[summary of the invention]
For solving above technical problem, the invention provides a kind of automatic school of electro-static discharging generator
Barebone and calibration steps, improve quality and the efficiency of ESD generator transmission of quantity value.
The technical solution adopted in the present invention is:
A kind of electro-static discharging generator automated calibration system, calibrates circuit including charging voltage and puts
Electricity correcting current circuit, wherein, described charging voltage calibration circuit includes and ESD generator
The first discharge head being connected and the first discharge head dock to gather ESD generator charging voltage
High-voltage probe;Described discharge current calibration circuit includes the second discharge head, current sensor,
And oscillograph, described second discharge head is connected with ESD generator, detects ESD generator
Electric current time, the second discharge head align currents sensor, the charging charge of ESD generator punctures
Air forms transient current, and this transient current is obtained by current sensor.
As the preferred embodiments of the present invention, described discharge current calibration circuit has farther included
Coaxial attenuator, one end of described coaxial attenuator is connected with current sensor, the other end with
Oscillograph connects.
As the preferred embodiments of the present invention, described coaxial attenuator by Lowloss coaxial cables with
Oscillograph connects.
The rear end of described high-voltage probe connects has high pressure gauge, described high pressure gauge to be placed in faraday cup
In.
Part after described current sensor is placed in faraday cup.
Described first discharge head is circular, and the second discharge head is pointed.
The shield effectiveness of described faraday cup is not less than 40dB.
The degree of accuracy of the charging voltage calibration system of described high-voltage probe and high pressure gauge composition is the lowest
In 1 grade.
What described current sensor, coaxial attenuator, Lowloss coaxial cables and oscillograph were formed puts
The Y-axis degree of accuracy of electricity correcting current system is not less than 3 grades, and time accuracy is not less than 10 grades,
Described oscillographic bandwidth is not less than 1GHz, and sample rate is not less than 4GHz.
A kind of calibration steps based on above-mentioned electro-static discharging generator automated calibration system, including with
Lower step:
(1) charging voltage calibration: the charging voltage grade of ESD generator is set, to ESD
Generator is charged, and after reaching charging voltage, is docked with high-voltage probe by circular discharge head,
Pressing ESD generator discharge switch, charging charge transfers to high-voltage probe, reads this charged electrical
Pressure value, compares the parameter area that this charging voltage value and standard specify, if this value is on rule
In fixed scope, can use for qualified, the most defective, do not recommend;
(2) calibration of discharge current: ESD generator charging voltage grade is set, to ESD
Generator is charged, after reaching charging voltage, by pointed discharge head align currents sensor
Centre, presses ESD generator discharge switch, and charging charge punctures air and forms transient state electricity
Stream, pointed discharge head extracts this transient current value, is sent to show after forming induced voltage by no-load voltage ratio
Ripple device, analyzes in oscillograph and extracts each current peak and rise time, the electric current that will obtain
The parameter area that peak value and rise time specify with standard respectively compares, if this value is in regulation
In the range of, can use for qualified, the most defective, do not recommend.
Patent of the present invention has the advantages that the present invention utilizes high direct voltage table and high pressure to visit
Charging voltage parameter under head calibration pattern air discharge, accuracy of selection 0.2 grade (or more excellent)
High direct voltage table and high-voltage probe, charging voltage calibration accuracy grade can reach 1 grade;
Utilize the discharge current parameter under current probe and Oscilloscope Calibration contact discharge pattern, select
0.5 grade (Y-axis) and the oscillograph of 2 grades (X-axis), the current probe of 0.1 grade, electric discharge electricity
Stream calibration accuracy grade can reach Y-axis 3 grades and X-axis 10 grades.
[detailed description of the invention]
The present invention adopts the following technical scheme that and is achieved:
1, ESD generator calibration steps is proposed
The major parameter characterizing ESD generator has a two categories below: 1. charging voltage: main school
Charging voltage peak-peak under quasi-pattern air discharge, the degree of accuracy 5 grades, need to calibrate four etc.
Level: 2kV, 4kV, 8kV and 15kV, altogether four parameters.2. discharge current: main school
Under quasi-contact discharge pattern when discharge current peak-peak, 30ns when current peak, 60ns electricity
Stream peak value and the 10% of the first peak value~90% rise time, the 1st parameter degree of accuracy 10 grades,
2nd~the 3 parameter degrees of accuracy 30 grades, the 4th parameter area is 0.7ns~1ns.Need following four
Calibration respectively under individual grade: 2kV, 4kV, 6kV and 8kV, altogether 16 parameters.
Based on above demand, the present invention proposes following calibration steps: 1. charging voltage lubber-line
Road: as it is shown in figure 1, calibration ESD generator charging voltage under pattern air discharge,
Use circular discharge head.2. discharge current calibration circuit: as in figure 2 it is shown, calibration ESD sends out
Raw device charging current under contact discharge pattern, uses pointed discharge head.
2, ESD generator automated calibration system is developed
According to above-mentioned alignment requirements, needing the parameter of calibration to amount to 20, all parameters need
By manual calculation or repeatedly conditioning instrumentation could obtain so that process of the test is loaded down with trivial details, and efficiency is low
Under, and it is readily incorporated random error.
For these problems, the present invention have devised a set of ESD generator automated calibration system,
As it is shown on figure 3, include that charging voltage calibrates subsystem automatically and discharge current calibrates subsystem automatically
System.Utilize in system computer and the dedicated software modules of configuration, arrange ESD generator and
The parameter of calibration instrument, automatically reading instrument numerical value, and enter according to relevant GB and international standard
Row data process, and automatically form the original record (or form) required for calibration.So, both
Scientifically perform such alignment method, reduce random error, also substantially increase calibration effect
Rate.
3, exploitation ESD generator calibration software module
In order to realize automatically calibrating, develop special ESD generator calibration software module,
Its module frame chart is as shown in Figure 4.A whole set of software module is divided into four one-level parts: 1. parameter sets
Put parts: this parts major function is to arrange the various parameters required for calibration, including ESD
Generator parameter, oscillograph parameter, calibrating element parameter (as high-voltage probe, current sensor,
Coaxial attenuator etc.), the standard etc. of calibration institute foundation, respectively in the diagram with four two grades of portions
Part represents.2. instrumentation program controls parts: this parts major function is to realize the program to instrument
Control, and the compatible same quasi-instrument of main flow both at home and abroad of energy, including following four secondary component: control
Bus storehouse (compatible bus has RS-232, GPIB, USB and LAN etc.), oscillograph drive
Dynamic storehouse polytype oscillographs such as () compatible Agilent, Tektronics and Lecroy, ESD
Generator Driver Library products such as (compatible) Switzerland TESEQ, Shanghai three base, Suzhou 3C TEST,
Instrument interchange controls (using IVI-COM software engineering to realize the exchange of above-mentioned instrument).3. school
Quasi-Row control parts: the major function of these parts is to realize the control to calibration process correlated activation
System, including following four secondary component: calibration line configuring (selects to use Fig. 1 or Fig. 2 school
Directrix road, and be configured with related parameter), the calibration flow process configuration (electric pressure if desired for calibration
And calibration sequence), programmable instrument controls (realizing controlling the instruction of programmable instrument), calibrated
Process control (starts calibration process, complete calibration activities).4. data processor: these parts
Major function be that the data obtained in calibration process are processed as required, as to carrying
The ESD generator got and oscilloscope data, carry out accordance according to relevant standard and compare,
Eventually form the original record (or form) meeting specific format requirement.
Below in conjunction with the accompanying drawings the present invention is described in further detail:
Referring to Fig. 1, give the calibration circuit of charging voltage, calibration process is as follows: arrange
The charging voltage grade (2kV, 4kV, 8kv, 15kV) of ESD generator 1, sends out ESD
Raw device 1 is charged, after indicator lamp show and reaches charging voltage, by circular discharge head 2 and
High-voltage probe 3 docks, and presses ESD generator 1 discharge switch, and charging charge transfers to high pressure
Probe 3, the high pressure gauge 4 connected by rear end reads charging voltage value, the charged electrical that will obtain
Pressure value and standard specify that the parameter area that (or product description) specifies compares, if this value
Within the limits prescribed, can use for qualified, the most defective, do not recommend.
For the electric jamming avoiding electric discharge moment to produce, high pressure gauge 4 is positioned over shield effectiveness not
Less than 40dB(decay 100 times) faraday cup 5 in.Special suggestion, charging voltage is accurate
Exactness is 5 grades, and for guaranteeing the degree of accuracy of calibration, high-voltage probe 3 and high pressure gauge 4 are formed
Calibration system accuracies should be not less than 1 grade.
Referring to Fig. 2, give the calibration circuit of discharge current, calibration process is as follows: arrange
ESD generator 1 charging voltage grade (2kV, 4kV, 6kv, 8kV), to ESD generator
1 is charged, and after indicator lamp shows to reach charging voltage, pointed discharge head 6 is directed at electricity
The centre (through hole of a diameter about 1mm) of flow sensor 7, presses ESD generator
1 discharge switch, charging charge punctures air and forms transient current, and pointed discharge head 6 extracts should
Transient current value, is sent to oscillograph 10, at oscillograph 10 after forming induced voltage by no-load voltage ratio
Middle analysis also extracts each current peak and rise time, by the current peak obtained and rise time
Specify that the parameter area that (or product description) specifies compares respectively with standard, if this value
Within the limits prescribed, can use for qualified, the most defective, do not recommend.
For ensureing the safety of calibrator (-ter) unit and improving the degree of accuracy, circuit design also contemplate as follows
Factor: 1. for protection oscillograph 10, increase between current sensor 7 rear end and oscillograph 10
Add the coaxial attenuator 8 of a 20dB;2. for exempting from the electric jamming of electric discharge moment, will
The follow-up circuit of current sensor 7 (coaxial attenuator 8+ Lowloss coaxial cables 9+ oscillograph 10)
Put in faraday cup 5;3. discharge current parameter includes current peak and rise time, peak value
Calibration accuracy is 10 grades, and the rise time is 30 grades, therefore coaxial by current sensor 7+
The calibration system Y-axis degree of accuracy of attenuator 8+ Lowloss coaxial cables 9+ oscillograph 10 composition should
Being not less than 3 grades, time accuracy should be not less than 10 grades, the bandwidth of oscillograph 10 in native system
Being not less than 1GHz, sample rate is not less than 4GHz.
Refer to Fig. 3 and Fig. 4, give calibration function required by Fig. 1 and Fig. 2
Automated calibration system and software module block diagram, host computer and calibration software module 11 are through program control
Bus 12, can control ESD generator 1, high pressure gauge 4 and oscillograph 10, be automatically performed
Parameter arranges, controls calibration process, extracts test data, and according to concerned countries and international mark
Standard carries out data process, output original record (or form).
Although above in conjunction with accompanying drawing, invention has been described, but the invention is not limited in
Above-mentioned detailed description of the invention, above-mentioned detailed description of the invention be only schematically rather than
Restrictive, those of ordinary skill in the art is under the enlightenment of the present invention, without departing from this
In the case of bright objective and scope of the claimed protection, it is also possible to make a lot of form, these
Within belonging to the protection of the present invention.