CN203307430U - Trolley position detection device of vacuum film coating machine - Google Patents
Trolley position detection device of vacuum film coating machine Download PDFInfo
- Publication number
- CN203307430U CN203307430U CN2013203615865U CN201320361586U CN203307430U CN 203307430 U CN203307430 U CN 203307430U CN 2013203615865 U CN2013203615865 U CN 2013203615865U CN 201320361586 U CN201320361586 U CN 201320361586U CN 203307430 U CN203307430 U CN 203307430U
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- optical fiber
- fiber optic
- detection device
- position detection
- guide rail
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Abstract
The utility model discloses a trolley position detection device of a vacuum film coating machine. The trolley position detection device comprises a magnetic guide rail, an optical fiber transmitter and an optical fiber receiver, wherein optical fiber heads of the optical fiber transmitter and the optical fiber receiver respectively penetrate through two optical fiber positioning plates and are arranged in waist-shaped holes formed in base plates on two sides of the magnetic guide rail. By virtue of the structure, the trolley position detection device has the advantages that (1) compared with an existing sensor detection device, a series of problems caused by heat expansion and cold contraction of the magnetic guide rail in a high-temperature working state can be solved; (2) a connection mode is a flexibly adjustable mode, and a flexibly adjustable sensor mechanism can be effectively adjusted regardless of the working temperature of the magnetic guide rail, so that film coating equipment can normally operate.
Description
Technical field
The utility model relates to technical field of vacuum plating, particularly a kind of chassis position detecting device of vacuum plating unit.
Background technology
Existing vacuum coating film equipment, chassis monitoring sensor device is mainly the mode of connection that is rigidly connected.The drawback of the mode that is rigidly connected maximum is that magnetic conductance rail deflection strengthens along with the vacuum chamber temperature raises, and the optoelectronic switch that is arranged on vacuum chamber cavity outside can misplace with the light source transfer port of inside cavity, thereby causes Monitoring Performance unstable, even loses efficacy.
The utility model content
Technical problem to be solved in the utility model is, for the deficiencies in the prior art, to provide a kind of chassis position detecting device of avoiding Monitoring Performance vacuum plating unit unstable, that even lost efficacy.
For solving the problems of the technologies described above, the technical solution of the utility model is: a kind of chassis position detecting device of vacuum plating unit, comprise the magnetic conductance rail, also comprise fiber optic emitter, fiber optic receiver, the optical fiber head of described fiber optic emitter and the optical fiber head of fiber optic receiver pass respectively two optical fiber position-boards and are arranged in the waist-shaped hole of offering on the substrate of magnetic conductance rail both sides.
Described proofing unit also comprises vacuum chamber cavity top board, is arranged on supporting seat and flange end cap on vacuum chamber cavity top board, described fiber optic emitter and fiber optic receiver are installed on the upper surface of described supporting seat, optical fiber between described fiber optic emitter and its optical fiber head passes the flange end cap, and the optical fiber between described fiber optic receiver and its optical fiber head passes another flange end cap.
The utility model adopts said structure, has the following advantages: 1, with existing sensor detecting device, compare, it one is the class problem that the utility model has overcome what because of the magnetic conductance rail, issue that the swollen shrinkage phenomenon of heat-dissipating produces at the hot operation state; 2, the utility model mode of connection is flexible adjustable mode, and namely no matter the magnetic conductance rail is worked at which kind of temperature, and the adjustable sensor mechanism of this flexibility can effectively be regulated thereupon, thereby has guaranteed the normal operation of filming equipment.
The accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail;
Fig. 1 is structural representation of the present utility model;
Fig. 2 is side-view of the present utility model;
In Fig. 1 ~ Fig. 2,1, fiber optic emitter; 2, fiber optic receiver; 3, flange end cap; 4, optical fiber position-board; 5, supporting seat; 6, vacuum chamber cavity top board; 7, magnetic conductance rail; 8, chassis.
Embodiment
Chassis position detecting device as a kind of vacuum plating unit of Fig. 1 ~ Fig. 2, comprise magnetic conductance rail 7, also comprise fiber optic emitter 1, fiber optic receiver 2, the optical fiber head of the optical fiber head of fiber optic emitter 1 and fiber optic receiver 2 passes respectively two optical fiber position-boards 4 and is arranged in the waist-shaped hole of offering on magnetic conductance rail 7 both sides substrates.
