CN103703410B - Pulse width expanding unit - Google Patents
Pulse width expanding unit Download PDFInfo
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- CN103703410B CN103703410B CN201280032194.2A CN201280032194A CN103703410B CN 103703410 B CN103703410 B CN 103703410B CN 201280032194 A CN201280032194 A CN 201280032194A CN 103703410 B CN103703410 B CN 103703410B
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- pulse width
- polarization
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a kind of pulse width expanding unit, it is configured to possesses: the polarization spectroscope (1) that the pulse laser of incident is carried out to light splitting; According to applied voltage, the pulse laser of incident is carried out to the electrooptic cell (2a, 2b) of polarization; By applying voltage to described electrooptic cell and this voltage being controlled, thus the polarized controller (3) of controlling inciding the polarization of the pulse laser on described electrooptic cell; And have and the pulse laser that has passed through described electrooptic cell is reflected and make its multiple reflective mirrors that incide described polarization spectroscope (4a, 4b, 4c), and the light path that forms the light path that makes pulse laser incide again described electrooptic cell forms device (4), thereby by making to make phase shifting by the pulse laser of described polarization spectroscope light splitting around described light path rotation, thereby and the pulse laser of this phase shifting is overlapped and expands its pulse width.
Description
Technical field
The present invention relates to a kind of pulse width expanding unit of the pulse width of expanding pulse laser, particularly, relate to a kind of by utilizing polarized controller to control the voltage that applies of electrooptic cell, make to produce phase shifting between the pulse laser by polarization spectroscope light splitting, thereby can suppress the increase of number of components and can form to miniaturization pulse width expanding unit.
Background technology
As existing pulse width expanding unit, have and possess: by the pulse laser of incident be divided into two bundle of pulsed laser the first spectroscope, make by the delay photosystem of a pulse laser incident of this first spectroscope branch and will pass through a pulse laser of this delay photosystem and second spectroscopical structure (for example, with reference to patent documentation 1) that another pulse laser merges.
Above-mentioned pulse width expanding unit, that the inciding pulse laser and another pulse laser that postpone photosystem and extended optical path length in the pulse laser by the first spectroscope branch are merged by the second spectroscope, thereby the pulse laser of phase shifting is overlapped, to expand the structure of pulse width of pulse laser.
In addition, as existing other pulse width expanding units, also have as shown in Figure 8, possess: the pulse laser coming from laser oscillator 10 incidents is reflected and form light path, and the structure of multiple part transmission reflective mirrors 22 of multiple total reflection reflectors 21 of configuration relatively and the light path intermediate configurations between each total reflection reflector 21 of configuration relatively.
Incide the pulse laser of above-mentioned pulse width expanding unit 20, at multiple part transmission reflective mirror 22 place's quilts being divided into transmitted through the pulse laser of part transmission reflective mirror 22 and the pulse laser being reflected. pulse as above swashs the light splitting of light, can produce the each of multiple part transmission reflective mirrors 22. as above by multiple arteries and veins of light splitting impulse light, different according to different its optical path lengths in the position of the part transmission reflective mirror 22 of generation light splitting, therefore, thereby the phase place of these pulse lasers is also different., export from pulse width expanding unit 20 as above pulse laser, it is the structure that the pulse laser of phase shifting coincides, after the pulse width of pulse laser is expanded output.
For example, when to pulse width expanding unit 20 incidents as above when pulse laser as shown in Fig. 9 (a), the pulse laser exported, as shown in Fig. 9 (b), is to have added the structure that the different pulse laser of multiple phase places of time delay coincides.
Prior art document
Patent documentation
Patent documentation 1: Japanese kokai publication hei 1-142524 communique
But, in pulse width expanding unit 20 as shown in Figure 8, as shown in Fig. 9 (b), the pulse width of pulse laser, the quantity (quantity of the pulse laser being overlapped) of the pulse laser that multiple phase places are different, these pulses Time delay (staggering of phase place) between laser and the peak energy of each pulse laser, distance between the total reflection reflector 21 that all can be according to relatively joining puts, and configuration total reflection reflector 21 and part transmission reflective mirror The number of 22 is different and produces change.Therefore, in order to further expand the pulse width of pulse laser, then existing mustConfiguration total reflection reflector 21 and the number of fractional transmission illuminator 22 must be increased, so that pulse width extensionThe overall dimensions of device 20 becomes big problem.
