CN103775649B - Sealed gearing device - Google Patents
Sealed gearing device Download PDFInfo
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- CN103775649B CN103775649B CN201410018204.8A CN201410018204A CN103775649B CN 103775649 B CN103775649 B CN 103775649B CN 201410018204 A CN201410018204 A CN 201410018204A CN 103775649 B CN103775649 B CN 103775649B
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- transmission shaft
- axle sleeve
- sealed
- thin film
- film deposition
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Abstract
The invention provides a kind of sealed gearing device.Sealing transmission device has the Height Adjustable function of transmission shaft, better can control the distance of thin film deposition chamber inner pallet and resistive heater, thus choose the warm area of the most applicable crystal epitaxy.
Description
Technical field
The present invention relates to equipment manufacturing technical field, particularly relate to the elevated-temperature seal transmission device used in a kind of chemical vapor deposition (ChemicalVaporDeposition is called for short CVD) equipment.
Background technique
Film growth is the important process in semiconductor technology, micro-nano technology field, and especially in semiconductor material growing field, the quality of film growth quality determines the important step whether device performance is superior often.CVD equipment is the key equipment of compound semiconductor epitaxial investigation of materials and production; the large-scale industrial being particularly suitable for the compound semiconductor epitaxial materials such as gallium nitride, gallium arsenide, indium phosphide, zine oxide is produced, and is the capital equipment world today producing semiconductor photoelectric device and microwave device material.
In the epitaxy technique of CVD equipment, gaseous reactant such as organometallic source gases and ammonia etc. enter in thin film deposition chamber, at sensed coil or setting off of resistor disc heating, complicated chemical reaction occur.Now, pallet needs at the uniform velocity to rotate to ensure the uniformity of gas aggradation and the crystal mass of epitaxial wafer, and the distance of heating resistor film and graphite pallet needs suitably, and it depends on the height of magnetic fluid axis.Cause heating uneven apart from too small meeting, directly have influence on the uniformity of Material growth; Low apart from the excessive heat utilization ratio that will cause, also can affect the uniformity of its heat simultaneously.So the height of magnetic fluid axis needs moderate, in addition also require that sealed gearing device has good seal, perpendicularity, rotating speed and stability.
If seal is bad, the gas reactant in thin film deposition chamber will be caused to leak into the external world, to environment, once reactant comprises harmful gas, the personal safety of that laboratory technician and operator will receive threat.If perpendicularity is bad, the graphite support disc spins that axle drives steadily, will not will produce small air-flow in graphite upper end, cause gas aggradation uneven, affect the crystal mass of Material growth; In addition, also likely cause graphite support slow, small fall to fall to damaging, cause economic loss.Rotating speed and stability test the necessary index of carrying out smoothly, if turn up is less than requirement of experiment, the crystal mass of that material also can not reach requirement; If stability is bad, experiment will be caused to stop, cause unnecessary economic loss.
In the prior art, CVD equipment thin film deposition chamber many employings Magneticfluid Seal Technique solves the problem of sealing transmission, but some problems of the many existence of the sealed gearing device for high temperature film deposition chambers, the height as axle is unadjustable, high temperature time the problem such as seal and poor stability.
Summary of the invention
(1) technical problem that will solve
In view of above-mentioned technical problem, the invention provides a kind of sealed gearing device, to realize the adjustment of axle height, and the seal of sealed gearing device and stability when improving high temperature.
(2) technological scheme
According to an aspect of the present invention, a kind of sealed gearing device is provided.Sealing transmission device comprises: transmission shaft, and its end has outside thread; Housing, is positioned at the periphery of transmission shaft, and the transmission axis hole seal buckle below the shell flange of its upper end and thin film deposition chamber closes, and the part that shell flange is given prominence on transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber; Axle sleeve, is arranged between housing and transmission shaft, and its end and transmission the tip of the axis are sealed by O RunddichtringO; Bearing, it is arranged between axle sleeve and housing diametrically, and it is presented axially in the middle part of housing, for fixed axle sleeve, and makes axle sleeve and transmission shaft can relative to housing into rotation; Shaftless actuating motor, it is presented axially between bearing and shell end, and it is diametrically between axle sleeve and housing, and its stator is fixed on housing, and its rotor is engaged with axle sleeve by key, for driving axle sleeve and drive axis; And axle height adjustment assembly, it is positioned at the periphery of transmission shaft diametrically, it is fixed on sleeve end in the axial direction, O RunddichtringO is withstood by sealed pressing sleeve in its upper end, there is inside it internal thread matched with transmission shaft end outside thread, by rotating drive shaft or axle height adjustment assembly, realize the adjustment of transmission shaft height.
