CN103796412A - Ordinary pressure plasma spray gun device - Google Patents
Ordinary pressure plasma spray gun device Download PDFInfo
- Publication number
- CN103796412A CN103796412A CN201310718545.1A CN201310718545A CN103796412A CN 103796412 A CN103796412 A CN 103796412A CN 201310718545 A CN201310718545 A CN 201310718545A CN 103796412 A CN103796412 A CN 103796412A
- Authority
- CN
- China
- Prior art keywords
- spray gun
- water
- gun device
- plasma spray
- sleeve pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007921 spray Substances 0.000 title claims abstract description 31
- 238000009413 insulation Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000002994 raw material Substances 0.000 abstract description 9
- 238000000576 coating method Methods 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 8
- 230000008021 deposition Effects 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- -1 claim again silester Chemical compound 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
Images
Abstract
The invention relates to an ordinary pressure plasma spray gun device which includes a nozzle, an outer anode sleeve pipe, a center electrode and a high frequency power supply. The outer anode sleeve pipe forms a spray gun cavity; the end of the cavity is provided with an insulating sealing cover; the center electrode is fixed in the middle of the insulating sealing cover; the spray gun cavity is internally provided with a first air duct which extends to the center electrode; and the nozzle is also provided with a second air duct. A first raw material fills the first air duct, and a second raw material fills the second air duct; the ordinary pressure plasma spray gun device can realize preparation of the plasma polymeric coating under the ordinary pressure; and the ordinary pressure plasma spray gun device is also provided with a water-cooling layer which can effectively reduce the temperature of the high temperature plasma generated by the gas discharging.
Description
Technical field
The invention belongs to material surface modifying field, specifically belong to atmospheric plasma spray gun body field.
Background technology
Material surface modifying treatment technology is one of current material preparation technology generally using, it is under certain external condition, material exterior materials and material surface generation physics or chemical reaction, thereby material surface state changed or produce new element and new group at material surface, finally meeting the needs of practical application.
But, the fast development of modern industry is had higher requirement to material wear-resistant wiping, wearing and tearing and the performance such as anticorrosive, meanwhile, also more and more higher to the requirement of environmental protection, thus effectively promote to be called as the development of material plasma process for modifying surface of green production process.Under vacuum, apply high-frequency electric field to reacting gas environment, gas ionizes and produces plasma under the excitation of high-frequency electric field.
The plasma treatment that is generally used for deposited coatings need to complete the in the situation that of negative pressure, and this has just brought great inconvenience, therefore needs a kind of generation badly and can realize at normal temperatures the plasma processing apparatus of plasma polymerization deposition.
Summary of the invention
In order to solve the above-mentioned problems in the prior art, provide a kind of atmospheric plasma spray gun device.
The technical solution adopted in the present invention is: a kind of atmospheric plasma spray gun device, for deposition of silica, comprise nozzle, outer anode sleeve pipe, central electrode and high frequency electric source, above-mentioned outer anode sleeve pipe forms spray gun cavity, the end of above-mentioned cavity is provided with insulation and obturation lid, above-mentioned central electrode is fixed on the centre of above-mentioned insulation and obturation lid, offers the first breather line and lead to above-mentioned central electrode in above-mentioned spray gun cavity, and said nozzle place is also provided with the second breather line.
Preferably, above-mentioned anode outside of sleeve is also provided with one deck water-cooled layer.
Preferably, above-mentioned water-cooled layer is set to double-deck circulation layer, and above-mentioned water-cooled enters from above-mentioned water-cooled layer one end, flows out from the above-mentioned water-cooled layer other end.
Preferably, between above-mentioned outer cathode sleeve and described central electrode, be also provided with insulating barrier, above-mentioned insulating barrier attaches above-mentioned outer anode sleeve pipe.
Preferably, the frequency range of above-mentioned high frequency electric source is 10Khz-100Khz.
Preferably, above-mentioned breather line is also provided with flow control valve, for regulating the flow that passes into gas.
Preferably, be also provided with the perforate that can discharge water and can water filling on above-mentioned water-cooled layer, described perforate is normally closed.
Preferably, on above-mentioned water-cooled layer, be also provided with syringe pump.
Adopt the beneficial effect of the technical program to be: this device comprises nozzle, outer anode sleeve pipe, central electrode and high frequency electric source, described outer anode sleeve pipe forms spray gun cavity, the end of described cavity is provided with insulation and obturation lid, described central electrode is fixed on the centre of described insulation and obturation lid, in described spray gun cavity, offer the first breather line and lead to described central electrode, described nozzle place is also provided with the second breather line.Pass into nitrogen, argon gas raw material or oxygen feed at described the first breather line.Described the second breather line passes into raw material monomer, can under normal pressure, realize plasma polymerized coating by this device.
Accompanying drawing explanation
For content of the present invention is more easily expressly understood, according to specific embodiment also by reference to the accompanying drawings, the present invention is further detailed explanation below, wherein:
Fig. 1 is the cross-sectional view of the embodiment of the present invention 1;
Fig. 2 is the structural representation of the embodiment of the present invention 2;
Fig. 3 is the structural representation of the embodiment of the present invention 3;
Fig. 4 is the structural representation of the embodiment of the present invention 4;
In figure, 1. nozzle 2. outer anode sleeve pipe 3. central electrode 4. first breather line 5. water-cooled layer 6. second breather line 7. insulation and obturation lid 8. insulating barrier 9. flow control valves.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
As shown in Figure 1, a kind of atmospheric plasma spray gun device, for deposition of silica, comprise nozzle 1, outer anode sleeve pipe 2, central electrode 3 and high frequency electric source (not marking in figure), between outer anode sleeve pipe 2, central electrode 3, connect the both positive and negative polarity of high frequency electric source, outer anode sleeve pipe 2 forms spray gun cavity, the end of cavity is provided with insulation and obturation lid 7, central electrode 3 is fixed on the centre of insulation and obturation lid 7, in spray gun cavity, offer the first breather line 4 and lead to central electrode 3, nozzle 1 place is also provided with the second breather line 6.
The first breather line 4 passes into helium raw material or oxygen feed, and the second breather line 6 passes into TEOS raw material.TEOS is tetraethoxysilane, claim again silester, tetraethyl orthosilicate, sub-silester, tetraethoxysilane, tetraethyl orthosilicate, adopt high frequency electric source, the frequency range of high frequency electric source is at 10Khz-100Khz, after high frequency electric source energising, outer anode sleeve pipe 2 and central electrode 3 are just switched on, after the oxygen that the first breather line 4 passes into or helium pass in electric field discharge generation part plasma, plasma is high-temperature plasma, because spray gun rear end is provided with insulator, region of discharge concentrates on spray tip part, pass into TEOS raw material at nozzle, mix with plasma, produce silica deposit.
The unstrpped gas that in the present embodiment, the first breather line 4 and the second breather line pass into is not limited to two kinds in above content, can also pass into as required other gas, for the various gas of plasma treatment.
As shown in Figure 2, all the other are identical with embodiment 1, difference is, outer anode sleeve pipe 2 outsides are also provided with one deck water-cooled layer 5, and water-cooled layer 5 is set to double-deck circulation layer, and water-cooled enters from water-cooled layer one end, flow out from the water-cooled layer other end, constantly pass into water-cooled, the temperature of the high-temperature plasma can effectively low gas discharge producing, is more conducive to the deposition of silicon dioxide.
As shown in Figure 3, all the other are identical with embodiment 2, and difference is, between outer cathode sleeve 2 and central electrode 3, is also provided with insulating barrier 8, and insulating barrier 8 attaches outer anode sleeve pipe 2.Insulating barrier just can effectively prevent between two just right electrodes, to sparking, guaranteeing safety.
Embodiment 4
All the other are identical with embodiment 3, and difference is, is also provided with flow control valve 9 on breather line 8, and for controlling the flow that passes into of gas, flow control valve 9 can effectively regulate the flow of the gas passing into.Avoid the gas that passes into too much gas discharge effect to be weakened, or avoid gas to pass into very few and make that the plasma that produces is very few can not effectively process material.
All the other are identical with embodiment 4, difference is, on water-cooled layer, be provided with the perforate that can discharge water and can water filling, perforate is normally closed, simultaneously, on water-cooled layer, be also provided with syringe pump, for replacing the water of water-cooled layer, prevent that the water in water-cooled layer from not lowering the temperature because the heat transfer of plasma makes water-cooled, now, only need open the perforate that can discharge water and can water filling, emit the water-cooled through heat transfer in water-cooled layer, again by syringe pump toward water filling in water-cooled layer, can effectively keep water-cooled layer to reduce the effect of plasma temperature.
The invention has the beneficial effects as follows: comprise nozzle, outer anode sleeve pipe, central electrode and high frequency electric source, described outer anode sleeve pipe forms spray gun cavity, the end of described cavity is provided with insulation and obturation lid, described central electrode is fixed on the centre of described insulation and obturation lid, in described spray gun cavity, offer the first breather line and lead to described central electrode, described nozzle place is also provided with the second breather line.Pass into helium raw material or oxygen feed at described the first breather line.Described the second breather line passes into TEOS raw material, can under normal pressure, realize the deposition of silicon dioxide by this device.
Above-described is only the preferred embodiment of the present invention, it should be pointed out that for the person of ordinary skill of the art, without departing from the concept of the premise of the invention, can also make some distortion and improvement, and these all belong to protection scope of the present invention.
Claims (8)
1. an atmospheric plasma spray gun device, comprise nozzle, outer anode sleeve pipe, central electrode and high frequency electric source, described outer anode sleeve pipe forms spray gun cavity, it is characterized in that, the end of described cavity is provided with insulation and obturation lid, described central electrode is fixed on the centre of described insulation and obturation lid, offers the first breather line and lead to described central electrode in described spray gun cavity, and described nozzle place is also provided with the second breather line.
2. atmospheric plasma spray gun device according to claim 1, is characterized in that, described anode outside of sleeve is also provided with one deck water-cooled layer.
3. atmospheric plasma spray gun device according to claim 2, is characterized in that, described water-cooled layer is set to double-deck circulation layer, and described water-cooled enters from described water-cooled layer one end, flows out from the described water-cooled layer other end.
4. atmospheric plasma spray gun device according to claim 1, is characterized in that, between described outer cathode sleeve and described central electrode, is also provided with insulating barrier, and described insulating barrier attaches described outer anode sleeve pipe.
5. atmospheric plasma spray gun device claimed in claim 1, is characterized in that, the frequency range of described high frequency electric source is 10Khz-100Khz.
6. hollow cathode spray gun device according to claim 1, is characterized in that, described breather line is also provided with flow control valve, for regulating the flow that passes into gas.
7. according to the hollow cathode spray gun device described in claim 2 or 3, it is characterized in that, on described water-cooled layer, be also provided with the perforate that can discharge water and can water filling, described perforate is normally closed.
