CN105952904A - Vacuum equipment and magnetic fluid seal driving device therefor - Google Patents
Vacuum equipment and magnetic fluid seal driving device therefor Download PDFInfo
- Publication number
- CN105952904A CN105952904A CN201610560199.2A CN201610560199A CN105952904A CN 105952904 A CN105952904 A CN 105952904A CN 201610560199 A CN201610560199 A CN 201610560199A CN 105952904 A CN105952904 A CN 105952904A
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- China
- Prior art keywords
- magnetic
- axle sleeve
- driving device
- magnetic fluid
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 55
- 238000007789 sealing Methods 0.000 claims abstract description 24
- 238000001816 cooling Methods 0.000 claims description 10
- 239000002826 coolant Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims 1
- 230000005389 magnetism Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention discloses a magnetic fluid seal driving device for vacuum equipment. The magnetic fluid seal driving device comprises a casing for being connected with the vacuum equipment in a sealing manner, a shaft sleeve for transmitting power and a magnet for generating a magnetic field; a through hole for allowing the shaft sleeve to penetrate through is formed in the casing; a bearing is arranged between the shaft sleeve and the casing; an inner ring of the bearing is connected with the outer circumference of the shaft sleeve; an outer ring of the shaft sleeve is connected with an inner circumference of the through hole; a clearance for placing magnetic fluid is arranged between the casing and the shaft sleeve; end faces at two poles of the magnet are separately close to the shaft sleeve and the casing which can conduct magnetism, so that a closed magnetic circuit is formed between the shaft sleeve and the casing; and the magnetic fluid is positioned at the magnetic circuit in the clearance, surrounds the shaft sleeve and is used for isolating a vacuum environment from an atmosphere environment. The driving device can be suitable for a narrow and small mounting space and an ultrahigh vacuum environment, and the applicability is improved. The invention also discloses the vacuum equipment comprising the magnetic fluid seal driving device.
Description
Technical field
The present invention relates to vacuum manufacture field, the magnetic fluid particularly relating to a kind of vacuum equipment is close
Envelope actuating device.Moreover, it relates to one includes above-mentioned magnetic fluid seal driving device
Vacuum equipment.
Background technology
Magneticfluid Seal Technique is just to send out after this brand-new functional material of magnetic fluid occurs
Exhibition is got up, and all has application in multiple fields, and wherein Magneticfluid Seal Technique is in Sealing Technology
On application be one of its most important achievement.Through the development of decades, magnet fluid sealing is
In various fields such as national defence, space flight, machinery, electronics, instrument, atomic energy, chemical industry, pharmacy
It is widely applied, particularly seals and pressure reduction three aspects of sealing in dust seal, vacuum
Show the most prominent.Sealing such as important machinery rotation portion；Hard disc of computer memorizer is used
In the sealing to dust and mist of oil；For the sealing to radgas in atomic power device；Send out
For the sealing preventing antibacterial etc. to be mixed in the stirring of ferment tank；Vacuum coating equipment, vacuum heat treatment furnace,
The sealing under the conditions of superelevation and extra high vacuum such as monocrystaline silicon stove and reactor, blower fan, gas
Sealing under pressure differential such as pump etc..Especially dynamically preventing as equipment in rotating shaft
Leakage part has prominent superiority, both can reach leakproof purpose, and the most unlikely impact can movable property part
Motion.
Refer to Fig. 1, Fig. 1 is the structural representation of magnetic fluid seal driving device in prior art
Figure.In the prior art, magnetic fluid seal driving device includes rotating shaft 01, housing 03, magnet
04 and sealing ring 02.One end of its shaft 01 is positioned at vacuum environment, and the other end is positioned at air
Environment, is used for transmitting power, completely cuts off vacuum environment by housing 03, has magnet 04 to produce magnetic
, make to be provided with magnetic fluid between rotating shaft 01 and magnet 04, it is achieved vacuum environment and big compression ring
The movable sealing isolation in border, and use sealing ring 02 to realize static seal.Meanwhile, at housing 03
Two ends are each provided with a bearing, are used for supporting rotating shaft 01.
But when encountering installing space size particularly axial dimension being the narrowest and small, it is desirable to reduce
The length of magnetic fluid seal driving device, in order to can use in this narrow space.But by
In in the prior art, inside actuating device, there are two bearings, two groups of magnetic poles and bearing caps etc.
Multiple parts so that actuating device is difficult to compress axial dimension.
