CN103716009B - Mems谐振器 - Google Patents
Mems谐振器 Download PDFInfo
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- CN103716009B CN103716009B CN201310719479.XA CN201310719479A CN103716009B CN 103716009 B CN103716009 B CN 103716009B CN 201310719479 A CN201310719479 A CN 201310719479A CN 103716009 B CN103716009 B CN 103716009B
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CN201310719479.XA CN103716009B (zh) | 2013-12-23 | 2013-12-23 | Mems谐振器 |
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CN201310719479.XA CN103716009B (zh) | 2013-12-23 | 2013-12-23 | Mems谐振器 |
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CN103716009A CN103716009A (zh) | 2014-04-09 |
CN103716009B true CN103716009B (zh) | 2017-06-23 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104202011A (zh) * | 2014-08-29 | 2014-12-10 | 电子科技大学 | 基于绝缘材料振动块的mems谐振器 |
CN111200411A (zh) * | 2020-02-16 | 2020-05-26 | 南通大学 | 一种微机械压电式圆盘谐振器及其制作方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101939906A (zh) * | 2007-12-11 | 2011-01-05 | 康奈尔大学 | 谐振体晶体管和振荡器 |
CN102037644A (zh) * | 2008-05-19 | 2011-04-27 | Nxp股份有限公司 | 改进mems谐振器 |
CN102388533A (zh) * | 2009-04-09 | 2012-03-21 | Nxp股份有限公司 | Mems谐振器 |
CN102868383A (zh) * | 2011-07-06 | 2013-01-09 | Nxp股份有限公司 | Mems谐振器 |
CN103051302A (zh) * | 2011-10-12 | 2013-04-17 | 苏州敏芯微电子技术有限公司 | 横向体声波谐振器、制备方法及应用该谐振器的振荡器 |
CN103326691A (zh) * | 2013-05-15 | 2013-09-25 | 中国科学院半导体研究所 | 频率可切换的微机械谐振器 |
CN103338022A (zh) * | 2013-07-22 | 2013-10-02 | 中国科学院半导体研究所 | 频率可调的mems谐振器 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US8040207B2 (en) * | 2009-01-15 | 2011-10-18 | Infineon Technologies Ag | MEMS resonator devices with a plurality of mass elements formed thereon |
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- 2013-12-23 CN CN201310719479.XA patent/CN103716009B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101939906A (zh) * | 2007-12-11 | 2011-01-05 | 康奈尔大学 | 谐振体晶体管和振荡器 |
CN102037644A (zh) * | 2008-05-19 | 2011-04-27 | Nxp股份有限公司 | 改进mems谐振器 |
CN102388533A (zh) * | 2009-04-09 | 2012-03-21 | Nxp股份有限公司 | Mems谐振器 |
CN102868383A (zh) * | 2011-07-06 | 2013-01-09 | Nxp股份有限公司 | Mems谐振器 |
CN103051302A (zh) * | 2011-10-12 | 2013-04-17 | 苏州敏芯微电子技术有限公司 | 横向体声波谐振器、制备方法及应用该谐振器的振荡器 |
CN103326691A (zh) * | 2013-05-15 | 2013-09-25 | 中国科学院半导体研究所 | 频率可切换的微机械谐振器 |
CN103338022A (zh) * | 2013-07-22 | 2013-10-02 | 中国科学院半导体研究所 | 频率可调的mems谐振器 |
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CN103716009A (zh) | 2014-04-09 |
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CB03 | Change of inventor or designer information |
Inventor after: Ye Guoping Inventor after: Wang Jianfeng Inventor before: Zhang Le Inventor before: Ou Wen Inventor before: Ming Anjie Inventor before: Zhang Wenbo Inventor before: Zhang Yu Inventor before: Ren Yaohui |
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Effective date of registration: 20170531 Address after: 321017 Industrial Zone, Jinhua Economic Development Zone, Zhejiang Applicant after: Huilong Electrical (Jinhua) Co., Ltd. Address before: 214135 Jiangsu New District of Wuxi City Linghu Road No. 200 China Sensor Network International Innovation Park C block 6 layer Applicant before: Jiangsu Internet of Things Research & Develoment Co., Ltd. |
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