CN103695861A - Connecting structure of substrate loading frame and magnetic lead rail - Google Patents
Connecting structure of substrate loading frame and magnetic lead rail Download PDFInfo
- Publication number
- CN103695861A CN103695861A CN201310708858.9A CN201310708858A CN103695861A CN 103695861 A CN103695861 A CN 103695861A CN 201310708858 A CN201310708858 A CN 201310708858A CN 103695861 A CN103695861 A CN 103695861A
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- Prior art keywords
- hole
- load frame
- substrate load
- magnetic conductance
- lead rail
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- 239000000758 substrate Substances 0.000 title claims abstract description 52
- 238000012856 packing Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Abstract
The invention discloses a connecting structure of a substrate loading frame and a magnetic lead rail. The connecting structure comprises a substrate loading frame, a magnetic lead rail and an insulating block, wherein a first thread hole is arranged on the magnetic lead rail; a counter bore is formed at a corresponding position on the insulating block; the insulating block is fixed on the magnetic lead rail by a countersunk head screw through the counter bore and the first thread hole; a through hole is formed on the substrate loading frame; a second thread hole is formed at the corresponding position of the insulating block; a fixed bolt passes through the through hole and is matched with the second thread hole, so that the loading frame is fixed on the insulating block; a baffle block is arranged between a nut of the fixed bolt and a thread section; the radial length of the baffle block is greater than the depth of the through hole; the radial length of the thread section of the fixed bolt is smaller than the depth of the second thread hole. A specific fixed bolt is selected, so that the condition that the bolt contacts the magnetic lead rail is ensured, the effect on the product quality caused by a short circuit of the substrate loading frame can be avoided, and the effect on production caused by heating deformation of the magnetic lead rail is not generated.
Description
Technical field
The present invention relates to a kind of control and liner of ITO coating film production line glass substrate loading frame, particularly the syndeton of substrate load frame and magnetic conductance rail.
Background technology
At present, ITO coating film production line substrate load frame adopts the alternative gear of magnetic conductance rail, rack gear is controlled and the glass substrate loading frame that leads is a kind of trend.These magnetic conductance rails all adopt the method for the repulsion formula glass substrate rack of controlling and lead, this type of drive is that the magnetic field force that the magnetic steering magnet by substrate load frame top produces produces contrary magnetic field force with the magnetic steering magnet on casing, make substrate load frame keep suspending, control the direct of travel of substrate load frame in guide rail together with lower driving wheel, reach the object of guiding.Existing substrate load frame and magnetic conductance rail adopt tension fixed form, fixed insulation piece on magnetic conductance rail, and substrate load frame is fixed on collets by standing bolt, has collets isolation between magnetic conductance rail and substrate load frame.There is following problem in this fixed form: when standing bolt is oversize, can penetrate collets and contact with magnetic conductance rail, causing the short circuit of substrate load frame, thereby affect quality product; Because continuous coating production line needs substrate load frame, in temperature, be delivery always in the vacuum chamber of 400 ℃ of left and right, magnetic conductance rail can baking always can cause distortion in hot environment, if very close to each other between the nut of standing bolt and substrate load frame, thereby cause the temperature distortion of substrate load frame and snap into, in vacuum chamber, affect output.
Summary of the invention
The technical problem that will solve of the present invention is to provide the syndeton of a kind of substrate load frame and magnetic conductance rail, being about to substrate load frame is connected on magnetic conductance rail, avoid again affecting because of the short circuit of substrate load frame the object of quality product, also can not affect production because of the temperature distortion of magnetic conductance rail.
For solving the problems of the technologies described above, the invention provides the syndeton of a kind of substrate load frame and magnetic conductance rail, comprise substrate load frame, magnetic conductance rail, collets, on described magnetic conductance rail, there is the first threaded hole, on collets, corresponding positions is equipped with counterbore, and sunk screw is fixed on collets on magnetic conductance rail by counterbore and the first threaded hole; On substrate load frame, have through hole, there is the second threaded hole collets corresponding position, standing bolt coordinates with the second threaded hole through through hole, thereby loading frame is fixed on collets, between the nut of described standing bolt and thread segment, there is block, the radical length of described block is greater than the degree of depth of described through hole, and the thread segment radical length of described standing bolt is less than the degree of depth of the second threaded hole.
Described block is packing ring, sleeve pipe.
Described block and standing bolt are one-body molded.