(3) beneficial effect
As can be seen from technique scheme, sealed gearing device of the present invention has following beneficial effect:
(1) there is the Height Adjustable function of transmission shaft, better can control the distance of thin film deposition chamber inner pallet and resistive heater, thus choose the warm area of the most applicable crystal epitaxy;
(2) there is the constituents such as axle center water-cooled, motor water cooling, effectively can reduce the thermal effect in this device working procedure, increase the service life;
(3) there is the assembly that axle sleeve is heat insulation, protect gas circuit, effectively can improve the seal of device.
Accompanying drawing explanation
Fig. 1 is the generalized section according to embodiment of the present invention sealed gearing device;
Fig. 2 is for protecting the schematic diagram of gas circuit in sealed gearing device shown in Fig. 1;
Fig. 3 is the schematic diagram of the axis of sealed gearing device shown in Fig. 1 height adjustment assembly.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.It should be noted that, in accompanying drawing or specification describe, similar or identical part all uses identical figure number.The implementation not illustrating in accompanying drawing or describe is form known to a person of ordinary skill in the art in art.In addition, although herein can providing package containing the demonstration of the parameter of particular value, should be appreciated that, parameter without the need to definitely equaling corresponding value, but can be similar to corresponding value in acceptable error margin or design constraints.The direction term mentioned in embodiment, such as " on ", D score, "front", "rear", "left", "right" etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is used to illustrate and is not used for limiting the scope of the invention.
It is Height Adjustable and have the sealed gearing device of good seal, perpendicularity, stability that the present invention utilizes that axle height adjustment assembly, the water-cooled of axle center and motor, axle sleeve are heat insulation, the structure such as boss structure, protection gas circuit realizes axle.
In one exemplary embodiment of the present invention, provide a kind of sealed gearing device.Fig. 1 is the generalized section according to embodiment of the present invention sealed gearing device.Please refer to Fig. 1, opened round transmission axis hole below thin film deposition chamber, the present embodiment sealed gearing device is arranged on the below of thin film deposition chamber, comprising:
Transmission shaft, its end has outside thread;
Housing, is positioned at the periphery of transmission shaft, and the transmission axis hole seal buckle below the shell flange of its upper end and thin film deposition chamber closes, and the part that housing is given prominence on transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber;
Axle sleeve, is arranged between housing and transmission shaft, and its end and transmission the tip of the axis are sealed by O RunddichtringO;
Bearing, it is arranged between axle sleeve and housing diametrically, the middle part of housing, for fixed axle sleeve, makes axle sleeve and transmission shaft can relative to housing into rotation;
Magnet fluid sealing assembly, in ring, between its shell flange being presented axially in housing upper end and bearing, it is diametrically between housing and axle sleeve, for carrying out magnet fluid sealing to the space between housing and axle sleeve, its water outlet and water inlet are connected to the corresponding mouth of constituent respectively;
Shaftless actuating motor, it is presented axially between bearing and shell end, on it is radial between axle sleeve and housing, its stator is fixed on housing, its rotor is engaged with axle sleeve by key, for driving axle sleeve and drive axis, the water outlet of its constituent is connected to the corresponding mouth of constituent with water inlet; And
Axle height adjustment assembly, it is presented axially in the end of axle sleeve, and it is positioned at the periphery of transmission shaft diametrically, and it is fixed by screws in the end of axle sleeve, and described O RunddichtringO is withstood by sealed pressing sleeve in its upper end, there is inside it internal thread matched with the outside thread of transmission shaft; By internal thread and externally threaded cooperation, realize the adjustment of transmission drive shaft height.
Below respectively each constituent element of the present embodiment sealed gearing device is described in detail.
Its middle shell mainly plays mechanical support effect, overall co-ordination and the support of the parts such as inner drive shafts, magnet fluid sealing assembly, bearing, actuating motor assembly, axle height adjustment assembly to be ensured on the one hand, complete by the mode of screw (6) with the bottom of thin film deposition chamber on the other hand and is connected and fixes.
Have employed the boss structure of annular protrusion in housing tip and the thin film deposition chamber position that connects, this boss structure is embedded in the bottom of thin film deposition chamber, is used for ensureing coaxality and the perpendicularity of transmission device and thin film deposition chamber.
Transmission shaft refers to the axis body at band sealed gearing device center, and bottom is with outside thread and keyway, and axle height adjustment assembly, with internal thread and fixing device, can realize the function regulating transmission shaft height when sealing.
Between magnet fluid sealing assembly and transmission shaft, add axle sleeve, prevent magnet fluid sealing liquid from directly contacting with transmission shaft, there is heat-blocking action.Wherein, magnet fluid sealing assembly comprises the parts such as magnet fluid sealing liquid, magnet, and magnet fluid sealing liquid is liquid magnetic, is adsorbed on the place that magnet and rotating part contact, reaches the effect of sealing in the mode of liquid state.But demagnetization phenomenon appears in magnet fluid sealing liquid in the case of a high temperature, in order to ensure the safe working temperature of magnet fluid sealing liquid, at the periphery design axle sleeve of tubular of transmission shaft, the transmission shaft avoided with high temperature directly contacts with magnet fluid sealing liquid phase.Whole sealed gearing device has four seal points, and magnet fluid sealing liquid is herein one of them seal point; Second seal point is the O RunddichtringO bottom axle sleeve and transmission shaft, realizes the sealing between axle sleeve and transmission shaft; 3rd seal point adopts the mode of O RunddichtringO to seal between magnet fluid sealing assembly and housing; 4th seal point adopts the mode of O RunddichtringO to seal between housing and thin film deposition chamber.
The water outlet of magnet fluid sealing assembly constituent is connected to the corresponding mouth of extraneous constituent with water intake.The water-cooled of magnet fluid sealing assembly is used to ensure that the magnetic liquid in magnetic fluid works in normal temperature range, prevents the demagnetization of magnetic liquid high temperature down to the phenomenon that can not seal.
As shown in Figure 2, outside device for sealing magnetic fluid, case inside devises the gas circuit that upwards passes into thin film deposition chamber inside.By this gas circuit, shielding gas is blown into thin film deposition chamber inside through this gas circuit, is used for reducing the hot-fluid of thin film deposition chamber inside to the thermal shock of magnetic seal liquid, reduces thin film deposition chamber internal dust simultaneously and flow into magnet fluid sealing component internal.
In the present embodiment, rotary drive is carried out in the periphery that shaftless actuating motor is bushed in transmission shaft.Complete the measurement to rotating speed of transmission shaft without shaft encoder, the information feed back of real-time rotate speed is carried out closed loop control to driver.Meanwhile, complete the connection bottom extraneous constituent and transmission shaft by rotary joint device, axle center water-cooled is carried out to the transmission shaft rotated.
The cold part of transmission shafts edema with the heart involved mainly reduces the temperature of axle itself, if the temperature of transmission shaft is too high, there will be the phenomenon that intensity reduces on the one hand, on the other hand because transmission shaft contacts with magnetic liquid indirectly, once the too high magnetic liquid of temperature still there will be demagnetization phenomenon, therefore the axle sleeve between transmission shaft and magnetic liquid also has heat-blocking action simultaneously, reduces the heat that magnetic liquid touches.
Meanwhile, at the annular water-cooling groove of outer shell body partial design of actuating motor, the water outlet of this annular water-cooling groove is connected to the corresponding mouth of extraneous constituent with water intake.This actuating motor constituent ensures that actuating motor uses at a lower temperature, reduces the operating temperature of motor, increases the service life.
Visible, as shown in Figure 1, in the present embodiment sealed gearing device, constituent comprises magnet fluid sealing assembly water-cooled, actuating motor water-cooled, cold three parts of transmission shafts edema with the heart involved.This three parts water-cooled common guarantee reliably working of sealed gearing device.
In the present embodiment, the structure of constituent, axle sleeve, protection gas circuit is adopted to improve the seal of device and the stability of long-term work.
Fig. 3 is the schematic diagram of the axis of sealed gearing device shown in Fig. 1 height adjustment assembly.Please refer to Fig. 3, this axle height adjustment assembly comprises: lock washer, screw, to match the rear pressing cover of internal thread with transmission shaft outside thread.Wherein: lock washer, for having certain thickness annular workpiece, on annulus, uniform 6 circular holes, corresponding with the screw of 6 bottom axle sleeve; Its inside, with convex key, is engaged mutually with the keyway bottom transmission shaft.Rear pressing cover, for having certain thickness annular workpiece, on annulus, uniform 12 circular holes, are positioned at the outside of lock washer, corresponding with the hole of lock washer, axle sleeve; Rear pressing cover is inner with internal thread, matches with the outside thread bottom transmission shaft.The bottom of transmission shaft has outside thread, rear pressing cover has the internal thread matched, now because the position of rear pressing cover is fixed, by rotating the height of rear pressing cover and adjustable transmission shaft, rear pressing cover, lock washer, sealed pressing sleeve, axle sleeve are well fixed together by screw by Height Adjustment afterwards successively; Fixed by screw herein, make sealed pressing sleeve compress O RunddichtringO between transmission shaft and axle sleeve, ensure sealing effect herein, sealed pressing sleeve is Flange-shaped Parts herein simultaneously, and with 6 uniform circular holes, corresponding with axle sleeve screw.