It addition, ultrahigh vacuum equipment is both needed to carry out for a long time the high-temperature baking degasification of about 400 DEG C,
High temperature easily makes rubber seal produce residual deformation, accelerates rubber seal aging, and to it
Carrying out cooling can make the baking temperature of equipment be difficult to reach requirement.Rubber seal is in vacuum environment
Under there is matter and damage problem, i.e. rubber long-term storage at normal temperatures and pressures or use in a vacuum can be by
The most aging become fragile, filler and the forfeiture of volatile component, its quality can be made to gradually decrease.Work as matter
When damage has exceeded initial decrement, rubber seal i.e. loses static seal usefulness, thus causes
Seal failure.Can there is volatilization phenomenon in the grease in bearing under vacuum, high temperature, no equally
Only can cause bearing premature breakdown due to insufficient lubrication, meanwhile, grease volatile matter also can pollute
Vacuum environment, is unfavorable for the acquisition of ultrahigh vacuum.
Therefore, the magnetic current that a kind of length is shorter, sealing effectiveness is good and the suitability is high how is provided
Body sealed gearing device is that those skilled in the art are presently required and solve the technical problem that.
Summary of the invention
It is an object of the invention to provide the magnetic fluid seal driving device of a kind of vacuum equipment, length
Shorter, sealing effectiveness is good and the suitability is high.It is a further object of the present invention to provide one to include
The vacuum equipment of above-mentioned magnetic fluid seal driving device, length is shorter, sealing effectiveness is good and fits
High by property.
For solving above-mentioned technical problem, the present invention provides a kind of magnetic fluid for vacuum equipment close
Envelope actuating device, including the housing for being tightly connected vacuum equipment, for transmitting the axle of power
Overlap and for producing the magnet in magnetic field, described housing is provided with for leading to that described axle sleeve passes
Hole, is provided with bearing between described axle sleeve and described housing, the inner ring of described bearing connects described
The periphery of axle sleeve, the outer ring of described bearing connects the inner circumferential of described through hole, described housing and described
Being provided with the gap for placing magnetic fluid between axle sleeve, the end face at described magnet the two poles of the earth leans on respectively
Closely can the described axle sleeve of magnetic conduction and described housing, make to be formed between described axle sleeve and described housing
The magnetic loop closed, described magnetic fluid is positioned at the described magnetic loop in described gap and around institute
State axle sleeve, be used for completely cutting off vacuum environment and atmospheric environment.
Preferably, described through hole is specially shoulder hole, and described shoulder hole includes for installing described
The bearing mounting hole of bearing, for installing the magnet mounting hole of described magnet and for described gap
Mesopore, described mesopore between described bearing mounting hole and described magnet mounting hole,
And the described aperture of bearing mounting hole and the aperture of described magnet mounting hole are all higher than described mesopore
Aperture, described gap is specially between the inner circumferential of described mesopore and the periphery of described axle sleeve
Space.
Preferably, the periphery of the corresponding described mesopore of described axle sleeve is provided with multiple annular magnetic pole
Tooth, multiple described annular magnetic pole teeth are axially arranged in order around described axle sleeve, institute along described axle sleeve
State the space that gap is specially between top and the described mesopore of described annular magnetic pole tooth.
Preferably, also include the non-magnetic locating ring being installed in described magnet mounting hole, described
The inner circumferential interference fits of the periphery of non-magnetic locating ring and described magnet mounting hole is installed, described non-
The inner circumferential interference fits of magnetic conduction locating ring installs the periphery of magnetic conductive cover, the inner periphery of described magnetic conductive cover
Around also near the periphery of described axle sleeve, described magnet is specially the annular permanent magnet around described axle sleeve
Body, housing described in the end contact of a magnetic pole of described annular permanent magnet, another magnetic pole
Magnetic conductive cover described in end contact.
Preferably, described bearing periphery is provided with two axial positioning retainer rings, one described axially
Positioning retainer ring between described bearing and described housing, another described axial positioning retainer ring position
Between described bearing and described axle sleeve, described housing and described axle sleeve are provided with for installing
The annular mounting groove of described axial positioning retainer ring.
Preferably, described bearing is specially crossed roller bearing.
Preferably, described shell one end is provided with the flange for connecting vacuum equipment, described method
The blue end face connecting vacuum equipment is provided with the first seal groove, and described axle sleeve is near vacuum equipment
End face is provided with the second seal groove.