The invention has the beneficial effects as follows: between the nut of standing bolt and thread segment, have block, the radical length of described block is greater than the radical length of described through hole, so just make between nut and substrate load frame gapped, when substrate load frame moves and makes in 400 ℃ of left and right vacuum chambers, substrate load frame expanded by heating, due to gapped between nut and substrate load frame, just can guarantee that nut can not be stuck in the through hole of collets, guarantee that substrate load frame can not be stuck in casing because of distortion;
The thread segment radical length of standing bolt is less than the degree of depth of the second threaded hole, just can guarantee that bolt can contact magnetic conductance rail, can avoid affecting quality product because of the short circuit of substrate load frame.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the specific embodiment of the invention.
Fig. 2 is the M portion enlarged view of Fig. 1.
Fig. 3 is the schematic diagram of standing bolt in the present invention.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Embodiment 1
As shown in Fig. 1～Fig. 2, the syndeton of substrate load frame and magnetic conductance rail, comprise substrate load frame 1, magnetic conductance rail 2 and collets 3, on described magnetic conductance rail 2, there is the first threaded hole, on collets 3, corresponding positions is equipped with counterbore, and sunk screw 4 is fixed on collets 3 on magnetic conductance rail 2 by counterbore and the first threaded hole; On substrate load frame 1, have through hole 11, there is the second threaded hole 32 collets 3 corresponding positions, and standing bolt 5 coordinates with the second threaded hole 32 through through hole 11, thereby substrate load frame 1 is fixed on collets 3.
The structural representation of standing bolt 5 as shown in Figure 3, between the nut 51 of standing bolt 5 and thread segment 53, there is block 52, described block 52 is packing rings, gasket sleeve is on thread segment 53, packing ring and standing bolt 5 are one-body molded, packing ring forms step on standing bolt, on thread segment 53, the radical length of block 52 is greater than the degree of depth of described through hole 11, thereby nut 51 is positioned at outside through hole 11, nut 51 is d with the gap of substrate load frame 1, thereby when substrate load frame 1 is heated, nut 51 can not be stuck in through hole 11; Thread segment 53 radical lengths of described standing bolt 5 are less than the degree of depth of the second threaded hole 32, thereby avoid standing bolt 5 to contact with magnetic conductance rail 2, prevent 1 short circuit of substrate load frame.
Embodiment 2
As shown in Fig. 1～Fig. 2, the syndeton of substrate load frame and magnetic conductance rail, comprise substrate load frame 1, magnetic conductance rail 2 and collets 3, on described magnetic conductance rail 2, there is the first threaded hole, on collets 3, corresponding positions is equipped with counterbore, and sunk screw 4 is fixed on collets 3 on magnetic conductance rail 2 by counterbore and the first threaded hole; On substrate load frame 1, have through hole 11, there is the second threaded hole 32 collets 3 corresponding positions, and standing bolt 5 coordinates with the second threaded hole 32 through through hole 11, thereby substrate load frame 1 is fixed on collets 3.
The structural representation of standing bolt 5 as shown in Figure 3, between the nut 51 of standing bolt 5 and thread segment 53, there is block 52, described block 52 is sleeve pipes, sleeve pipe is high temperature material, and casing pipe sleeve is on thread segment 53, and the radical length of block 52 is greater than the degree of depth of described through hole 11, thereby nut 51 is positioned at outside through hole 11, nut 51 is d with the gap of substrate load frame 1, thereby when substrate load frame 1 is heated, nut 51 can not be stuck in through hole 11; Thread segment 53 radical lengths of described standing bolt 5 are less than the degree of depth of the second threaded hole 32, thereby avoid standing bolt 5 to contact with magnetic conductance rail 2, prevent 1 short circuit of substrate load frame.
Claims (3)
1. the syndeton of substrate load frame and magnetic conductance rail, comprise substrate load frame, magnetic conductance rail, collets, on described magnetic conductance rail, have the first threaded hole, on collets, corresponding positions is equipped with counterbore, and sunk screw is fixed on collets on magnetic conductance rail by counterbore and the first threaded hole; On substrate load frame, have through hole, there is the second threaded hole collets corresponding position, standing bolt coordinates with the second threaded hole through through hole, thereby loading frame is fixed on collets, it is characterized in that: between the nut of described standing bolt and thread segment, have block, the radical length of described block is greater than the degree of depth of described through hole, and the thread segment radical length of described standing bolt is less than the degree of depth of the second threaded hole.
2. the syndeton of substrate load frame as claimed in claim 1 and magnetic conductance rail, is characterized in that: described block is packing ring, sleeve pipe.
3. the syndeton of substrate load frame as claimed in claim 1 or 2 and magnetic conductance rail, is characterized in that: described block and standing bolt are one-body molded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310708858.9A CN103695861B (en) | 2013-12-20 | 2013-12-20 | The syndeton of substrate load frame and magnetic conductance rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310708858.9A CN103695861B (en) | 2013-12-20 | 2013-12-20 | The syndeton of substrate load frame and magnetic conductance rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103695861A true CN103695861A (en) | 2014-04-02 |
| CN103695861B CN103695861B (en) | 2015-12-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310708858.9A Expired - Fee Related CN103695861B (en) | 2013-12-20 | 2013-12-20 | The syndeton of substrate load frame and magnetic conductance rail |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103695861B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483633A (en) * | 2016-02-01 | 2016-04-13 | 京东方科技集团股份有限公司 | Magnetron sputtering device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4492845A (en) * | 1982-09-17 | 1985-01-08 | Kljuchko Gennady V | Plasma arc apparatus for applying coatings by means of a consumable cathode |
| DE202008004228U1 (en) * | 2008-03-27 | 2008-05-29 | Grenzebach Maschinenbau Gmbh | Device for fixing and transporting shock-sensitive plates in sputter coating systems |
| CN203223440U (en) * | 2013-04-22 | 2013-10-02 | 芜湖真空科技有限公司 | Magnetic guide rail connection mechanism |
| CN203313100U (en) * | 2013-04-22 | 2013-11-27 | 芜湖真空科技有限公司 | Magnetic guide rail mechanism |
| CN203307430U (en) * | 2013-06-24 | 2013-11-27 | 芜湖真空科技有限公司 | Trolley position detection device of vacuum film coating machine |
| CN203653687U (en) * | 2013-12-20 | 2014-06-18 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connection structure of substrate loading frame and magnetic lead rail |
-
2013
- 2013-12-20 CN CN201310708858.9A patent/CN103695861B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4492845A (en) * | 1982-09-17 | 1985-01-08 | Kljuchko Gennady V | Plasma arc apparatus for applying coatings by means of a consumable cathode |
| DE202008004228U1 (en) * | 2008-03-27 | 2008-05-29 | Grenzebach Maschinenbau Gmbh | Device for fixing and transporting shock-sensitive plates in sputter coating systems |
| CN203223440U (en) * | 2013-04-22 | 2013-10-02 | 芜湖真空科技有限公司 | Magnetic guide rail connection mechanism |
| CN203313100U (en) * | 2013-04-22 | 2013-11-27 | 芜湖真空科技有限公司 | Magnetic guide rail mechanism |
| CN203307430U (en) * | 2013-06-24 | 2013-11-27 | 芜湖真空科技有限公司 | Trolley position detection device of vacuum film coating machine |
| CN203653687U (en) * | 2013-12-20 | 2014-06-18 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connection structure of substrate loading frame and magnetic lead rail |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105483633A (en) * | 2016-02-01 | 2016-04-13 | 京东方科技集团股份有限公司 | Magnetron sputtering device |
| CN105483633B (en) * | 2016-02-01 | 2017-12-08 | 京东方科技集团股份有限公司 | A kind of magnetic control sputtering device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103695861B (en) | 2015-12-09 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Connecting structure of substrate loading frame and magnetic lead rail Effective date of registration: 20181106 Granted publication date: 20151209 Pledgee: Bank of Communications Ltd Bengbu branch Pledgor: Anhui Bengbu Huayi Conductive Film Glass Co., Ltd. Registration number: 2018340000621 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20200327 Address after: 233010 No. 377, Jiahe Road, high tech Zone, Bengbu City, Anhui Province Patentee after: Bengbu Huayi branch of Kaisheng Technology Co., Ltd Address before: 233010 Anhui city in Bengbu province long high tech Industrial Development Zone, Road No. 377 Patentee before: ANHUI BENGBU HUAYI CONDUCTIVE FILM GLASS Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CI03 | Correction of invention patent |
Correction item: Patentee|Address Correct: Anhui Bengbu Huayi conductive film glass Co., Ltd.| 233010 No. 377, Changming Road, high tech Industrial Development Zone, Bengbu, Anhui Province False: Bengbu Huayi branch of Kaisheng Technology Co., Ltd.| 233010 No. 377, Jiahe Road, high tech Zone, Bengbu City, Anhui Province Number: 16-02 Volume: 36 |
|
| CI03 | Correction of invention patent | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 Termination date: 20201220 |
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| CF01 | Termination of patent right due to non-payment of annual fee |