CN103763898A - Electromagnetic shielding optical window based on multicycle master-slave nested circular ring orthogonal array - Google Patents
Electromagnetic shielding optical window based on multicycle master-slave nested circular ring orthogonal array Download PDFInfo
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Abstract
The invention provides an electromagnetic shielding optical window based on a multicycle master-slave nested circular ring orthogonal array, and belongs to the technical field of electromagnetic shielding. The electromagnetic shielding optical window is characterized in that metal meshes of the multicycle master-slave nested circular ring array are formed by basic circular rings, sub circular rings, secondary sub circular rings, filling circular rings, modulated circular rings and modulated sub circular rings, wherein the basic circular rings form a two-dimensional orthogonal externally-tangent communicated array, the modulated circular rings form a two-dimensional orthogonal separation array, the modulated circular rings and the basic rings are communicated in an externally-tangent mode, the sub circular rings and the filling circular rings which are communicated with the basic circular rings in an internally-tangent mode are arranged in the basic circular rings, the secondary sub circular rings which are communicated with the sub circular rings in an internally-tangent mode are arranged in the sub circular rings, and the modulated sub circular rings which are communicated with the modulated circular rings in an internally-tangent mode are arranged in the modulated circular rings. It is guaranteed that all the circular rings are mutually conductive by overlapping lines or arranging metal which guarantees reliable electrical connection between metal ring points of tangency at joints where the circular rings are tangently communicated. Through the metal mesh structure, distribution unevenness of high-level diffraction light intensity of the meshes can be remarkably reduced, stray light caused by diffraction is more evenly distributed, and the influence on imaging is smaller.
Description
Technical field
The invention belongs to optical clear part electromagnetic shielding field, particularly a kind of electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate.
Background technology
Along with the broadening of electromagnetic wave application frequency spectrum and the increase of intensity, requirement to the electromagnetic shielding optical window of the field application such as space flight and aviation equipment, advanced optical instrument, communication apparatus, medical diagnostic equipment and secret facility is more and more higher, mainly that requirement optical window is when having superpower broadband electromagnetic shielding ability, also there is high light transmittance, the smaller the better on the impact of optical imagery, observation, detection.Such as, the optical window of aircraft in space flight and aviation equipment field, the inside and outside electromagnetic signal in cabin that realizes that must be high-quality is isolated, shield on the one hand external electromagnetic interference and harmful electromagnetic signal, in order to avoid cause cabin inner electronic equipment to lose efficacy, while preventing on the one hand cabin inner electronic equipment work, electromagnetic signal appears optical window and causes electromagnetic leakage, but the light transmission of the optical window indispensable function that is it, optical window is carried out to electromagnetic shielding and should reduce as much as possible the impact on its transparency, particularly do not affect as much as possible optical detection or optical imagery function; Similarly, the optical window of advanced optical instrument also will have high as far as possible light transmittance and the impact of alap image quality, to realize high-quality detection and measurement, will prevent the impact of electromagnetic interference on instrument internal photoelectric detector simultaneously; Secret Architectural Equipment for Party and government offices, military commanding place, important R&D institution, need to be to the glass pane in its house when guaranteeing daylighting, carry out design of Electromagnetic Shielding, important information is divulged a secret to propagating to cause outside window with electromagnetic radiation form when preventing the electronic device works such as indoor electric brain; Medical electromagnetism isolation ward optical window will guarantee the overwhelming majority conductively-closeds of indoor electromagnetic wave and prevent that field operation personnel from being impaired one's health by electromagenetic wave radiation for a long time, etc.At present the electromagnetic shielding of this class optical window mainly adopt transparent conductive film, metal inducement transmission-type multi-layer film structure, with resistance type frequency-selective surfaces with there is millimeter metallic mesh in submillimeter cycle etc.
Transparent conductive film is a kind of transparent metal oxide film that tin indium oxide is main material of take, and is often applied to the occasion that visible light wave range is transparent, but can not takes into account wider transmission region, though it is not strong to have wider micro-wave screening wave band screening ability.Metal inducement transmission-type multi-layer film structure adopts multi-layer thin metal film and deielectric-coating composite construction to realize shielding electromagnetic waves, and stronger to low frequency microwave screening ability, transmission region is mainly visible ray and ultraviolet light, but light transmittance is not high.Frequency-selective surfaces adopts periodically resonant element structure realization band to lead to or band stop filter function, because its metal coverage rate is higher, interference electromagnetic wave beyond reflective operation frequency band well, but optics light transmittance is lower, reduce the image quality of optical detection, to optical imagery processing, pattern recognition, target search and tracking, brought difficulty.In sum, meet broadband high transmission rate and two requirements of wide-band electromagnetic shielding of optical window, all there is obvious deficiency in above-mentioned each technical scheme simultaneously.Comparatively speaking, there is millimeter metallic mesh in submillimeter cycle, because its period ratio disturbs electromagnetic wavelength much smaller, can realize stronger low width wave band electromagnetic shielding; And the metallic mesh cycle much larger than optical wavelength, can guarantee the light transmittance of optical region.Therefore, the metallic mesh in millimeter submillimeter cycle has good electrically conducting transparent performance, can meet the requirement of optical window to high transmission rate and wide-band electromagnetic shielding, in optical window electromangnetic spectrum field, is widely used:
1. patent 03135313.5 " a kind of electromagnetic shielding observation window " is combined into electromagnetic armouring structure with substance or multi-metal silk screen and based semiconductor quantum well structure, can realize 10GHz with the shield effectiveness of the interior 50dB of surpassing, this structure reaches more than 50% at the light transmittance of the high regional transmission of visible ray.
2. patent 93242068.0 " electromagnetic shielding glass " is pressed from both sides conductive metal mesh between layer glass, at glass outer side, with conductive transparent film, makes it to be bonded on window frame of metal to form electromagnetic armouring structure, and this structure has certain daylighting.
3. patent 94231862.5 " without Moire fringe electromagnetic shielding observation window " adopts by the parallel placement of the different wire netting of two number of layers, and their warps or parallel have certain angle, to reach, overcomes Moire fringe phenomenon, realizes the visual field more clearly.
4. patent 02157954.7 " high shielding effect Tempest glass " respectively has one deck polycarbonate film in woven wire both sides, film outside respectively attaches one deck glass, last hot pressing forms electromagnetic armouring structure, and this structure, in the situation that light transmittance reaches 60%, has stronger shield effectiveness.
5. patent 200610084149.8 " electromagnetic shielded film and manufacture method thereof " has been described a kind of high transparency electromagnetic wave shield film with metal mesh pattern being formed by photoetching process, and the main purpose of this invention is to reduce metal consumption and overcomes to use between metal level and film substrate to solidify the problem of environmental pollution that glue causes.
6. US Patent No. 4871220 " Short wavelength pass filter having a metal mesh on a semiconducting substrate " has been described a kind of metallic mesh with square structure, for realizing the anti-electromagnetic interference performance of optical window.
7. patent 201010239355.8 " a kind of electromagnetic shielding conformal optical window with longitude and latitude shape net grid structure " has been described a kind of a kind of conformal electromagnetic shielding optical window with longitude and latitude shape metallic mesh structure of realizing by metallic mesh technology and conformal optics window setting technique, mainly solve the Structure Designing Problem of conformal optics window metallic mesh, improve the capability of electromagnetic shielding of conformal optics window.
8. patent 200610010066.4 " the electromagnetic shielding optical window with annulus metallic mesh structure " has been described a kind of metallic mesh unit with annulus profile, for realizing the electro-magnetic screen function of optical window; Compare individual layer grid metallic mesh, light transmittance and screening ability are improved, and the stray light that senior diffraction causes has also obtained certain homogenizing.
9. patent 200810063988.0 " a kind of electromagnetic shielding optical window with double-layer pane metallic mesh structure " has been described and a kind ofly by the identical grid metallic mesh of structural parameters or woven wire, has been placed in parallel in the electromagnetic shielding optical window that optical window or transparent substrates both sides form, when not reducing light transmittance, increased substantially electromagnetic shielding efficiency.
10. patent 200810063987.6 " a kind of electromagnetic shielding optical window with double-layer circular ring metallic mesh structure " has been described and a kind ofly by two-layer annulus metallic mesh, has been loaded on the electromagnetic shielding optical window that optical window both sides form, and solves the problem that high transmission rate and strong electromagnetic shield effectiveness can not be taken into account simultaneously.
Hub-spoke-type structure based on annulus unit of people's exploitations such as 11. U.S. Battelle research institute Jennifer I.Halman and perceptual metallic mesh (the Jennifer I.Halman etc. of the overlapping structure of many annulus, " Predicted and measured transmission and diffraction by a metallic mesh coating " .Proc.SPIE, 2009,7302:73020Y-1-73020Y-8), and think, this structure can be due to the effect of annulus, make senior Diffraction fringe distribution homogenizing of net grid, realize low secondary lobe, favourable to imaging.
12. the Ian B.Murray of U.S. Exotic Electro-Optics company, the people such as the Victor Densmore of Arizona, USA university and Vaibhav Bora have jointly reported the perceptual net grid of hub-spoke-type structure and the overlapping structure of many annulus have been introduced after stochastic parameter distribution design the impact of diffraction characteristic (Ian B.Murray, Victor Densmore, the people such as Vaibhav Bora, " Numerical comparision of grid pattern diffraction effects through measurement and modeling with OptiScan software ", Proc.SPIE, 2011, 8016:80160U-1-80160U-15), point out each ring interval and diameter random value within the specific limits, be conducive to improve the uniformity of senior Diffraction fringe distribution.
Above-mentioned each scheme, due to the core devices that adopts metallic mesh (or woven wire) as shielding, can realize good effectiveness and certain light transmittance.But adopt metallic mesh (or woven wire) as electromagnetic armouring structure, be just inevitably subject to net grid in the impact of optical region diffraction.Because cycle of metallic mesh is in millimeter or submillimeter magnitude, be to realize higher light transmittance, its metal wire width is generally in micron and sub-micrometer scale, and such structural parameters have very strong diffraction effect at optical region.Incident light overwhelming majority energy is by metallic mesh transmission, transmissive portion comprises zero order diffracted light and senior diffraction light, and conventionally, zero level time diffraction light is the useful information for imaging and observation, senior time diffraction light forms stray light, and imaging and detection are produced to interference.Therefore, should improve as much as possible the zero level time shared proportion of diffraction light, meanwhile, under senior the inevitable prerequisite occurring of diffraction light, make as far as possible senior diffraction light distribution more even, the stray light of its formation becomes more uniform background or noise.
Metal current net grid are mainly traditional grid grid structure, (structure of patent 7 is because processing is on curved surface for the structure mainly adopting as above-mentioned patent 1-6, a kind grid structure), there is intrinsic contradiction in grid grid structure transmittancy and screening ability, be difficult to take into account high transmission rate and strong electromagnetic shield effectiveness simultaneously, particularly senior diffraction energy of grid grid mainly concentrates on mutually perpendicular diaxon, image quality is had a certain impact, and the occasion even requiring at high imaging quality is difficult to application.Change net grid diffraction characteristic and generally need to change its architectural feature, above-mentioned patent 200610010066.4 " the electromagnetic shielding optical window with annulus metallic mesh structure " proposes to be built into annulus metallic mesh with metal ring, improve senior diffraction energy of grid metallic mesh and concentrated the shortcoming distributing, and can alleviate the contradiction of its transmittancy and screening ability.In above-mentioned document 11 and 12, the people such as the people such as Jennifer I.Halman and Ian B.Murray, the uniformity that metallic mesh structure based on annulus unit improves senior Diffraction fringe distribution has also all been proposed, but the people's such as Jennifer I.Halman research is also monocycle annulus arrangement architecture, and orientation is determined, it is suitable with the structure of patent 200610010066.4 propositions to regulating the effect of senior diffraction, and although the people's such as Ian B.Murray research further, random overlapping circular ring structure is proposed, make circle diameter and spacing random distribution value within the specific limits, realize and further improve senior Diffraction fringe distribution uniformity, but the random distribution of circle diameter and spacing has changed the uniformity that mesh distributes, to damage electromagnetic shielding efficiency.
Complexity day by day along with electromagnetic environment, requirement to the transmittancy of electromagnetic shielding optical window and electromagnetic shielding ability is improving constantly, especially at Aero-Space equipment field and advanced optical instrument field, when having required optical window to reach 95% even higher light transmittance, also there is extremely low image quality impact, in the microwave frequency range lower than 20GHz, realize shield effectiveness more than 30dB, this makes existing technology be difficult to realize.The both sides that patent 200810063988.0 and patent 200810063987.6 have all adopted double-level-metal net grid to be placed in parallel in optical window transparent substrate or substrate form, double layer of metal net grid have identical unit profile and structural parameters, by optimizing the spacing of two layers of mesh grid, realize when not reducing light transmittance, increased substantially electromagnetic shielding efficiency.But senior diffraction stray light of this Double-level Reticulated grid structure distributes, still identical with light transmittance individual layer net grid are suitable, not exclusively meet the requirement that the fields such as following Aero-Space equipment and advanced optical instrument affect low image quality.
Summary of the invention
The object of the invention is to overcome the deficiency of above-mentioned existing optical window electromangnetic spectrum scheme, particularly for existing individual layer grid metallic mesh, individual layer circular ring net grid, double-layer pane and circular ring net grid, there is stray light that senior diffraction the causes relative concentrated problem that distributes, research and develop a kind of electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, reach and realize the degree of depth homogenizing of senior diffraction and the object that extremely low image quality affects.
The technical solution used in the present invention is: the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, metallic mesh in electromagnetic shielding optical window is arranged by two-dimensional quadrature as basic annulus by the metal ring of same diameter that connecting airtight arranges forms the basic structure of two-dimensional mesh grid and load on optical window transparent substrate surface, and the circumscribed connection of adjacent basic annulus, in each basic annulus, have with this annulus inscribe and be communicated with, the sub-annulus of metal, in sub-annulus, there is the secondary sub-annulus being communicated with this sub-annulus inscribe, the secondary sub-annulus that this sub-annulus is communicated with its inscribe forms subelement jointly, between adjacent subunits, there is one and fill annulus and circumscribed connection of sub-annulus in two subelements, and be communicated with the basic annulus inscribe at subelement place simultaneously, basic annulus, in basic annulus, each subelement and filling annulus form the elementary cell of two-dimensional metallic net grid structure jointly, between elementary cell, exist one with the equal circumscribed modulation annulus being communicated with of adjacent four basic annulus of two-dimensional quadrature, each modulation annulus has the sub-annulus of modulation being communicated with this annulus inscribe, modulates in annulus and its, respectively to modulate sub-annulus and jointly form modulation elementary cell, described basic annulus, sub-annulus, secondary sub-annulus, the diameter of filling annulus, modulate annulus and modulating sub-annulus are millimeter and submillimeter magnitude, and described basic annulus, sub-annulus, secondary sub-annulus, the metal wire width of filling annulus, modulate annulus and modulating sub-annulus are micron and sub-micrometer scale, described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place, described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place.
The above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, in each described elementary cell, sub-annulus number is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the basic annulus in the center of circle of adjacent sub-annulus and place forms is arbitrarily angled, sub-annulus in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different; In each subelement, secondary sub-annulus number is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the sub-annulus in the center of circle of adjacent secondary sub-annulus and place forms is arbitrarily angled, secondary sub-annulus in different subelements is equal diameter or non-equal diameter annulus, and number is identical or different; The sub-annulus number of each modulation elementary cell internal modulation is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the center of circle of the sub-annulus of adjacent modulation and place modulation annulus forms is arbitrarily angled, the sub-annulus of modulation in different modulating elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different.
The above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, the circumscribed connection of adjacent sub-annulus or crossing in described elementary cell, the circumscribed connection of adjacent secondary sub-annulus in subelement or crossing, the circumscribed connection of the sub-annulus of adjacent modulation or crossing in modulation elementary cell.
As a kind of preferred frame mode, the above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, the diameter of described elementary cell neutron annulus is identical, and the angle that the center of circle of adjacent sub-annulus and basic annulus circle center line connecting form equates; In subelement, the diameter of secondary sub-annulus is identical, and the angle that the circle center line connecting of the sub-annulus in the center of circle of adjacent secondary sub-annulus and place forms equates; The diameter of modulating sub-annulus in modulation elementary cell is identical, and the angle that the circle center line connecting of the center of circle of the sub-annulus of adjacent modulation and place modulation annulus forms equates.
As a kind of preferred frame mode, the above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, the sub-annulus number in described different elementary cells is identical, equal diameters; Secondary sub-annulus number in different subelements is identical, equal diameters; The number of the sub-annulus of modulation in different modulating elementary cell is identical, equal diameters.
As a kind of preferred frame mode, the above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, the secondary sub-annulus relative position in described different subelements is identical, and is arranged in basic annulus after being copied by a subelement; Subelement relative position in different elementary cells is identical, the sub-annulus relative position of modulation in different modulating elementary cell is identical, and by an elementary cell and one modulation elementary cell copy rear by orthogonal arrangement, connect airtight to arrange respectively jointly form two-dimensional metallic net grid.
As a kind of preferred frame mode, the above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, secondary sub-annulus relative position in different subelements in a described elementary cell is different, and after being copied by a subelement, be arranged in basic annulus, wherein any one subelement with respect to other subelements in same basic annulus in two dimensional surface around rotating to an angle from the body annulus center of circle; In a line, subelement relative position in neighboring unit cells is different, the sub-annulus relative position of modulation in adjacent modulation elementary cell is different, and after being copied by an elementary cell and one modulation elementary cell, by orthogonal arrangement, connect airtight to arrange and form two-dimensional metallic net grid, wherein any one elementary cell rotates to an angle around self basic annulus center of circle in two dimensional surface with respect to its neighboring unit cells, and any one modulation elementary cell rotates to an angle around self modulation annulus center of circle in two dimensional surface with respect to its adjacent modulation elementary cell.
As a kind of preferred frame mode, the above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, the angle that any elementary cell in described same a line is rotated relative to neighboring unit cells is identical, and the angle of rotating relative to adjacent modulation elementary cell with any modulation elementary cell in a line is identical.
The above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, described basic annulus, sub-annulus, secondary sub-annulus, fill annulus, modulate annulus, modulate sub-annulus and connection metal consists of the good alloy of electric conductivity, as simple metal and metal alloys such as gold, silver, copper, aluminium, and metal thickness is greater than 100nm.
