CN103775649A - Sealing transmission device - Google Patents
Sealing transmission device Download PDFInfo
- Publication number
- CN103775649A CN103775649A CN201410018204.8A CN201410018204A CN103775649A CN 103775649 A CN103775649 A CN 103775649A CN 201410018204 A CN201410018204 A CN 201410018204A CN 103775649 A CN103775649 A CN 103775649A
- Authority
- CN
- China
- Prior art keywords
- transmission shaft
- axle sleeve
- housing
- thin film
- film deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention provides a sealing transmission device. The sealing transmission device has a function of adjusting the height of a transmission shaft. The distance between a tray and a heating resistance wire in a thin-film deposition chamber can be better controlled, so that a temperature area most suitable for epitaxial crystal growth is selected.
Description
Technical field
The present invention relates to equip manufacturing technology field, relate in particular to the elevated-temperature seal transmission device using in a kind of chemical vapor deposition (Chemical Vapor Deposition is called for short CVD) equipment.
Background technique
Film growth is the important process of semiconductor technology, micro-nano manufacture field, and especially in semiconductor material growing field, the quality of film growth quality determines the important step whether device performance is superior often.CVD equipment is the key equipment of compound semiconductor epitaxial investigation of materials and production; the large-scale industrial that is particularly suitable for the compound semiconductor epitaxial materials such as gallium nitride, gallium arsenide, indium phosphide, zine oxide is produced, and is the capital equipment of producing semiconductor photoelectric device and microwave device material in the world today.
In the epitaxy technique of CVD equipment, as organic metal source gas and ammonia etc. enter in thin film deposition chamber, there is complicated chemical reaction at sensed coil or setting off of resistor disc heating in gaseous reactant.Now, pallet need at the uniform velocity rotate to guarantee the uniformity of gas aggradation and the crystal mass of epitaxial wafer, and the distance of heating resistor film and graphite pallet need to be suitably, and it depends on the height of magnetic fluid axis.The too small meeting of distance causes heating inhomogeneous, directly has influence on the uniformity of Material growth; The excessive heat utilization ratio that will cause of distance is low, also can affect the uniformity of its heat simultaneously.So it is moderate that the height of magnetic fluid axis needs, and in addition also requires sealed gearing device to have good seal, perpendicularity, rotating speed and stability.
If seal is bad, will cause the gas reactant in thin film deposition chamber to leak into the external world, to environment, once reactant comprises harmful gas, that laboratory technician and operator's personal safety will be received threat.If perpendicularity is bad, the graphite support disc spins that axle drives will be not steady, will produce small air-flow in graphite upper end, causes gas aggradation inhomogeneous, affects the crystal mass of Material growth; In addition, also likely cause graphite support slow, small fall to fall to damaging, cause economic loss.Rotating speed and stability are to test the necessary index of carrying out smoothly, if turn up less than requirement of experiment, the crystal mass of that material can not reach requirement yet; If stability is bad, will cause experiment to be ended, cause unnecessary economic loss.
In the prior art, the Magneticfluid Seal Technique that adopts CVD equipment thin film deposition chamber solves the problem of sealing transmission more, but there are some problems for the sealed gearing device of high temperature film deposition chambers, the problem such as seal and poor stability when as unadjustable in the height of axle, high temperature more.
Summary of the invention
(1) technical problem that will solve
In view of above-mentioned technical problem, the invention provides a kind of sealed gearing device, to realize the adjusting of axle height, and seal and the stability of sealed gearing device while improving high temperature.
(2) technological scheme
According to an aspect of the present invention, provide a kind of sealed gearing device.Sealing transmission device comprises: transmission shaft, and its end has outside thread; Housing, is positioned at the periphery of transmission shaft, and the transmission axis hole seal buckle of the shell flange of its upper end and thin film deposition chamber below closes, and the part of the outstanding shell flange in transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber; Axle sleeve, is arranged between housing and transmission shaft, and its end and transmission the tip of the axis seal by O RunddichtringO; Bearing, it is arranged between axle sleeve and housing diametrically, and it is presented axially in the middle part of housing, for fixed axle sleeve, and axle sleeve and transmission shaft can be rotated with respect to housing; Shaftless actuating motor, it is presented axially between bearing and shell end, and it is diametrically between axle sleeve and housing, and its stator is fixed on housing, and its rotor engages with axle sleeve by key, for driving axle sleeve and transmission shaft to rotate; And axle height adjustment assembly, it is positioned at the periphery of transmission shaft diametrically, it is fixed on axle sleeve end in the axial direction, O RunddichtringO is withstood by sealed pressing sleeve in its upper end, its inner side has the internal thread matching with transmission shaft end outside thread, by rotating drive shaft or axle height adjustment assembly, realize the adjusting of transmission shaft height.