Preferably, it is installed with rotating shaft in described axle sleeve.
Preferably, described enclosure interior is provided with the annular cooling bath around described through hole, described
Being provided with the interface of connection described annular cooling bath on the periphery of housing, described interface is used for cooling down
Liquid passes in and out.
A kind of vacuum equipment, including power set and to connect the magnetic fluid of described power set close
Envelope actuating device, described magnetic fluid seal driving device is specially the magnetic described in above-mentioned any one
Fluid-tight transmission.
The magnetic fluid seal driving device that the present invention provides, including axle sleeve, magnet and housing, its
Bottom bracket axle is used for transmitting power, and magnet is used for producing magnetic field, and housing is used for connecting vacuum equipment.
It is provided with the through hole passed for axle sleeve on housing, bearing, axle are installed between axle sleeve and housing
The periphery of the inner ring connecting bushing held, the outer ring of bearing connects the inner circumferential of through hole, housing and axle sleeve
Between be provided with the gap for placing magnetic fluid, the end face at magnet the two poles of the earth is respectively close to leading
The axle sleeve of magnetic and housing, make to be formed between axle sleeve and housing the magnetic loop of closing, and magnetic fluid is positioned at
At magnetic loop in gap and around axle sleeve, it is used for completely cutting off vacuum environment and atmospheric environment.
Above-mentioned actuating device compared with prior art, due to housing can magnetic conduction, simplify structure,
Can only use a bearing, eliminate multiple parts, particularly eliminate rubber seal,
Effectively shorten the length of actuating device and avoided use rubber on the basis of ensureing sealing effectiveness
Problem produced by sealing ring.Enable above-mentioned actuating device be applicable to narrow and small installing space with
And ultra-high vacuum environment, improve the suitability.
The present invention also provides for a kind of vacuum equipment including above-mentioned magnetic fluid seal driving device, by
Having above-mentioned technique effect in above-mentioned magnetic fluid seal driving device, above-mentioned vacuum equipment also should have
There is same technique effect, be no longer discussed in detail at this.
Accompanying drawing explanation
Fig. 1 is the structural representation of magnetic fluid seal driving device in prior art；
Fig. 2 is a kind of detailed description of the invention of magnetic fluid seal driving device provided by the present invention
Partly cut open schematic diagram；
Fig. 3 is the close-up schematic view in Fig. 2 at I；
Fig. 4 is the another kind of specific embodiment party of magnetic fluid seal driving device provided by the present invention
Formula partly cut open schematic diagram.
Detailed description of the invention
The core of the present invention is to provide the magnetic fluid seal driving device of a kind of vacuum equipment, length
Shorter, sealing effectiveness is good and the suitability is high.Another core of the present invention is to provide one and includes
The vacuum equipment of above-mentioned magnetic fluid seal driving device, length is shorter, sealing effectiveness is good and fits
High by property.
In order to make those skilled in the art be more fully understood that the present invention program, below in conjunction with the accompanying drawings
The present invention is described in further detail with detailed description of the invention.
Refer to Fig. 2 and Fig. 3, Fig. 2 is magnetic fluid seal driving device provided by the present invention
A kind of detailed description of the invention partly cut open schematic diagram；Fig. 3 is that in Fig. 2, partial enlargement at I shows
It is intended to.
The specific embodiment of the invention provide magnetic fluid seal driving device, including axle sleeve 2,
Magnet 6 and housing 4.Its middle shell 4 is used for being tightly connected vacuum equipment, i.e. housing 4 is installed
Be used for the opening of connecting power device in vacuum equipment, axle sleeve 2 is used for transmitting power, magnet 6
For producing magnetic field.The through hole passed for axle sleeve 2, axle sleeve 2 and shell it is provided with on housing 4
Bearing 3 is installed between body 4, the periphery of the inner ring connecting bushing 2 of bearing 3, bearing 3
Outer ring connects the inner circumferential of through hole.And rotating shaft can be installed with in axle sleeve 2, both can one
Formula is arranged, rotating shaft connecting power device and parts to be driven respectively, it is achieved power transmits, it is possible to
Axle sleeve 2 is set in the rotating shaft of other equipment, it is possible to realize power and transmit.
Specifically, bearing 3 can be crossed roller bearing, not only can carry bigger axial,
Radial load, has minimum radially, axially play and deflection angle, even if therefore making simultaneously
With a bearing 3, it is also ensured that the running accuracy of axle sleeve 2 and deflection angle, it is ensured that seal
Gap.May be used without other kinds of bearing, all within protection scope of the present invention.
Meanwhile, housing 4 and axle sleeve 2 are permeability magnetic material and make, it is possible to magnetic conduction, and both it
Between be provided with gap, this gap is around axle sleeve 2, owing to one end of axle sleeve 2 is vacuum environment,
The other end is atmospheric environment, and housing 3 is also such, so the side in gap is vacuum environment,
Opposite side is atmospheric environment.The end face at magnet 6 the two poles of the earth respectively close to axle sleeve 2 and housing 4,
Form the magnetic loop of Guan Bi between the two, make magnetic fluid 8 be positioned at the magnetic loop in gap and around
Axle sleeve 2, and make magnetic fluid 8 steadily adsorb and be full of gap, it is achieved vacuum environment and air
The isolation of environment.
Above-mentioned actuating device compared with prior art, due to housing 4 can magnetic conduction, simplification finishes
Structure, can only use a bearing 3, eliminate multiple parts, particularly eliminate rubber seal
Circle, makes ensureing effectively to have shortened on the basis of sealing effectiveness the length of actuating device avoiding
By problem produced by rubber seal.Above-mentioned actuating device is enable to be applicable to narrow and small installation
Space and ultra-high vacuum environment, improve the suitability.
In the actuating device that the specific embodiment of the invention provides, for the ease of the peace of each parts
Dress, but through hole is shoulder hole, shoulder hole include the bearing mounting hole for installing bearing 3,
For installing the magnet mounting hole of magnet 6 and the mesopore for gap, mesopore is positioned at bearing
Between installing hole and magnet mounting hole, and the aperture of bearing mounting hole and the aperture of magnet mounting hole
Being all higher than the aperture of mesopore, gap is specially between the inner circumferential of mesopore and the periphery of axle sleeve 2
Space.I.e. the aperture at shoulder hole two ends is more than the aperture at middle part, and two ends are used for installing bearing
3 and magnet 6, hole wall distance axle sleeve 2 is farther, middle part distance axle sleeve 2 closer to, between being formed
Gap.Specifically, bearing 3 periphery is provided with two axial positioning retainer rings 1, an axial location
Back-up ring 1 is between bearing 3 and housing 4, and another axial positioning retainer ring 1 is positioned at bearing 3
And between axle sleeve 2, housing 4 and axle sleeve 2 are provided with for installing axial positioning retainer ring 1
Annular mounting groove, installs axial positioning retainer ring 1 by the location shaft shoulder on axle sleeve 2.Also can lead to
Cross other modes to realize axially positioning, or adjust each parts position is set, all the present invention's
Within protection domain.
Meanwhile, the periphery of the corresponding mesopore of axle sleeve 2 is provided with multiple annular magnetic pole tooth 201,
Multiple annular magnetic pole teeth 201 are axially arranged in order around axle sleeve 2 along axle sleeve 2, and gap is specially
Space between top and the mesopore of annular magnetic pole tooth 201.By the adjustment of contour structures,
Improve the magnetic field intensity of gap location, it is ensured that sealing effectiveness.Correspondence also can be set on mesopore
Annular magnetic pole tooth 201, improves the magnetic field intensity of gap location further.
In the magnetic fluid seal driving device that the specific embodiment of the invention provides, magnet 6 has
Body is the annular permanent magnet around axle sleeve 2, can be all-in-one-piece loop configuration, it is also possible to for
The loop configuration that the arc-shaped permanent magnet of multiple deciles is combined into, or multiple cylindrical permanent magnet 6 row
The loop configuration arranged.Non-magnetic locating ring 5 is installed in magnet mounting hole, and is led by non-
Magnetic material is made, it is impossible to enough magnetic conductions.The periphery of non-magnetic locating ring 5 is interior with magnet mounting hole
Week, interference fits was installed, and the inner circumferential interference fits of non-magnetic locating ring 5 is installed outside magnetic conductive cover 7
In week, the inner periphery of magnetic conductive cover 7 is around also near the periphery of axle sleeve 2, a magnetic of annular permanent magnet
The end contact housing 4 of pole, the end contact magnetic conductive cover 7 of another magnetic pole, make housing 4 have
The characteristic of one magnetic pole, makes axle sleeve have the characteristic of another magnetic pole, and then makes between the two
Gap forms high-intensity magnetic field.Non-magnetic locating ring 5 is set, coordinates with magnetic conductive cover 7 and can limit
The position of magnet 6, owing to being non-magnet material, the distribution to magnetic field plays a key effect.With
Time ensure and the axiality of rotating shaft 8, i.e. ensure the interval 701 between magnetic conductive cover 7 and axle sleeve 2
Concordance.May be used without other modes and magnet 6 is set, as long as ensureing magnetic direction, all existing
Within protection scope of the present invention.