Summary of the invention
Therefore, for the problems referred to above, problem to be solved by this invention be to provide a kind of can suppression component quantity
Increase and the pulse width expansion device of Miniaturizable ground formation.
In order to solve above-mentioned problem, the pulse width expansion device of the present invention, possess components described below and constitute:polarization Spectroscope, it becomes by making the polarized light vertical relative to the plane of incidence in the polarized light component of the pulse laser of incidence Sub reflector, and parallel polarized light component is passed through, thus pulse laser is carried out to light splitting; Electrooptic cell, its root According to the voltage applied, to by described polarization spectroscope, the pulse laser of incidence polarizes; Polarization Control Device, it is by applying voltage to described electrooptic cell and being controlled this voltage, thus to inciding described electricity The polarization of the pulse laser of optical element is controlled; And, light path forms device, and it possesses and will pass through described electricity The pulse laser of optical element reflects and is incident upon multiple illuminators of described polarization spectroscope, and formation makes incidence The pulse laser reflected by polarization spectroscope in the pulse laser of this polarization spectroscope incides described electricity again The light path of optical element, by make the pulse laser by described polarization spectroscope light splitting around described light path rotate so that Phase shifting, and the pulse laser of this phase shifting is overlapped, thus extend its pulse width.
Invention effect
According to the pulse width expansion device of the present invention, by make the pulse laser by polarization spectroscope light splitting around by
The light path that light path formation device is formed rotates and makes phase shifting, then the pulse laser of this phase shifting carries out weight
Export after conjunction such that it is able to the pulse width of extension pulse laser.
Now, the staggering of phase place of the pulse laser owing to overlapping is to be executed electrooptic cell by polarized controller
Making alive is controlled and produces, and therefore increases number of components without the pulse width for extension pulse laser.
Therefore, it is possible to miniaturization ground forms the overall dimensions of pulse width expansion device.
Accompanying drawing explanation
Fig. 1 is the schematic drawing of the embodiment of the pulse width expansion device representing the present invention.
Fig. 2 is the block diagram of the control representing laser oscillator and above-mentioned pulse width expansion device.
Fig. 3 is the time diagram of the control signal representing Fig. 2.
Fig. 4 is to represent that the applying voltage of the Pockers cell to described pulse width expansion device is incident with pulse laser
Time to Pockers cell produces the curve chart of relation, and (a) represents and execute alive curve to the first Pockers cell
Figure, (b) represent to the second Pockers cell execute alive curve chart, (c) represent they add up to voltage song
Line chart.
Fig. 5 is to represent the curve chart adding up to voltage applied to described Pockers cell.
Fig. 6 is to represent when being applied with the total voltage shown in Fig. 5 to described Pockers cell, from described pulse width
The curve chart of the output pulse of degree expanding unit, (a) represents the output curve chart of pulse of reality, (b) represents will
A the output pulse of () is expressed as the curve chart of the different pulse of phase place.
Fig. 7 is the schematic drawing of another embodiment of the pulse width expansion device representing the present invention.
Fig. 8 is the schematic drawing of the example representing existing pulse width expansion device.
Fig. 9 is the curve chart of the pulse shape representing pulse laser, and (a) is to represent to described existing pulse width
The curve chart of the input pulse of expanding unit, (b) represent the output from described existing pulse width expansion device
The curve chart of pulse.
Symbol description
1, cubic type polarization spectroscope
1a, 1b, plate polarization spectroscope
2a, the first Pockers cell
2b, the second Pockers cell
3, polarized controller
3a, the first voltage applying circuit
3b, the second voltage applying circuit
3c, pulse generator
4, light path forms device
4a, 4b, 4c, total reflection reflector
5, control panel
6, laser oscillator
A, represent the arrow of direction of advance of pulse laser
L, optical axis
T, time delay
θ, angle of incidence to plate polarization spectroscope
φ, to the angle of incidence of total reflection reflector
Detailed description of the invention
Below, based on accompanying drawing, embodiments of the present invention are described in detail.
Fig. 1 is the schematic diagram of the embodiment of the pulse width expansion device representing the present invention.This pulse width extends
Device, is by being carried out light splitting and make its phase shifting by incident pulse laser, then by the pulse of this phase shifting
Laser carries out overlapping thus extends the device of pulse width, its by polarization spectroscope the 1, first Pockers cell 2a,
Two Pockers cell 2b, polarized controller 3 and light path form device 4 and constitute.