8. hollow cathode spray gun device according to claim 7, is characterized in that, is also provided with syringe pump on described water-cooled layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310718545.1A CN103796412B (en) | 2013-12-24 | 2013-12-24 | A kind of atmospheric plasma spray gun device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310718545.1A CN103796412B (en) | 2013-12-24 | 2013-12-24 | A kind of atmospheric plasma spray gun device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103796412A true CN103796412A (en) | 2014-05-14 |
| CN103796412B CN103796412B (en) | 2016-09-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310718545.1A Expired - Fee Related CN103796412B (en) | 2013-12-24 | 2013-12-24 | A kind of atmospheric plasma spray gun device |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10199697A (en) * | 1997-01-10 | 1998-07-31 | Pearl Kogyo Kk | Surface treatment device by atmospheric pressure plasma |
| CN1404925A (en) * | 2002-10-31 | 2003-03-26 | 上海交通大学 | Plasma spraying gun |
| CN2586330Y (en) * | 2002-12-05 | 2003-11-12 | 天津理工学院 | Internally feeding powder convergent-divergent nozzle of plasma welding gun |
| CN2604845Y (en) * | 2003-01-27 | 2004-02-25 | 王守国 | Atmospheric radio-frequency and DC mixed cold plasma generator |
| CN1859825A (en) * | 2006-06-07 | 2006-11-08 | 清华大学 | Atmospheric pressure discharge cold plasma generator based on double gas source |
| CN201172684Y (en) * | 2007-05-23 | 2008-12-31 | 上海大豪纳米材料喷涂有限公司 | Plasma spraying gun |
| US20100201271A1 (en) * | 2006-04-04 | 2010-08-12 | Cheju National University Industry Academic Cooperation Foundation | Dc arc plasmatron and method of using the same |
| US20120261391A1 (en) * | 2009-10-06 | 2012-10-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Atmospheric pressure plasma method for producing surface-modified particles and coatings |
| CN203079894U (en) * | 2012-11-27 | 2013-07-24 | 中国石油天然气股份有限公司 | Surface treatment device for overlapping area of pipeline repaired mouth with 3PE (Three-layer Polyethylene) main pipe |
| CN203708616U (en) * | 2013-12-24 | 2014-07-09 | 苏州市奥普斯等离子体科技有限公司 | Atmospheric pressure plasma torch device |
-
2013
- 2013-12-24 CN CN201310718545.1A patent/CN103796412B/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10199697A (en) * | 1997-01-10 | 1998-07-31 | Pearl Kogyo Kk | Surface treatment device by atmospheric pressure plasma |
| CN1404925A (en) * | 2002-10-31 | 2003-03-26 | 上海交通大学 | Plasma spraying gun |
| CN2586330Y (en) * | 2002-12-05 | 2003-11-12 | 天津理工学院 | Internally feeding powder convergent-divergent nozzle of plasma welding gun |
| CN2604845Y (en) * | 2003-01-27 | 2004-02-25 | 王守国 | Atmospheric radio-frequency and DC mixed cold plasma generator |
| US20100201271A1 (en) * | 2006-04-04 | 2010-08-12 | Cheju National University Industry Academic Cooperation Foundation | Dc arc plasmatron and method of using the same |
| CN1859825A (en) * | 2006-06-07 | 2006-11-08 | 清华大学 | Atmospheric pressure discharge cold plasma generator based on double gas source |
| CN201172684Y (en) * | 2007-05-23 | 2008-12-31 | 上海大豪纳米材料喷涂有限公司 | Plasma spraying gun |
| US20120261391A1 (en) * | 2009-10-06 | 2012-10-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Atmospheric pressure plasma method for producing surface-modified particles and coatings |
| CN203079894U (en) * | 2012-11-27 | 2013-07-24 | 中国石油天然气股份有限公司 | Surface treatment device for overlapping area of pipeline repaired mouth with 3PE (Three-layer Polyethylene) main pipe |
| CN203708616U (en) * | 2013-12-24 | 2014-07-09 | 苏州市奥普斯等离子体科技有限公司 | Atmospheric pressure plasma torch device |
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| Publication number | Publication date |
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| CN103796412B (en) | 2016-09-28 |
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Effective date of registration: 20210319 Address after: 215000 1701, building 2, 209 Zhuyuan Road, Suzhou high tech Zone, Suzhou City, Jiangsu Province Patentee after: SUZHOU FENGYUANBAO AGRICULTURAL TECHNOLOGY Co.,Ltd. Address before: 2 Taishan Road, Suzhou hi tech Industrial Development Zone, Suzhou, Jiangsu Province, 215011 (in Boji science and Technology Park) Patentee before: SUZHOU OPS PLASMA TECHNOLOGY Co.,Ltd. |
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Granted publication date: 20160928 |