For the ease of installing, the flange for connecting vacuum equipment can be provided with in housing 4 one end,
The end face of Flange joint vacuum equipment is provided with the first seal groove 403, and axle sleeve 2 sets near vacuum
Standby end face is provided with the second seal groove 202, it is ensured that sealing, when being provided with rotating shaft, also
The second seal groove 202 can be not provided with, all within protection scope of the present invention.Specifically, may be used
Magnet mounting hole is disposed in proximity to one end of flange, and the side i.e. installing magnet 6 is vacuum ring
Border, the one end being provided with bearing 3 is atmospheric environment.
On the basis of the actuating device that above-mentioned each detailed description of the invention provides, it is also possible to transmission
Device cools down, and refer to Fig. 4, Fig. 4 is magnetic fluid seal driving provided by the present invention
The another kind of detailed description of the invention of device partly cut open schematic diagram.
It is internally provided with the annular cooling bath 401 around through hole, the outer end of housing 4 at housing 4
Being provided with the interface 402 of connection annular cooling bath 401 on face, interface 402 enters for coolant
Go out.Two interfaces 402 specifically can be set, and interface 402 is specially hickey.Can
This device is cooled down importing coolant by this interface 402, thus be applicable to higher
Ambient temperature.May be used without other types of cooling, as being arranged parallel to the Cooling Holes of rotating shaft 8,
All within protection scope of the present invention.
Except above-mentioned magnetic fluid seal driving device, the detailed description of the invention of the present invention also provides for one
Plant the vacuum equipment including above-mentioned magnetic fluid seal driving device, other each several parts of this vacuum equipment
Structure refer to prior art, repeat no more herein.
Specifically, above-mentioned vacuum equipment can be ultrahigh vacuum equipment.
Above vacuum equipment provided by the present invention and magnetic fluid seal driving device thereof are carried out
It is discussed in detail.Principle and the embodiment of the present invention are carried out by specific case used herein
Illustrating, the explanation of above example is only intended to help to understand method and the core thereof of the present invention
Thought.It should be pointed out that, for those skilled in the art, without departing from this
On the premise of inventive principle, it is also possible to the present invention is carried out some improvement and modification, these improve
Also fall in the protection domain of the claims in the present invention with modifying.
Claims (10)
1. for a magnetic fluid seal driving device for vacuum equipment, including for the company of sealing
Connect the housing (4) of vacuum equipment, for transmitting the axle sleeve (2) of power and for producing magnetic field
Magnet (6), it is characterised in that be provided with for described axle sleeve (2) on described housing (4)
The through hole passed, is provided with bearing (3) between described axle sleeve (2) and described housing (4),
The inner ring of described bearing (3) connects the periphery of described axle sleeve (2), outside described bearing (3)
Circle connects the inner circumferential of described through hole, is provided with between described housing (4) and described axle sleeve (2)
For placing the gap of magnetic fluid (8), the end face at described magnet (6) the two poles of the earth is respectively close to energy
The described axle sleeve (2) of enough magnetic conductions and described housing (4), make described axle sleeve (2) and described shell
Forming the magnetic loop of closing between body (4), described magnetic fluid (8) is positioned at described gap
At described magnetic loop and around described axle sleeve (2), it is used for completely cutting off vacuum environment and atmospheric environment.
Magnetic fluid seal driving device the most according to claim 1, it is characterised in that
Described through hole is specially shoulder hole, and described shoulder hole includes the axle for installing described bearing (3)
Hold installing hole, for installing the magnet mounting hole of described magnet (6) and between described gap
Lyriform pore, described mesopore is between described bearing mounting hole and described magnet mounting hole, and institute
The aperture in the aperture and described magnet mounting hole of stating bearing mounting hole is all higher than the hole of described mesopore
Footpath, described gap is specially between the inner circumferential of described mesopore and the periphery of described axle sleeve (2)
Space.
