CN2588134Y - Seal transmission device - Google Patents
Seal transmission device Download PDFInfo
- Publication number
- CN2588134Y CN2588134Y CN 02281518 CN02281518U CN2588134Y CN 2588134 Y CN2588134 Y CN 2588134Y CN 02281518 CN02281518 CN 02281518 CN 02281518 U CN02281518 U CN 02281518U CN 2588134 Y CN2588134 Y CN 2588134Y
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- CN
- China
- Prior art keywords
- magnetic fluid
- bearing
- vacuum
- main shaft
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The utility model relates to a seal transmission device, which is used for transmitting motion and power to vacuum and ultra high vacuum environments. A power inputting device is connected with one end of a main shaft; the other end of the main shaft is arranged in a vacuum chamber. The end of the main shaft connected with the power inputting device is connected with a casing by a bearing. A magnetic fluid cap is tightly attached to the bearing; a magnetic fluid is arranged between a magnetic fluid shell and the magnetic fluid cap; the magnetic fluid is used for isolating vacuum and non vacuum. A seal ring is arranged between the magnetic fluid shell and the casing for isolating vacuum and non vacuum. The magnetic fluid can also be replaced by a framework seal ring. The magnetic fluid can also be replaced by liquid metals. The bearing works in a non vacuum environment; the bearing can use various lubricants and is suitable for various rotating speeds; the utility model has the advantages of rigid transmission, high transmitting precision, high seal performance and low failure rate; the service life of the bearing can reach the theory service life. The design concept is suitable for magnetic fluid seal transmission devices, seal ring seal transmission devices, liquid metal seal transmission devices, etc.
Description
Affiliated technical field
The utility model relates to a kind of sealed gearing device, is used for to vacuum and ultra-high vacuum environment transmitting moving and power.
Background technique
In vacuum environment, the surface of material can lose the air protection film, with lubricator can vacuum environment be polluted and make, and this in most of the cases is unallowed.As everyone knows, when two material surfaces that do not have a protective film are in contact with one another in vacuum environment and have certain pressure, by thermodynamic principle as can be known, the material that constitutes two block of material will cause so-called cold welding phenomenon by the interdiffusion of surface of contact phase.When two kinds of materials of cold welding separate, will cause tearing and degrading of material surface, the reason that Here it is has the part surface of the motion of being in contact with one another can rapid wearing, bearing can damage rapidly in vacuum environment.
Needed motion and power in vacuum environment, in most of the cases need be imported by the outside, this just needs to solve transmission accuracy and speed, sealability, clean environment, high temperature and low temperature, be in contact with one another contradictions each other such as the part surface of motion is lubricated.For transmitting moving in vacuum environment and power, designed various mechanisms in the past: as the metal bellows sealed gearing device, seal ring sealed gearing device, magnetic force coupling actuator, magnet fluid sealing transmission device, liquid metal sealed gearing device etc.
Various mechanisms in the past are problem of ubiquity all, and promptly bearing is worked in vacuum environment, and bearing can not make with lubricator, and bearing weares and teares easily, the rate of fault height, and system leaks easily, keeps in repair very difficult.
The model utility content
The utility model provides a kind of bearing to work in non-vacuum environment for the technical problem that solves above-mentioned existence, and bearing can use various oiling agents, thereby is fit to the sealed gearing device of various rotational speed.
The technical solution of the utility model is as follows:
Power input device links to each other with an end of main shaft, and the other end of main shaft is in vacuum chamber.Is connected by bearing between the end that main shaft and power input device link to each other and the housing, the magnetic fluid lid is close to bearing, and magnetic fluid is between main shaft, magnetic fluid shell and magnetic fluid cover, and magnetic fluid is used for isolated vacuum and antivacuum.Between magnetic fluid shell and the housing by seal ring isolated vacuum and antivacuum.
Described magnetic fluid also can replace with backbone sealing ring.
Described magnetic fluid can also replace with liquid metal.
The utility model has designed the sealed gearing device that is exclusively used in transmitting moving and power in vacuum environment, and characteristics are that bearing is worked in non-vacuum environment, and bearing can use various oiling agents, is fit to various rotational speed; Positive drive, the transmission accuracy height; Sealability is preeminent, and rate of fault is low, and bearing can reach its theoretical life-span in working life.This design concept is not only applicable to the magnet fluid sealing transmission device, also is applicable to seal ring sealed gearing device and liquid metal sealed gearing device etc.
