CN204849013U - Vacuum magnetron sputters plate washer structure of metal layer equipment - Google Patents
Vacuum magnetron sputters plate washer structure of metal layer equipment Download PDFInfo
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- CN204849013U CN204849013U CN201520530731.7U CN201520530731U CN204849013U CN 204849013 U CN204849013 U CN 204849013U CN 201520530731 U CN201520530731 U CN 201520530731U CN 204849013 U CN204849013 U CN 204849013U
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- plate washer
- utility
- metal layer
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- vacuum magnetron
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Abstract
The utility model provides a vacuum magnetron sputters plate washer structure of metal layer equipment, it is main includes plate washer, screw rod and motor, the utility model discloses an install more than one in vacuum magnetron sputters metal layer equipment, the removal of this plate washer can produce the function that side direction thickness changes in vacuum magnetron sputters the metal layer production process, the utility model discloses borrow the removal of controlling the plate washer by power cord circular telegram relief revolution screw rod.
Description
Technical field
The utility model relates to a kind of by supply lead energising relief revolution screw rod to control the movement of plate washer, particularly relates to a kind of barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment.
Background technology
Current vacuum magnetic-control sputtering metallic diaphragm technology cannot accomplish the thickness gradually layer process of side direction, also therefore cannot accomplish the change of color.
Utility model content
Technical problem underlying to be solved in the utility model is, overcomes the above-mentioned defect that prior art exists, and provides a kind of barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment, controls the movement of plate washer by supply lead energising relief revolution screw rod.
The utility model solves the technical scheme that its technical problem adopts:
A kind of barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment, mainly comprise plate washer, screw rod and motor, the utility model is more than one, device in vacuum magnetic-control sputtering metallic diaphragm equipment, the movement of this plate washer can produce the function of lateral thickness change in vacuum magnetic-control sputtering metallic diaphragm production process, and the utility model controls the movement of plate washer by supply lead energising relief revolution screw rod.
The beneficial effects of the utility model are, control the movement of plate washer by supply lead energising relief revolution screw rod.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is the stereographic map of the barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment.
Fig. 2 is the enforcement illustration of the barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment.
Number in the figure illustrates:
1, plate washer
2, motor
3, screw rod
4, supply lead
5, vacuum magnetic-control sputtering metallic diaphragm equipment
Embodiment
Refer to Fig. 1 and Fig. 2, a kind of barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment, mainly comprise plate washer 1, motor 2, screw rod 3 and supply lead 4, the utility model is more than one, device in vacuum magnetic-control sputtering metallic diaphragm equipment 5, the movement of this plate washer 1 can produce the function of lateral thickness change in vacuum magnetic-control sputtering metallic diaphragm production process, and the utility model is energized relief motor 2 rotating screw bolt 3 to control the movement of plate washer 1 by supply lead 4.
The above, it is only preferred embodiment of the present utility model, not any pro forma restriction is done to the utility model, every above embodiment is done according to technical spirit of the present utility model any simple modification, equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
In sum, the utility model is in structure design, use practicality and cost benefit, meet completely needed for industry development, and the structure disclosed also is have unprecedented innovative structure, there is novelty, creativeness, practicality, meet the regulation about new patent important document, therefore mention application in accordance with the law.
Claims (2)
1. a barrier structure for vacuum magnetic-control sputtering metallic diaphragm equipment, is characterized in that, comprising:
One plate washer, is arranged in vacuum magnetic-control sputtering metallic diaphragm equipment, moves by screw rod; And
One motor, after supply lead energising, rotating screw bolt moves plate washer;
One screw rod, connecting motor moves plate washer; And
One supply lead, feed motor power supply.
2. the barrier structure of vacuum magnetic-control sputtering metallic diaphragm equipment according to claim 1, is characterized in that, described plate washer is more than one in vacuum magnetic-control sputtering metallic diaphragm equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520530731.7U CN204849013U (en) | 2015-07-21 | 2015-07-21 | Vacuum magnetron sputters plate washer structure of metal layer equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520530731.7U CN204849013U (en) | 2015-07-21 | 2015-07-21 | Vacuum magnetron sputters plate washer structure of metal layer equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204849013U true CN204849013U (en) | 2015-12-09 |
Family
ID=54739581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520530731.7U Active CN204849013U (en) | 2015-07-21 | 2015-07-21 | Vacuum magnetron sputters plate washer structure of metal layer equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204849013U (en) |
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2015
- 2015-07-21 CN CN201520530731.7U patent/CN204849013U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |