[summary of the invention]
For solving above technical matters, the invention provides a kind of electro-static discharging generator automated calibration system and calibration steps, improve quality and the efficiency of ESD generator transmission of quantity value.
The technical solution adopted in the present invention is:
A kind of electro-static discharging generator automated calibration system, comprise charging voltage calibration circuit and discharge current calibration circuit, wherein, described charging voltage calibration circuit comprises the first discharge head of being connected with ESD generator, docks to gather the high-voltage probe of ESD generator charging voltage with the first discharge head; Described discharge current calibration circuit comprises the second discharge head, current sensor, and oscillograph, described the second discharge head is connected with ESD generator, while detecting the electric current of ESD generator, the second discharge head align currents sensor, the charging charge of ESD generator punctures air and forms transient current, and this transient current is obtained by current sensor.
As the preferred embodiments of the present invention, described discharge current calibration circuit further includes coaxial attenuator, and one end of described coaxial attenuator is connected with current sensor, and the other end is connected with oscillograph.
As the preferred embodiments of the present invention, described coaxial attenuator is connected with oscillograph by Lowloss coaxial cables.
The rear end of described high-voltage probe is connected with high pressure gauge, and described high pressure gauge is placed in faraday cup.
Part after described current sensor is all positioned in faraday cup.
Described the first discharge head is circular, and the second discharge head is pointed.
The shield effectiveness of described faraday cup is not less than 40dB.
The accuracy of the charging voltage calibration system that described high-voltage probe and high pressure gauge form is not less than 1 grade.
The Y-axis accuracy of the discharge current calibration system that described current sensor, coaxial attenuator, Lowloss coaxial cables and oscillograph form is not less than 3 grades, and time accuracy is not less than 10 grades, and described oscillographic bandwidth is not less than 1GHz, and sampling rate is not less than 4GHz.
A calibration steps based on above-mentioned electro-static discharging generator automated calibration system, comprises the following steps:
(1) charging voltage calibration: the charging voltage grade that ESD generator is set, ESD generator is charged, after reaching charging voltage, circular discharge head is docked with high-voltage probe, press ESD generator discharge switch, charging charge is transferred to high-voltage probe, reads this charging voltage value, and the parameter area of this charging voltage value and standard regulation is compared, if this value within the limits prescribed, for qualified, can use, otherwise defective, not recommendation;
(2) calibration of discharge current: ESD generator charging voltage grade is set, ESD generator is charged, reach after charging voltage, by the centre of pointed discharge head align currents sensor, press ESD generator discharge switch, charging charge punctures air and forms transient current, pointed discharge head extracts this transient current value, after forming induced voltage by no-load voltage ratio, be sent to oscillograph, in oscillograph, analyze and extract each current peak and rise time, the current peak of acquisition and rise time are compared with the parameter area of standard regulation respectively, if this value within the limits prescribed, for qualified, can use, otherwise defective, recommendation not.
Patent of the present invention has following beneficial effect: the present invention utilizes the charging voltage parameter under high direct voltage table and high-voltage probe calibration pattern air discharge, high direct voltage table and the high-voltage probe of accuracy of selection 0.2 grade (or more excellent), charging voltage calibration accuracy grade can reach 1 grade; Utilize the discharge current parameter under current probe and Oscilloscope Calibration contact discharge pattern, select the oscillograph of 0.5 grade (Y-axis) and 2 grades (X-axis), the current probe of 0.1 grade, discharge current calibration accuracy grade can reach 10 grades of 3 grades of Y-axis and X-axis.
[embodiment]
The present invention takes following technical scheme to be achieved:
1, ESD generator calibration steps is proposed
The major parameter that characterizes ESD generator has following two classes: 1. charging voltage: mainly calibrate charging voltage peak-peak under pattern air discharge, 5 grades of accuracy, need to calibrate four grade: 2kV, 4kV, 8kV and 15kV, amount to four parameters.2. discharge current: 10%~90% rise time of current peak and the first peak value when current peak, 60ns while mainly calibrating discharge current peak-peak, 30ns under contact discharge pattern, the 1st 10 grades of parameter accuracy, 2nd~3 30 grades of parameter accuracy, the 4th parameter area is 0.7ns~1ns.Need under following four grades, calibrate respectively: 2kV, 4kV, 6kV and 8kV, amount to 16 parameters.
Based on above demand, the present invention proposes following calibration steps: 1. charging voltage is calibrated circuit: as shown in Figure 1, the charging voltage of calibration ESD generator under pattern air discharge, adopts circular discharge head.2. discharge current is calibrated circuit: as shown in Figure 2, the charging current of calibration ESD generator under contact discharge pattern, adopts pointed discharge head.
2, development ESD generator automated calibration system
According to above-mentioned alignment requirements, need the parameter of calibration to amount to 20, all parameters need to be by hand computations or are repeatedly regulated instrument to obtain, and make process of the test loaded down with trivial details, inefficiency, and easily introduce stochastic error.
For these problems, the present invention has designed a set of ESD generator automated calibration system, as shown in Figure 3, comprises charging voltage automatic calibration subsystem and discharge current automatic calibration subsystem.Utilize the computing machine and the dedicated software modules that in system, configure, the parameter of ESD generator and calibration instrument is set, automatically reads instrument numerical value, and carry out data processing according to relevant GB and international standard, automatically form calibration needed raw readings (or form).Like this, both scientifically carry out such alignment method, reduced stochastic error, also greatly improved calibration efficiency.
3, exploitation ESD generator calibration software module
In order to realize automatic calibration, developed special-purpose ESD generator calibration software module, its module frame chart is as shown in Figure 4.A whole set of software module is divided into four one-level parts: 1. parameter arranges parts: this parts major function is that the needed various parameters of calibration are set, comprise the standard of ESD generator parameter, oscillograph parameter, calibrating element parameter (as high-voltage probe, current sensor, coaxial attenuator etc.), calibration institute foundation etc., in Fig. 4, with four secondary parts, represent respectively.2. instrumentation program control assembly: this parts major function is the programmed control realizing instrument, and can the compatible same quasi-instrument of main flow both at home and abroad, comprise following four secondary parts: control bus storehouse (compatible bus has RS-232, GPIB, USB and LAN etc.), oscillograph Driver Library (polytype oscillograph such as compatible Agilent, Tektronics and Lecroy), ESD generator Driver Library products such as () compatible Switzerland TESEQ, Shanghai three bases, Suzhou 3C TEST, instrument exchange and control (adopting IVI-COM software engineering to realize the exchange of above-mentioned instrument).3. calibration flow process control parts: the major function of these parts is the control realizing calibration process correlated activation, comprise following four secondary parts: calibration line configuring (selects to adopt Fig. 1 or Fig. 2 to calibrate circuit, and dispose related parameter), calibration flow process configuration (as electric pressure and the calibration sequence of needs calibration), programmable instrument control (realize the instruction of programmable instrument is controlled), calibration process is controlled (start calibration process, complete calibration activities).4. data processor: the major function of these parts is that the data to obtaining in calibration process are processed as required, as the ESD generator to extracting and oscillograph data, according to related standards, carry out accordance comparison, finally form the raw readings (or form) that meets specific format requirement.
Below in conjunction with accompanying drawing, the present invention is described in further detail:
Refer to Fig. 1, provided the calibration circuit of charging voltage, calibration process is as follows: the charging voltage grade (2kV that ESD generator 1 is set, 4kV, 8kv, 15kV), ESD generator 1 is charged, when showing, pilot lamp reaches after charging voltage, circular discharge head 2 is docked with high-voltage probe 3, press ESD generator 1 discharge switch, charging charge is transferred to high-voltage probe 3, the high pressure gauge 4 connecting by rear end reads charging voltage value, the parameter area of the charging voltage value obtaining and standard regulation (or product description) regulation is compared, if this value within the limits prescribed, for qualified, can use, otherwise defective, recommendation not.
The electric field producing for the moment of avoiding discharging disturbs, and high pressure gauge 4 is positioned over to shield effectiveness and is not less than 100 times of 40dB(decay) faraday cup 5 in.Special suggestion, charging voltage accuracy is 5 grades, for guaranteeing the accuracy of calibration, the calibration system accuracy that high-voltage probe 3 and high pressure gauge 4 form should be not less than 1 grade.
Refer to Fig. 2, provided the calibration circuit of discharge current, calibration process is as follows: ESD generator 1 charging voltage grade (2kV is set, 4kV, 6kv, 8kV), ESD generator 1 is charged, when showing, pilot lamp reaches after charging voltage, by the centre of pointed discharge head 6 align currents sensors 7 (through hole of a diameter 1mm), press ESD generator 1 discharge switch, charging charge punctures air and forms transient current, pointed discharge head 6 extracts this transient current value, after forming induced voltage by no-load voltage ratio, be sent to oscillograph 10, in oscillograph 10, analyze and extract each current peak and rise time, the current peak obtaining and rise time are compared with the parameter area of standard regulation (or product description) regulation respectively, if this value within the limits prescribed, for qualified, can use, otherwise defective, recommendation not.
For guaranteeing the safety of correcting device and improving accuracy, in line design, also considered following factor: be 1. protection oscillograph 10, between current sensor 7 rear ends and oscillograph 10, increased the coaxial attenuator 8 of a 20dB; 2. for exempting from the electric discharge electric field interference of moment, the follow-up circuit of current sensor 7 (coaxial attenuator 8+ Lowloss coaxial cables 9+ oscillograph 10) is put into faraday cup 5; 3. discharge current parameter comprises current peak and rise time, peak value calibration accuracy is 10 grades, rise time is 30 grades, therefore the calibration system Y-axis accuracy being comprised of current sensor 7+ coaxial attenuator 8+ Lowloss coaxial cables 9+ oscillograph 10 should be not less than 3 grades, time accuracy should be not less than 10 grades, in native system, the bandwidth of oscillograph 10 is not less than 1GHz, and sampling rate is not less than 4GHz.
Refer to Fig. 3 and Fig. 4, the automated calibration system and the software module block diagram that complete Fig. 1 and the desired calibration function of Fig. 2 have been provided, host computer and calibration software module 11 are through programmed bus 12, can control ESD generator 1, high pressure gauge 4 and oscillograph 10, automatically complete parameter setting, control calibration process, extract test data, and according to concerned countries and international standard, carry out data processing, output raw readings (or form).
Although invention has been described by reference to the accompanying drawings above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment is only schematic; rather than restrictive; those of ordinary skill in the art is under enlightenment of the present invention; not departing from the scope situation that aim of the present invention and claim protect, can also make a lot of forms, within these all belong to protection of the present invention.