Proofing unit also comprises vacuum chamber cavity top board 6, is arranged on supporting seat 5 and flange end cap 3 on vacuum chamber cavity top board 6, fiber optic emitter 1 and fiber optic receiver 2 are installed on the upper surface of supporting seat 5, optical fiber between fiber optic emitter 1 and its optical fiber head passes flange end cap 3, and the optical fiber between fiber optic receiver 2 and its optical fiber head passes another flange end cap 3.
Fiber section is incorporated in vacuum chamber by flange end cap 3, and optical fiber is fixed on the substrate of magnetic conductance rail both sides.Magnetic conductance rail both sides substrate has can be for the waist-shaped hole of light source detection, and optical fiber head, between this waist-shaped hole, passes receipts by signal, and chassis is detected through position.Fiber optic emitter 1 and fiber optic receiver 2 are installed on supporting seat 5, and supporting seat 5 is connected with vacuum chamber cavity top board 6, and fiber optic emitter 1, fiber optic receiver 2 and supporting seat 5 are positioned at vacuum chamber cavity top board 6 tops, namely all are positioned at atmospheric layer.Optical fiber passes flange end cap 3 and vacuum chamber cavity top board 6 arrives in vacuum chamber cavity body, has entered vacuum zone, is installed on magnetic conductance rail 7 both sides by optical fiber position-board 4.The waist-shaped hole that fiber optic emitter 1 and fiber optic receiver 2 are offered by magnetic conductance rail 7 both sides carries out correlation, thereby judges the operation conditions of chassis 8.
Along with the temperature variation of vacuum chamber inside cavity, the magnetic conductance rail has the phenomenon of expanding with heat and contract with cold.Because now Fibre Optical Sensor is flexible structure, so the optical fiber head of fiber optic emitter 1 and fiber optic receiver 2 can not change with respect to the waist-shaped hole position of magnetic conductance rail 7 both sides, thereby overcomes the series of problems that sensor causes because of the variation of magnetic conductance rail.
The above is exemplarily described the utility model by reference to the accompanying drawings; obviously the utility model specific implementation is not subject to the restrictions described above; as long as the various improvement of having adopted the technical solution of the utility model to carry out; or directly apply to other occasion without improvement, all within protection domain of the present utility model.
Claims (2)
1. the chassis position detecting device of a vacuum plating unit, comprise magnetic conductance rail (7), it is characterized in that: also comprise fiber optic emitter (1), fiber optic receiver (2), the optical fiber head of the optical fiber head of described fiber optic emitter (1) and fiber optic receiver (2) passes respectively two optical fiber position-boards (4) and is arranged in the waist-shaped hole of offering on the substrate of magnetic conductance rail (7) both sides.
2. the chassis position detecting device of a kind of vacuum plating unit according to claim 1, it is characterized in that: described proofing unit also comprises vacuum chamber cavity top board (6), be arranged on supporting seat (5) and flange end cap (3) on vacuum chamber cavity top board (6), described fiber optic emitter (1) and fiber optic receiver (2) are installed on the upper surface of described supporting seat (5), optical fiber between described fiber optic emitter (1) and its optical fiber head passes flange end cap (3), optical fiber between described fiber optic receiver (2) and its optical fiber head passes another flange end cap (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203615865U CN203307430U (en) | 2013-06-24 | 2013-06-24 | Trolley position detection device of vacuum film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203615865U CN203307430U (en) | 2013-06-24 | 2013-06-24 | Trolley position detection device of vacuum film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203307430U true CN203307430U (en) | 2013-11-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203615865U Expired - Fee Related CN203307430U (en) | 2013-06-24 | 2013-06-24 | Trolley position detection device of vacuum film coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203307430U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695861A (en) * | 2013-12-20 | 2014-04-02 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connecting structure of substrate loading frame and magnetic lead rail |
| CN109983154A (en) * | 2017-10-27 | 2019-07-05 | 应用材料公司 | For the carrier of the contactless transport in depositing system, the device of the contactless transport for carrier, and the method for transport agent contactless in depositing system |
-
2013
- 2013-06-24 CN CN2013203615865U patent/CN203307430U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695861A (en) * | 2013-12-20 | 2014-04-02 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connecting structure of substrate loading frame and magnetic lead rail |
| CN109983154A (en) * | 2017-10-27 | 2019-07-05 | 应用材料公司 | For the carrier of the contactless transport in depositing system, the device of the contactless transport for carrier, and the method for transport agent contactless in depositing system |
| CN109983154B (en) * | 2017-10-27 | 2021-11-26 | 应用材料公司 | Carrier for contactless transport in a deposition system, device for transport of a carrier, and method for transporting a carrier |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131127 Termination date: 20180624 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |