CN103781586A - Marking apparatus with a plurality of lasers and a combining deflection device - Google Patents

Marking apparatus with a plurality of lasers and a combining deflection device Download PDF

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Publication number
CN103781586A
CN103781586A CN201280042992.3A CN201280042992A CN103781586A CN 103781586 A CN103781586 A CN 103781586A CN 201280042992 A CN201280042992 A CN 201280042992A CN 103781586 A CN103781586 A CN 103781586A
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China
Prior art keywords
laser beam
laser
deflecting
arrangement
instrument
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Granted
Application number
CN201280042992.3A
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Chinese (zh)
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CN103781586B (en
Inventor
凯文·L·安布鲁斯特
布拉德·D·吉尔马丁
彼得·J·屈克达尔
伯纳德·J·理查德
丹尼尔·J·瑞安
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Alltec Angewandte Laserlicht Technologie GmbH
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Alltec Angewandte Laserlicht Technologie GmbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355Texturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/07Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H01S3/076Folded-path lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08059Constructional details of the reflector, e.g. shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/083Ring lasers
    • H01S3/0835Gas ring lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22Gases
    • H01S3/223Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232Carbon dioxide (CO2) or monoxide [CO]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383Parallel arrangements

Abstract

The invention relates to a marking apparatus (100) for marking an object with laser light, comprising a plurality of lasers (10), in particular gas lasers (10), and a control unit for individually activating each of the lasers (10) to emit a laser beam according to a sign to be marked. A deflection device (30) is provided by which at least two laser beams are combined on a common spot.

Description

There is the mark instrument of a plurality of laser instruments and a combination deflecting apparatus
Technical field
According to claim 1 above described in, the present invention relates in one for by the mark instrument of laser marking objects.
Background technology
Conventionally, known marking arrangement uses a single laser instrument, for example, is for example CO 2the gas laser of laser instrument.Such laser instrument is launched a laser beam, and this laser beam is transferred on object to be marked.This object moves relative to this mark instrument on a conveyer belt.Typically, according to a symbol to be marked, one scan equipment is provided for directed this laser beam on object.
In order to increase handling capacity, general mark instrument has comprised a plurality of laser instruments, particularly multiple gas lasers.In addition,, according to a symbol to be marked, a control module is provided for the each laser instrument of independent activation and launches a laser beam.
The mark instrument of prior art, the intensity of the laser beam of one of them laser instrument can be controlled in a certain scope.But an extra high intensity can need excessively large laser instrument.
The shortcoming of one known mark instrument is only to have one can reach among compact design and high-intensity laser beam.
U.S. Pat 4,727,235 theme is a laser instrument Mk system, it has a plurality of laser instruments.The laser beam of transmitting is aligned to one-dimensional array and mutually has a fixed range.
U.S. Pat 4,131,782 relate to one for make the instrument in hole in an object by laser beam.This instrument has comprised a plurality of laser instruments, and the light beam of its transmitting is combined into a bit on body surface.For this reason, all laser beams are directed to a public arrangement for deflecting, such as a speculum.
From U.S. Pat 4,652, one known to 722 are for mark object laser instrument instrument.The laser instrument of some is provided, and the light beam of its transmitting is directed to a substrate to be marked with predefined distance to each other.
Japan Patent JP2011156574 relates to one for make the instrument of an object by laser beam.A plurality of laser beams are conditioned to form an adjacent making line.
U.S. Pat 6,229,940B1 has described out another Optical Maser System.This system has comprised a plurality of laser instruments, and the light beam of its transmitting is passed the shared condenser lens of all laser beams and is combined to a bit.
U.S. Pat 2009/0323753A1 is about for example, an instrument for inscribing container (bottle).This instrument uses a plurality of laser instruments, and the light beam of this laser instrument is directed into the release portion with a fixed position.For each laser instrument, it has a releaser.
U.S. Pat 5,115,446A relates to the bearing structure of the parts for laser instrument.This bearing structure allows the resonatron rectangular arranged of laser instrument.
Summary of the invention
The object of this invention is to provide a mark instrument with compact design, it allows to arrange the intensity of the laser beam of instrument under wide scope simultaneously.
Object of the present invention can solve by the mark instrument that includes claim 1 technical characterictic.
Preferred embodiment, in dependent claims and description afterwards, particularly provides by reference to the accompanying drawings mutually afterwards.
According to the present invention, above-mentioned this class mark instrument is characterised in that and provides a deflecting apparatus, is incorporated into a common point by least two laser beams of this deflecting apparatus.
Can be regarded as a basic conception of the present invention, its laser beam by least two various lasers of combination increases the sharp light intensity on the point being mapped on object to be marked.The laser beam of this combination can be understood to be on common point and overlap each other at least partly.The laser beam of combination can or form a single light beam, or they can cross one another at an a single point (, common point).
Useful, this has allowed to need high-intensity especially function.For example, thereby mark can be any change of body surface, the change of color, engraving, cutting.This mark instrument can be realized the operation that can be used for or be not used in mark extraly, such as, boring, burrows or punching.