In addition, axle height regulates to set up needs the function simultaneously completing transmission, lock washer is inner with convex key, transmission shaft relevant position has keyway and matches with it, and after screw fixes rear pressing cover, lock washer, axle sleeve, driven by motor axle sleeve rotates, lock washer rotates simultaneously, now, because the convex key of lock washer inside and the keyway of transmission shaft are interlocked, transmission shaft is rotated by the gearing of convex key thereupon.
So far, by reference to the accompanying drawings the present embodiment has been described in detail.Describe according to above, those skilled in the art should have sealed gearing device of the present invention and have clearly been familiar with.
In addition, the above-mentioned definition to each element and method is not limited in various concrete structures, shape or the mode mentioned in mode of execution, and those of ordinary skill in the art can replace it with knowing simply, such as:
(1) axle height adjustment assembly part, can also, under the prerequisite determining size, adopt the form of keyway occlusion or screw to be fixed;
(2) actuating motor part can replace with the actuating motor of solid shaft, actuating motor is fixed on transmission shaft side, carries out rotary drive in bel-drivenn mode to transmission shaft;
In sum, the invention provides a kind of device for carrying out sealing transmission to the thin film deposition chamber of chemical vapor depsotition equipment.Sealing transmission device can realize carrying out sealing transmission to the thin film deposition chamber of high-temperature closed, transmission shaft is by the height of axle height (refering in particular to the distance that axle enters thin film deposition chamber) adjusting part adjusting axle, reach the distance regulated between thin film deposition chamber inner pallet and heating wire, thus improve efficiency and the uniformity of heating wire heating, improve the growth quality of semiconductor epitaxial wafer.
Above-described specific embodiment; object of the present invention, technological scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a sealed gearing device, is characterized in that, comprising:
Transmission shaft, its end has outside thread;
Housing, is positioned at the periphery of described transmission shaft, and the transmission axis hole seal buckle below the shell flange of its upper end and thin film deposition chamber closes, and the part that shell flange is given prominence on described transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber;
Axle sleeve, is arranged between described housing and described transmission shaft, and its end and described transmission the tip of the axis are sealed by O RunddichtringO;
Bearing, it is arranged between described axle sleeve and housing diametrically, and it is presented axially in the middle part of described housing, for fixing described axle sleeve, and makes described axle sleeve and transmission shaft can relative to housing into rotation;
Shaftless actuating motor, it is presented axially between described bearing and shell end, and it is diametrically between described axle sleeve and housing, and its stator is fixing on the housing, and its rotor is engaged with described axle sleeve by key, for driving axle sleeve and drive axis; And
Axle height adjustment assembly, it is positioned at the periphery of described transmission shaft diametrically, it is fixed on sleeve end in the axial direction, described O RunddichtringO is withstood by sealed pressing sleeve in its upper end, there is inside it internal thread matched with transmission shaft end outside thread, by rotating described transmission shaft or described axle height adjustment assembly, realizing the adjustment of transmission shaft height, comprising:
Lock washer, for having certain thickness ring workpiece, its inside, with convex key, is engaged mutually with the keyway bottom transmission shaft, and its peripheral several circular holes uniform;
Rear pressing cover, for having certain thickness annular workpiece, on annulus, several circular holes uniform, are positioned at the outside of lock washer, corresponding with the hole of lock washer, axle sleeve, and rear pressing cover is inner with internal thread;
Wherein, the bottom of transmission shaft has outside thread, rear pressing cover has the internal thread matched, the position of rear pressing cover is fixed, by rotating the height of rear pressing cover and adjustable transmission shaft, described rear pressing cover, lock washer, sealed pressing sleeve, axle sleeve are well fixed together by screw by Height Adjustment afterwards successively; Fixed by screw herein simultaneously, make the O RunddichtringO between sealed pressing sleeve compression transmission shaft and axle sleeve.
2. sealed gearing device according to claim 1, is characterized in that, uniform 6 circular holes in periphery of described lock washer, corresponding with the screw of 6 bottom axle sleeve, uniform 12 circular holes in periphery of described rear pressing cover.
