CN103743640B - 固体薄膜纳米压痕连续测量仪 - Google Patents
固体薄膜纳米压痕连续测量仪 Download PDFInfo
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107941639B (zh) * | 2017-11-15 | 2020-08-14 | 北京工业大学 | 基于纳米压痕技术的复合材料界面相研究方法 |
CN108731604B (zh) * | 2018-05-22 | 2020-02-07 | 中原工学院 | 一种气体静压主轴径向气膜厚度与刚度检测系统 |
CN109142031A (zh) * | 2018-09-25 | 2019-01-04 | 南京通用化工设备技术研究院 | 一种管道用检测装置 |
CN109297813B (zh) * | 2018-11-08 | 2020-06-16 | 清华大学 | 一种柔性基底上纳米薄膜的弹性模量测试方法 |
CN113484155A (zh) * | 2021-07-06 | 2021-10-08 | 中国工程物理研究院激光聚变研究中心 | 一种超薄薄膜力学性能测量装置和力学性能测量方法 |
CN113484156A (zh) * | 2021-07-06 | 2021-10-08 | 中国工程物理研究院激光聚变研究中心 | 一种空心聚合物微球的耐压强度测量装置及其耐压强度测量方法 |
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CN101793911A (zh) * | 2010-04-09 | 2010-08-04 | 北京工业大学 | 一种基于扫描电镜的纳米压痕系统 |
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CN203688375U (zh) * | 2013-12-31 | 2014-07-02 | 浙江工业大学 | 固体薄膜纳米压痕连续测量仪 |
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Patent Citations (5)
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CN101793911A (zh) * | 2010-04-09 | 2010-08-04 | 北京工业大学 | 一种基于扫描电镜的纳米压痕系统 |
CN102252925A (zh) * | 2011-04-19 | 2011-11-23 | 吉林大学 | 纳米压痕/刻划测试装置 |
CN102723303A (zh) * | 2012-06-13 | 2012-10-10 | 南京工业大学 | Xy两坐标气浮定位平台 |
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