Preferably, deflecting apparatus comprises an arrangement for deflecting group, its corresponding each laser beam comprises at least one arrangement for deflecting, specifically, corresponding at least one mapping mirror of each laser beam (mapping mirror) or a fiber waveguide, and each arrangement for deflecting is adjustable and/or displaceable separately separately at its yawing moment.If a laser beam is combined with another or several other laser beams, corresponding arrangement for deflecting can simply be adjusted accordingly.This arrangement for deflecting group can further allow the laser beam that is not incorporated into common point to be rearranged into the laser beam array needing.
In the present embodiment, each laser beam is directed to their corresponding arrangement for deflecting.It is adjustable each other that this arrangement for deflecting is independent of, and makes substantially can arrange the structure of any needs.The light beam of laser instrument transmitting forms one and specifically arranges, such as, the linear array of a parallel light beam of advancing.What can be regarded as a significant advantage is to allow linear array to be mapped to flexibly any other arrangement.Particularly, the interval between light beam can be changed or be reduced by this arrangement for deflecting group.
In the time that mark instrument moves or before operation, arrangement for deflecting can be set to a position needing.For this object, each arrangement for deflecting can be moved by the electro-motor of control module control by one.
In the situation that arrangement for deflecting is speculum, adjusting can realize by independent inclined mirror,, changes the direction of yawing moment or appointment speculum that is.Additional or optional, speculum can be shifted, and is displaceable in other words.Because laser beam can be rearranged by speculum, speculum also can be called as mapping mirror.
In context of the present invention, can be understood to whether any control one light beam is mapped to the process on object to be marked thereby activate each laser instrument transmitting one laser beam.Therefore, activate and also can pass through a beam shutter (beam shutter) realization.That is to say, one laser instrument keep activate, then the laser beam of a beam shutter control laser instrument by or stop.
Conventionally, laser instrument can be the laser instrument of any kind.If it is vital place that laser instrument is arranged into space, the present invention is useful especially.That is to say, if laser power depends on the size of laser instrument strongly.If the size of laser instrument forbids producing very close laser beam mutually, another advantage of the present invention can display.The present invention allows rearranging of laser beam to cause between laser beam to only have a bit of distance, therefore, have protrude mark resolution ratio.
The example of this class laser instrument is gas laser, chemical laser, fibre laser, dye laser and solid-state laser.In addition, semiconductor laser or metal vapor laser also can use.If use gas laser, is preferably CO 2laser instrument.But any Known Species all can provide, for example, He-Ne laser, CO laser instrument, argon laser, nitrogen laser, or excimer laser.These can be with continuous wave (continuous wave) or pulsing operation.
Symbol to be marked can be understood to any mark, for example, and a word, single pixel of a picture or figure.Symbol can comprise a series of point or line.That is to say, laser instrument can be by the activation of short time manufacturing place or be activated to produce the line of a certain length in a time range that can arrange on object.
In context of the present invention, object to be marked can be any article or have and can be affected surperficial product by the light of laser instrument.Specifically, object can be a packing, for example, for food or beverage, a fruit or a label.The material of object can comprise plastics, paper, metal, pottery, fiber, composite and organic organization.
Preferably, in order progressively to adjust and to be sent to the laser beam power of common point, control module is suitable for as power grade as required or is incorporated into the quantity of the laser beam of single point according to user's input setting.The laser beam power that is sent to common point is the summation of the power of each laser beam that is directed to common point.The combination of the quantity of laser instrument arranges accordingly each arrangement for deflecting by control module and reaches.Useful, can realize a very high intensity, this intensity reaches the overall strength of the laser beam of all combinations.The separation laser beam of higher quantity will be provided, if enough once lower intensity, such as the laser beam of two or three combinations, wherein each combined laser beam is made up of the laser beam of several laser instruments.Therefore, all laser instruments may can be used simultaneously in mark, and do not rely on the laser beam intensity of current needs.
According to a preferred embodiment of the invention, arrangement for deflecting is conditioned the beam spacing making between laser beam and has been reduced.The inferior position of the large beam spacing being produced by the large scale of laser instrument has been alleviated.With respect to the equipment for reducing beam spacing, in this equipment, all light beams are directed in a common optical element, for example, a suitable prism, the distortion that the arrangement for deflecting of instrument of the present invention causes light beam is still less.In addition,, in the case of the determined beam spacing in surface of object plays an important role, a protrude mark resolution ratio can be implemented.
One beam spacing reducing also causes more concentrated being mapped in common optical element of laser beam.In the time that spherical aberration occurs between paraxial ray and marginal ray, this is vital, and paraxial ray is mapped to the laser beam at the center of lens or speculum, and marginal ray, is mapped to the laser beam away from lens or speculum center.Useful, reduce beam spacing and be conducive to reduce spherical aberration.
Another preferred embodiment of the present invention is characterised in that, this arrangement for deflecting group comprises one first and 1 second mapping mirror group, and the corresponding each laser beam of each mapping mirror group comprises at least one mapping mirror, and the directed laser beam of the first mapping mirror group is to the second mapping mirror group.Therefore, each light beam is directed by least two mapping mirrors separately.This has allowed rearranging especially flexibly of light beam.Under these circumstances, arrangement for deflecting can be for the scanning motion of combined laser beam and implementation beam combination.
Conventionally, arrangement for deflecting can be by manual adjustments, particularly displaceable.But, be preferably the yawing moment that control module is applied to dislocation arrangement for deflecting and/or regulates arrangement for deflecting, particularly pass through gimbals.For expanded application field, each arrangement for deflecting can controlled unit regulate separately.In a relatively cost-saving example, at least one arrangement for deflecting of corresponding each laser beam can controlled unit regulate.Useful, gimbals can allow the arrangement for deflecting after installation to rotate freely angle or even all direction rotations at least two.
The adjusting of the arrangement for deflecting being undertaken by control module allows a variable Code location.Thereby the direction that this means the laser beam penetrating from instrument can be changed the position that changes the symbol to be generated by the laser beam on object.In addition, the height of code can be changed.
In addition, static mark is also feasible.In this situation, object is not moved whole mark is in service with respect to mark instrument.Arrangement for deflecting is moved to make laser beam flying to move, and like this, all symbols to be printed can be by continuous generation to static object.In the present embodiment, be particularly preferably for printing 2D figure, it needs high printed resolution.
Control module can also further be suitable for as automatically regulating arrangement for deflecting to be suitable for the variation of position of object, for example, and the vibration of compensation object.The variation of position can be passed through a sensor, as ultrasonic wave or Optical devices or approach switch are determined.
One preferred embodiment of instrument of the present invention is characterised in that, at least one scanning mirror device is provided, it comprises a public speculum, from all laser beams of this arrangement for deflecting group in the above, control module is suitable for as pivotable scanning mirror device simultaneously, particularly by a galvanometer (galvanometer).
Scanning mirror equipment can be understood to that any light beam that can cause is by the apparatus of some continuous locus.
One favourable may be, first, any amount of laser beam is deflected device combination, and then the laser beam of combination and any remaining laser beam not being combined are scanned mirror device and are redirected.In other words, scanning reflection mirror has formed a 2D beam direction system at a 2D plane interior orientation common point.
In simple situation, such scanning mirror equipment can comprise one or more rotatable mirrors.Equipment comprises the galvanometer being connected with a speculum, and it is commonly called galvanometer scanner.One galvanometer scanner can change input electrical signal into the position, angle of the speculum of galvanometer scanner.Preferably, provide at least two galvanometer scanners.After galvanometer scanner is arranged, each like this laser beam is directed to the second galvanometer scanner from the first galvanometer scanner, in a specific visual field, just advantageously may form any two-dimensional scan and move.
Scanning mirror equipment also can be understood to a light beam steering unit (BTU), and it also can be called as an installation component.
The task of scanning mirror equipment also can be performed by acousto-optic equipment.Among this, a sound wave and acousto-material coupling.The angle of the deflection of the laser beam of acousto-material is passed through in the domination of sound wave frequency.By change sound wave frequency fast, the short scan campaign that can reach laser beam.
For the object of mark in moving with respect to mark instrument, in another preferred embodiment, the information that control module is suitable for as moving according to object regulates arrangement for deflecting and/or at least one scanning reflection mirror device.Therefore object can be pursued or be followed the trail of.
According to another preferred embodiment of the invention, the first and second mapping mirror groups are arranged in linear array separately; And each mapping mirror is tiltable.In this embodiment, the spacing between the mapping mirror in two of shining upon in mirror groups can be fixed, and it allows to use a common mounting device with linear array Support Mapping mirror, and the inclination of speculum is still feasible simultaneously.The second mapping mirror group can tilt a plane being formed by the laser beam that is mapped to the first mapping mirror group.Can be provided for the positioner of the position of at least one linear array that regulates mapping mirror.Particularly, positioner can substitute common mounting device.
Another preferred embodiment of instrument of the present invention is characterised in that, control module is suitable for as controlling arrangement for deflecting arranges the convergence of a non-combined laser beam or the degree of dispersing, the laser beam of non-combination is launched from arrangement for deflecting, specifically, launches from the second arrangement for deflecting group.Therefore, arrangement for deflecting can be conditioned, make from instrument one give set a distance, produce the required separation distance between non-combined laser beam.The height of the word of laser beam manufacture and printed resolution are to be arranged by the interval of laser beam, and the degree that also can restrain by adjusting is revised simultaneously.
Laser instrument can be arranged and make parallel laser instrument and formation one linear array left of laser beam.But, according to different application, may need to change the linearly aligned direction of laser beam.For this reason, control module can be suitable for as regulating arrangement for deflecting, and the linear array that makes the laser beam that is mapped to arrangement for deflecting around the axle rotation of direct of travel of laser beam that is parallel to ejaculation, for example, is rotated 90 °.Thereby one horizontally can rotate to arranged vertically or vice versa.For the linear array of slewed laser beam, this arrangement for deflecting group can comprise one first mapping mirror group, and it uses together with at least one or two scanning mirror equipment.
In order to form a plurality of common points, each laser instrument can be assigned in a plurality of groups, and arrangement for deflecting is arranged, and makes the laser beam of the laser instrument of each group be incorporated into a corresponding common point.Preferably, the quantity that is assigned to the laser instrument of a group is identical for each group.The in the situation that of 9 laser instruments, for example, may there be 3 laser instruments of 3 groups, or have 4 groups, its every group has 2 laser instruments and 1 laser instrument being closed.