Described polarization spectroscope 1, is vertical relative to the plane of incidence by the polarized light component of incident pulse laser
Polarized light component (hereinafter referred to as " s polarized light ") reflects, and makes parallel polarized light component (hereinafter referred to as
" p-polarization light ") device that passes through, it is arranged on the optical axis L of the pulse laser inciding pulse width expansion device
On.As this polarization spectroscope 1, as it is shown in figure 1, employ two corner cube prism bondings, and at its binding face
Implement the polarization spectroscope 1 of the cubic type of the coating of multilayer dielectric film and metallic film.
As it is shown in figure 1, the pulse laser at polarization spectroscope 1 passes through, in the optical axis L of side, to set to arranged in series
There is the first Pockers cell 2a and the second Pockers cell 2b.This first Pockers cell 2a and the second Pockers cell 2b
It is the electrooptic cell making pulse laser produce polarization according to the voltage applied, general according to first from the left side of Fig. 1
Kerr cell 2a, the order of the second Pockers cell 2b configure.First Pockers cell 2a and the second Pockers cell
2b will not make pulse laser produce polarization under not executing alive state, and when there being applying voltage, then can root
Make pulse laser produce polarization according to the voltage applied.By to this first Pockers cell 2a and bis-Pu Keer
Box 2b applies the voltage of regulation, it is possible to make pulse laser produce the polarization of such as 180 ° (π).
This first Pockers cell 2a and the second Pockers cell 2b are electrically connected with polarized controller 3.This polarization
Control device 3, be by applying voltage and to this applying electricity to the first Pockers cell 2a and the second Pockers cell 2b
Pressure is controlled, thus to inciding pulse laser inclined of the first Pockers cell 2a and the second Pockers cell 2b
Shake the device being controlled, as it is shown in figure 1, by the first voltage applying circuit 3a, the second voltage applying circuit 3b,
And pulse generator 3c is constituted.
Described first voltage applying circuit 3a is to execute alive element to the first Pockers cell 2a, general with first gram
You box 2a electrically connects.It addition, described second voltage applying circuit 3b is to execute alive to the second Pockers cell 2b
Element, electrically connects with the second Pockers cell 2b.
It addition, described pulse generator 3c, it is to apply electricity to described first voltage applying circuit 3a and the second voltage
Road 3b sends and starts to each first Pockers cell 2a and the second Pockers cell 2b or the signal of end voltage applying
Device, electrically connect with the first voltage applying circuit 3a and the second voltage applying circuit 3b.This pulse generator
3c separately can send described signal to the first voltage applying circuit 3a and the second voltage applying circuit 3b,
Start for instance, it is possible to the time sends to the first voltage applying circuit 3a and the second voltage applying circuit 3b with staggering
The signal that voltage applies.
It addition, this pulse generator 3c, as in figure 2 it is shown, swash with by the pulse inciding pulse width expansion device
Light carry out the laser oscillator 6 that exports and for control laser oscillator 6 and from the control panel of external input signal
5 electrical connections, it is possible to according to the signal inputted from control panel 5, make the oscillation action of laser oscillator 6 with to the
One Pockers cell 2a and the second Pockers cell 2b executes alive time synchronized.
Pulse laser at described second Pockers cell 2b passes through in the optical axis L of side, is provided with light path and forms device 4.
This light path forms device 4, is to be formed the pulse laser having passed through the second Pockers cell 2b is reflected and is incident upon
On described polarization spectroscope 1, then make to incide in the pulse laser on this polarization spectroscope 1 by polarization spectro
The pulse laser of mirror 1 reflection incides the device of the light path on described first Pockers cell 2a again, such as Fig. 1 institute
Show, be made up of three total reflection reflectors 4a, 4b, 4c and described polarization spectroscope 1.
Described three total reflection reflectors 4a, 4b, 4c, all make the angle of incidence φ of pulse laser be 45 ° of ground relative to
Optical axis L configures obliquely, and be arranged in formation with these three total reflection reflectors 4a, 4b, 4c and described partially
The position of the rectangle light path that spectroscope 1 is summit of shaking.That is, three total reflection reflectors 4a, 4b, 4c are configured to
Can be formed, from polarization spectroscope 1 to the optical path length of total reflection reflector 4a with from total reflection reflector 4b to entirely
Reflection illuminator 4c optical path length equal, from total reflection reflector 4a to the optical path length of total reflection reflector 4b
The rectangle light path equal with the optical path length of from total reflection reflector 4c to polarization spectroscope 1.