(3) beneficial effect
Can find out from technique scheme, sealed gearing device of the present invention has following beneficial effect:
(1) there is the Height Adjustable function of transmission shaft, can better control the distance of thin film deposition chamber inner pallet and resistive heater, thereby choose the warm area of applicable crystal epitaxy;
(2) there is the constituents such as axle center water-cooled, motor water cooling, can effectively reduce the thermal effect in this device working procedure, increase the service life;
(3) there is the assembly that axle sleeve is heat insulation, protect gas circuit, can effectively improve the seal of device.
Accompanying drawing explanation
Fig. 1 is according to the generalized section of embodiment of the present invention sealed gearing device;
Fig. 2 is the schematic diagram of protecting gas circuit shown in Fig. 1 in sealed gearing device;
Fig. 3 is the schematic diagram of the height adjustment assembly of sealed gearing device axis shown in Fig. 1.
Embodiment
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.It should be noted that, in accompanying drawing or specification description, similar or identical part is all used identical figure number.The implementation that does not illustrate in accompanying drawing or describe is form known to a person of ordinary skill in the art in affiliated technical field.In addition, although the demonstration of the parameter that comprises particular value can be provided herein, should be appreciated that, parameter is without definitely equaling corresponding value, but can in acceptable error margin or design constraints, be similar to corresponding value.The direction term of mentioning in embodiment, for example " on ", D score, 'fornt', 'back', " left side ", " right side " etc., be only the direction with reference to accompanying drawing.Therefore, the direction term of use is to be not used for limiting the scope of the invention for explanation.
It is Height Adjustable and have a sealed gearing device of good seal, perpendicularity, stability that the present invention utilizes the structures such as the water-cooled of axle height adjustment assembly, axle center and motor, axle sleeve are heat insulation, boss structure, protection gas circuit to realize axle.
In one exemplary embodiment of the present invention, provide a kind of sealed gearing device.Fig. 1 is according to the generalized section of embodiment of the present invention sealed gearing device.Please refer to Fig. 1, thin film deposition chamber below opened round transmission axis hole, the present embodiment sealed gearing device is arranged on the below of thin film deposition chamber, comprising:
Transmission shaft, its end has outside thread;
Housing, is positioned at the periphery of transmission shaft, and the transmission axis hole seal buckle of the shell flange of its upper end and thin film deposition chamber below closes, and the part of the outstanding housing in transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber;
Axle sleeve, is arranged between housing and transmission shaft, and its end and transmission the tip of the axis seal by O RunddichtringO;
Bearing, it is arranged between axle sleeve and housing diametrically, and the middle part of housing, for fixed axle sleeve, can rotate with respect to housing axle sleeve and transmission shaft;
Magnet fluid sealing assembly, be ring, it is presented axially between the shell flange and bearing of housing upper end, it is diametrically between housing and axle sleeve, for magnet fluid sealing is carried out in the space between housing and axle sleeve, its water outlet is connected with the corresponding mouth of constituent respectively with water inlet;
Shaftless actuating motor, it is presented axially between bearing and shell end, it is radially gone up between axle sleeve and housing, its stator is fixed on housing, its rotor engages with axle sleeve by key, be used for driving axle sleeve and transmission shaft to rotate, corresponding mouthful with constituent is connected the water outlet of its constituent with water inlet; And
Axle height adjustment assembly, it is presented axially in the end of axle sleeve, and it is positioned at the periphery of transmission shaft diametrically, and it is fixed by screws in the end of axle sleeve, and described O RunddichtringO is withstood by sealed pressing sleeve in its upper end, its inner side has the internal thread matching with the outside thread of transmission shaft; By internal thread and externally threaded cooperation, realize the adjusting of transmission drive shaft height.
Below respectively each constituent element of the present embodiment sealed gearing device is elaborated.
Its middle shell mainly plays mechanical support effect, to guarantee on the one hand overall co-ordination and the support of the parts such as inner transmission shaft, magnet fluid sealing assembly, bearing, actuating motor assembly, axle height adjustment assembly, complete and be connected and fix with the mode of screw bottom for (6) of thin film deposition chamber on the other hand.
Adopted the boss structure of annular protrusion in housing top and the thin film deposition chamber position that connects, this boss structure is embedded in the bottom of thin film deposition chamber, is used for guaranteeing coaxality and the perpendicularity of transmission device and thin film deposition chamber.
Transmission shaft refers to the axis body with sealed gearing device center, and bottom is with outside thread and keyway, and axle height adjustment assembly, with internal thread and fixing device, can be realized the function that regulates transmission shaft height in the situation that of sealing.
Between magnet fluid sealing assembly and transmission shaft, increase axle sleeve, prevented that magnet fluid sealing liquid from directly contacting with transmission shaft, has heat-blocking action.Wherein, magnet fluid sealing assembly comprises the parts such as magnet fluid sealing liquid, magnet, and magnet fluid sealing liquid is liquid magnetic, is adsorbed in liquid mode the place that magnet and rotating part contact, and reaches the effect of sealing.But there is demagnetization phenomenon in magnet fluid sealing liquid under high-temperature condition, in order to guarantee the safe working temperature of magnet fluid sealing liquid, in the periphery design of transmission shaft the axle sleeve of tubular, avoided directly contacting with magnet fluid sealing liquid phase with the transmission shaft of high temperature.Whole sealed gearing device has four seal points, and magnet fluid sealing liquid is herein one of them seal point; Second seal point is the O RunddichtringO of axle sleeve and transmission shaft bottom, realizes the sealing between axle sleeve and transmission shaft; The 3rd seal point is between magnet fluid sealing assembly and housing, to adopt the mode of O RunddichtringO to seal; The 4th seal point is to adopt the mode of O RunddichtringO to seal between housing and thin film deposition chamber.
With extraneous constituent corresponding mouthful is connected the water outlet of magnet fluid sealing assembly constituent with water intake.The water-cooled of magnet fluid sealing assembly is for guaranteeing that the magnetic liquid in magnetic fluid works in normal temperature range, prevents the demagnetization of magnetic liquid high temperature so that the phenomenon that can not seal.
As shown in Figure 2, in device for sealing magnetic fluid outside, housing inner side designed a gas circuit that upwards passes into thin film deposition chamber interior.By this gas circuit, shielding gas is blown into thin film deposition chamber interior through this gas circuit, the thermal shock of the hot-fluid that is used for reducing thin film deposition chamber interior to magnetic seal liquid, reduces thin film deposition chamber interior dust simultaneously and flows into magnet fluid sealing component internal.
In the present embodiment, the periphery that shaftless actuating motor edge is enclosed within transmission shaft is rotated transmission.Complete the measurement to rotating speed of transmission shaft without shaft encoder, the information of real-time rotate speed is fed back to driver and carry out closed loop control.Meanwhile, complete being connected of extraneous constituent and transmission shaft bottom by rotary joint device, the transmission shaft of rotation is carried out to axle center water-cooled.
The cold part of transmission shafts edema with the heart involved is mainly to reduce the temperature of axle itself, if the excess Temperature of transmission shaft, there will be on the one hand the phenomenon of strength decreased, on the other hand because transmission shaft contacts with magnetic liquid indirectly, once excess Temperature magnetic liquid still there will be demagnetization phenomenon, therefore the axle sleeve between transmission shaft and magnetic liquid also has heat-blocking action simultaneously, reduces the heat that magnetic liquid touches.
Meanwhile, in the outer shell body partial design of actuating motor annular water-cooling groove, corresponding mouthful with extraneous constituent is connected the water outlet of this annular water-cooling groove with water intake.This actuating motor constituent guarantees that actuating motor uses at a lower temperature, reduces the operating temperature of motor, increases the service life.
Visible, as shown in Figure 1, in the present embodiment sealed gearing device, constituent comprises magnet fluid sealing assembly water-cooled, actuating motor water-cooled, cold three parts of transmission shafts edema with the heart involved.This three parts water-cooled common guarantee the reliably working of sealed gearing device.
