CN203223440U - Magnetic guide rail connection mechanism - Google Patents
Magnetic guide rail connection mechanism Download PDFInfo
- Publication number
- CN203223440U CN203223440U CN 201320202934 CN201320202934U CN203223440U CN 203223440 U CN203223440 U CN 203223440U CN 201320202934 CN201320202934 CN 201320202934 CN 201320202934 U CN201320202934 U CN 201320202934U CN 203223440 U CN203223440 U CN 203223440U
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- CN
- China
- Prior art keywords
- connecting rod
- magnetic conductance
- pedestal
- conductance rail
- guide rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Fittings On The Vehicle Exterior For Carrying Loads, And Devices For Holding Or Mounting Articles (AREA)
Abstract
The utility model provides a magnetic guide rail connection mechanism which is applied to the technical field of vacuum coating equipment. A connection structure of the connection mechanism is respectively connected with a magnetic guide rail (3) and a flange end cover (4), the lower end face of a base (1) of the connection structure is fixedly connected with the magnetic guide rail (3) through bolts, one end of a connection rod (2) is movably connected with the base (1), and the other end of the connection rod (2) is fixedly connected with the flange end cover (4). According to the magnetic guide rail connection mechanism, the magnetic guide rail is connected with the flange end cover through the magnetic guide rail connection structure which is a flexible structure. When the magnetic guide rail works at the same high temperature and produces a certain amount of internal stress, as the magnetic guide rail connection mechanism moves flexibly, the stress produced by deformation of the magnetic guide rail is released, deformation of the magnetic guide rail will not be caused, and the problem that the deformation of the magnetic guide rail is large in the prior art is resolved.
Description
Technical field
The utility model belongs to the vacuum coating equipment technical field, more particularly, relates to a kind of magnetic conductance rail bindiny mechanism that can make the magnetic conductance rail not produce obvious distortion under high temperature condition.
Background technique
Magnetic conductance trailer structure of the prior art, its Placement mainly are that magnetic conductance rail and flange end cap are rigidly connected, though such Placement is fixing reliable on install, its defective is not have activity.The magnetic conductance rail is worked owing to being under the hot environment for a long time, its material can produce the phenomenon of expanding with heat and contract with cold, and hot soak condition and magnetic conductance rail are for being rigidly connected, and this moment, the magnetic conductance rail can produce certain internal stress, along with continuous accumulation and the increasing of internal stress, finally caused the distortion of magnetic conductance rail.The magnetic conductance rail is in case distortion is easy to make equipment can't be in normal working.
The model utility content
Technical problem to be solved in the utility model is: at the prior art deficiency, provide a kind of magnetic conductance rail that can make not produce obvious distortion under high temperature condition, be convenient to the magnetic conductance rail bindiny mechanism that the staff installs.
Solve above-described technical problem, the technological scheme that the utility model is taked is:
The utility model is a kind of magnetic conductance rail bindiny mechanism, described linkage structure is connected with the flange end cap with the magnetic conductance rail respectively, described linkage structure comprises pedestal, connecting rod, be bolted to connection between the lower end surface of described pedestal and the magnetic conductance rail, one end of connecting rod and pedestal flexibly connect, and the other end of connecting rod is fixedlyed connected with the flange end cap.
Preferably, fluting portion is set on the described pedestal, between two sides of fluting portion connecting pin is installed, on the described connecting rod perforation is set, the perforating movable of connecting rod is sleeved on the connecting pin.
Preferably, the end car of described connecting rod has one section thread structure, and flange end cap lower end has screw, and this screw is blind hole, is connected by thread connecting mode between connecting rod and the flange end cap.
Arrange on the described connecting rod along the con-rod only boss in one week, suit is regulated pad on the connecting rod, and described adjusting pad is regulated the structure that pad is set to regulate the relative distance between connecting rod and the flange end cap between connecting rod and flange end cap.
Preferably, as mode of execution one, described magnetic conductance rail bindiny mechanism also comprises supporting base, fluting portion is set on the supporting base, fluting portion penetrates the supporting base upper surface, and two sides of fluting portion are two supporting base sides, and two connecting pins that are arranged in parallel are set between two supporting base sides, one of them connecting pin and connecting rod flexibly connect, and another connecting pin and pedestal flexibly connect.
Preferably, as mode of execution two, described fluting portion is arranged on the pedestal upper surface, fluting portion is set to recessed structure, two sides of fluting portion are two pedestal sides, between two pedestal sides connecting pin are installed, and connecting rod one end and connecting pin flexibly connect.
Adopt the technical solution of the utility model, can obtain following beneficial effect:
Magnetic conductance rail described in the utility model bindiny mechanism, magnetic conductance rail linkage structure by flexible structure is connected the magnetic conductance rail with the flange end cap, when the magnetic conductance rail is worked under same high temperature condition, when it produces certain internal stress, because magnetic conductance rail bindiny mechanism is flexible movable, the stress relief that thereby the distortion of magnetic conductance rail can be produced can not cause the distortion of magnetic conductance rail, has solved in the prior art toward the big problem of magnetic conductance rail amount of deformation.
Description of drawings
Make briefly bright to each accompanying drawing of this specification expressed content and the mark among the figure below:
Fig. 1 is the connection diagram at magnetic conductance rail described in the utility model and vacuum chamber top.
Fig. 2 is the structural representation of the mode of execution one of magnetic conductance rail described in the utility model bindiny mechanism;
Fig. 3 is the structural representation of the mode of execution two of magnetic conductance rail described in the utility model bindiny mechanism;
Reference character: 1, pedestal; 2, connecting rod; 3, magnetic conductance rail; 4, flange end cap; 5, fluting portion; 6, connecting pin; 7, regulate pad; 9, supporting base upper surface; 10, supporting base side; 11, supporting base; 12, pedestal upper surface; 13, pedestal side; 14, magnetic conductance rail bindiny mechanism; 15, vacuum chamber top board.
Embodiment
Contrast accompanying drawing below, by the description to embodiment, the effect of the mutual alignment between the shape of embodiment of the present utility model such as related each member, structure, the each several part and annexation, each several part and working principle etc. are described in further detail:
Shown in accompanying drawing 1-accompanying drawing 3, the utility model is a kind of magnetic conductance rail bindiny mechanism, described linkage structure is connected with flange end cap 4 with magnetic conductance rail 3 respectively, described linkage structure comprises pedestal 1, connecting rod 2, be bolted to connection between the lower end surface of described pedestal 1 and the magnetic conductance rail 3, an end of connecting rod 2 and pedestal 1 flexibly connect, and the other end of connecting rod 2 is fixedlyed connected with flange end cap 4.
Preferably, on the described pedestal 1 fluting portion 5 is set, connecting pin 6 is installed between two sides of fluting portion 5, perforation 7 is set on the described connecting rod 2, perforation 7 movable sets of connecting rod 2 are on connecting pin 6.
Preferably, the end car of described connecting rod 2 has one section thread structure, and flange end cap 4 lower ends have screw, and this screw is blind hole, is connected by thread connecting mode between connecting rod 2 and the flange end cap 4.
Arrange on the described connecting rod 2 along the connecting rod boss in one week of 2 bodies, suit is regulated pad 7 on the connecting rod 2, described adjusting pad 7 is regulated the structure that pad 7 is set to regulate the relative distance between connecting rod 2 and the flange end cap 4 between connecting rod 2 and flange end cap 4.
Preferably, described magnetic conductance rail bindiny mechanism also comprises supporting base 11, fluting portion 5 is set on the supporting base 11, fluting portion 5 penetrates supporting base upper surface 9, two sides of fluting portion 5 are two supporting base sides 10, two connecting pins that are arranged in parallel 6 are set between two supporting base sides 10, and one of them connecting pin 6 flexibly connects with connecting rod 2, and another connecting pin 6 flexibly connects with pedestal 1.
Preferably, described fluting portion 5 is arranged on the pedestal upper surface 12, and fluting portion 5 is set to recessed structure, and two sides of fluting portion 5 are that connecting pin 6 is installed between 13, two pedestal sides 13, two pedestal sides, connecting rod 2 one ends and connecting pin 6 flexible connections.
Solved the big problem of magnetic conductance rail amount of deformation in the magnetic conductance rail described in the utility model bindiny mechanism.Structure of the present utility model, the magnetic conductance rail bindiny mechanism that flexibly connects by setting solves the problems referred to above.Flexibly connect by connecting pin between connecting rod one end of magnetic conductance trailer structure and the pedestal, like this, connecting rod just can rotate with respect to pedestal, and the Placement of the other end of connecting rod and flange end cap is for being threaded.
Two kinds of mode of executions to magnetic conductance trailer structure of the present utility model describe respectively below:
Fig. 2 is the structural representation of the mode of execution one of magnetic conductance rail described in the utility model bindiny mechanism;
In mode of execution one, described magnetic conductance rail bindiny mechanism also comprises supporting base 11, fluting portion 5 is set on the supporting base 11, fluting portion 5 penetrates supporting base upper surface 9, two sides of fluting portion 5 are two supporting base sides 10, two connecting pins that are arranged in parallel 6 are set between two supporting base sides 10, and one of them connecting pin 6 flexibly connects with connecting rod 2, and another connecting pin 6 flexibly connects with pedestal 1.
Fig. 3 is the structural representation of the mode of execution two of magnetic conductance rail described in the utility model bindiny mechanism;
In mode of execution two, described fluting portion 5 is arranged on the pedestal upper surface 12, and fluting portion 5 is set to recessed structure, and two sides of fluting portion 5 are two pedestal sides 13, connecting pin 6 is installed between two pedestal sides 13, and connecting rod 2 one ends and connecting pin 6 flexibly connect.
The utility model has solved the big problem of magnetic conductance rail amount of deformation in the past.The mode of existing magnetic conductance trailer structure mainly is that magnetic conductance rail and flange end cap are rigidly connected, though such mode is fixing reliable on install, its major defect does not have activity.The magnetic conductance rail is worked owing to being under the hot environment for a long time, its material can produce the phenomenon of expanding with heat and contract with cold, hot soak condition and magnetic conductance trailer structure are rigidly connected words, the magnetic conductance rail is worked under high-temperature ring and can be produced certain internal stress, along with continuous accumulation and the increasing of internal stress, finally caused the distortion of magnetic conductance rail.The magnetic conductance rail is in case distortion is easy to make equipment can't be in normal working.The utility model technology be exactly generation for fear of this type of situation.Connect by the flexible connection mode pedestal, the magnetic conductance rail is worked under same high temperature condition, and when it produced certain internal stress, because pedestal is movable, nature can or not cause the distortion of magnetic conductance rail with its main stress relief.
By reference to the accompanying drawings the utility model has been carried out exemplary description above; obviously the concrete realization of the utility model is not subjected to the restriction of aforesaid way; as long as the various improvement of having adopted method design of the present utility model and technological scheme to carry out; or without improving design of the present utility model and technological scheme are directly applied to other occasions, all in protection domain of the present utility model.
Claims (6)
1. magnetic conductance rail bindiny mechanism, described linkage structure is connected with flange end cap (4) with magnetic conductance rail (3) respectively, it is characterized in that: described linkage structure comprises pedestal (1), connecting rod (2), be bolted to connection between the lower end surface of described pedestal (1) and the magnetic conductance rail (3), one end of connecting rod (2) and pedestal (1) flexibly connect, and the other end of connecting rod (2) is fixedlyed connected with flange end cap (4).
2. magnetic conductance rail according to claim 1 bindiny mechanism, it is characterized in that: fluting portion (5) is set on the described pedestal (1), between two sides of fluting portion (5) connecting pin (6) is installed, described connecting rod arranges perforation on (2), and the perforating movable of connecting rod (2) is sleeved on the connecting pin (6).
3. the magnetic conductance rail bindiny mechanism of telling according to claim 1 or 2, it is characterized in that: the end car of described connecting rod (2) has one section thread structure, flange end cap (4) lower end has screw, this screw is blind hole, is connected by thread connecting mode between connecting rod (2) and the flange end cap (4).
4. magnetic conductance rail according to claim 3 bindiny mechanism, it is characterized in that: arrange on the described connecting rod (2) along connecting rod (2) boss in one week of body, connecting rod (2) is gone up suit and is regulated pad (7), described adjusting pad (7) is positioned between connecting rod (2) and the flange end cap (4), regulates the structure that pad (7) is set to regulate the relative distance between connecting rod (2) and the flange end cap (4).
5. magnetic conductance rail according to claim 4 bindiny mechanism, it is characterized in that: described magnetic conductance rail bindiny mechanism also comprises supporting base (11), fluting portion (5) is set on the supporting base (11), fluting portion (5) penetrates supporting base upper surface (9), two sides of fluting portion (5) are two supporting base sides (10), two connecting pins that are arranged in parallel (6) are set between two supporting base sides (10), one of them connecting pin (6) flexibly connects with connecting rod (2), and another connecting pin (6) flexibly connects with pedestal (1).
6. magnetic conductance rail according to claim 4 bindiny mechanism, it is characterized in that: described fluting portion (5) is arranged on the pedestal upper surface (12), fluting portion (5) is set to recessed structure, two sides of fluting portion (5) are two pedestal sides (13), connecting pin (6) is installed between two pedestal sides (13), and connecting rod (2) one ends and connecting pin (6) flexibly connect.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201320202934 CN203223440U (en) | 2013-04-22 | 2013-04-22 | Magnetic guide rail connection mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201320202934 CN203223440U (en) | 2013-04-22 | 2013-04-22 | Magnetic guide rail connection mechanism |
Publications (1)
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CN203223440U true CN203223440U (en) | 2013-10-02 |
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Family Applications (1)
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CN 201320202934 Expired - Fee Related CN203223440U (en) | 2013-04-22 | 2013-04-22 | Magnetic guide rail connection mechanism |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103695861A (en) * | 2013-12-20 | 2014-04-02 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connecting structure of substrate loading frame and magnetic lead rail |
CN105483633A (en) * | 2016-02-01 | 2016-04-13 | 京东方科技集团股份有限公司 | Magnetron sputtering device |
-
2013
- 2013-04-22 CN CN 201320202934 patent/CN203223440U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103695861A (en) * | 2013-12-20 | 2014-04-02 | 安徽省蚌埠华益导电膜玻璃有限公司 | Connecting structure of substrate loading frame and magnetic lead rail |
CN105483633A (en) * | 2016-02-01 | 2016-04-13 | 京东方科技集团股份有限公司 | Magnetron sputtering device |
CN105483633B (en) * | 2016-02-01 | 2017-12-08 | 京东方科技集团股份有限公司 | A kind of magnetic control sputtering device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131002 Termination date: 20180422 |