But, light path forms device 4 and is not limited to by three total reflection reflectors 4a, 4b, 4c and polarization spectro
The structure that mirror 1 is constituted, reflects as long as can be formed the pulse laser having passed through the second Pockers cell 2b and makes it
Incide on described polarization spectroscope 1, then make to incide being polarized in the pulse laser on this polarization spectroscope 1
The pulse laser of spectroscope 1 reflection incides the device of the light path on described first Pockers cell 2a again,
Can also be such as forming polygonal light path and to possess the structure of multiple total reflection reflector.
Then, with reference to Fig. 1～Fig. 6, the use state of pulse width expansion device as constructed as above is illustrated.
When using pulse width expansion device, first, from the control panel 5 shown in Fig. 2 to pulse generator 3c
Input the pulse laser exported by laser oscillator 6 and the pulse laser by pulse width expansion device extension output
Parameter.The input of parameter can be carried out in advance, it addition, when according to the performance of laser oscillator 6 etc. the most in advance
Determine the value of regulation without when inputting, it is also possible to do not carry out parameter input.
Then, it is used for making laser oscillator 6 start laser generation to pulse generator 3c input from control panel 5
Signal S1.When have input signal S1Time, then pulse generator 3c will be based on being inputted by control panel 5
Parameter starts the signal S of laser generation to laser oscillator 6 output2, so that laser oscillator 6 carries out laser generation.
When have input signal S2Time, then laser oscillator 6 will start laser generation, thus output have corresponding to
Described parameter and the pulse width of laser oscillator 6 self performance and the pulse laser of peak energy.
When having started the output of pulse laser from laser oscillator 6, the most as shown in Figure 1 and Figure 2, the arteries and veins exported
Impulse light advances towards the direction of arrow A, and incides the polarization spectroscope 1 of pulse width expansion device, relatively
S polarized light in the vertical polarized light component of the plane of incidence is reflected, and only makes the polarized light parallel relative to the plane of incidence become
The p-polarization light divided is by this polarization spectroscope 1, and incides the first Pockers cell 2a and the second Pockers cell 2b.
In order to make the pulse laser inciding the first Pockers cell 2a and the second Pockers cell 2b produce polarization, arteries and veins
Rush generator 3c and output signal S to laser oscillator 62Afterwards, defeated to the first voltage applying circuit 3a respectively
Go out signal S3, to the second voltage applying circuit 3b output signal S4.Signal S3It is to the first voltage applying circuit 3a
Send starts to execute alive signal, signal S to the first Pockers cell 2a4It is to the second voltage applying circuit 3b
Send starts to execute alive signal to the second Pockers cell 2b.As the first voltage applying circuit 3a and second
Voltage applying circuit 3b be have input signal S respectively3And signal S4Time, then start to the first Pockers cell 2a with
And second Pockers cell 2b apply voltage.
Here, signal S3With signal S4, as it is shown on figure 3, only stagger T time delay and be respectively inputted to
One voltage applying circuit 3a and the second voltage applying circuit 3b.This time delay T, according to inciding pulse width
The pulse laser of expanding unit is true around the time required for being formed light path that device 4 formed a week by described light path
Fixed.Such as, described light path form the light path that device 4 formed the longest, then time delay, T was the longest.
As shown in Fig. 4 (a), the voltage being applied to the first Pockers cell 2a is set to, and makes to incide pulse width
The pulse laser of expanding unit makes the pulse laser of incidence produce 180 ° when inciding the first Pockers cell 2a for the first time
(π) voltage polarized, i.e. make the first Pockers cell 2a as λ/2 wavelength plate function voltage (hereinafter referred to as
For " λ/2 voltage "), then with λ/2 voltages keep constant.Or, it is also possible under inputting from laser oscillator 6
Temporarily cease applying voltage before one pulse laser, the most again apply λ/2 voltage.
As shown in Fig. 4 (b), by ratio signal S3Only stagger T time delay ground input signal S4, so that execute
It is added to the voltage on the second Pockers cell 2b, only staggers T time delay than the voltage being applied to the first Pockers cell 2a
Ground starts to apply.
Therefore, the voltage being applied on the second Pockers cell 2b is set as, is inciding pulse width expansion device
Pulse laser does not apply when inciding on the second Pockers cell 2b for the first time, and pulse laser further around by
When the light path that light path formation device 4 is formed incides on the second Pockers cell 2b after one week for the second time, it is set to from 0kV
The voltage of the setting between the voltage of described λ/2, afterwards, applies voltage and tapers into.Then, shaking from laser
Swing device 6 when inputting next pulse laser, then carry out same Control of Voltage.
Now, mutually opposing voltage is applied to the first Pockers cell 2a and the second Pockers cell 2b respectively.Cause
This, be applied to the first Pockers cell 2a and the total voltage of the second Pockers cell 2b, as shown in Fig. 4 (c),
It is the voltage deducting from the voltage being applied to the first Pockers cell 2a and being applied to the second Pockers cell 2b and the electricity obtained
Pressure.That is, described total voltage, incides first for the first time at the pulse laser inciding pulse width expansion device
It is λ/2 voltage during Pockers cell 2a and the second Pockers cell 2b, and at pulse laser further around by light path shape
After the light path becoming device 4 to be formed rotates a circle, second time incides the first Pockers cell 2a and the second Pockers cell
During 2b, then it it is the regulation between the voltage of 0kV to λ/2 deducting from λ/2 voltage and being applied to the second Pockers cell 2b
The voltage of value and the magnitude of voltage that obtains, afterwards, diminish with the magnitude of voltage being applied on the second Pockers cell 2b, close
Meter voltage is also gradually reduced, and moves closer to λ/2 voltage.
As it has been described above, the voltage being applied on the first Pockers cell 2a and the second Pockers cell 2b, along with pulse
Laser light incident produces change on the first Pockers cell 2a and the second Pockers cell 2b, correspondingly incident
The polarization degree of pulse laser, also with laser light incident to the first Pockers cell 2a and the second Pockers cell 2b
And produce change.
From the pulse laser of laser oscillator 6 output, incide first for the first time by polarization spectroscope 1
The pulse laser (p-polarization light) of Pockers cell 2a and the second Pockers cell 2b, as shown in Figure 4, owing to applying
Total voltage to the first Pockers cell 2a and the second Pockers cell 2b is λ/2 voltage, therefore produces 180 ° (π)
Polarization.Now, it is s polarized light that most p-polarization light is all polarized, but according to the performance of Pockers cell, p is inclined
Shake light a part will not by polarization remain for s polarized light.That is, pulse laser is passing through the first Pockers cell
After 2a and the second Pockers cell 2b, become p-polarization light and the state of s polarized light mixing.
This pulse laser is after having passed through the second Pockers cell 2b, as it is shown in figure 1, by three total reflection reflectors
4a, 4b, 4c reflect, and incide polarization spectroscope 1 again by being formed, by light path, the light path that device formed,
Wherein p-polarization light is exported by polarization spectroscope 1, and s polarized light reflected by polarization spectroscope 1 after again
Incide the first Pockers cell 2a and the second Pockers cell 2b.
Incide the first Pockers cell 2a and the s polarized light of the second Pockers cell 2b again, according to Fig. 4
Second time when inciding the first Pockers cell 2a and the second Pockers cell 2b be applied to the first Pockers cell 2a with
And the total voltage that second on Pockers cell 2b, a part at least within is polarized p-polarization light.Therefore, arteries and veins
Impulse light, after having passed through the first Pockers cell 2a and the second Pockers cell 2b, becomes p-polarization light and s polarization
The state of light mixing.
This pulse laser, after having passed through the second Pockers cell 2b, carries out the process as said process, as
The p-polarization light of a portion exports from polarization spectroscope 1.Pulse laser carries out following same process, from partially
The spectroscope 1 that shakes exports.
It is being 4m to the optical path length being formed the light path that device 4 is formed by light path and is employing described λ/2 voltage and be
The Pockers cell of-6.4kV extends dress as this pulse width of the first Pockers cell 2a and the second Pockers cell 2b
Put, the pulse laser that incident pulse energy is 100mJ, pulse width (FWHM: full width at half maximum (FWHM)) is 20ns,
And by polarized controller 3 to being applied to the first Pockers cell 2a and the total voltage of the second Pockers cell 2b
When carrying out control as shown in Figure 5, then the pulse width (full width at half maximum (FWHM)) of the pulse laser exported, such as Fig. 6 (a)
Shown in be extended to about 450ns.
This output pulse, as shown in Fig. 6 (b), is that multiple pulse lasers of phase shifting overlap and the structure that formed,
Each pulse laser of phase shifting, is being formed the feelings that optical path length is 4m of the light path that device 4 is formed by light path
Under condition, phase place respectively staggers about 13ns, and the time needed for it rotates around described light path with pulse laser is equal.
Fig. 7 is the schematic drawing of another embodiment of the pulse width expansion device representing the present invention.This embodiment
The glass system of use or plastic plate (plane) polarization spectroscope substitute the polarization of above-mentioned cubic type
Spectroscope 1.In the case of Gai, as it is shown in fig. 7, by plate for the two panels mutually opposing inclination of polarization spectroscope 1a, 1b
Be arranged in the optical axis L of pulse laser, and the incidence angle θ being preferably arranged to each pulse laser becomes and makes p inclined
Shake the Brewster's angle that reflectance is 0 (angle of polarization) of light.By being configured so that plate polarization illuminator 1a, 1b,
Incide plate polarization spectroscope 1a by pulse laser and produce refraction, it is possible to make at plate polarization spectroscope
The optical axis L staggered before and after 1a returns to original position at plate polarization spectroscope 1b such that it is able to prevent
The problem staggered in the position of optical axis L is there is when using plate polarization spectroscope.Therefore, pulse width can be made to expand
The location of the component parts of extending apparatus becomes easy, it is possible to easily carry out the maintenance of pulse width expansion device.
As it has been described above, according to the pulse width expansion device of the present invention, the phase shifting of the pulse laser owing to overlapping
By polarized controller, Pockers cell can be executed alive control and produce, it is therefore not necessary to for extending pulse
The pulse width of laser and increase number of components.Therefore, it is possible to miniaturization ground is formed outside pulse width expansion device
Shape size.Further, since number of components is few, so that the tune of the parts in use and carried out when safeguarding
Whole, polarization spectroscope the 1, first Pockers cell 2a of being especially arranged in the light path of pulse laser, second general gram
The adjustment of that box 2b and the position of total reflection reflector 4a, 4b, 4c and angle becomes easy.
Even if it addition, inciding the wavelength of pulse laser of pulse width expansion device and oscillating impulse laser
In the case of the specification of laser oscillator 6 changes, by by polarization spectroscope 1 and the first Pockers cell 2a with
And second Pockers cell 2b be transformed to the structure of suitable specification just can be corresponding.
Further, by being formed the optical path length of the light path that device 4 is formed by light path and being filled by Polarization Control
Put 3 and first Pockers cell 2a and the second Pockers cell 2b is executed alive control generation polarization, it is thus possible to
Enough the pulse shape of the pulse laser exported is converted arbitrarily.
Claims (7)
1. a pulse width expansion device, it is characterised in that be configured to possess:
Polarization spectroscope, its by make incidence pulse laser polarized light component in vertical relative to the plane of incidence
Polarized light component reflects, and makes parallel polarized light component pass through, thus pulse laser is carried out light splitting；
Electrooptic cell, it is according to the voltage applied, to the pulse laser of incidence by described polarization spectroscope
Polarize；
Polarized controller, it, by applying voltage to described electrooptic cell and being controlled this voltage, makes this electricity
Pressure is initially described electrooptic cell λ/2 voltage as λ/2 plate function, then becomes zero to λ/2 voltage
Between voltage, thus the polarization of the pulse laser inciding described electrooptic cell is controlled；And,
Light path forms device, and it possesses and is reflected by the pulse laser having passed through described electrooptic cell and be incident upon institute
State multiple illuminators of polarization spectroscope, and formed in the pulse laser making to incide this polarization spectroscope by polarizing
The pulse laser of dichroic mirror incides the light path of described electrooptic cell again,
This pulse width expansion device of above-mentioned composition, is enclosed by the pulse laser of described polarization spectroscope light splitting by making
Rotate so that phase shifting around described light path, and the pulse laser of this phase shifting is overlapped, thus extend
Its pulse width.
2. pulse width expansion device as claimed in claim 1, it is characterised in that along with pulse laser incides
Described electrooptic cell, the voltage that described polarized controller is applied on described electrooptic cell produces change.
3. pulse width expansion device as claimed in claim 1 or 2, it is characterised in that described electrooptic cell is
Pockers cell.
4. pulse width expansion device as claimed in claim 3, it is characterised in that divide having passed through described polarization
The optical axis of the pulse laser of light microscopic is provided with two described Pockers cells.
5. pulse width expansion device as claimed in claim 4, it is characterised in that said two Pockers cell divides
It is not applied in mutually opposing voltage.
6. pulse width expansion device as claimed in claim 1, it is characterised in that described light path forms device tool
There are three illuminators, and form the rectangle light path as summit with these three illuminators and described polarization spectroscope.
7. pulse width expansion device as claimed in claim 1, it is characterised in that described polarization spectroscope is vertical
Cube type polarization spectroscope.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-175826 | 2011-08-11 | ||
| JP2011175826A JP5803027B2 (en) | 2011-08-11 | 2011-08-11 | Pulse width expansion device |
| PCT/JP2012/069738 WO2013021917A1 (en) | 2011-08-11 | 2012-08-02 | Pulse width expansion device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103703410A CN103703410A (en) | 2014-04-02 |
| CN103703410B true CN103703410B (en) | 2016-10-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280032194.2A Expired - Fee Related CN103703410B (en) | 2011-08-11 | 2012-08-02 | Pulse width expanding unit |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5803027B2 (en) |
| KR (1) | KR20140045419A (en) |
| CN (1) | CN103703410B (en) |
| TW (1) | TW201326961A (en) |
| WO (1) | WO2013021917A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108899744A (en) * | 2018-09-03 | 2018-11-27 | 吉林大学 | A kind of polarization type laser pulse stretching system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6549267B1 (en) * | 1996-02-22 | 2003-04-15 | Nikon Corporation | Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same |
| CN2890991Y (en) * | 2006-04-12 | 2007-04-18 | 中国科学院上海光学精密机械研究所 | Laser pulse stretching and compressing device |
| CN101840125A (en) * | 2010-04-21 | 2010-09-22 | 北京大学 | Negative dispersion pulse widening optical fiber amplifying device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5691215A (en) * | 1979-12-26 | 1981-07-24 | Nec Corp | Light pulse gate circuit |
| JP2612913B2 (en) * | 1988-10-05 | 1997-05-21 | 日本電信電話株式会社 | Optical amplifier |
| JPH09288251A (en) * | 1996-02-22 | 1997-11-04 | Nikon Corp | Pulse width lengthening optical system and exposure device provided therewith |
| JP3715800B2 (en) * | 1998-10-02 | 2005-11-16 | 三菱電機株式会社 | Laser irradiation device |
| JP2000292757A (en) * | 1999-04-05 | 2000-10-20 | Toshiba Corp | Device for expansion of width of light pulse |
| DE102009047098A1 (en) * | 2009-11-25 | 2011-05-26 | Carl Zeiss Smt Gmbh | Optical arrangement for homogenizing a laser pulse |
-
2011
- 2011-08-11 JP JP2011175826A patent/JP5803027B2/en active Active
-
2012
- 2012-08-02 WO PCT/JP2012/069738 patent/WO2013021917A1/en active Application Filing
- 2012-08-02 KR KR1020137033605A patent/KR20140045419A/en not_active Application Discontinuation
- 2012-08-02 CN CN201280032194.2A patent/CN103703410B/en not_active Expired - Fee Related
- 2012-08-10 TW TW101128883A patent/TW201326961A/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6549267B1 (en) * | 1996-02-22 | 2003-04-15 | Nikon Corporation | Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same |
| CN2890991Y (en) * | 2006-04-12 | 2007-04-18 | 中国科学院上海光学精密机械研究所 | Laser pulse stretching and compressing device |
| CN101840125A (en) * | 2010-04-21 | 2010-09-22 | 北京大学 | Negative dispersion pulse widening optical fiber amplifying device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201326961A (en) | 2013-07-01 |
| JP2013040980A (en) | 2013-02-28 |
| JP5803027B2 (en) | 2015-11-04 |
| CN103703410A (en) | 2014-04-02 |
| WO2013021917A1 (en) | 2013-02-14 |
| KR20140045419A (en) | 2014-04-16 |
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