In the present embodiment, adopt the structure of constituent, axle sleeve, protection gas circuit to improve the seal of device and the stability of long-term work.
Fig. 3 is the schematic diagram of the height adjustment assembly of sealed gearing device axis shown in Fig. 1.Please refer to Fig. 3, this axle height adjustment assembly comprises: lock washer, screw, with the match rear pressing cover of internal thread of transmission shaft outside thread.Wherein: lock washer, for thering is certain thickness annular workpiece, uniform 6 circular holes on annulus, corresponding with 6 screws of axle sleeve bottom; Its inside is with convex key, with the keyway phase interlock of transmission shaft bottom.Rear pressing cover, for having certain thickness annular workpiece, uniform 12 circular holes on annulus, are positioned at the outside of lock washer, corresponding with the hole of lock washer, axle sleeve; , with internal thread, match with the outside thread of transmission shaft bottom in rear pressing cover inside.The bottom of transmission shaft has outside thread, rear pressing cover has the internal thread matching, now because the position of rear pressing cover is fixed, be the height of adjustable transmission shaft by rotation rear pressing cover, Height Adjustment is well fixed together rear pressing cover, lock washer, sealed pressing sleeve, axle sleeve by screw afterwards successively; Fix by screw herein simultaneously, make sealed pressing sleeve compress the O RunddichtringO between transmission shaft and axle sleeve, guarantee sealing effect herein, sealed pressing sleeve is Flange-shaped Parts herein, and with 6 uniform circular holes, corresponding with axle sleeve screw.
In addition, axle height regulates sets up the function that need to simultaneously complete transmission, lock washer inside is with convex key, transmission shaft relevant position has keyway and matches with it, after screw is fixed rear pressing cover, lock washer, axle sleeve, and the rotation of driven by motor axle sleeve, lock washer rotates simultaneously, now, because the convex key of lock washer inside and the keyway of transmission shaft are interlocked, transmission shaft rotates by the gearing of convex key thereupon.
So far, by reference to the accompanying drawings the present embodiment be have been described in detail.Describe according to above, those skilled in the art should have clearly understanding to sealed gearing device of the present invention.
In addition, the above-mentioned definition to each element and method is not limited in various concrete structures, shape or the mode in mode of execution, mentioned, and those of ordinary skill in the art can know simply and replace it, for example:
(1) axle height adjustment assembly part, can also determine under the prerequisite of size, adopts the form of keyway interlock or screw to be fixed;
(2) actuating motor part can replace with the actuating motor of solid shaft, and actuating motor is fixed on to transmission shaft one side, in bel-drivenn mode, transmission shaft is rotated to transmission;
In sum, the invention provides a kind of device that seals transmission for the thin film deposition chamber to chemical vapor depsotition equipment.Sealing transmission device can be realized the thin film deposition chamber of high-temperature closed is sealed to transmission, transmission shaft can be by the height of axle height (refer in particular to axle enter thin film deposition chamber distance) adjusting part adjusting axle, reach the distance regulating between thin film deposition chamber inner pallet and heating wire, thereby improve efficiency and the uniformity of heating wire heating, improve the growth quality of semiconductor epitaxial wafer.
Above-described specific embodiment; object of the present invention, technological scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. a sealed gearing device, is characterized in that, comprising:
Transmission shaft, its end has outside thread;
Housing, is positioned at the periphery of described transmission shaft, and the transmission axis hole seal buckle of the shell flange of its upper end and thin film deposition chamber below closes, and the part of the outstanding shell flange in described transmission shaft top stretches in thin film deposition chamber, and its rear end is positioned at outside thin film deposition chamber;
Axle sleeve, is arranged between described housing and described transmission shaft, and its end and described transmission the tip of the axis seal by O RunddichtringO;
Bearing, it is arranged between described axle sleeve and housing diametrically, and it is presented axially in the middle part of described housing, for fixing described axle sleeve, and described axle sleeve and transmission shaft can be rotated with respect to housing;
Shaftless actuating motor, it is presented axially between described bearing and shell end, and it is diametrically between described axle sleeve and housing, and its stator is fixed on described housing, and its rotor engages with described axle sleeve by key, for driving axle sleeve and transmission shaft to rotate; And
Axle height adjustment assembly, it is positioned at the periphery of described transmission shaft diametrically, it is fixed on axle sleeve end in the axial direction, described O RunddichtringO is withstood by sealed pressing sleeve in its upper end, its inner side has the internal thread matching with transmission shaft end outside thread, by rotating described transmission shaft or described axle height adjustment assembly, realize the adjusting of transmission shaft height.