According in another preferred embodiment of the present invention, the telescopic equipment with at least two lens is provided for focal length integrally-regulated of laser beam.This is integrally-regulated can be understood to that all laser beams advance by telescopic equipment and be therefore affected in the same manner.Control module can be suitable for as the distance according to object arranges telescopic equipment, thereby particularly makes the focal length of laser beam corresponding to the distance of object.Useful, when object near or during away from this instrument, the spot size that is manufactured on the mark on object can keep constant.Preferably, telescopic equipment is arranged on after arrangement for deflecting, reduces because the largest beam interval between any two laser beams may be deflected device.It is less that therefore the optical element of telescopic equipment can be done.
In preferred a variation of instrument of the present invention, provide a retractor device group, for the convergence of each laser beam or the degree of dispersing are set, thereby the focal length of each laser beam is set.This can carry out separately each light beam.Useful, therefore can compensate path difference, path difference refers to and arrives before object, the length difference in the path of light beam separately.This may be because the different internal path lengths in the surface profile of object or mark instrument cause.
Each retractor device can comprise at least two optical elements, particularly at least two lens or curved mirror, and the distance between it is conditioned for arranging focal length.
Preferably, retractor device, it also can be called a light-beam forming unit, its controlled unit linear regulation, that is, the position of at least one optical element of each retractor device is changed in the direction of propagation of corresponding laser beam.
In order to compensate the path length difference between the laser beam that is combined to common point, control module can be suitable for as controlling retractor device, makes the laser beam after combination have a common foci or focus.In addition, the light beam focal length of different combinations also can be set, for reach high strength and a level and smooth or soft profile at center in the overlapping place of two light beams.One common foci can be considered to all combined laser beams and have same diameter or a spot size on object to be marked.
Control module can further be applied to control retractor device and compensate the path length difference between the laser beam not being combined.Path length difference may be caused by the particular arrangement of arrangement for deflecting.Depend on arrangement for deflecting in place, the beam path of laser beam may have different length, causes the different some size of the laser beam on object.Had retractor device, it is exactly feasible that flat field is proofreaied and correct, and in plane correction, each laser beam records identical focal length from an end of instrument.
Control module also can be suitable for as regulating in real time retractor device, is changed because of the adjusting of arrangement for deflecting when path.Additional or optional, control module can be suitable for as having the information changing about path or be redirected the information of laser beam by scanning device according to any, retractor device is set, and path changes the movement such as vibrations or any other object.
According to another embodiment of the present invention, control module is suitable for the activation for postponing separately each laser instrument, like this, when object at object moving direction in the situation that mark instrument moves, at least two laser beams are penetrated the same position on object in object moving direction.Can make the opportunity of the activation of laser instrument all laser beams in the moving direction of object, penetrate the same position at object.
In addition, no matter the location between Emission Lasers bundle and object moving direction, different laser beams can cause gauge point to become line, and line is perpendicular to object moving direction.The length of this line depends on the location between Emission Lasers bundle and object moving direction.
Preferably, laser instrument is stacked and makes the laser beam that laser instrument is launched form a laser beam array, particularly has the linear array of collimated laser beam.Each laser instrument can be gas laser, and it comprises the resonatron around an interior zone at least partly, and resonatron forms a closed loop or open loop.The laser beam of transmitting is directed to interior zone by light beam transmission apparatus, and light beam transmission apparatus is preferably a speculum group.General light beam transmission apparatus also can form by the output coupling mirror of gas laser.In such situation, a resonatron end portion of each gas laser can be indicated the direction at interior zone.Then, this arrangement for deflecting group can be arranged on interior zone.
Advantageously, some resonatron is beneficial to cooling, and these resonator tube are arranged on the opposite face of closed loop or open loop, and distance farthest, and is held in joint space-efficient mode at interior zone due to light element simultaneously relative to each other, and the overall size of instrument does not increase.
Light beam transmission apparatus also can be used as a part for retractor device.In addition, can be a part for retractor device for the output coupler of the gas laser that is coupled out laser beam.Output coupling can be partially reflecting mirror, and the wherein outer surface of each speculum, towards the surface away from laser gas, can have any shape that is conventionally.Therefore, preferred shape is that the behavior of each output coupling is similar to telescopical first lens.
The present invention's one advantageous variant is devoted to damage the situation of (failed) pixel, and damaged pixel refers to that laser instrument lost efficacy, and does not go out a laser beam.For the laser beam of replacing damaged laser instrument, thereby control module is deflected to the direction of damaging laser beam applicable to the laser beam of the laser instrument that regulates arrangement for deflecting and retractor device to work.Thereby thereby retractor device is controlled for regulating the path length difference between the laser rays that damages laser beam and replace this light beam.
Another preferred embodiment of the present invention is characterised in that, each arrangement for deflecting is a fiber waveguide.Fiber waveguide can be any fiber waveguide flexibly of guiding laser instrument emission of light, and this light has a certain wavelength, specifically a wavelength infrared light with 10 μ m.The example of fiber waveguide can be optical fiber or has the blank pipe of inner reflective surface.
Each fiber waveguide can be equipped with the input coupling optical part of the core for the laser beam of ejaculation is directed to fiber waveguide with suitable angle.Fiber waveguide can be equipped with output coupling optical part equally, and it comprises and is in particular at least two lens, for collecting the laser emission away from fiber waveguide.Output coupling optical part can be determined size, focal length and the depth of focus of laser beam.Especially, output coupling optical part can be formed retractor device.
Preferably, fiber waveguide has identical length.This has caused spot size and the quality of the mark on object more constant.