3. sealed gearing device according to claim 1, is characterized in that, described sealed pressing sleeve is Flange-shaped Parts, and its periphery is with 6 uniform circular holes.
4. sealed gearing device according to claim 1, is characterized in that, also comprises:
Magnet fluid sealing assembly, in ring, it is presented axially between the described shell flange of housing upper end and described bearing, and it is diametrically between described housing and axle sleeve, for carrying out magnet fluid sealing to the space between described housing and described axle sleeve.
5. sealed gearing device according to claim 4; it is characterized in that; outside described magnet fluid sealing assembly; case inside has the gas circuit that is upwards blown into the shielding gas of thin film deposition chamber inside; in thin film deposition chamber, shielding gas is blown into by this gas circuit; be used for reducing the hot-fluid of thin film deposition chamber inside to the thermal shock of magnetic seal liquid, reduce thin film deposition chamber internal dust simultaneously and flow into magnet fluid sealing component internal.
6. sealed gearing device according to claim 4, is characterized in that, the water outlet of described magnet fluid sealing assembly constituent is connected to the corresponding mouth of extraneous constituent with water intake.
7. sealed gearing device according to claim 1, is characterized in that, completes the connection bottom extraneous constituent and transmission shaft by rotary joint device, carries out axle center water-cooled to transmission shaft.
8. sealed gearing device according to claim 1, is characterized in that, at the annular water-cooling groove of outer shell body partial design of actuating motor, the water outlet of this annular water-cooling groove is connected to the corresponding mouth of extraneous constituent with water intake.
9. sealed gearing device according to any one of claim 1 to 8, is characterized in that, is applied in chemical vapor depsotition equipment;
Connect on shell flange top and thin film deposition chamber position have employed annular boss structure, this boss structure is embedded in the bottom of thin film deposition chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018204.8A CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018204.8A CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
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| Publication Number | Publication Date |
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| CN103775649A CN103775649A (en) | 2014-05-07 |
| CN103775649B true CN103775649B (en) | 2016-03-02 |
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| CN201410018204.8A Active CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105350073B (en) * | 2015-10-30 | 2018-09-25 | 中国电子科技集团公司第四十八研究所 | A kind of the graphite plate rotary sealing appts and automatic loading and unloading system of silicon epitaxy equipment |
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| US4168070A (en) * | 1977-12-27 | 1979-09-18 | Niigata Engineering Co., Ltd. | Sealing device for shaft |
| CN1401601A (en) * | 2002-09-30 | 2003-03-12 | 烽火通信科技股份有限公司 | Gas outlet end rotary connection device for PCVD deposit lathe |
| CN2588134Y (en) * | 2002-12-02 | 2003-11-26 | 沈阳聚智电子科技有限公司 | Seal transmission device |
| CN1605899A (en) * | 2004-09-16 | 2005-04-13 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN1888451A (en) * | 2006-07-31 | 2007-01-03 | 上海凯泉泵业（集团）有限公司 | Rotor axial regulator |
| CN201297390Y (en) * | 2008-11-11 | 2009-08-26 | 中芯国际集成电路制造(上海)有限公司 | Magneto-fluid cooling structure and corresponding magneto-fluid sealing device |
| CN202893299U (en) * | 2012-08-20 | 2013-04-24 | 青岛联康油脂制品有限公司 | Mechanical sealing device for reaction kettle tank |
-
2014
- 2014-01-15 CN CN201410018204.8A patent/CN103775649B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4168070A (en) * | 1977-12-27 | 1979-09-18 | Niigata Engineering Co., Ltd. | Sealing device for shaft |
| CN1401601A (en) * | 2002-09-30 | 2003-03-12 | 烽火通信科技股份有限公司 | Gas outlet end rotary connection device for PCVD deposit lathe |
| CN2588134Y (en) * | 2002-12-02 | 2003-11-26 | 沈阳聚智电子科技有限公司 | Seal transmission device |
| CN1605899A (en) * | 2004-09-16 | 2005-04-13 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN1888451A (en) * | 2006-07-31 | 2007-01-03 | 上海凯泉泵业（集团）有限公司 | Rotor axial regulator |
| CN201297390Y (en) * | 2008-11-11 | 2009-08-26 | 中芯国际集成电路制造(上海)有限公司 | Magneto-fluid cooling structure and corresponding magneto-fluid sealing device |
| CN202893299U (en) * | 2012-08-20 | 2013-04-24 | 青岛联康油脂制品有限公司 | Mechanical sealing device for reaction kettle tank |
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