CN104296693B - System and method for detecting orthogonality of precision shafting - Google Patents
System and method for detecting orthogonality of precision shafting Download PDFInfo
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- CN104296693B CN104296693B CN201310624727.2A CN201310624727A CN104296693B CN 104296693 B CN104296693 B CN 104296693B CN 201310624727 A CN201310624727 A CN 201310624727A CN 104296693 B CN104296693 B CN 104296693B
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- graticle
- dimensional adjustable
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- interior focusing
- autocollimator
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Abstract
The invention relates to a system and method for detecting the orthogonality of a precision shafting. The detection system comprises a four-dimension adjustable reticle, a television interior focusing autocollimator, and a detection platform. The four-dimension adjustable reticle is mounted on a rotating link of a pitch component of a to-be-detected precision orthogonal shafting. The detection platform is used for supporting the to-be-detected precision orthogonal shafting. The television interior focusing autocollimator is used for working with the four-dimension adjustable reticle to detect the orthogonality of the shafting through autocollimation and collimation. The four-dimension adjustable reticle is mounted on the rotating link of a shafting, the mirror surface of the reticle is adjusted to be perpendicular to the axis, the reticle center is on the axis, and the axis is simulated with the aid of the center of the reticle in the detection process rather than the center of a process hole. The limitations and defects of the prior art are overcome. After one adjustment, both the verticality and the intersection deviation can be obtained. The system and the method of the invention are based on the optical principle. The detection accuracy and efficiency are high. The method is simple. No requirement is put on the machining precision of a process hole in a bearing sleeve. The system and the method are easy to implement.
Description
Technical field
The invention belongs to precision optical machinery quadrature shaft detection technique field, it is related to a kind of detection system of precision bearing system orthogonality
System and method.
Background technology
With the polytechnic continuous development of electro-optical system, high accuracy surely takes aim at technology and high-precision transmission system has become existing
The inexorable trend of stage development, captures exactly for guarantee electro-optical system, aims at and follow the tracks of target, to accurate quadrature shaft just
The property handed over all proposes very high index request.
A kind of Chinese patent application " the inspection of perpendicularity of quadrature shaft and position degree of Application No. 201010241206.5
Survey method " discloses a kind of detection method of the accurate quadrature shaft orthogonality of detection, but range requires, and is only applicable to it
In a shafting be the structure that two semiaxis parts are constituted, and the bearing holder (housing, cover) design technology hole of two semiaxis parts, install with bearing
The axiality of axial plane is not more than ￠ 0.01, during the Intersection of detection quadrature shaft, simulates the position of axis with the center of fabrication hole
Put, so the machining accuracy of fabrication hole axiality will directly affect the accuracy of detection of quadrature shaft Intersection.Existing detection side
Method is very high to the fabrication hole requirement on machining accuracy on bearing holder (housing, cover), increased difficulty of processing and processing cost.
Content of the invention
It is an object of the invention to provide a kind of detecting system of precision bearing system orthogonality and method, just to solve precision bearing system
The problem that the detection of the property handed over is very high to the fabrication hole requirement on machining accuracy on bearing holder (housing, cover) and increased difficulty of processing and processing cost.
For achieving the above object, the detecting system technical scheme of the precision bearing system orthogonality of the present invention is as follows：This detection system
System includes four-dimensional adjustable graticle, TV interior focusing autocollimator and detection platform, and described four-dimensional adjustable graticle is installed to be treated
In the rocking link of the accurate quadrature shaft pitch components of detection, detection platform is used for support precision quadrature shaft to be detected, institute
State TV interior focusing autocollimator for detect shafting orthogonality with four-dimensional adjustable graticle autocollimatic and aiming.
Further, detecting system also includes luminaire, is used for illuminating four-dimensional adjustable graticle.
Further, described four-dimensional adjustable graticle is fixedly arranged on an axis of precision quadrature shaft to be detected by keyset
Rocking link on.
The detection method technical scheme of the precision bearing system orthogonality of the present invention is as follows：The method is used for by orientation part and bows
Face upward the quadrature shaft of part composition, orientation part forms the azimuth axis of quadrature shaft, pitch components form bowing of quadrature shaft
Face upward axis, the step of detection method is as follows：
(1) four-dimensional adjustable graticle is installed on the rocking link of pitch components, and adjust four-dimensional adjustable graticle minute surface
Vertical with pitch axis；
(2) illuminate four-dimensional adjustable graticle, then TV interior focusing autocollimator is focused, make four-dimensional adjustable graticle
Graduation picture is clear, and four-dimensional adjustable graticle rotates around pitch axis, then graduation picture is justified around pitch axis line drawing, four-dimensional adjustable point of adjustment
Draw the horizontally and vertically direction displacement of plate so that graduation picture is minimum around the picture circle amount of pitch axis, now four-dimensional adjustable graticle
Graduation center in pitch axis, to simulate pitch axis；
(3) adjustment TV interior focusing autocollimator displacement in the horizontal and vertical directions is so that graduation image position is in TV
The center zero of interior focusing autocollimator；
(4) TV interior focusing autocollimator is accommodated to infinity, send directional light, adjustment electricity to four-dimensional adjustable graticle
Make TV interior focusing autocollimator and four-dimensional adjustable graticle autocollimatic depending on the orientation of interior focusing autocollimator, luffing angle；
(5) pitch components rotate 180 ° around azimuth axis, and another minute surface of four-dimensional adjustable graticle is in TV interior focusing certainly
Pitching line in collimator overlaps, the variable quantity of measurement rhumb line, calculates the perpendicularity deviation of quadrature shaft；
(6) TV interior focusing autocollimator focusing makes graduation picture clear, and measurement graduation is as the variable quantity of pitching line and reading
Now working distance multiplying power, calculates the Intersection of quadrature shaft, completes the detection of precision bearing system orthogonality.
Further, adjusting the four-dimensional adjustable graticle minute surface process vertical with pitch axis in described step (1) is：Will
TV interior focusing autocollimator accommodates to infinity, sends directional light to four-dimensional adjustable graticle, adjusts four-dimensional adjustable graticle
Orientation, luffing angle, make TV interior focusing autocollimator by the auto-collimation picture of four-dimensional adjustable graticle minute surface around pitch axis
The picture circle amount of line is minimum, and now four-dimensional adjustable graticle minute surface is vertical with pitch axis.
The detecting system of precision bearing system orthogonality of the present invention and method are not come by fabrication hole center in detection process
Simulation axis, but four-dimensional adjustable graticle is installed on the rocking link of a shafting, adjust the minute surface of four-dimensional adjustable graticle
Vertical with axis, graduation center, on axis, is simulated axis with four-dimensional adjustable graticle center, is overcome the office of prior art
Sex-limited and defect, after the completion of once adjusting, can draw perpendicularity and Intersection deviation simultaneously, and the present invention is based on optical principle
Accuracy of detection height, efficiency high, method are simple, and the fabrication hole machining accuracy on bearing holder (housing, cover) is not required, convenient to carry out.
Brief description
Fig. 1 is the TV interior focusing autocollimator optical system diagram of the embodiment of the present invention；
Fig. 2 is the TV interior focusing autocollimator outline drawing of the embodiment of the present invention；
Fig. 3 is four-dimensional adjustable graticle structure chart；
Fig. 4 is the A-A sectional view of Fig. 3；
Fig. 5 is the B-B sectional view of Fig. 3；
Fig. 6 is the quadrature shaft modular construction figure to be measured of embodiment；
Fig. 7 is the A-A sectional view of Fig. 6；
Fig. 8 is the pitch axis adapter plate structure figure of embodiment.
The each implication indicating of in figure is as follows：11, fixing object lens；12, object lens of focusing；13, luminaire；14, graticle；
15, spectroscope；16, reflecting mirror；17, eyepiece graticule；18, CCD；21, translate base；22, fixed frame；23, adjusting screw；
24, translational adjustment platform；25, angular adjustment platform；26, four-dimensional adjustable graticle；27, attachment screw；51, orientation upper half axle portion part；
52, pitch axis part；53, orientation lower half axle portion part；54, the matched bearings of lower half axle portion part；55, pitch axis matched bearings；56,
The matched bearings of upper half axle portion part；57, keyset mounting screw holes.
Specific embodiment
As shown in Figure 5,6, in detection platform, four-dimensional adjustable graticle passes through keyset to precision quadrature shaft to be detected
It is installed in the rocking link of precision quadrature shaft pitch components to be detected, TV interior focusing autocollimator is placed in four-dimensional adjustable
Graticle dead ahead, for autocollimatic and aiming graticle.
As shown in Figure 1, 2, TV interior focusing autocollimator is by interior focusing optical system, ccd image sensor imaging system,
Operation control system mounting seat etc. forms.Panel operation explanation：" switching " operation execution is spacing, X and Y conversion；" illumination " operates
Adjust LED illumination brightness, totally 5 grades of brightness regulation；RESET when spacing adjustment work away to parallel optical position, during X and Y operation
For resetting；It is used for positive and negative working distance " ←, → " to adjust.In Fig. 1,11 represent fixing object lens；12 represent focusing object lens；13 expressions
Luminaire；14 expression graticles；15 expression spectroscopes；16 expression reflecting mirrors；17 expression eyepiece graticules；18 expression CCD.
Instrument parameter：Focusing objective focal length f ' *=203.265mm (the parallel optical position of outgoing)；Focal length variations f '=101.9
～351.4mm；Measurement range-∞～-420mm ,+300mm～∞；Effective aperture Ф 25mm；Additional objective focal length f '=
312.6mm、312.1mm、208.1mm、103.8mm、51.3mm、-103.8mm、-208.1mm、-312.1mm；Ccd detector 1/
3″；Focusing linearity≤0.03mm/1000mm.
The four-dimension as shown in Fig. 3,4,5 is adjustable, and graticle is double mirror, horizontally and vertically moves Adjust and use translation
Relative movement between base 21 and 24 two match grinding planes of translational adjustment platform, adjusts lower floor's milled screw and realizes；Orientation, pitching
Angular adjustment utilizes the relative motion between radius identical convex-concave sphere, and spherical radius is SR100, adjusts upper strata milled screw
Realize.Angle and displacement governing loop are separate, will not influence each other.In figure 21 represents translation base；22 expression fixed frames；
23 expression adjusting screws；24 expression translational adjustment platforms；25 expression angular adjustment platforms；The 26 four-dimensional adjustable graticles of expression；27 expressions
Attachment screw.
Parameter：Horizontally and vertically moving range ± 5mm, azimuth pitch angle of regulation range ± 2 °, four-dimensional adjustable graticle
The depth of parallelism≤0.6 μm of two work surfaces, flatness≤0.03 μm.
As shown in Figure 6,7, orientation upper half axle portion part 51 and orientation lower half axle portion part 53 are formed quadrature shaft modular construction figure
The azimuth axis II II of quadrature shaft, pitch components 52 define the pitch axis I I of quadrature shaft, have in pitch axis
Light path through hole.In Fig. 7,51 represent orientation upper half axle portion part；52 expression pitch axis parts；53 represent orientation lower half axle portion part；54 tables
Show the matched bearings of lower half axle portion part；55 expression pitch axis matched bearings；The matched bearings of 56 expression upper half axle portion parts；57 expressions
Keyset mounting screw holes.The pitch axis that pitch axis keyset is connected by screw in Fig. 7 is fastened.
Embodiment technical specification is：Azimuth axis is not more than 20 with the error of perpendicularity of pitch axis ", Intersection error is not more than
0.05.
As shown in figure 8, can get pitch axis adapter plate structure figure.
