semicircle shape of ccd sensor formation by detection, and system is that upper semi-circle or lower semi-circular can distinguish that focusing system is in upper out of focus or lower out of focus by what detect.The barycenter that analyzes semicircle according to the range of triangle optical principle in Fig. 5 is the defocusing amount mathematical relationship in detected material surface to the distance in the semicircle center of circle and system object lens.Under mathematical analysis, determine system out of focus direction and out of focus distance, export the quick rotation of controlling motor to target location by signal, thereby realize system focusing,
The present invention adopts ball-screw to match with crossed roller bearing, has both guaranteed the working motion scope of large stroke, can realize again precision positioning, makes full use of the high characteristic of running accuracy of crossed roller bearing and ball-screw.
Claims (5)
1. the large stroke precision positioning table of high accuracy of automatically focusing, it is characterized in that: comprise motor, high precision ball leading screw, high precision ball leading screw lower support, support bar, piezoelectric ceramics, trigonometric expression laser beam emitting device, high precision ball feed screw nut, high precision ball leading screw upper support and platen, the rotating shaft of described motor is connected with the lower end of described high precision ball leading screw with direction straight up, described high precision ball leading screw lower support is set in the hypomere of described high precision ball leading screw, described high precision ball feed screw nut is set in the stage casing of described high precision ball leading screw, described high precision ball leading screw upper support is set in the epimere of described high precision ball leading screw, described support bar is arranged between described high precision ball leading screw upper support and described high precision ball leading screw lower support, on described high precision ball leading screw, be provided with slide rail, described platen is arranged on described high precision ball leading screw upper support, described piezoelectric ceramics is arranged at described platen inner side, described trigonometric expression laser beam emitting device is arranged at the top of described high precision ball leading screw upper support and the upper surface to described platen just.
2. the large stroke precision positioning table of automatic focusing high accuracy according to claim 1, is characterized in that: the inside of described high precision ball leading screw lower support and described high precision ball leading screw upper support is provided with crossed roller bearing.
3. the large stroke precision positioning table of automatic focusing high accuracy according to claim 1, is characterized in that: the outer race of described high precision ball feed screw nut is equipped with connected unit.
4. the large stroke precision positioning table of automatic focusing high accuracy according to claim 1, is characterized in that: between the rotating shaft of described motor and the lower end of described high precision ball leading screw, be connected by shaft coupling.
5. the large stroke precision positioning table of automatic focusing high accuracy according to claim 1, it is characterized in that: described trigonometric expression laser beam emitting device comprises camera lens casing, little pellicle mirror, condenser lens and large pellicle mirror, described camera lens casing is two casings that mutually run through connection, described condenser lens is arranged in one of them casing and the junction of close another one casing, described little pellicle mirror is arranged in the casing that described condenser lens is installed and is positioned at the top of casing, and described large pellicle mirror is arranged at the center in another one casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410064226.8A CN103801824B (en) | 2014-02-25 | 2014-02-25 | A kind of auto-focusing high-precision large-stroke precise positioning work table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410064226.8A CN103801824B (en) | 2014-02-25 | 2014-02-25 | A kind of auto-focusing high-precision large-stroke precise positioning work table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103801824A true CN103801824A (en) | 2014-05-21 |
| CN103801824B CN103801824B (en) | 2015-11-25 |
Family
ID=50699467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410064226.8A Expired - Fee Related CN103801824B (en) | 2014-02-25 | 2014-02-25 | A kind of auto-focusing high-precision large-stroke precise positioning work table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103801824B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107390356A (en) * | 2017-08-28 | 2017-11-24 | 电子科技大学 | The method focused on automatically based on representation of laser facula |
| CN109951100A (en) * | 2019-03-25 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of big travel displacement driving device and its control method |
| CN112335227A (en) * | 2019-08-21 | 2021-02-05 | 深圳市大疆创新科技有限公司 | Control device, imaging system, control method, and program |
| CN113329184A (en) * | 2021-08-02 | 2021-08-31 | 武汉中导光电设备有限公司 | Real-time focusing device and method based on position detector |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5987990A (en) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | Laser beam machine |
| DE4109567A1 (en) * | 1991-03-22 | 1992-09-24 | Weidmueller Interface | Nozzle with preferential fracture zone - in which nozzle is screwed into intermediate polyvinyl sulphide or ceramic element which contains groove traversed by electrical conductor |
| CN102179630A (en) * | 2011-04-01 | 2011-09-14 | 江苏大学 | Laser micromachining device for surface of engine cylinder and machining method of laser micromachining device |
| CN102626834A (en) * | 2012-05-07 | 2012-08-08 | 上海市激光技术研究所 | Dual-pickup-head laser fast cutting device used for different formats and application method |
| CN202555974U (en) * | 2012-05-07 | 2012-11-28 | 上海市激光技术研究所 | Double-light-head laser fast cutting device for different breadths |
| CN203209853U (en) * | 2013-03-21 | 2013-09-25 | 武汉华工激光工程有限责任公司 | Machining device applied to large-size light guide plate |
| CN203725980U (en) * | 2014-02-25 | 2014-07-23 | 哈尔滨工业大学（威海） | Automatic focusing high accuracy large stroke precision positioning workbench |
-
2014
- 2014-02-25 CN CN201410064226.8A patent/CN103801824B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5987990A (en) * | 1982-11-10 | 1984-05-21 | Nisshin Steel Co Ltd | Laser beam machine |
| DE4109567A1 (en) * | 1991-03-22 | 1992-09-24 | Weidmueller Interface | Nozzle with preferential fracture zone - in which nozzle is screwed into intermediate polyvinyl sulphide or ceramic element which contains groove traversed by electrical conductor |
| CN102179630A (en) * | 2011-04-01 | 2011-09-14 | 江苏大学 | Laser micromachining device for surface of engine cylinder and machining method of laser micromachining device |
| CN102626834A (en) * | 2012-05-07 | 2012-08-08 | 上海市激光技术研究所 | Dual-pickup-head laser fast cutting device used for different formats and application method |
| CN202555974U (en) * | 2012-05-07 | 2012-11-28 | 上海市激光技术研究所 | Double-light-head laser fast cutting device for different breadths |
| CN203209853U (en) * | 2013-03-21 | 2013-09-25 | 武汉华工激光工程有限责任公司 | Machining device applied to large-size light guide plate |
| CN203725980U (en) * | 2014-02-25 | 2014-07-23 | 哈尔滨工业大学（威海） | Automatic focusing high accuracy large stroke precision positioning workbench |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107390356A (en) * | 2017-08-28 | 2017-11-24 | 电子科技大学 | The method focused on automatically based on representation of laser facula |
| CN109951100A (en) * | 2019-03-25 | 2019-06-28 | 中国科学院长春光学精密机械与物理研究所 | A kind of big travel displacement driving device and its control method |
| CN109951100B (en) * | 2019-03-25 | 2020-09-08 | 中国科学院长春光学精密机械与物理研究所 | Large-stroke displacement driving device and control method thereof |
| CN112335227A (en) * | 2019-08-21 | 2021-02-05 | 深圳市大疆创新科技有限公司 | Control device, imaging system, control method, and program |
| CN113329184A (en) * | 2021-08-02 | 2021-08-31 | 武汉中导光电设备有限公司 | Real-time focusing device and method based on position detector |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103801824B (en) | 2015-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101349542B (en) | Vision measuring apparatus of large size part | |
| CN103801824B (en) | A kind of auto-focusing high-precision large-stroke precise positioning work table | |
| CN103674977B (en) | Optical elements of large caliber element surface damage detection device and corresponding detection method | |
| CN109000571B (en) | Thickness consistency detection device | |
| CN102221123A (en) | Submicron-level positioning accuracy parallel regulating platform and regulating method thereof | |
| CN103528514B (en) | The many visual fields of machine vision work in coordination with mechanism and equipped with this mechanism measurement with detection device | |
| CN105234802A (en) | Small ball head tool single-turntable polishing machining device and tool setting method | |
| CN107234487B (en) | Moving component multi-parameter detecting method based on combinatorial surface type standard | |
| CN104028890A (en) | Large-stroke column coordinate two-photon polymerization processing method and device | |
| CN103801826B (en) | Laser processing focusing device, focusing method and laser processing equipment | |
| CN104296693B (en) | System and method for detecting orthogonality of precision shafting | |
| CN107096928A (en) | Centering car lens barrel processing unit (plant) and its method based on optical decentration system | |
| CN103454070A (en) | Focus performance test method for X-ray combined refraction lens on basis of CCD detection | |
| CN203725980U (en) | Automatic focusing high accuracy large stroke precision positioning workbench | |
| CN203587877U (en) | Microscope fast focusing objective table device | |
| CN201266076Y (en) | Large size part measuring apparatus based on machine vision | |
| CN113333942A (en) | Machining head with laser focus automatic focusing function and machining method thereof | |
| CN204269071U (en) | A kind of slim electronic two-dimentional precision surface plate | |
| CN109520443A (en) | A kind of roll angle measurement method based on combinatorial surface type standard | |
| CN108709509B (en) | Contour camera, matched oversized-diameter revolving body workpiece non-contact caliper and non-contact revolving body measuring method | |
| CN208547763U (en) | Three dimensional scanning platform | |
| CN109596074A (en) | Coaxial bearing degree detection system | |
| Luo et al. | Reflector automatic acquisition and pointing based on auto-collimation theodolite | |
| CN212390966U (en) | Multifunctional detection device based on laser triangulation method | |
| CN108273806B (en) | A kind of laser cleaning equipment camera lens and laser cleaning equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20170225 |