The above-mentioned electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, described adhesive linkage forms with chromium or titanium material.
Novelty of the present invention and good result are:
Metallic mesh in electromagnetic shielding optical window is arranged by two-dimensional quadrature as basic annulus by the metal ring of same diameter that connecting airtight arranges forms the basic structure of two-dimensional mesh grid and load on optical window transparent substrate surface, and the circumscribed connection of adjacent basic annulus, novelty of the present invention is: in each basic annulus, have with this annulus inscribe and be communicated with, the sub-annulus of metal, in sub-annulus, there is the secondary sub-annulus being communicated with this sub-annulus inscribe, the secondary sub-annulus that this sub-annulus is communicated with its inscribe forms subelement jointly, between adjacent subunits, there is one and fill annulus and circumscribed connection of sub-annulus in two subelements, and be communicated with the basic annulus inscribe at subelement place simultaneously, basic annulus, in basic annulus, each subelement and filling annulus form the elementary cell of two-dimensional metallic net grid structure jointly, between elementary cell, exist one with the equal circumscribed modulation annulus being communicated with of adjacent four basic annulus of two-dimensional quadrature, each modulation annulus has the sub-annulus of modulation being communicated with this annulus inscribe, modulates in annulus and its, respectively to modulate sub-annulus and jointly form modulation elementary cell, described basic annulus, sub-annulus, secondary sub-annulus, the diameter of filling annulus, modulate annulus and modulating sub-annulus are millimeter and submillimeter magnitude, and described basic annulus, sub-annulus, secondary sub-annulus, the metal wire width of filling annulus, modulate annulus and modulating sub-annulus are micron and sub-micrometer scale, described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place, described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal that two annulus are communicated with at overlapping place.Senior the diffraction energy that the good result that novelty of the present invention produces mainly concentrates on homogenizing metallic mesh distributes, specific as follows:
Basic annulus in metallic mesh and modulation annulus all be take the shortcoming that omnidirectional distribution senior the diffraction energy that traditional grid metallic mesh exists as basic arrangement mode overcomes well concentrate to distribute, there is the characteristic that senior diffraction energy of good homogenizing distributes, and form metal ring array with a modulation annulus with four circumscribed connected modes that are communicated with of basic annulus, when guaranteeing that light transmittance is identical, with only have the structure of single diameter circle ring array and compare, need to increase the diameter of each annulus, senior diffraction energy of each circle ring array all reduces, reach the object that senior diffraction energy of homogenizing distributes, this is one of reason of senior diffraction energy distribution of metallic mesh homogenizing of the present invention.
In basic annulus, add sub-annulus to form elementary cell, in modulation annulus, add the sub-annulus of modulation to form modulation elementary cell, because the difference of the sub-annulus number of modulation, diameter and position relationship in the sub-annulus in each elementary cell and modulation elementary cell, make its short texture, arrange spuious, therefore senior diffraction energy is lower, and senior Diffraction fringe distribution is more even, avoids occurring the concentrated situation about distributing of senior the diffraction energy existing as traditional grid metallic mesh; Meanwhile, when guaranteeing that light transmittance is identical, need further to increase the diameter of basic annulus and modulation annulus, reduced on the whole senior diffraction energy of each array; Again because senior diffraction of sub-circle ring array structure generation is very low with the probability that stack occurs senior diffraction modulating circle ring array structure with basic annulus array structure, optimize after the parameters such as sub-number of rings, diameter and position, senior the diffraction that their energy are higher do not superpose, thereby homogenizing senior diffraction energy distribute, this be senior diffraction energy of metallic mesh homogenizing of the present invention distribute former therefore two.
In sub-annulus, add secondary sub-annulus to form subelement, between subelement, introduce and fill annulus, basic annulus, subelement and filling annulus are reformulated elementary cell, when guaranteeing that light transmittance is identical, with only have the structure of basic annulus and sub-annulus and compare, need further to increase the diameter of basic annulus and sub-annulus in elementary cell, reduced on the whole senior diffraction energy of each array; Again because the probability of senior diffraction generation stack of secondary sub-annulus and other circle ring array structure is very low, especially optimize structure and parameter after senior time higher diffraction of their energy do not superpose, thereby homogenizing senior diffraction energy distribute, this be senior diffraction energy of metallic mesh homogenizing of the present invention distribute former therefore three.
Each subelement can rotate to an angle centered by the center of circle of its sub-annulus, each elementary cell can rotate to an angle centered by the center of circle of its basic annulus, each modulation elementary cell can rotate to an angle centered by it modulates the center of circle of annulus, do not change the aperture ratio of metallic mesh and then do not affect light transmittance, but can further modulate senior order of diffraction Energy distribution, senior diffraction energy of homogenizing distributes better, this be senior diffraction energy of metallic mesh homogenizing of the present invention distribute former therefore four.
To sum up, metallic mesh structure of the present invention can realize the degree of depth homogenizing that senior diffraction energy of net grid distributes, and this is the most outstanding effect of the present invention.In addition, in primary circle ring structure, add sub-annulus, in sub-annulus, add secondary sub-annulus, between sub-annulus, introduce and fill annulus, in modulation annulus, add the sub-annulus of modulation, all effectively improved the uniformity of round metal looped network grid structures, and subelement rotates to an angle centered by the center of circle of its sub-annulus, when elementary cell rotates to an angle centered by the center of circle of its basic annulus, when modulation elementary cell rotates to an angle centered by the center of circle of its modulation annulus, can not change the uniformity of metallic mesh structure, when senior order of diffraction Energy distribution carried out to effectively modulation, substantially do not affect effectiveness, even in some preferred version, can improve effectiveness.
Accompanying drawing explanation
Fig. 1 is a kind of preferred structure generalized section of the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate.
Fig. 2 is the basic annulus and modulation annulus distribution schematic diagram of the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate.
Fig. 3 is the typical subelement schematic diagram of the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate.
Fig. 4 is the typical elementary cell schematic diagram of the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate.
Fig. 5 is the circumscribed mode of communicating schematic diagram of two annulus.
Fig. 6 is two annulus inscribe mode of communicating schematic diagrames.
Fig. 7 is a kind of rotation mode schematic diagram of other subelements in the basic annulus in the relative place of subelement of the present invention.
Fig. 8 is a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell of the present invention.
Fig. 9 is existing grid grid structural representation.
Figure 10 is existing senior diffraction of grid grid and relative intensity distribution schematic diagram thereof.
Figure 11 is existing circular ring net grid structural representation.
Figure 12 is existing senior diffraction of circular ring net grid and relative intensity distribution schematic diagram thereof.
Figure 13 is the metallic mesh structural representation of preferred version A in the present invention.
Figure 14 is senior diffraction of the metallic mesh of preferred version A in the present invention and relative intensity distribution schematic diagram thereof.
Figure 15 is that senior diffraction maximal phase of three kinds of net grid structures is to intensity contrast figure.
Piece number explanation in figure: the 1. sub-annulus 9. of 8. levels of the adhesive linkage 2. protective layer 3. anti-reflection film 4. transparent substrate 5. metallic mesh 6. sub-annulus of basic annulus 7. is filled sub-annulus 12. connection metals of annulus 10. modulation annulus 11. modulation
Embodiment
With preferred embodiment, the present invention is further described with reference to the accompanying drawings:
Electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, metallic mesh 5 in electromagnetic shielding optical window is arranged by two-dimensional quadrature as basic annulus 6 by the metal ring of same diameter that connecting airtight arranges forms the basic structure of two-dimensional mesh grid and load on optical window transparent substrate surface, and the circumscribed connection of adjacent basic annulus 6, in each basic annulus 6, have with this annulus inscribe and be communicated with, the sub-annulus 7 of metal, in sub-annulus 7, there is the secondary sub-annulus 8 being communicated with these sub-annulus 7 inscribes, the common subelement that forms of secondary sub-annulus 8 that this sub-annulus 7 is communicated with its inscribe, between adjacent subunits, there is one and fill annulus 9 and circumscribed connection of sub-annulus 7 in two subelements, and be communicated with basic annulus 6 inscribes at subelement place simultaneously, basic annulus 6, each subelement and the common elementary cell that forms two-dimensional metallic net grid structure of filling annulus 9 in basic annulus 6, between elementary cell, exist one with the equal circumscribed modulation annulus 10 being communicated with of the basic annulus 6 of adjacent four two-dimensional quadratures, each modulation annulus 10 has the sub-annulus 11 of the modulation being communicated with this annulus inscribe, modulation annulus 10 with its in respectively modulate sub-annulus 11 and modulate elementary cell common composition, described basic annulus 6, sub-annulus 7, secondary sub-annulus 8, the diameter of filling annulus 9, modulation annulus 10 and modulating sub-annulus 11 are millimeter and submillimeter magnitude, and described basic annulus 6, sub-annulus 7, secondary sub-annulus 8, the metal wire width of filling annulus 9, modulation annulus 10 and modulating sub-annulus 11 are micron and sub-micrometer scale, described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal 12 that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal 12 that two annulus are communicated with at overlapping place, described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal 12 that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal 12 that two annulus are communicated with at overlapping place.Described transparent substrate 4 can be any transparent material, as long as it can, as the transparent optical window material that meets use occasion requirement, can be processed metallic mesh 5 thereon by certain technological process simultaneously; According to technological process, metallic mesh 5 can be carried in transparent substrate 4 surfaces by adhesive linkage 1; Individual layer or multi-layered antireflection coating 3 strengthen the transmittancy of optical window, the protective layer 2 of individual layer or multilayer, and object is to prevent that metal part long term exposure from causing corrosion and oxidation in air, reduces screening ability, also prevents that metallic mesh 5 is scratched simultaneously.
Electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate of the present invention, by the metal ring of same diameter as basic annulus 6 by two-dimensional quadrature arranged evenly connect airtight to arrange form the basic structure of metallic mesh and load on optical window transparent substrate surface, and the circumscribed connection of adjacent basic annulus 6, between basic annulus 6, exist one with the equal circumscribed modulation annulus 10 being communicated with of the basic annulus 6 of adjacent four two-dimensional quadratures, the distribution of basic annulus 6 and modulation annulus 10 as shown in Figure 2, Fig. 2 mid point A, B, C, the center of circle of tetra-basic annulus 6 of adjacent two-dimensional quadrature of D, point E, F, G, H is four centers of circle with the circumscribed modulation annulus 10 being communicated with of same basic annulus 6, quadrangle ABCD and quadrangle EFGH are square, such arrangement mode guarantees that all basic annulus 6 and modulation annulus 10 are to distribute and connecting airtight the formation metallic mesh 5 of arranging according to two-dimensional quadrature.
Electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate of the present invention, described basic annulus 6, sub-annulus 7, secondary sub-annulus 8, the diameter of filling annulus 9, modulation annulus 10 and modulating sub-annulus 11 are millimeter and submillimeter magnitude, described basic annulus 6, sub-annulus 7, secondary sub-annulus 8, the metal wire width of filling annulus 9, modulation annulus 10 and modulating sub-annulus 11 are for micron and sub-micrometer scale, to guarantee high transmission rate and good effectiveness.In addition, each annulus part and connection metal consist of the good metal of electric conductivity, and as simple metal and metal alloys such as gold, silver, copper, aluminium, and metal thickness is greater than 100nm.
Electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate of the present invention, in each elementary cell, sub-annulus 7 numbers are more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the basic annulus 6 in the center of circle of adjacent sub-annulus 7 and place forms is arbitrarily angled, sub-annulus 7 in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different; In each subelement, secondary sub-annulus 8 numbers are more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the sub-annulus 7 in the center of circle of adjacent secondary sub-annulus 8 and place forms is arbitrarily angled, secondary sub-annulus 8 in different subelements is equal diameter or non-equal diameter annulus, and number is identical or different; Sub-annulus 11 numbers of each modulation elementary cell internal modulation are more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the center of circle of the sub-annulus 11 of adjacent modulation and place modulation annulus 10 forms is arbitrarily angled, the sub-annulus 11 of modulation in different modulating elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different; The circumscribed connection of adjacent sub-annulus 7 or crossing in elementary cell, the circumscribed connection of adjacent secondary sub-annulus 8 in subelement or crossing, modulates the interior adjacent modulation circumscribed connection of sub-annulus 11 of elementary cell or intersects.Fig. 3 represents the subelement preferred structure schematic diagram being comprised of sub-annulus 7 and secondary sub-annulus 8, and in Fig. 3, in subelement, the diameter of secondary sub-annulus 8 is identical, and the angle that the circle center line connecting of the sub-annulus 7 in the center of circle of adjacent secondary sub-annulus 8 and place forms equates.Fig. 3 (a) is (b) the circumscribed connection of secondary sub-annulus 8 of same diameter in subelement, and Fig. 3 (c) is (d) the crossing connection of secondary sub-annulus 8 of same diameter in subelement.The structural similarity of modulation elementary cell and subelement, also can be used representation modulation annulus 10 and the relation of modulating sub-annulus 11 in Fig. 3.Meanwhile, basic annulus 6 also can represent with Fig. 3 with the relation of sub-annulus 7.
Electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, metallic mesh 5 in electromagnetic shielding optical window is arranged to connect airtight to arrange by two-dimensional quadrature as basic annulus 6 by the metal ring of same diameter and is formed the basic structure of two-dimensional mesh grid, and the circumscribed connection of adjacent basic annulus 6, in each basic annulus 6, have with this annulus inscribe and be communicated with, the sub-annulus 7 of metal, in sub-annulus 7, there is the secondary sub-annulus 8 being communicated with these sub-annulus 7 inscribes, the common subelement that forms of secondary sub-annulus 8 that this sub-annulus 7 is communicated with its inscribe, between adjacent subunits, there is one and fill annulus 9 and circumscribed connection of sub-annulus 7 in two subelements, and be communicated with basic annulus 6 inscribes at subelement place simultaneously, basic annulus 6, each subelement and the common nested circular ring structure of multicycle principal and subordinate that forms of filling annulus 9 in basic annulus 6, form the elementary cell of two-dimensional mesh grid array structure, several typical structures of elementary cell are as Fig. 4, in elementary cell, each sub-annulus 7 is circumscribed connection, wherein Fig. 4 (a) is (b) for the number of sub-annulus 7 is 4, and the circumscribed connection of secondary sub-annulus 8 of same diameter in subelement, Fig. 4 (c) is (d) for sub-annulus number is 5, and in subelement, the secondary sub-annulus 8 of same diameter intersects connection.
Fig. 5, Fig. 6 represents that respectively the circumscribed connection of two annulus or inscribe are communicated with, overlapping or (as covered) be set guarantee the metal reliably electrically connecting between metal ring tangent point by lines, connects airtight and is communicated with conduction guaranteeing between tangent metal ring.Wherein, Fig. 5 (a) (b) when (c) is illustrated respectively in circumscribed connection two annulus to be seamless overlapping structural representation: Fig. 5 (a) be the seamless overlapping ordinary circumstance of two annulus, the distance of center circle of two annulus is less than the distance of center circle of two annulus when circumscribed, and be greater than the distance of center circle of two annulus when circumscribed and the difference of two annulus line thickness sums, Fig. 5 (b) is seamless overlapping a kind of special circumstances, the inside and outside contour of two annulus lines is mutually circumscribed, Fig. 5 (c) is seamless overlapping another kind of special circumstances, the distance of center circle of two annulus equals the distance of center circle of two annulus when circumscribed and the difference of two annulus line thickness sums, the interior profile of two annulus lines is circumscribed, and in Fig. 5 (d) because two annulus are circumscribed, therefore need to the metal reliably electrically connecting between assurance metal ring tangent point be set at place, point of contact.Fig. 6 (a) is the seamless overlapping ordinary circumstance of two annulus when two annulus are seamless overlapping structural representation: Fig. 6 (a) and are illustrated in inscribe and are communicated with when being illustrated respectively in inscribe and being communicated with (b), distance of center circle when the distance of center circle of two annulus is greater than two annulus inscribes, and the distance of center circle while being less than two annulus inscribes and diameter compared with large circle line thickness and, the seamless overlapping a kind of special circumstances of two annulus when Fig. 6 (b) is illustrated in inscribe connection, the distance of center circle when distance of center circle of two annulus equals two annulus inscribes and diameter compared with large circle line thickness and, the i.e. outline inscribe of two annulus lines, and Fig. 6 (c) represent diameter compared with the outline of small circle ring lines and diameter compared with the interior profile inscribe of large circle lines, now need to the metal reliably electrically connecting between assurance metal ring tangent point be set at place, point of contact.In addition, if two annulus are seamless when overlapping, the overlapping area of two metal rings is less, being not enough to guarantee has reliably and electrically connects between two metal rings, also need to the metal reliably electrically connecting between assurance metal ring point of contact be set at place, point of contact, to guarantee that the circumscribed connection or the inscribe that realize becket are communicated with.And shown in Fig. 5 (d) and Fig. 6 (c), be place, a kind of preferred point of contact metal connected mode, the connection metal 12 that place, point of contact covers is rectangle, the length of side of rectangle is greater than becket line thickness, rectangle will make a limit of rectangle drop on completely in becket lines while covering junction, point of contact, and its opposite side will drop in another tangent becket lines completely.According to different processing method and technological levels, place, annulus point of contact also can adopt the connection metal of other form, as long as can make two tangent beckets have reliably, electrically connects.