Describe the utility model in detail below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is a magnet fluid sealing transmission structures schematic representation of the present utility model.
Fig. 2 is a seal ring sealed gearing device structural representation of the present utility model.
Among Fig. 1, hanging scroll 1, main shaft 2, screw 3, housing 4, seal ring 1, seal ring 26, magnetic fluid 7, magnetic fluid shell 8, magnetic fluid lid 9, bearing 10, flange 11, bearing gland 12, locking nut 13, water gland 14, water seal body temperature 15, seal ring 3 16, backbone sealing ring 17, power input device 18, fixed support 19.
Among Fig. 2, hanging scroll 20, main shaft 21, screw 22, housing 23, backbone sealing ring 24, spacer 25, pressure pad 26, bearing 27, flange 28, bearing gland 29, water gland 30, water seal body 31, seal ring 32, power input device 33, fixed support 34.
Embodiment
If magnetic fluid is worked under high temperature or low temperature, be without prejudice in order to guarantee magnetic fluid, described main shaft and housing can adopt water-cooling pattern.
If seal ring is worked under high temperature or low temperature, be without prejudice in order to guarantee seal ring, described main shaft and housing can adopt water-cooling pattern.
If liquid metal is worked under high temperature or low temperature, reliable in order to guarantee the liquid metal sealing, described main shaft and housing can adopt water-cooling pattern.
Claims (3)
1. sealed gearing device, comprise main shaft, housing, bearing, magnetic fluid, power input device links to each other with an end of main shaft, the other end of main shaft is in vacuum chamber, it is characterized in that being connected by bearing between a end that described main shaft and power input device link to each other and the housing, the magnetic fluid lid is close to bearing, and magnetic fluid is between main shaft, magnetic fluid shell and magnetic fluid lid.
2. a kind of sealed gearing device according to claim 1 is characterized in that described magnetic fluid can be substituted by backbone sealing ring.
3. a kind of sealed gearing device according to claim 1 is characterized in that described magnetic fluid can also be substituted by liquid metal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02281518 CN2588134Y (en) | 2002-12-02 | 2002-12-02 | Seal transmission device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 02281518 CN2588134Y (en) | 2002-12-02 | 2002-12-02 | Seal transmission device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN2588134Y true CN2588134Y (en) | 2003-11-26 |
Family
ID=33743872
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 02281518 Expired - Fee Related CN2588134Y (en) | 2002-12-02 | 2002-12-02 | Seal transmission device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN2588134Y (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100458243C (en) * | 2007-04-29 | 2009-02-04 | 浙江工业大学 | Magnetofluid seal driving device for vacuum equipment driving shaft |
CN103486140A (en) * | 2013-09-18 | 2014-01-01 | 浙江工业大学 | High-precision transmission device under thermal vacuum environment |
CN103775649A (en) * | 2014-01-15 | 2014-05-07 | 中国科学院半导体研究所 | Sealing transmission device |
CN111706677A (en) * | 2020-06-05 | 2020-09-25 | 浙江工业大学 | Lower friction pair and transmission device |
CN113492244A (en) * | 2020-03-20 | 2021-10-12 | 上海朗仕电子设备有限公司 | External transmission mechanism for vacuum reflow soldering furnace |
-
2002
- 2002-12-02 CN CN 02281518 patent/CN2588134Y/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100458243C (en) * | 2007-04-29 | 2009-02-04 | 浙江工业大学 | Magnetofluid seal driving device for vacuum equipment driving shaft |
CN103486140A (en) * | 2013-09-18 | 2014-01-01 | 浙江工业大学 | High-precision transmission device under thermal vacuum environment |
CN103486140B (en) * | 2013-09-18 | 2015-12-30 | 浙江工业大学 | High-precision transmission under hot vacuum environment |
CN103775649A (en) * | 2014-01-15 | 2014-05-07 | 中国科学院半导体研究所 | Sealing transmission device |
CN103775649B (en) * | 2014-01-15 | 2016-03-02 | 中国科学院半导体研究所 | Sealed gearing device |
CN113492244A (en) * | 2020-03-20 | 2021-10-12 | 上海朗仕电子设备有限公司 | External transmission mechanism for vacuum reflow soldering furnace |
CN111706677A (en) * | 2020-06-05 | 2020-09-25 | 浙江工业大学 | Lower friction pair and transmission device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |