CN103703410B - 脉冲宽度扩展装置 - Google Patents

脉冲宽度扩展装置 Download PDF

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Publication number
CN103703410B
CN103703410B CN201280032194.2A CN201280032194A CN103703410B CN 103703410 B CN103703410 B CN 103703410B CN 201280032194 A CN201280032194 A CN 201280032194A CN 103703410 B CN103703410 B CN 103703410B
Authority
CN
China
Prior art keywords
pulse laser
voltage
pulse
pulse width
polarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201280032194.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN103703410A (zh
Inventor
梶山康
梶山康一
石井大助
柳川良勝
木口哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
V Technology Co Ltd
Original Assignee
V Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Publication of CN103703410A publication Critical patent/CN103703410A/zh
Application granted granted Critical
Publication of CN103703410B publication Critical patent/CN103703410B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN201280032194.2A 2011-08-11 2012-08-02 脉冲宽度扩展装置 Expired - Fee Related CN103703410B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011175826A JP5803027B2 (ja) 2011-08-11 2011-08-11 パルス幅拡張装置
JP2011-175826 2011-08-11
PCT/JP2012/069738 WO2013021917A1 (ja) 2011-08-11 2012-08-02 パルス幅拡張装置

Publications (2)

Publication Number Publication Date
CN103703410A CN103703410A (zh) 2014-04-02
CN103703410B true CN103703410B (zh) 2016-10-26

Family

ID=47668425

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280032194.2A Expired - Fee Related CN103703410B (zh) 2011-08-11 2012-08-02 脉冲宽度扩展装置

Country Status (5)

Country Link
JP (1) JP5803027B2 (ja)
KR (1) KR20140045419A (ja)
CN (1) CN103703410B (ja)
TW (1) TW201326961A (ja)
WO (1) WO2013021917A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108899744A (zh) * 2018-09-03 2018-11-27 吉林大学 一种偏振式激光脉冲展宽系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6549267B1 (en) * 1996-02-22 2003-04-15 Nikon Corporation Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same
CN2890991Y (zh) * 2006-04-12 2007-04-18 中国科学院上海光学精密机械研究所 激光脉冲展宽与压缩装置
CN101840125A (zh) * 2010-04-21 2010-09-22 北京大学 一种负色散脉冲展宽光纤放大装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691215A (en) * 1979-12-26 1981-07-24 Nec Corp Light pulse gate circuit
JP2612913B2 (ja) * 1988-10-05 1997-05-21 日本電信電話株式会社 光増幅装置
JPH09288251A (ja) * 1996-02-22 1997-11-04 Nikon Corp パルス幅伸長光学系および該光学系を備えた露光装置
JP3715800B2 (ja) * 1998-10-02 2005-11-16 三菱電機株式会社 レーザ照射装置
JP2000292757A (ja) * 1999-04-05 2000-10-20 Toshiba Corp 光パルス幅拡張装置
DE102009047098A1 (de) * 2009-11-25 2011-05-26 Carl Zeiss Smt Gmbh Optische Anordnung zur Homogenisierung eines Laserpulses

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6549267B1 (en) * 1996-02-22 2003-04-15 Nikon Corporation Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same
CN2890991Y (zh) * 2006-04-12 2007-04-18 中国科学院上海光学精密机械研究所 激光脉冲展宽与压缩装置
CN101840125A (zh) * 2010-04-21 2010-09-22 北京大学 一种负色散脉冲展宽光纤放大装置

Also Published As

Publication number Publication date
JP5803027B2 (ja) 2015-11-04
KR20140045419A (ko) 2014-04-16
WO2013021917A1 (ja) 2013-02-14
JP2013040980A (ja) 2013-02-28
TW201326961A (zh) 2013-07-01
CN103703410A (zh) 2014-04-02

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Granted publication date: 20161026

Termination date: 20210802