Magnetic fluid seal driving device the most according to claim 2, it is characterised in that
The periphery of the corresponding described mesopore of described axle sleeve (2) is provided with multiple annular magnetic pole tooth (201),
Multiple described annular magnetic pole teeth (201) are axially arranged in order around described along described axle sleeve (2)
Axle sleeve (2), described gap is specially the top of described annular magnetic pole tooth (201) and described gap
Space between hole.
Magnetic fluid seal driving device the most according to claim 3, it is characterised in that
Also include the non-magnetic locating ring (5) being installed in described magnet mounting hole, described non-magnetic fixed
The periphery of position ring (5) is installed with the inner circumferential interference fits of described magnet mounting hole, described non-magnetic
The inner circumferential interference fits of locating ring (5) installs the periphery of magnetic conductive cover (7), described magnetic conductive cover (7)
Inner periphery around and near the periphery of described axle sleeve (2), described magnet (6) be specially around
The annular permanent magnet of described axle sleeve (2), the end contact of a magnetic pole of described annular permanent magnet
Described housing (4), magnetic conductive cover (7) described in the end contact of another magnetic pole.
Magnetic fluid seal driving device the most according to claim 4, it is characterised in that
Described bearing (3) periphery is provided with two axial positioning retainer rings (1), a described axial location
Back-up ring (1) is positioned between described bearing (3) and described housing (4), and another is described axially
Positioning retainer ring (1) is positioned between described bearing (3) and described axle sleeve (2), described housing (4)
With the annular peace being provided with on described axle sleeve (2) for installing described axial positioning retainer ring (1)
Tankage.
Magnetic fluid seal driving device the most according to claim 1, it is characterised in that
Described bearing (3) is specially crossed roller bearing.
Magnetic fluid seal driving device the most according to claim 1, it is characterised in that
Described housing (4) one end is provided with the flange for connecting vacuum equipment, and described Flange joint is true
The end face of null device is provided with the first seal groove (403), and described axle sleeve (2) is near vacuum equipment
End face be provided with the second seal groove (202).
Magnetic fluid seal driving device the most according to claim 1, it is characterised in that
Described axle sleeve is installed with rotating shaft in (2).
9. according to the magnetic fluid seal driving device described in claim 1 to 8 any one,
It is characterized in that, described housing (4) is internally provided with the annular cooling bath around described through hole
(401), the periphery of described housing (4) is provided with connection described annular cooling bath (401)
Interface (402), described interface (402) for coolant pass in and out.
10. a vacuum equipment, including power set and the magnetic current that connects described power set
Body sealed gearing device, it is characterised in that described magnetic fluid seal driving device is specially right
Require the magnetic fluid seal driving device described in 1 to 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610560199.2A CN105952904B (en) | 2016-07-15 | 2016-07-15 | Vacuum equipment and its magnetic fluid seal driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610560199.2A CN105952904B (en) | 2016-07-15 | 2016-07-15 | Vacuum equipment and its magnetic fluid seal driving device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105952904A true CN105952904A (en) | 2016-09-21 |
| CN105952904B CN105952904B (en) | 2019-03-29 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610560199.2A Active CN105952904B (en) | 2016-07-15 | 2016-07-15 | Vacuum equipment and its magnetic fluid seal driving device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110185803A (en) * | 2019-05-21 | 2019-08-30 | 浙江工商大学 | Magnet fluid sealing axis with heat-insulated axis |
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|---|---|---|---|---|
| US4335885A (en) * | 1980-08-19 | 1982-06-22 | Mechanical Technology Incorporated | Plural fluid magnetic/centrifugal seal |
| JPH08320083A (en) * | 1995-05-24 | 1996-12-03 | Rigaku Corp | Magnetic seal device |
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| US20100090413A1 (en) * | 2008-10-09 | 2010-04-15 | Mahoney David G | Magnetic fluid seal with centering of bearing and shaft by compressible member |
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| CN105221753A (en) * | 2015-09-09 | 2016-01-06 | 北京交通大学 | Radial magnetic liquid rotating sealing device |
| CN205918906U (en) * | 2016-07-15 | 2017-02-01 | 湖南维格磁流体股份有限公司 | Vacuum apparatus and magnetic fluid sealed transmission device thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110185803A (en) * | 2019-05-21 | 2019-08-30 | 浙江工商大学 | Magnet fluid sealing axis with heat-insulated axis |
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| CN105952904B (en) | 2019-03-29 |
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