Carry out the method and step of the detection of precision bearing system orthogonality using the detecting system of above-mentioned precision bearing system orthogonality
As follows：
(1) in mounting plate, orientation upper half axle portion part and the orientation lower half axle portion part of the quadrature shaft part of embodiment
It is attached by screws to detect on support, two-sided four-dimensional adjustable graticle and keyset threaded one by the inside and outside of M30 × 1
Rise, then with screw, keyset is connected on pitch axis part, mounting screw holes is shown in Fig. 7, and pitch axis rotates to around azimuth axis
With platform parallel, lock azimuth axis, the two-sided four-dimensional adjustable graticle described in the method and aforesaid four-dimensional adjustable graticle
Identical, it is intended merely to emphasize that four-dimensional adjustable graticle is double mirror；
(2) TV interior focusing autocollimator is aligned with two-sided four-dimensional adjustable graticle, and TV interior focusing autocollimator is focused
Go out directional light to 9999 (infinitys), adjust the side of graticle by the angle modulation screw of two-sided four-dimensional adjustable graticle
Position, luffing angle, make the auto-collimation picture in TV interior focusing autocollimator around the picture circle amount minimum 2 of pitch axis I I ".
(3) illuminate two-sided four-dimensional adjustable graticle with lighting lamp, then TV interior focusing autocollimator is focused, make double
The graduation picture of the four-dimensional adjustable graticle in face is clear, and now working distance is 401；Graduation picture draws circle around pitch axis I I, by double
The displacement adjusting screw of the four-dimensional adjustable graticle in face, to adjust the position on the horizontally and vertically direction of two-sided four-dimensional adjustable graticle
Move so that graduation picture measures minimum 0.01 around the picture circle of axis I I；
(4) step 1,2 adjustment after the completion of, adjust TV interior focusing autocollimator mounting seat on horizontally and vertically regulation machine
Structure, to adjust the displacement on the horizontally and vertically direction of TV interior focusing autocollimator so that graduation image position is in TV interior focusing
The center zero of autocollimator；
(5), after the completion of step 4 adjustment, again TV interior focusing autocollimator is accommodated to 9999 and go out directional light, adjust certainly
Collimator mounting seat upper position, pitching adjusting mechanism, to adjust the orientation of TV interior focusing autocollimator, luffing angle makes certainly
Collimator and four-dimensional adjustable graticle autocollimatic；
(6) step 3, after the completion of 4, the position of TV interior focusing autocollimator is fixed, and as benchmark, mustn't change position again
Put.
(7) shafting 1 rotates 180 ° with two-sided four-dimensional adjustable graticle around azimuth axis II II, after rotation, two-sided four
Tie up another minute surface of adjustable graticle pitching line in TV interior focusing autocollimator to overlap, the angle of measurement rhumb line is partially worth and is
30 ", the perpendicularity deviation calculating quadrature shaft is 30 "/2=15 ", meets index request；
(8) focusing of TV interior focusing autocollimator makes graduation picture clear, and now working distance is 554, and measurement graduation is as pitching
The bias H=0.06 of line and reading now working distance multiplying power β=1.04, the Intersection deviation calculating quadrature shaft is H/
2 β=0.06/2.08=0.029, meet index request.
Claims (2)
1. a kind of detection method of precision bearing system orthogonality, the method is used for the normal axis being made up of orientation part and pitch components
System, orientation part formed quadrature shaft azimuth axis, pitch components formed quadrature shaft pitch axis it is characterised in that
The step of detection method is as follows：
(1) four-dimensional adjustable graticle is installed on the rocking link of pitch components, and adjust four-dimensional adjustable graticle minute surface and bow
Face upward axis vertical；
(2) illuminate four-dimensional adjustable graticle, then TV interior focusing autocollimator is focused, make the graduation of four-dimensional adjustable graticle
As clearly, four-dimensional adjustable graticle rotates around pitch axis, then graduation picture is justified around pitch axis line drawing, adjusts four-dimensional adjustable graticle
The displacement of horizontally and vertically direction so that graduation picture is minimum around the picture circle amount of pitch axis, now four-dimensional adjustable graticle point
Draw center in pitch axis, to simulate pitch axis；
(3) adjustment TV interior focusing autocollimator displacement in the horizontal and vertical directions is so that graduation image position is adjusted in TV
The center zero of burnt autocollimator；
(4) TV interior focusing autocollimator is accommodated to infinity, send directional light to four-dimensional adjustable graticle, in adjustment TV
The orientation of focusing autocollimator, luffing angle make TV interior focusing autocollimator and four-dimensional adjustable graticle autocollimatic；
(5) pitch components rotate 180 ° around azimuth axis, and another minute surface of four-dimensional adjustable graticle is in TV interior focusing auto-collimation
Pitching line in instrument overlaps, the variable quantity of measurement rhumb line, calculates the perpendicularity deviation of quadrature shaft；
(6) focusing of TV interior focusing autocollimator makes graduation picture clear, measures graduation and as the variable quantity of pitching line and reads now
Working distance multiplying power, calculates the Intersection of quadrature shaft, completes the detection of precision bearing system orthogonality.
2. the detection method of precision bearing system orthogonality according to claim 1 is it is characterised in that adjust in described step (1)
The whole four-dimensional adjustable graticle minute surface process vertical with pitch axis be：TV interior focusing autocollimator is accommodated to infinity,
Send directional light to four-dimensional adjustable graticle, adjust orientation, the luffing angle of four-dimensional adjustable graticle, make TV interior focusing autocollimatic
Straight instrument measures minimum, now four-dimensional adjustable graticle by the auto-collimation picture of four-dimensional adjustable graticle minute surface around the picture circle of pitch axis
Minute surface is vertical with pitch axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310624727.2A CN104296693B (en) | 2013-11-28 | 2013-11-28 | System and method for detecting orthogonality of precision shafting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310624727.2A CN104296693B (en) | 2013-11-28 | 2013-11-28 | System and method for detecting orthogonality of precision shafting |
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| CN104296693B true CN104296693B (en) | 2017-02-08 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105698713B (en) * | 2016-01-27 | 2019-03-29 | 西安应用光学研究所 | A kind of device and scaling method of calibrating precise shafting axis of rotation |
| CN106247997B (en) * | 2016-08-09 | 2018-12-28 | 中国人民解放军国防科学技术大学 | Error of perpendicularity method for orthogonal guide rail platform |
| CN106735961B (en) * | 2016-12-30 | 2019-04-02 | 中国科学院西安光学精密机械研究所 | The calibration of Orthogonal Double balance staff, debugging and reflecting mirror Method of Adjustment for laser processing |
| CN109238174A (en) * | 2018-09-05 | 2019-01-18 | 长春理工大学 | A kind of multi-axis turntable intercept and Intersection comprehensive test device and method |
| CN110763163B (en) * | 2019-10-28 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | Photoelectric image measuring instrument and measuring method for detecting verticality of large-size workpiece |
| CN110779469B (en) * | 2019-11-07 | 2021-05-04 | 中国科学院合肥物质科学研究院 | Shafting perpendicularity detection device and method for horizontal photoelectric tracking system |
| CN112098050B (en) * | 2020-08-21 | 2022-08-12 | 西安空间无线电技术研究所 | System and method for testing orthogonality of two shafts of coarse pointing mechanism |
| CN112427969B (en) * | 2020-10-28 | 2022-06-24 | 九江精密测试技术研究所 | Method for processing axial positioning surface of turntable frame |
| CN114111688B (en) * | 2021-07-29 | 2023-08-25 | 深圳市中图仪器股份有限公司 | Device and method for measuring orthogonality of orthogonal axis system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| GB2102979A (en) * | 1981-07-07 | 1983-02-09 | Ring Sights Ltd | Collimator gun sight |
| FR2602347B1 (en) * | 1986-07-31 | 1989-12-22 | Applic Gles Electricite Me | ALIGNMENT DEVICE FOR MULTI-WAY SIGHTING APPARATUS |
| CN100410642C (en) * | 2005-05-18 | 2008-08-13 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting verticality of optical axis and mounting baseplane in optical system |
| CN101922923B (en) * | 2010-07-31 | 2012-05-30 | 中国航空工业集团公司洛阳电光设备研究所 | Method for detecting perpendicularity and true position of normal axis |
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