In the present invention, for reaching the object of the stray light that senior diffraction of homogenizing cause, a kind of typical scheme is, the diameter of elementary cell neutron annulus 7 is identical, and the angle that the center of circle of adjacent sub-annulus 7 and basic annulus 6 circle center line connectings form equates; In subelement, the diameter of secondary sub-annulus 8 is identical, and the angle that the circle center line connecting of the sub-annulus 7 in the center of circle of adjacent secondary sub-annulus 8 and place forms equates; The diameter of modulating sub-annulus 11 in modulation elementary cell is identical, and the angle that the circle center line connecting of the center of circle of the sub-annulus 11 of adjacent modulation and place modulation annulus 10 forms equates.On such scheme basis, as a kind of preferred version, sub-annulus 7 numbers in different elementary cells are identical, equal diameters; Secondary sub-annulus 8 numbers in different subelements are identical, equal diameters; The number of the sub-annulus 11 of modulation in different modulating elementary cell is identical, equal diameters.As a special case of this preferred version, secondary sub-annulus 8 relative positions in different subelements are identical, and are arranged in basic annulus 6 after being copied by a subelement; Subelement relative position in different elementary cells is identical, sub-annulus 11 relative positions of modulation in different modulating elementary cell are identical, and by an elementary cell and one modulation elementary cell copy rear by orthogonal arrangement, connect airtight to arrange respectively jointly form two-dimensional metallic net grid.The stray light effect causing in order to realize senior diffraction of good homogenizing, another special case as this preferred version, secondary sub-annulus 8 relative positions in different subelements in the present invention in metallic mesh array elementary cell are different, and after being copied by a subelement, be arranged in basic annulus 6, wherein any one subelement with respect to other subelements in same basic annulus 6 in two dimensional surface around rotating to an angle from body annulus 7 centers of circle, in a line, subelement relative position in neighboring unit cells is different, sub-annulus 11 relative positions of modulation in adjacent modulation elementary cell are different, and after being copied by an elementary cell and one modulation elementary cell, by orthogonal arrangement, connect airtight to arrange and form two-dimensional mesh grid array, wherein any one elementary cell rotates to an angle around self basic annulus 6 center of circle in two dimensional surface with respect to its neighboring unit cells, any one modulation elementary cell rotates to an angle around self modulating annulus 10 centers of circle in two dimensional surface with respect to its adjacent modulation elementary cell, the angle of rotating relative to neighboring unit cells with any elementary cell in a line is identical, the angle of rotating relative to adjacent modulation elementary cell with any modulation elementary cell in a line is identical.For example, Fig. 7 represents a kind of rotation mode schematic diagram of other subelements in the relatively same basic annulus of subelement, Fig. 8 represents a kind of rotation mode schematic diagram of the relative neighboring unit cells of elementary cell, wherein the elementary cell of metallic mesh is selected the structure of Fig. 4 (b), the relative rotation angle of subelement is 18 °, with each elementary cell in a line, relative to neighboring unit cells, has rotated successively 22.5 ° of angles.
Fig. 9 and Figure 10 are respectively the existing grid grid of US Patent No. 4871220 structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof, and Figure 11 and Figure 12 are respectively the existing circular ring net grid of patent 200610010066.4 structural representation and its senior diffraction and relative intensity distribution schematic diagram thereof, Figure 13 and Figure 14 are respectively metallic mesh structural representation and its senior diffraction and the relative intensity distribution schematic diagram thereof of preferred version A in the present invention, metallic mesh in preferred version A selects the structure of Fig. 4 (b) as elementary cell, select Fig. 3 (a) as modulation elementary cell, and employing Fig. 7, rotation mode shown in Fig. 8 is rotated, the anglec of rotation between subelement is 18 °, with each elementary cell in a line, relative to neighboring unit cells, 22.5 ° of angles have been rotated successively, with each modulation elementary cell in a line, relative to adjacent modulation elementary cell, 22.5 ° of angles have been rotated successively.
In order to illustrate that the present invention is in senior diffraction energy of homogenizing active superiority that distributes, based on scalar diffraction theory, senior diffraction energy distribution situation and senior the maximum relative intensity of diffraction to above-mentioned three kinds of structures are carried out theory calculating, during calculating, make the light transmittance of each structure identical (being 95.4%), its zero level relative intensity is 91%, and imaging useful information ratio is identical.Metallic mesh structure in preferred version A is compared with grid, circular ring net grid, highest time diffraction relative intensity obviously reduces, and obviously increase in the identical number of investigating senior diffraction spot in interval, thereby avoided senior diffraction energy to concentrate on the problem in the minority order of diffraction time, make senior diffraction energy distribute more even; Figure 15 is the concrete numerical value of the maximum relative intensity of senior diffraction of above-mentioned three kinds of structures, visible, the maximum relative intensity of senior diffraction of grid metallic mesh structure is obviously higher with respect to other structures, the maximum relative intensity of senior diffraction of the corresponding metallic mesh structure of preferred version A of the present invention obviously reduces, from 0.0259% (the maximum relative intensity of senior diffraction of existing circular ring structure), drop to 0.0054%, reduced by 79%, the homo-effect of senior diffraction is obvious.In sum, the effect that metallic mesh structure of the present invention distributes to senior diffraction energy of homogenizing is very remarkable, not only be better than the existing grid metallic mesh of US Patent No. 4871220 structure, be also better than the existing annulus metallic mesh of patent 200610010066.4 structure.
Building form of the present invention, make mesh relatively average, especially the metallic mesh structure providing in preferred version, when senior diffraction energy of degree of depth homogenizing distributes, still there is good light transmission and shielding properties, when when constructing double-level-metal net grid structure, can improve the contradictory problems of light transmittance and shield effectiveness, meanwhile, because senior diffraction energy of single layer structure degree of depth homogenizing of the present invention distributes, can solve again the problem that in existing double-level-metal net grid structure, further senior diffraction energy of homogenizing distributes due to the restriction of individual layer net grid structure.
Metallic mesh in electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate of the present invention can adopt following processing method processing and fabricating: by modes such as electron-beam direct writings, make mask, optical window transparent substrate cleans rear chromium plating or titanium as adhesive linkage, metal-coated films on it, then apply photoresist, utilize manufactured mask to carry out photoetching, finally carry out dry method or wet etching, after removing photoresist, obtain net gate pattern.Also can save mask manufacture link, and directly adopt the way of laser direct-writing to make the metallic mesh pattern based on the nested annulus orthogonal array of multicycle principal and subordinate.Other microelectronic processing technology flow process or binary optical elements making flow process etc. also can be used for making metallic mesh structure of the present invention.
Claims (10)
1. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate, metallic mesh in electromagnetic shielding optical window (5) is arranged and being connected airtight the basic structure of the formation two-dimensional mesh grid of arranging and loading on optical window transparent substrate surface by two-dimensional quadrature as basic annulus (6) by the metal ring of same diameter, and the circumscribed connection of adjacent basic annulus (6), it is characterized in that: in each basic annulus (6), have with this annulus inscribe and be communicated with, the sub-annulus (7) of metal, in sub-annulus (7), there is the secondary sub-annulus (8) being communicated with this sub-annulus (7) inscribe, the secondary sub-annulus (8) that this sub-annulus (7) is communicated with its inscribe forms subelement jointly, between adjacent subunits, there is one and fill annulus (9) and circumscribed connection of sub-annulus (7) in two subelements, and be communicated with basic annulus (6) inscribe at subelement place simultaneously, basic annulus (6), in basic annulus (6), each subelement and filling annulus (9) form the elementary cell of two-dimensional metallic net grid structure jointly, between elementary cell, exist one with the equal circumscribed modulation annulus (10) being communicated with of adjacent four basic annulus of two-dimensional quadrature (6), each modulation annulus (10) has the sub-annulus of modulation (11) being communicated with this annulus inscribe, modulation annulus (10) with its in respectively modulate sub-annulus (11) and modulate elementary cell common composition, described basic annulus (6), sub-annulus (7), secondary sub-annulus (8), the diameter of filling annulus (9), modulation annulus (10) and modulating sub-annulus (11) are millimeter and submillimeter magnitude, described basic annulus (6), sub-annulus (7), secondary sub-annulus (8), the metal wire width of filling annulus (9), modulation annulus (10) and modulating sub-annulus (11) for micron and sub-micrometer scale, described circumscribed connection comprises: 1. place, the circumscribed and circumscribed point of contact of two annulus arranges the connection metal (12) that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal (12) that two annulus are communicated with at overlapping place, described inscribe is communicated with and comprises: 1. two annulus inscribes and place, inscribe point of contact arrange the connection metal (12) that two annulus are communicated with, 2. two annulus are seamless overlapping structure at junction lines, 3. two annulus, when junction lines are seamless overlapping structure, arrange the connection metal (12) that two annulus are communicated with at overlapping place.
2. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 1, it is characterized in that: in each elementary cell, sub-annulus (7) number is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the basic annulus in the center of circle of adjacent sub-annulus (7) and place (6) forms is arbitrarily angled, sub-annulus (7) in different elementary cells is equal diameter or non-equal diameter annulus, and number is identical or different; In each subelement, secondary sub-annulus (8) number is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the sub-annulus in the center of circle of adjacent secondary sub-annulus (8) and place (7) forms is arbitrarily angled, secondary sub-annulus (8) in different subelements is equal diameter or non-equal diameter annulus, and number is identical or different; Each the modulation sub-annulus of elementary cell internal modulation (11) number is more than or equal to 2, and diameter is identical or different, the angle that the circle center line connecting of the center of circle of the sub-annulus of adjacent modulation (11) and place modulation annulus (10) forms is arbitrarily angled, the sub-annulus of modulation (11) in different modulating elementary cell is equal diameter or non-equal diameter annulus, and number is identical or different.
3. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 1 and 2, it is characterized in that: the circumscribed connection of adjacent sub-annulus (7) or crossing in elementary cell, the circumscribed connection of adjacent secondary sub-annulus (8) in subelement or crossing, the circumscribed connection of the sub-annulus of adjacent modulation (11) or crossing in modulation elementary cell.
4. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 2, it is characterized in that: the diameter of elementary cell neutron annulus (7) is identical, the angle that the center of circle of adjacent sub-annulus (7) and basic annulus (6) circle center line connecting form equates; In subelement, the diameter of secondary sub-annulus (8) is identical, and the angle that the circle center line connecting of the sub-annulus in the center of circle of adjacent secondary sub-annulus (8) and place (7) forms equates; The diameter of modulating sub-annulus (11) in modulation elementary cell is identical, and the angle that the circle center line connecting of the center of circle of the sub-annulus of adjacent modulation (11) and place modulation annulus (10) forms equates.
5. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 4, is characterized in that: sub-annulus (7) number in different elementary cells is identical, equal diameters; Secondary sub-annulus (8) number in different subelements is identical, equal diameters; The number of the sub-annulus of modulation (11) in different modulating elementary cell is identical, equal diameters.
6. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 5, it is characterized in that: secondary sub-annulus (8) relative position in different subelements is identical, and be arranged in basic annulus (6) after being copied by a subelement; Subelement relative position in different elementary cells is identical, the sub-annulus of modulation (11) relative position in different modulating elementary cell is identical, and by an elementary cell and one modulation elementary cell copy rear by orthogonal arrangement, connect airtight to arrange respectively jointly form two-dimensional metallic net grid.
7. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 5, it is characterized in that: secondary sub-annulus (8) relative position in the different subelements in an elementary cell is different, and be arranged in basic annulus (6) after being copied by a subelement, wherein any one subelement with respect to other subelements in same basic annulus (6) in two dimensional surface around rotating to an angle from body annulus (7) center of circle: in a line, subelement relative position in neighboring unit cells is different, the sub-annulus of modulation (11) relative position in adjacent modulation elementary cell is different, and after being copied by an elementary cell and one modulation elementary cell, by orthogonal arrangement, connect airtight to arrange and form two-dimensional metallic net grid, wherein any one elementary cell rotates to an angle around self basic annulus (6) center of circle in two dimensional surface with respect to its neighboring unit cells, any one modulation elementary cell rotates to an angle around self modulating annulus (10) center of circle in two dimensional surface with respect to its adjacent modulation elementary cell.
8. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 7, it is characterized in that: the angle of rotating relative to neighboring unit cells with any elementary cell in a line is identical, the angle of rotating relative to adjacent modulation elementary cell with any modulation elementary cell in a line is identical.
9. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 1, it is characterized in that: described basic annulus (6), sub-annulus (7), secondary sub-annulus (8), fill annulus (9), modulation annulus (10), modulate sub-annulus (11) and connection metal (12) consists of the good alloy of electric conductivity, and alloy thickness is greater than 100nm.
10. the electromagnetic shielding optical window based on the nested annulus orthogonal array of multicycle principal and subordinate according to claim 1, is characterized in that: adhesive linkage (1) forms with chromium or titanium material.
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| CN1200231A (en) * | 1996-08-30 | 1998-11-25 | 鹿岛建设株式会社 | Windowpane having electromagnetic shielding ability |
| JP2002111278A (en) * | 1999-01-28 | 2002-04-12 | Sumitomo Rubber Ind Ltd | Method of manufacturing light-permeable electromagnetic wave shield component |
| CN1889822A (en) * | 2006-05-22 | 2007-01-03 | 哈尔滨工业大学 | Electromagnetic screening optical window with circular ring metal meshed gate structure |
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