2. sealed gearing device according to claim 1, is characterized in that, described axle height adjustment assembly comprises:
Lock washer, for having certain thickness ring workpiece, its inside is with convex key, with the keyway phase interlock of transmission shaft bottom, and its peripheral uniform several circular holes;
Rear pressing cover, for having certain thickness annular workpiece, uniform several circular holes on annulus, are positioned at the outside of lock washer, and corresponding with the hole of lock washer, axle sleeve, rear pressing cover inside is with internal thread;
Wherein, the bottom of transmission shaft has outside thread, rear pressing cover has the internal thread matching, the position of rear pressing cover is fixed, be the height of adjustable transmission shaft by rotation rear pressing cover, Height Adjustment is well fixed together described rear pressing cover, lock washer, sealed pressing sleeve, axle sleeve by screw afterwards successively; Fix by screw herein simultaneously, make sealed pressing sleeve compress the O RunddichtringO between transmission shaft and axle sleeve.
3. sealing transmitting assemblies according to claim 2, is characterized in that, uniform 6 circular holes in periphery of described lock washer are corresponding with 6 screws of axle sleeve bottom, uniform 12 circular holes in periphery of described rear pressing cover.
4. sealing transmitting assemblies according to claim 2, is characterized in that, described sealed pressing sleeve is Flange-shaped Parts, and its periphery is with 6 uniform circular holes.
5. sealed gearing device according to claim 1, is characterized in that, also comprises:
Magnet fluid sealing assembly, is ring, and it is presented axially between the described shell flange and described bearing of housing upper end, and it is diametrically between described housing and axle sleeve, for magnet fluid sealing is carried out in the space between described housing and described axle sleeve.
6. sealed gearing device according to claim 5; it is characterized in that; in described magnet fluid sealing assembly outside; housing inner side has a gas circuit that is upwards blown into the shielding gas of thin film deposition chamber interior; by being blown into shielding gas in this gas circuit phase thin film deposition chamber; the thermal shock of the hot-fluid that is used for reducing thin film deposition chamber interior to magnetic seal liquid, reduces thin film deposition chamber interior dust simultaneously and flows into magnet fluid sealing component internal.
7. sealed gearing device according to claim 5, is characterized in that, corresponding mouthful with extraneous constituent is connected the water outlet of described magnet fluid sealing assembly constituent with water intake.
8. sealed gearing device according to claim 1, is characterized in that, completes being connected of extraneous constituent and transmission shaft bottom by rotary joint device, and transmission shaft is carried out to axle center water-cooled.
9. sealed gearing device according to claim 1, is characterized in that, in the outer shell body partial design of actuating motor annular water-cooling groove, corresponding mouthful with extraneous constituent is connected the water outlet of this annular water-cooling groove with water intake.
