CN104296693A - System and method for detecting orthogonality of precision shafting - Google Patents
System and method for detecting orthogonality of precision shafting Download PDFInfo
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- CN104296693A CN104296693A CN201310624727.2A CN201310624727A CN104296693A CN 104296693 A CN104296693 A CN 104296693A CN 201310624727 A CN201310624727 A CN 201310624727A CN 104296693 A CN104296693 A CN 104296693A
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Abstract
The invention relates to a system and method for detecting the orthogonality of a precision shafting. The detection system comprises a four-dimension adjustable reticle, a television interior focusing autocollimator, and a detection platform. The four-dimension adjustable reticle is mounted on a rotating link of a pitch component of a to-be-detected precision orthogonal shafting. The detection platform is used for supporting the to-be-detected precision orthogonal shafting. The television interior focusing autocollimator is used for working with the four-dimension adjustable reticle to detect the orthogonality of the shafting through autocollimation and collimation. The four-dimension adjustable reticle is mounted on the rotating link of a shafting, the mirror surface of the reticle is adjusted to be perpendicular to the axis, the reticle center is on the axis, and the axis is simulated with the aid of the center of the reticle in the detection process rather than the center of a process hole. The limitations and defects of the prior art are overcome. After one adjustment, both the verticality and the intersection deviation can be obtained. The system and the method of the invention are based on the optical principle. The detection accuracy and efficiency are high. The method is simple. No requirement is put on the machining precision of a process hole in a bearing sleeve. The system and the method are easy to implement.
Description
Technical field
The invention belongs to precision optical machinery quadrature shaft detection technique field, relate to a kind of detection system and method for precision bearing system orthogonality.
Background technology
Along with the polytechnic development of electro-optical system, high precision surely takes aim at the inexorable trend that technology and high-precision transmission system have become present stage development, for ensureing that electro-optical system is caught exactly, aimed at and tracking target, very high index request is all proposed to the orthogonality of accurate quadrature shaft.
Application number be 201010241206.5 Chinese patent application " a kind of verticality of quadrature shaft and the detection method of position degree " disclose a kind of detection method detecting accurate quadrature shaft orthogonality, but usable range has requirement, being only applicable to a wherein axle is the structure that two and half spindle units are formed, and the bearing holder (housing, cover) design technology hole of two and half spindle units, the right alignment of installing axial plane with bearing is not more than ￠ 0.01, when detecting the Intersection of quadrature shaft, the position of axis is simulated with the center of fabrication hole, so the machining precision of fabrication hole right alignment will directly affect the accuracy of detection of quadrature shaft Intersection.Existing detection method is very high to the fabrication hole requirement on machining accuracy on bearing holder (housing, cover), adds difficulty of processing and processing cost.
Summary of the invention
The object of this invention is to provide a kind of detection system and method for precision bearing system orthogonality, very high and add the problem of difficulty of processing and processing cost to the fabrication hole requirement on machining accuracy on bearing holder (housing, cover) with the detection solving precision bearing system orthogonality.
For achieving the above object, the detection system technical scheme of precision bearing system orthogonality of the present invention is as follows: this detection system comprises four-dimensional adjustable graticule, TV interior focusing autocollimator and detection platform, the described four-dimension is adjustable, and graticule is installed in the rocking link of accurate quadrature shaft pitch components to be detected, for supporting accurate quadrature shaft to be detected in detection platform, described TV interior focusing autocollimator is used for carrying out detection axis system orthogonality with the adjustable graticule autocollimatic of the four-dimension with aiming at.
Further, detection system also comprises light fixture, for illuminating four-dimensional adjustable graticule.
Further, the adjustable graticule of the described four-dimension is fixedly arranged on by card extender in the rocking link of an axis of accurate quadrature shaft to be detected.
The detection method technical scheme of precision bearing system orthogonality of the present invention is as follows: the method is used for the quadrature shaft be made up of orientation parts and pitch components, orientation parts form the azimuth axis of quadrature shaft, pitch components forms the pitch axis of quadrature shaft, and the step of detection method is as follows:
(1) four-dimensional adjustable graticule is installed in the rocking link of pitch components, and it is vertical with pitch axis to adjust four-dimensional adjustable graticule minute surface;
(2) four-dimensional adjustable graticule is illuminated, then TV interior focusing autocollimator is focused, make the graduation of four-dimensional adjustable graticule as clear, four-dimensional adjustable graticule rotates around pitch axis, then graduation picture is around pitch axis line drawing circle, adjusts level and the vertical direction displacement of four-dimensional adjustable graticule, makes graduation picture minimum around the picture circle amount of pitch axis, now the graduation center of four-dimensional adjustable graticule is in pitch axis, to simulate pitch axis;
(3) adjust the displacement in the horizontal and vertical directions of TV interior focusing autocollimator, make graduation image position in the center zero of TV interior focusing autocollimator;
(4) TV interior focusing autocollimator is accommodated to infinite distance, send directional light to the adjustable graticule of the four-dimension, orientation, the luffing angle of adjustment TV interior focusing autocollimator make TV interior focusing autocollimator and the adjustable graticule autocollimatic of the four-dimension;
(5) pitch components rotates 180 ° around azimuth axis, and the pitching line of another minute surface in TV interior focusing autocollimator of four-dimensional adjustable graticule overlaps, and measures the variable quantity of position line, calculates the perpendicularity deviation of quadrature shaft;
(6) TV interior focusing autocollimator focusing make graduation as clear, measure graduation as pitching line variable quantity and read now working distance multiplying power, calculate the Intersection of quadrature shaft, complete the detection of precision bearing system orthogonality.
Further, the process that in described step (1), the four-dimensional adjustable graticule minute surface of adjustment is vertical with pitch axis is: TV interior focusing autocollimator is accommodated to infinite distance, directional light is sent to the adjustable graticule of the four-dimension, regulate orientation, the luffing angle of four-dimensional adjustable graticule, make TV interior focusing autocollimator minimum around the picture circle amount of pitch axis by the autocollimation picture of four-dimensional adjustable graticule minute surface, now four-dimensional adjustable graticule minute surface is vertical with pitch axis.
Detection system and the method for precision bearing system orthogonality of the present invention do not simulate axis by fabrication hole center in testing process, but four-dimensional adjustable graticule is installed in the rocking link of an axle system, regulate minute surface and the axes normal of four-dimensional adjustable graticule, graduation center is on axis, axis is simulated with the adjustable graticule center of the four-dimension, overcome limitation and the defect of prior art, after once having adjusted, verticality and Intersection deviation can be drawn simultaneously, the present invention is based on optical principle accuracy of detection high, efficiency is high, method is simple, to the fabrication hole machining precision not requirement on bearing holder (housing, cover), be convenient to implement.
Accompanying drawing explanation
Fig. 1 is the TV interior focusing autocollimator optical system diagram of the embodiment of the present invention;
Fig. 2 is the TV interior focusing autocollimator outside drawing of the embodiment of the present invention;
Fig. 3 is four-dimensional adjustable graticule structural drawing;
Fig. 4 is the A-A cut-open view of Fig. 3;
Fig. 5 is the B-B cut-open view of Fig. 3;
Fig. 6 is the quadrature shaft modular construction figure to be measured of embodiment;
Fig. 7 is the A-A cut-open view of Fig. 6;
Fig. 8 is the pitch axis adapter plate structure figure of embodiment.
In figure, each implication indicated is as follows: 11, fixing object lens; 12, focusing object lens; 13, light fixture; 14, graticule; 15, spectroscope; 16, catoptron; 17, eyepiece graticule; 18, CCD; 21, translation base; 22, fixed frame; 23, set screw; 24, translational adjustment platform; 25, angular adjustment platform; 26, four-dimensional adjustable graticule; 27, attachment screw; 51, first spindle unit of orientation; 52, pitch axis parts; 53, second spindle unit of orientation; 54, the matched bearings of second spindle unit; 55, pitch axis matched bearings; 56, the matched bearings of first spindle unit; 57, card extender mounting screw holes.
Embodiment
As shown in Figure 5,6, accurate quadrature shaft to be detected is located in detection platform, four-dimensional adjustable graticule is installed to by card extender in the rocking link of accurate quadrature shaft pitch components to be detected, TV interior focusing autocollimator is placed in four-dimensional adjustable graticule dead ahead, for autocollimatic and aiming graticule.
As shown in Figure 1, 2, TV interior focusing autocollimator by interior focusing optical system, the compositions such as ccd image sensor imaging system, operation control system mount pad.Panel operation illustrates: " switching " operation performs spacing, X and Y conversion; " illumination " operation regulates LED illumination brightness, totally 5 grades of brightness regulation; " reset " regulates working distance to directional light position when spacing, is used for resetting during X and Y operation; " ←, → " regulate for positive and negative working distance.In Fig. 1,11 represent fixing object lens; 12 represent focusing object lens; 13 represent light fixture; 14 represent graticule; 15 represent spectroscope; 16 represent catoptron; 17 represent eyepiece graticule; 18 represent CCD.
Instrument parameter: focusing objective focal length f ' *=203.265mm (outgoing directional light position); Focal length variations f '=101.9 ~ 351.4mm; Measurement range-∞ ~-420mm ,+300mm ~ ∞; Effective aperture Ф 25mm; Additional object lens focal distance f '=312.6mm, 312.1mm, 208.1mm, 103.8mm, 51.3mm ,-103.8mm ,-208.1mm ,-312.1mm; Ccd detector 1/3 "; Focusing linearity≤0.03mm/1000mm.
The adjustable graticule of the four-dimension as shown in Fig. 3,4,5 is double mirror, level and the relative movement between vertical mobile Adjust and use translation base 21 and translational adjustment platform 4 two match grinding planes, regulates lower floor's milled screw to realize; Relative motion between the convex-concave sphere that orientation, luffing angle Adjust and use radius are identical, spherical radius is SR100, regulates upper strata milled screw to realize.Angle and displacement governing loop separate, can not influence each other.In figure, 21 represent translation base; 22 represent fixed frame; 23 represent set screw; 24 represent translational adjustment platform; 25 represent angular adjustment platform; 26 represent four-dimensional adjustable graticule; 27 represent attachment screw.
Parameter: level and vertical moving range ± 5mm, azimuth pitch angle of regulation range ± 2 °, the depth of parallelism≤0.6 μm of four-dimensional adjustable graticule two workplace, flatness≤0.03 μm.
As shown in Figure 6,7, first spindle unit 51 of orientation and second spindle unit 53 of orientation define the azimuth axis II-II of quadrature shaft to quadrature shaft modular construction figure, and pitch components 52 defines the pitch axis I-I of quadrature shaft, has light path through hole in pitch axis.In Fig. 7,51 represent first spindle unit of orientation; 52 represent pitch axis parts; 53 represent second spindle unit of orientation; The matched bearings of 54 second spindle units of expression; 55 represent pitch axis matched bearings; The matched bearings of 56 first spindle units of expression; 57 represent card extender mounting screw holes.The pitch axis that pitch axis card extender is connected by screw in Fig. 7 is fastened.
Embodiment technical indicator is: the error of perpendicularity of azimuth axis and pitch axis is not more than 20 ", Intersection error is not more than 0.05.
As shown in Figure 8, pitch axis adapter plate structure figure can be obtained.
The detection system of above-mentioned precision bearing system orthogonality is adopted to carry out the method step of the detection of precision bearing system orthogonality as follows:
(1) at mounting plate, first spindle unit of orientation of the quadrature shaft parts of embodiment and second spindle unit of orientation are screwed on Bracket for Inspection, the two-sided four-dimension is adjustable graticule and card extender are by inside and outside being threaded of M30 × 1, then with screw, card extender is connected on pitch axis parts, mounting screw holes is shown in Fig. 7, pitch axis rotates to and platform parallel around azimuth axis, locking azimuth axis, the adjustable graticule of the two-sided four-dimension described in the method is identical with the adjustable graticule of the aforesaid four-dimension, just in order to emphasize that four-dimensional adjustable graticule is double mirror,
(2) TV interior focusing autocollimator is aimed at the adjustable graticule of the two-sided four-dimension, TV interior focusing autocollimator accommodates to 9999(infinite distance) go out directional light, regulated orientation, the luffing angle of graticule by the angle modulation screw of the adjustable graticule of the two-sided four-dimension, make the autocollimation picture in TV interior focusing autocollimator around pitch axis I-I picture circle amount minimum be 2 ".
(3) illuminate the adjustable graticule of the two-sided four-dimension with lighting lamp, then to the focusing of TV interior focusing autocollimator, make the graduation of the adjustable graticule of the two-sided four-dimension as clear, now working distance is 401; Graduation picture draws circle around pitch axis I-I, by the displacement set screw of the adjustable graticule of the two-sided four-dimension, regulates the displacement on the level of the adjustable graticule of the two-sided four-dimension and vertical direction, and making graduation picture minimum around the picture circle amount of axis I-I is 0.01;
(4) after step 1,2 has adjusted, regulate the level on TV interior focusing autocollimator mount pad and vertical governor motion, adjust the displacement on the level of TV interior focusing autocollimator and vertical direction, make graduation image position in the center zero of TV interior focusing autocollimator;
(5) after step 4 has adjusted, again TV interior focusing autocollimator is accommodated to 9999 and go out directional light, regulate autocollimator mount pad upper position, pitching adjusting mechanism, adjust the orientation of TV interior focusing autocollimator, luffing angle makes autocollimator and the adjustable graticule autocollimatic of the four-dimension;
(6) step 3,4 complete after, the position of TV interior focusing autocollimator is fixed, and as benchmark, mustn't change position again.
(7) axle system 1 rotates 180 ° with the adjustable graticule of the two-sided four-dimension around azimuth axis II-II, after rotation, the pitching line of another minute surface in TV interior focusing autocollimator of the two-sided four-dimension is adjustable graticule overlaps, it is 30 that the angle of measurement position line is worth partially "; the perpendicularity deviation calculating quadrature shaft is 30 "/2=15 ", meets index request;
(8) focusing of TV interior focusing autocollimator makes graduation as clear, now working distance is 554, measure graduation as pitching line bias H=0.06 and read now working distance multiplying power β=1.04, the Intersection deviation calculating quadrature shaft is H/2 β=0.06/2.08=0.029, meets index request.
Claims (5)
1. the detection system of a precision bearing system orthogonality, it is characterized in that, this detection system comprises four-dimensional adjustable graticule, TV interior focusing autocollimator and detection platform, the described four-dimension is adjustable, and graticule is installed in the rocking link of accurate quadrature shaft pitch components to be detected, for supporting accurate quadrature shaft to be detected in detection platform, described TV interior focusing autocollimator is used for carrying out detection axis system orthogonality with the adjustable graticule autocollimatic of the four-dimension with aiming at.
2. the detection system of precision bearing system orthogonality according to claim 1, it is characterized in that, detection system also comprises light fixture, for illuminating four-dimensional adjustable graticule.
3. the detection system of precision bearing system orthogonality according to claim 1 and 2, is characterized in that, the described four-dimension is adjustable, and graticule is fixedly arranged on by card extender in the rocking link of an axis of accurate quadrature shaft to be detected.
4. the detection method of a precision bearing system orthogonality, the method is used for the quadrature shaft be made up of orientation parts and pitch components, and orientation parts form the azimuth axis of quadrature shaft, and pitch components forms the pitch axis of quadrature shaft, it is characterized in that, the step of detection method is as follows:
(1) four-dimensional adjustable graticule is installed in the rocking link of pitch components, and it is vertical with pitch axis to adjust four-dimensional adjustable graticule minute surface;
(2) four-dimensional adjustable graticule is illuminated, then TV interior focusing autocollimator is focused, make the graduation of four-dimensional adjustable graticule as clear, four-dimensional adjustable graticule rotates around pitch axis, then graduation picture is around pitch axis line drawing circle, adjusts level and the vertical direction displacement of four-dimensional adjustable graticule, makes graduation picture minimum around the picture circle amount of pitch axis, now the graduation center of four-dimensional adjustable graticule is in pitch axis, to simulate pitch axis;
(3) adjust the displacement in the horizontal and vertical directions of TV interior focusing autocollimator, make graduation image position in the center zero of TV interior focusing autocollimator;
(4) TV interior focusing autocollimator is accommodated to infinite distance, send directional light to the adjustable graticule of the four-dimension, orientation, the luffing angle of adjustment TV interior focusing autocollimator make TV interior focusing autocollimator and the adjustable graticule autocollimatic of the four-dimension;
(5) pitch components rotates 180 ° around azimuth axis, and the pitching line of another minute surface in TV interior focusing autocollimator of four-dimensional adjustable graticule overlaps, and measures the variable quantity of position line, calculates the perpendicularity deviation of quadrature shaft;
(6) TV interior focusing autocollimator focusing make graduation as clear, measure graduation as pitching line variable quantity and read now working distance multiplying power, calculate the Intersection of quadrature shaft, complete the detection of precision bearing system orthogonality.
5. the detection method of precision bearing system orthogonality according to claim 4, it is characterized in that, the process that in described step (1), the four-dimensional adjustable graticule minute surface of adjustment is vertical with pitch axis is: TV interior focusing autocollimator is accommodated to infinite distance, directional light is sent to the adjustable graticule of the four-dimension, regulate orientation, the luffing angle of four-dimensional adjustable graticule, make TV interior focusing autocollimator minimum around the picture circle amount of pitch axis by the autocollimation picture of four-dimensional adjustable graticule minute surface, now four-dimensional adjustable graticule minute surface is vertical with pitch axis.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105698713A (en) * | 2016-01-27 | 2016-06-22 | 西安应用光学研究所 | An apparatus for calibrating a revolving axis of a precision shaft system and a calibrating method |
| CN106247997A (en) * | 2016-08-09 | 2016-12-21 | 中国人民解放军国防科学技术大学 | Error of perpendicularity method for orthogonal guide rail platform |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal double-pendulum-axis calibration and debugging method and reflector assembling and debugging method for laser processing |
| CN109238174A (en) * | 2018-09-05 | 2019-01-18 | 长春理工大学 | A kind of multi-axis turntable intercept and Intersection comprehensive test device and method |
| CN110763163A (en) * | 2019-10-28 | 2020-02-07 | 中国科学院西安光学精密机械研究所 | Photoelectric image measuring instrument and measuring method for detecting verticality of large-size workpiece |
| CN110779469A (en) * | 2019-11-07 | 2020-02-11 | 中国科学院合肥物质科学研究院 | Shafting perpendicularity detection device and method for horizontal photoelectric tracking system |
| CN112098050A (en) * | 2020-08-21 | 2020-12-18 | 西安空间无线电技术研究所 | System and method for testing orthogonality of two shafts of coarse pointing mechanism |
| CN112427969A (en) * | 2020-10-28 | 2021-03-02 | 九江精密测试技术研究所 | Method for processing axial positioning surface of turntable frame |
| CN114088037A (en) * | 2021-07-29 | 2022-02-25 | 深圳市中图仪器股份有限公司 | Method for measuring orthogonality of orthogonal axis system of instrument |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0069575A2 (en) * | 1981-07-07 | 1983-01-12 | Ring Sights Limited | Improved collimator gun sight |
| FR2602347A1 (en) * | 1986-07-31 | 1988-02-05 | Applic Gles Electricite Me | Alignment device for a sighting apparatus having several channels |
| CN1865889A (en) * | 2005-05-18 | 2006-11-22 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting verticality of optical axis and mounting baseplane in optical system |
| CN101922923A (en) * | 2010-07-31 | 2010-12-22 | 中国航空工业集团公司洛阳电光设备研究所 | Method for detecting perpendicularity and true position of normal axis |
-
2013
- 2013-11-28 CN CN201310624727.2A patent/CN104296693B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0069575A2 (en) * | 1981-07-07 | 1983-01-12 | Ring Sights Limited | Improved collimator gun sight |
| FR2602347A1 (en) * | 1986-07-31 | 1988-02-05 | Applic Gles Electricite Me | Alignment device for a sighting apparatus having several channels |
| CN1865889A (en) * | 2005-05-18 | 2006-11-22 | 中国科学院长春光学精密机械与物理研究所 | Method for detecting verticality of optical axis and mounting baseplane in optical system |
| CN101922923A (en) * | 2010-07-31 | 2010-12-22 | 中国航空工业集团公司洛阳电光设备研究所 | Method for detecting perpendicularity and true position of normal axis |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105698713A (en) * | 2016-01-27 | 2016-06-22 | 西安应用光学研究所 | An apparatus for calibrating a revolving axis of a precision shaft system and a calibrating method |
| CN106247997A (en) * | 2016-08-09 | 2016-12-21 | 中国人民解放军国防科学技术大学 | Error of perpendicularity method for orthogonal guide rail platform |
| CN106247997B (en) * | 2016-08-09 | 2018-12-28 | 中国人民解放军国防科学技术大学 | Error of perpendicularity method for orthogonal guide rail platform |
| CN106735961A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Orthogonal double-pendulum-axis calibration and debugging method and reflector assembling and debugging method for laser processing |
| CN106735961B (en) * | 2016-12-30 | 2019-04-02 | 中国科学院西安光学精密机械研究所 | Orthogonal double-pendulum-axis calibration and debugging method and reflector assembling and debugging method for laser processing |
| CN109238174A (en) * | 2018-09-05 | 2019-01-18 | 长春理工大学 | A kind of multi-axis turntable intercept and Intersection comprehensive test device and method |
| CN110763163A (en) * | 2019-10-28 | 2020-02-07 | 中国科学院西安光学精密机械研究所 | Photoelectric image measuring instrument and measuring method for detecting verticality of large-size workpiece |
| CN110779469A (en) * | 2019-11-07 | 2020-02-11 | 中国科学院合肥物质科学研究院 | Shafting perpendicularity detection device and method for horizontal photoelectric tracking system |
| CN112098050A (en) * | 2020-08-21 | 2020-12-18 | 西安空间无线电技术研究所 | System and method for testing orthogonality of two shafts of coarse pointing mechanism |
| CN112098050B (en) * | 2020-08-21 | 2022-08-12 | 西安空间无线电技术研究所 | System and method for testing orthogonality of two shafts of coarse pointing mechanism |
| CN112427969A (en) * | 2020-10-28 | 2021-03-02 | 九江精密测试技术研究所 | Method for processing axial positioning surface of turntable frame |
| CN114088037A (en) * | 2021-07-29 | 2022-02-25 | 深圳市中图仪器股份有限公司 | Method for measuring orthogonality of orthogonal axis system of instrument |
| CN114088037B (en) * | 2021-07-29 | 2023-08-11 | 深圳市中图仪器股份有限公司 | Method for measuring orthogonality of orthogonal axis system of instrument |
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