The invention further relates to a Mk system that includes a mark instrument as above, this system can further comprise a pivoting device, for a relative object moving direction, mark instrument is tilted.
By illustrating, by inclination mark instrument, can make to change printed resolution as subsequently, change one perpendicular to the direction of an object moving direction on object the distance of gauge point be possible.This be by one perpendicular to the direction of an object moving direction in beam spacing arrange.Because laser instrument can be delayed to, when object has moved when large as beam spacing in object moving direction, be just activated, thereby beam spacing in object moving direction does not play a decisive role to printed resolution.
Then, can change perpendicular to the beam spacing in the direction of an object moving direction by inclination mark instrument, and thereby change and swash the two-dimensional arrangements of wire harness.Preferably, the printed resolution that control module is applicable to based on required tilts mark instrument by pivoting device.
In the linearly aligned situation of laser beam, the angle of inclination between the linear array of laser beam and object moving direction has been arranged in the direction of vertical object moving direction, the distance between the gauge point on object.If the linear array of laser beam is perpendicular to object moving direction, the distance maximum between gauge point.For a less distance is set, angle of inclination can be reduced.Adding suitable launching time, laser instrument, angle of inclination can be set up, and makes gauge point form the gauge point of a continuous lines or separation.Overlapping mark point can manufacturedly be used for causing the varying strength of gauge point, such as, for gray scale printing.In addition, inclination angle can be zero, postpones between a corresponding igniting if select, and selects the activation of laser instrument, complete overlapping the reaching of gauge point.
The present invention understands more fully and other various different characteristics and advantage of the present invention become clearer in connection with accompanying drawing by following explanation.Below explanation is only some examples, but not any restriction to the application.Equivalent unit in accompanying drawing indicates with identical Reference numeral respectively.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the first embodiment of mark instrument of the present invention;
Fig. 2 is the schematic diagram of the first structure of light-beam forming unit group and arrangement for deflecting group;
Fig. 3 A and Fig. 3 B are the different views of the second structure of light-beam forming unit group and arrangement for deflecting group;
Fig. 4 A and Fig. 4 B are the different views of the 3rd structure of arrangement for deflecting group and light-beam forming unit group;
Fig. 5 is according to the schematic diagram of Mk system of the present invention and the object to be marked that moves with respect to Mk system.
The specific embodiment
Fig. 1 is according to the schematic diagram of the first embodiment of a mark instrument 100 of the present invention, and mark instrument 100 has comprised, a plurality of gas lasers 10, and each laser instrument is launched a laser beam, and it is used to manufacture a mark on object (not shown).In order to form and directed laser beam, this instrument 100 further comprises Optical devices 30,40,45,50.Although the present invention is below with reference to comprising that the mark instrument of gas laser is described, the laser instrument of other models also can be replaced and being adopted.
In an example shown, a plurality of gas lasers 10, have comprised 9 gas laser 10a-10i.Conventionally, it is desirable having a large amount of gas laser 10, such as, at least 4 or 6 laser instruments.Each gas laser 10 has comprised resonatron 12, and its mutual fluid connects (fluidic connection).Namely, the resonatron 12 of a gas laser forms a public resonatron three dimensions (resonator volume).It is also feasible that resonatron 12 fluids of different laser instruments 10 connect.
In described embodiment, gas laser refers to CO 2laser instrument, and correspondingly, gas laser can comprise other gases, as CO, and N 2and He.
Resonator tube 12, around an interior zone or free center space 5 therebetween, is set to the shape of an annular.The annular forming by linkage unit 16 is for connecting the adjacent resonatron 12 that belongs to identical laser.Connection Element 16 is set to the corner of stacking laser instrument, and is enclosed with the speculum for laser beam is reflected to other resonator tube from an adjacent resonators pipe 12.
In described example, resonatron 12 forms the sealing three dimensions of an annular or rectangle.Conventionally, the shape in any other at least part of closed interior region 5 can be selected, a for example triangle, square or a U-shaped.
The resonatron 12 of each gas laser 10a-10i can form a sealing three dimensions (sealed volume).Thereby the common sealing three dimensions of formation one can is separated by or interconnect to the three dimensions of laser instrument to each other.In the laser instrument of sealing, conventionally need in long-time, laser gas composition be remained unchanged.With this end in view, by an extra gas reservoir 19, total gas three dimensions can be enhanced.Gas in holder can not be excited to produce gas light.But holder 19 is connected with the gas three dimensions of one or more resonatrons 12.
Mark instrument 100 has further comprised the excitation apparatus (excitation mean) (not indicating) on each resonatron 12 and has been attached at the cooling block (not indicating) on resonatron 12.Likely every one side of the cubic structure of each resonatron 12 has a cooling block.Therefore, each cooling block is not a cooling single resonatron, but a plurality of resonatrons 12 of cooling various lasers 10a-10i.Cooling block can have plurality of channels, can circulate by its this cool stream.
The resonatron 12 of each laser instrument 10 is set to independently, separated plane layer.Laser instrument 10 is roughly the same and be stacked on each other and go up in a parallel manner.
The rectangular shape of laser instrument 10 can be opening on an angle.In illustrated embodiment, be the upper left corner, provide the output flange portion 17 of an integration thereon.On this angle, the three-dimensional end of gas has a mirror 18 backlight, and mirror 18 backlight is for being reflected back laser beam resonatron 12.Mirror 18 backlight can be connected with an end resonatron 12, and this end resonatron 12 is supported by integrated output flange 17, or mirror backlight 18 can link with integrated output flange 17.
Three-dimensional another end of gas is terminated on same angle by output coupler 13.Output coupler 13 is coupled out a laser beam, and can be connected to an end resonatron 12 or integrated output flange 17 again simultaneously.Output coupler 13 can be partially reflecting mirror 13 or also can be described as part reflection output coupler.The laser beam of transmitting can be directed in interior zone 5 by light beam transmission apparatus 14 subsequently.In illustrated embodiment, light beam transmission apparatus 14 comprises at least one speculum 14 being arranged on integrated output flange 17.
In interior zone 5, be provided with the Optical devices 30,40,45,50 for shaping and deflection laser bundle.This setting advantageously makes space requirement relatively low.
Be mapped to one group for the light-beam forming unit 40 of laser focusing bundle again from the laser beam of light beam transmission apparatus 14.Corresponding each laser beam of this group light-beam forming unit includes a light-beam forming unit 40a-40i.Therefore, the focusing of laser beam can be by each independent setting.Illustrated is for each light-beam forming unit 40a-40i, is provided with lens.But what each light-beam forming unit can replace comprises at least two optical elements, such as, speculum or lens, form a retractor device, useful, and the focal length of adjusting laser beam only needs the slight displacement of the optical element of retractor device thereupon.
After advancing by light-beam forming unit 40, laser beam is mapped on a deflecting apparatus 30, and it comprises an arrangement for deflecting group 30.But, this order can be changed or these two kinds of devices in single element can replace, light-beam forming unit 40 element can be arranged on two interelements of arrangement for deflecting 30.
Conventionally can be also light beam transmission apparatus 14 forming section retractor devices 40 or part arrangement for deflecting 30.In the situation that being part arrangement for deflecting, light beam transmission apparatus 14 can form the first mapping mirror group.The quantity of the optical element needing is then by useful minimizing.
In the embodiment describing, corresponding each laser beam of an arrangement for deflecting group 30 is provided with an arrangement for deflecting 33a-33i.These arrangements for deflecting 33a-33i can also be called as one first mapping device group or speculum 33.Conventionally, arrangement for deflecting can be any device that changes the direction of propagation of laser beam, comprises optical fiber.Mapping mirror can be independent of each other and be placed.Therefore the arrangement that, is mapped to the laser beam on arrangement for deflecting 30 can change by the position that regulates independent speculum 33a-33i.
Mapping mirror 33a-33i is tiltable and displaceable, in other words translation.For inclined mirror, each mapping mirror 33a-33i has been mounted gimbals.One control module (not shown) can be suitable for as each mapping mirror 33a-33i is set to the position needing by gimbals.
At least two mapping mirror 33a, 33b is conditioned and corresponding laser beam is crossed one another go up on one point or more at least going up, and this point can be called as common point.This common point or the first common point are preferably in the outside of instrument 100, and object to be marked can be simply positioned on above-mentioned point.
Remaining mapping mirror 33c-33i can or be conditioned and makes their laser beam form at least one other common point, or makes their laser beam be mapped to point independent on object to be marked.
Control module is suitable for as regulating any remaining mapping mirror 33c-33i, makes the laser beam of their correspondences be mapped to the first common point being formed by two mapping mirror 33a, 33b.Therefore the intensity of the laser beam that hits the first common point of any needs can be set, until the combined strength of all laser beams.
After leaving arrangement for deflecting 30, laser beam is mapped in a series of common optical element, that is, and and the optical element that all laser beams are mapped to.These can comprise the telescopic equipment 45 of an across-the-board regulation for laser beam foucing.With respect to retractor device group 40 as above, telescopic equipment 45 affects all laser beams in the same manner.
Optical element in beam path also can comprise for changing or the device of the intensity distributions of homogenising light beam, for changing the device of polarization of light beam, particularly, for reaching the public polarization in the whole cross section of light beam, or for the light beam of depolarization.
Finally, laser beam is passed one scan mirror device 50 and is directed to outside instrument 100.This equipment 50 can comprise two galvanometer scanners 50, and each galvanometer scanner has a rotatable public speculum 50a, and all laser beams are mapped on this public speculum 50a.
As shown in Figure 2, be the first exemplary arrangement of arrangement for deflecting group 30 and light-beam forming unit group 40.
Laser beam 90a-90i shown in Fig. 2 the right is mapped in an arrangement for deflecting group 30, and this arrangement for deflecting group 30 has comprised the first and second mapping mirror groups 33,34.Namely, each light beam 90a-90i is directed to the second mapping mirror from the first mapping mirror 33a-33i.Because the mapping of second in figure mirror group 34 is described from top, therefore independent speculum, is in 9 speculum situations in this example, cannot distinguish.The first mapping mirror group 33 and the second mapping mirror group 34 are arranged in respectively linear array 35,36.
In the example illustrating, laser beam 90a-90i is mapped out by this arrangement for deflecting group 30, and the linear array of laser beam is rotated, for example, and 90 °.But the laser beam 90a-90i that is mapped to the first mapping mirror group 33 can parallelly advance, then after being redirected by the second mapping mirror group 34, the no longer parallel but convergence of at least some laser beam 90a-90i is advanced.Consequently, they overlap on a common point, on this common point, can place object to be marked.
Shown in structure therefore also can be called as the mapper as one level-vertical pixel.The first and second mapping mirror groups 33,34 are aligned to a plane and orthogonal.
After this arrangement for deflecting group 30, provide the light-beam forming unit group 40 of a beam shaping for laser beam 90a-90i and calibration.This light-beam forming unit group 40 has comprised a plurality of light-beam forming units, and each have at least two lens.Thereby in order to regulate the focus of each laser beam 90a-90i and to be adjusted in the spot size on object to be marked, lens can be offset on the direction of propagation of laser beam 90a-90i.Therefore light-beam forming unit forms retractor device.When correspondence, each laser beam 90a-90i has a retractor device, and light beam also can be conditioned for path length difference.Particularly importantly these show different paths conventionally at the overlapping laser beam of common point.
For Printing Marks is to object, the scanning motion of laser beam 90a-90i can be performed by the second mapping mirror group 34.Alternatively, the second mapping mirror group 34 can arrive one scan mirror device by directed laser beam 90a-90i.
Fig. 3 A and 3B show the different view of another structure of arrangement for deflecting group 30 and light-beam forming unit group 40.
This structure is different from the arrangement of the first and second mapping mirror groups 33,34 before.Under present case, this first mapping mirror group 33, the second mapping mirror group 34 form linear array, and its (being different from the former structure) be not in a plane.On the contrary, two linear arraies are reduced in the interval between laser beam 90a-90i take an angle (in this case as 45 °).Meanwhile, the linear array of laser beam 90a-90i is rotated 90 °.
Fig. 4 A and 4B show another useful structure of mapping mirror 33,34.Here being mapped to before arrangement for deflecting group 30, first pass through light-beam forming unit group 40 from the laser beam in left side.The same with situation before, the structure that Fig. 4 A and 4B describe has been shown the first and second mapping mirror groups 33,34, and every group is aligned to linear array 35,36.But in this subsidiary embodiment, the second mapping mirror group 34 is tilted as in the distance required apart from instrument, all laser beam 90a-90i that are reflected are overlapping and form a common point.By the degree of convergence of laser beam 90a-90i is set, common point place distance can be different.
Preferably, the mapping mirror of the second mapping mirror group 34 can tilt by gimbals controlled unit.The mapping mirror of the first mapping mirror group 33 can or be fixed these speculums can not be shifted in printing operation, or speculum also can be by universal rotational.
In the embodiment of Fig. 2 to Fig. 4 B, illustrated, the scanning motion of laser beam 90a-90i can be by the mapping mirror 34a-34i operation of the second mapping mirror group 34 that tilts.Scanning device, has one for being redirected the galvanometer scanner of the public speculum of all laser beam 90a-90i, does not exist in this case.But it may be also useful that such scanning device is provided.
For arrangement for deflecting being set to any Fig. 2 to the structure shown in Fig. 4 B, preferably provide a control module.
Fig. 5 schematically shows a Mk system 120 and object to be marked 1.
Object 1 moves in object moving direction 2, and shows in the drawings its situation three different positions, and they are sequentially on three different positions.Mk system 120 includes the pivoting device 110 of a mark instrument 100 and for mark instrument 100 is tilted.
Mark instrument 100 can comprise any assembly mentioned above, such as, the arrangement for deflecting being formed by two mapping mirror groups, each mapping mirror group is arranged in linear array.As shown in Figure 5, control module 20 and positioner 60 are provided equally.Positioner is for locating the linear array of mapping mirror.Independent mapping mirror can be fixed in corresponding array, makes them can not be shifted still to tilt, and for example, tilts by gimbals.
Mark instrument 100 is launched the laser beam of a plurality of combinations, and Fig. 5 shows three 90a wherein, 90b, 90c.In the time that object 1 moves, laser beam 90a, the 90b of combination, 90c are redirected accordingly.Laser beam 90a, the 90b of each combination, 90c comprise independently laser beam, or in other words, are produced by multiple gas lasers.In the example of describing, each light beam 90a, 90b, 90c form by three gas lasers.With respect to previously described example, these independently laser beams that form a common point are not only overlapping at common point, but have the path that part is identical.Useful, the movement of object 1, for example, a unwanted vibration, can not have influence on independent laser beam and whether form a common point at body surface.
Depend on shape and the position of object 1, as that indicates in the mark in Fig. 3 " d ", the changeable size of distance between object 1 and instrument 100.Further, sequentially on a point, for the laser beam 90a of each combination, 90b, 90c, its distance can be different.The laser beam 90a of the combination on object 1,90b, the spot size of 90c still equates.With this end in view, provide foregoing light-beam forming unit, it regulates by control module 20.
The useful layout flexibly that a plurality of laser instruments are provided of mark instrument of describing.One extra high laser beam intensity can be reached to a common point by the laser beam of the laser instrument of combination any amount.If desired laser beam intensity, lower than the laser instrument of all combinations, can form a plurality of common points, and it is each makes by a plurality of laser beams.Thereby advantageously provide the compact design of the high beam intensity of a permission, and use laser beam very flexibly.

Claims (13)

1. for by the mark instrument of laser labelling one object (1), comprise
-a plurality of laser instruments (10), particularly gas laser (10); And
-mono-for according to a symbol to be marked, activates separately each laser instrument (10) thereby the control module (20) of transmitting one laser beam (90a – 90i);
It is characterized in that,
Described instrument also comprises:
-mono-deflecting apparatus (30), by described deflecting apparatus, at least two laser beams (90a – 90i) are incorporated into a common point;
Described deflecting apparatus (30) comprises an arrangement for deflecting group (30), corresponding each laser beam (90a – 90i), and arrangement for deflecting group (30) has at least one arrangement for deflecting (33a – 33i, 34a – 34i); And
Each arrangement for deflecting (33a – 33i, 34a – 34i) is adjustable and/or displaceable separately separately at its yawing moment;
In order to combine a laser beam (90a – 90i) to another or several other laser beams (90a – 90i), corresponding deflection device (33a – 33i, 34a – 34i) is correspondingly adjustable; And
Arrangement for deflecting group (30) allows to rearrange laser beam (the 90a – 90i) array of needs of laser beam (90a – 90i) one-tenth that are not incorporated into common point.
2. mark instrument as claimed in claim 1, is characterized in that,
Corresponding each laser beam (90a-90i), described at least one arrangement for deflecting (33a – 33i, 34a – 34i) is one of following: corresponding each laser beam (90a-90i), at least one mapping mirror (33a – 33i, 34a – 34i) or corresponding each laser beam (90a-90i), at least one fiber waveguide; And
Each at least one mapping mirror (33a – 33i, 34a – 34i) or fiber waveguide is independent adjustable and/or displaceable separately at its yawing moment.
3. mark instrument as claimed in claim 1 or 2, is characterized in that,
In order progressively to adjust a laser beam power that is sent to common point, control module (20) is suitable for as according to a power grade needing or be incorporated into the quantity of the laser beam (90a – 90i) of a single point according to user's input setting.
4. the mark instrument as described in claim 1 to 3 any one, is characterized in that,
For the laser beam (90a – 90i) of orientation by deflecting apparatus (30) combination is to the direction of needs, provide at least one scanning mirror equipment (50);
Described scanning mirror equipment (50) has comprised a public speculum (50a), penetrates all laser beams (90a – 90i) from deflecting apparatus (30) on described public speculum (50a); And
Control module (20) is suitable for as pivotable scanning mirror equipment (50), particularly by a galvanometer.
5. the mark instrument as described in claim 2 to 4 any one, is characterized in that,
In order to form a plurality of common points, each laser instrument (10) is assigned in a plurality of groups, and
The laser beam (90a – 90i) that described arrangement for deflecting (33a – 33i, 34a – 34i) is arranged the laser instrument (10a-10i) that makes each group is incorporated into common point separately.
6. the mark instrument as described in claim 1 to 5 any one, is characterized in that,
Corresponding each laser beam (90a – 90i) provides retractor device group (40), and retractor device group (40) comprises at least one retractor device (40a – 40i);
Each retractor device (40a – 40i) is adjustable for the focal length of laser beam (90a – 90i) of a correspondence is set separately; And
For compensating the path length difference between the laser beam (90a – 90i) that is combined to common point, control module (20) is suitable for as controlling retractor device (40a – 40i) and makes the laser beam (90a – 90i) of combination have a common foci.
7. the mark instrument as described in claim 2 to 6 any one, is characterized in that,
Described arrangement for deflecting group (30) comprises one first and second mapping mirror group (33,34);
Each mapping mirror group (33,34) corresponding each laser beams (90a90i) comprise at least one mapping mirror (33a – 33i, 34a – 34i);
Described the first mapping directed described laser beam of mirror group (33) (90a – 90i) is to described the second mapping mirror group (34).
8. mark instrument as claimed in claim 7, is characterized in that,
Described control module (20) is suitable for the yawing moment into dislocation arrangement for deflecting (33a – 33i, 34a – 34i) and/or adjusting arrangement for deflecting (33a – 33i, 34a – 34i), particularly passes through gimbals.
9. the mark instrument as described in claim 2 to 8 any one, is characterized in that,
Described control module (20) is suitable for as controlling arrangement for deflecting (33a – 33i, 34a – 34i) arranges the convergence of a laser beam (90a – 90i) from arrangement for deflecting group (30) transmitting or the degree of dispersing.
10. the mark instrument as described in claim 1 to 9 any one, is characterized in that,
Be provided a telescopic equipment (45) with at least two lens, described telescopic equipment (45) is integrally-regulated for the focal length of laser beam (90a – 90i).
11. mark instruments as described in claim 1 to 10 any one, is characterized in that,
Each arrangement for deflecting comprises that a fiber waveguide and described fiber waveguide have identical length.
12. mark instruments as described in claim 1 to 11 any one, is characterized in that,
Arrangement for deflecting (33a – 33i, 34a – 34i) is conditioned the not beam spacing between the laser beam (90a – 90i) of common point combination is reduced.
13. Mk systems,
Include the mark instrument as described in claim 1 to 12 any one, and
For the pivoting device (110) of the described mark instrument (100) that tilts with respect to the object moving direction (2) of object to be marked (1).
CN201280042992.3A 2011-09-05 2012-07-19 There is the mark instrument of a plurality of laser instrument and a combination deflecting apparatus Expired - Fee Related CN103781586B (en)

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