10. according to the sealed gearing device described in any one in claim 1 to 9, it is characterized in that, be applied in chemical vapor depsotition equipment;
Adopted annular boss structure in shell flange top and the thin film deposition chamber position that connects, this boss structure is embedded in the bottom of thin film deposition chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018204.8A CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410018204.8A CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103775649A true CN103775649A (en) | 2014-05-07 |
| CN103775649B CN103775649B (en) | 2016-03-02 |
Family
ID=50568227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410018204.8A Active CN103775649B (en) | 2014-01-15 | 2014-01-15 | Sealed gearing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103775649B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105350073A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Graphite disc rotary sealing device of silicon epitaxy apparatus, and automatic feeding and blanking system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4168070A (en) * | 1977-12-27 | 1979-09-18 | Niigata Engineering Co., Ltd. | Sealing device for shaft |
| CN1401601A (en) * | 2002-09-30 | 2003-03-12 | 烽火通信科技股份有限公司 | Gas outlet end rotary connection device for PCVD deposit lathe |
| CN2588134Y (en) * | 2002-12-02 | 2003-11-26 | 沈阳聚智电子科技有限公司 | Seal transmission device |
| CN1605899A (en) * | 2004-09-16 | 2005-04-13 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN1888451A (en) * | 2006-07-31 | 2007-01-03 | 上海凯泉泵业（集团）有限公司 | Rotor axial regulator |
| CN201297390Y (en) * | 2008-11-11 | 2009-08-26 | 中芯国际集成电路制造(上海)有限公司 | Magneto-fluid cooling structure and corresponding magneto-fluid sealing device |
| CN202893299U (en) * | 2012-08-20 | 2013-04-24 | 青岛联康油脂制品有限公司 | Mechanical sealing device for reaction kettle tank |
-
2014
- 2014-01-15 CN CN201410018204.8A patent/CN103775649B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4168070A (en) * | 1977-12-27 | 1979-09-18 | Niigata Engineering Co., Ltd. | Sealing device for shaft |
| CN1401601A (en) * | 2002-09-30 | 2003-03-12 | 烽火通信科技股份有限公司 | Gas outlet end rotary connection device for PCVD deposit lathe |
| CN2588134Y (en) * | 2002-12-02 | 2003-11-26 | 沈阳聚智电子科技有限公司 | Seal transmission device |
| CN1605899A (en) * | 2004-09-16 | 2005-04-13 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN1888451A (en) * | 2006-07-31 | 2007-01-03 | 上海凯泉泵业（集团）有限公司 | Rotor axial regulator |
| CN201297390Y (en) * | 2008-11-11 | 2009-08-26 | 中芯国际集成电路制造(上海)有限公司 | Magneto-fluid cooling structure and corresponding magneto-fluid sealing device |
| CN202893299U (en) * | 2012-08-20 | 2013-04-24 | 青岛联康油脂制品有限公司 | Mechanical sealing device for reaction kettle tank |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105350073A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Graphite disc rotary sealing device of silicon epitaxy apparatus, and automatic feeding and blanking system |
| CN105350073B (en) * | 2015-10-30 | 2018-09-25 | 中国电子科技集团公司第四十八研究所 | A kind of the graphite plate rotary sealing appts and automatic loading and unloading system of silicon epitaxy equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103775649B (en) | 2016-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206328457U (en) | A kind of vacuum film plating substrate sample stage | |
| TWI755329B (en) | Reciprocating rotary cvd equipment and application method | |
| CN101954596A (en) | Numerical-control direct-drive turning-milling composite rotary working table | |
| CN201799863U (en) | Numerical control direct-driving turning composite rotating table | |
| CN101096100A (en) | Robot for industry | |
| CN105531086A (en) | Industrial robot | |
| CN103775649B (en) | Sealed gearing device | |
| CN107605700A (en) | A kind of cryogenic pump of the high occlusion limit | |
| CN201729873U (en) | Integral type observation window mechanism | |
| CN104407012A (en) | Oxygen bomb type calorimeter | |
| CN209319784U (en) | A kind of transmission device in six-joint robot joint | |
| CN108624955B (en) | Reaction chamber and epitaxial growth equipment | |
| CN104562202A (en) | Crystal transformation mechanism for sapphire crystal growth equipment | |
| CN109423697B (en) | Furnace door device for low-pressure diffusion furnace and low-pressure diffusion furnace | |
| CN104046962B (en) | A kind of axially strength drives planetary rotation device | |
| CN107453582B (en) | A kind of permanent-magnet speed governor of the magnetic conduction body disc based on high thermal conductivity | |
| CN113802109A (en) | Semiconductor device capable of automatically opening and closing | |
| CN208308958U (en) | Pallet rotary mechanism and reaction chamber | |
| CN104482212A (en) | High-vacuum magnetic-coupling dynamic seal drive device and applying method | |
| US20130142622A1 (en) | Water Pump for Vehicle | |
| CN206972347U (en) | A kind of automobile fan | |
| CN112921167A (en) | High-intensity magnetic field heat treatment equipment | |
| CN218240068U (en) | Rotating device driven by servo motor | |
| CN117205838B (en) | Silicon carbide powder synthesizer and silicon carbide powder | |
| CN220566519U (en) | Magnetic fluid transmission device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |