CN103668074A - Vacuum film-plating device having three-section shell and alternate plating piece turners - Google Patents
Vacuum film-plating device having three-section shell and alternate plating piece turners Download PDFInfo
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- CN103668074A CN103668074A CN201210324191.8A CN201210324191A CN103668074A CN 103668074 A CN103668074 A CN 103668074A CN 201210324191 A CN201210324191 A CN 201210324191A CN 103668074 A CN103668074 A CN 103668074A
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Abstract
The invention relates to a vacuum film-plating device having a three-section shell and alternate plating piece turners. A vacuum film-plating chamber is composed of a fixed section and two alternate rotation sections; and the inside of each of the two rotation section is accompanied with an extensible plating piece turner. The vacuum film-plating device is characterized in that the quantity of plating piece hanging shafts and the quantity of electrodes on the plating piece turner can be flexibly changed.
Description
Technical field
The present invention relates to the research and development manufacture of vacuum coating film equipment, especially the setting to vacuum chamber and plating piece pivoted frame and magnetic control evaporation electrode.
Background technology
In low-temperature plasma film process, film forming environment, sputtering target material or evaporation electrode power supply, plating piece pivoted frame, man-machine technology controlling and process, regularly clear maintenance etc., determine quality of forming film and efficiency and stability in production process.The coating chamber, the arranging of plating piece pivoted frame that the present invention is directed to film forming environment propose the filming chamber of three lobe shell combination structure vacuum platings and can expand to replace continuously plating piece pivoted frame.To improve quality stability and the efficiency of quality of forming film and film-forming products.
Summary of the invention
The invention provides a kind of three lobe housings with the vacuum coater that replaces plating piece pivoted frame.It comprises three lobe coating chambers, can expand continuously alternately plating piece pivoted frame, it is characterized in that:
Described three lobe housing coating chambers are comprised of (1g) fixed lobes, (2h1,2h2) movable flap, and three lobe housing groups form vacuum film coating chamber; Described (3) can be expanded continuously alternately plating piece pivoted frame and be connect extension bull stick, (3-9) rotation bull stick, (5) and can be expanded continuous plating piece pivoted frame upper support web wheel, (44) magnetic control or the evaporation electrode connective bar of replacing and form by once revolve round the sun wheel, (3-3) rotation idle wheel, (3-1) fixed pulley, (3-4) self-rotation wheel, (3-5) secondary revolution wheel, (3-6) secondary self-rotation wheel, (3-7) plating piece unit pivoted frame, (3-8) plating piece of (30q) buncher driving wheel, (3-2).
Three described lobe housing coating chambers are with expanding continuously the alternately vacuum coater of plating piece pivoted frame, it is characterized in that described three lobe housing coating chambers are by the hinged (2h1 of (11) substrate flange two axial limit symmetry of (1g) fixed lobes, 2h2) each axial limit of (11) substrate flange of movable flap, two (2h1, 2h2) movable flap replaces samsara and is combined into coating chamber with (1g) fixed lobes, three lobes (1g) and (2h1 of described three lobe housing coating chambers, 2h2) its axial cross section is semicircle housing, its axial two ends is semicircle ancient cooking vessel shape, its axial slices is with (11) substrate flange, substrate flange is with (a) o-ring groove, described (1g) fixed lobes has and diffusion pump or the large valve flange-interface of molecular pump (12) and sealed groove, the upper end of described (1g) fixed lobes is with (444) magnetic control or evaporation electrode connective bar mouth, and the inwall of described three lobe housing coating chambers is with steel clothing.
Three described lobe housings are with the vacuum coater that replaces plating piece pivoted frame, it is characterized in that described (3-7) plating piece unit pivoted frame build-in is on (3-5) secondary revolution wheel, under nested (3-4) self-rotation wheel and with rotation bull stick of mandrel (3-9); (3-7) the radially any uniform arrangement n of plating piece unit pivoted frame (3-6) secondary self-rotation wheel also connects extension bull stick with mandrel (3-8) plating piece; (3-6) secondary self-rotation wheel is by (3-5) secondary revolution wheel drive;
Described (3) can be expanded continuously alternately plating piece pivoted frame and once revolve round the suns individual (3-7) plating piece of radially any uniform arrangement n unit pivoted frame of taking turns, its corresponding n of setting to (3-3) rotation idle wheel, (3-4) self-rotation wheel by (3-2);
Described (44) magnetic control or evaporation electrode connective bar one end build-in are in (3-1) fixed pulley, be fixed on again in (2h1 or 2h2) movable flap, the other end is fixed on (5) can be expanded continuously alternately on plating piece pivoted frame upper support web wheel and dock with (444) magnetic control in (1g) fixed lobes or evaporation electrode connective bar mouth, can many groups to setting up.
The present invention solves its technical problem: vacuum film coating chamber, the alternation continuously of plating piece pivoted frame, and plating piece pivoted frame can spread with respect to plating piece, saves energy consumption, raises the efficiency and reliability.
The technical solution adopted for the present invention to solve the technical problems is: vacuum film coating chamber decomposition consists of three lobe shell combination, by two lobe shell combination, worked, and supporting pair of plating piece pivoted frame.Inspired by " Bai Linu " channel theory, adopt semicolumn ancient cooking vessel shape two lobe shell combination coating chambers; Two plating piece pivoted frames are quoted " planet circular system configuration ", in train, radially locate uniform arrangement plating piece unit pivoted frame.
The invention has the beneficial effects as follows: vacuum film coating chamber decomposition consists of three lobe shell combination, by two lobe shell combination, worked, supporting pair of plating piece pivoted frame realized alternation continuously.Inspired by " Bai Linu " channel theory, adopt semicolumn ancient cooking vessel shape two lobe shell combination coating chambers, realize the confined chamber body dead angle of eliminating in smoothing junction, make the airtight die cavity of vacuum film coating chamber without rapids stream Vortex surge, large degree restriction blast impacts, the step-up ratio of restriction vacuum film coating chamber, saves vacuum reaching standard time.Two plating piece pivoted frames are quoted " planet circular system configuration ", train radially locate uniform arrangement plating piece unit pivoted frame, realize free plating piece pivoted frame expansion, realize any speed governing of plating piece pivoted frame.
Accompanying drawing explanation
Fig. 1 is that the present invention's three lobe housings are with the vacuum coater wiring layout that replaces plating piece pivoted frame
Fig. 2 is that the present invention can expand continuously alternately plating piece pivoted frame wiring layout
Below in conjunction with accompanying drawing, invention is further illustrated.
Embodiment
As shown in Figure 1, three lobe housing coating chambers are semicolumn ancient cooking vessel shape housing, each axial limit of (11) substrate flange by (11) substrate flange two axial limit symmetry hinged (2h1,2h2) movable flap of (1g) fixed lobes, two (2h1,2h2) movable flap replace samsara and are combined into coating chamber with (1g) fixed lobes, three lobes (1g) of described three lobe housing coating chambers and (2h1,2h2) its axial cross section are semicircle housing, its axial two ends is semicircle ancient cooking vessel shape, its axial slices is with (11) substrate flange, and substrate flange is with (a) o-ring groove; Described (1g) fixed lobes has and diffusion pump or the large valve flange-interface of molecular pump (12) and sealed groove, the upper end of described (1g) fixed lobes is with (444) magnetic control or evaporation electrode connective bar mouth, and the inwall of described three lobe housing coating chambers is with steel clothing;
As shown in Figure 2, (3) can expand and replace continuously two (2h1 that plating piece pivoted frame is attached to three lobe housing coating chambers, 2h2) in movable flap, alternate wheel is back into entering coating chamber work, described (3) can be expanded continuously alternately plating piece pivoted frame and quote " planet circular system configuration ", by (30q) buncher driving wheel, (3-2) once revolution is taken turns, (3-3) a rotation idle wheel, (3-1) fixed pulley, (3-4) self-rotation wheel, (3-5) secondary revolution wheel, (3-6) secondary self-rotation wheel, (3-7) plating piece unit pivoted frame, (3-8) plating piece connects extension bull stick, (3-9) a rotation bull stick, (5) can expand continuously alternately plating piece pivoted frame upper support web wheel, (44) magnetic control or evaporation electrode connective bar form,
Described (3-7) plating piece unit pivoted frame build-in on (3-5) secondary revolution wheel, under nested (3-4) self-rotation wheel and with rotation bull stick of mandrel (3-9); (3-7) the radially any uniform arrangement n of plating piece unit pivoted frame (3-6) secondary self-rotation wheel also connects extension bull stick with mandrel (3-8) plating piece; (3-6) secondary self-rotation wheel is by (3-5) secondary revolution wheel drive;
Described (3) can be expanded continuously alternately plating piece pivoted frame and once revolve round the suns individual (3-7) plating piece of radially any uniform arrangement n unit pivoted frame of taking turns, its corresponding n of setting to (3-3) rotation idle wheel, (3-4) self-rotation wheel by (3-2);
Described (44) magnetic control or evaporation electrode connective bar one end build-in are in (3-1) fixed pulley, be fixed on again in (2h1 or 2h2) movable flap, the other end is fixed on (5) can be expanded continuously alternately on plating piece pivoted frame upper support web wheel and dock with (444) magnetic control in (1g) fixed lobes or evaporation electrode connective bar mouth, can many groups to setting up.
Claims (3)
1. three lobe housings are with a vacuum coater that replaces plating piece pivoted frame, and it comprises three lobe housing coating chambers, can expand continuously alternately plating piece pivoted frame, it is characterized in that:
Described three lobe housing coating chambers are comprised of (1g) fixed lobes and (2h1,2h2) two movable flap, and three lobe housing groups form vacuum film coating chamber; Described (3) can be expanded continuously alternately plating piece pivoted frame and be connect extension bull stick, (3-9) rotation bull stick, (5) and can be expanded continuous plating piece pivoted frame upper support web wheel, (44) magnetic control or the evaporation electrode connective bar of replacing and form by once revolve round the sun wheel, (3-3) rotation idle wheel, (3-1) fixed pulley, (3-4) self-rotation wheel, (3-5) secondary revolution wheel, (3-6) secondary self-rotation wheel, (3-7) plating piece unit pivoted frame, (3-8) plating piece of (30q) buncher driving wheel, (3-2).
2. three lobe housings according to claim 1 are with the vacuum coater that replaces plating piece pivoted frame, it is characterized in that described three lobe housing coating chambers are by the hinged (2h1 of (11) substrate flange two axial limit symmetry of (1g) fixed lobes, 2h2) each axial limit of (11) substrate flange of movable flap, two (2h1, 2h2) movable flap replaces samsara and is combined into coating chamber with (1g) fixed lobes, three lobes (1g) and (2h1 of described three lobe housing coating chambers, 2h2) its axial cross section is semicircle housing, its axial two ends is semicircle ancient cooking vessel shape, its axial slices is with (11) substrate flange, substrate flange is with (a) o-ring groove, described (1g) fixed lobes has and diffusion pump or the large valve flange-interface of molecular pump (12) and sealed groove, the upper end of described (1g) fixed lobes is with (444) magnetic control or evaporation electrode connective bar mouth, and the inwall of described three lobe housing coating chambers is with steel clothing.
3. three lobe housings according to claim 1 are with the vacuum coater that replaces plating piece pivoted frame, it is characterized in that described (3-7) plating piece unit pivoted frame build-in is on (3-5) secondary revolution wheel, under nested (3-4) self-rotation wheel and with rotation bull stick of mandrel (3-9); (3-7) the radially any uniform arrangement n of plating piece unit pivoted frame (3-6) secondary self-rotation wheel also connects extension bull stick with mandrel (3-8) plating piece; (3-6) secondary self-rotation wheel is by (3-5) secondary revolution wheel drive;
Described (3) can expand continuously alternately plating piece pivoted frame by (3-2) once revolve round the sun individual (3-7) plating piece of radially any uniform arrangements n unit pivoted frame, its corresponding n of setting of wheel to (3-3) rotation idle wheel, individual (3-7) plating piece of (3-4) arrangement n unit pivoted frame, its corresponding n of setting to (3-3) rotation idle wheel, (3-4) self-rotation wheel;
Described (44) magnetic control or evaporation electrode connective bar one end build-in are in (3-1) fixed pulley, be fixed on again in (2h1 or 2h2) movable flap, the other end is fixed on (5) can be expanded continuously alternately on plating piece pivoted frame upper support web wheel and dock with (444) magnetic control in (1g) fixed lobes or evaporation electrode connective bar mouth, can many groups to setting up.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210324191.8A CN103668074A (en) | 2012-09-04 | 2012-09-04 | Vacuum film-plating device having three-section shell and alternate plating piece turners |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210324191.8A CN103668074A (en) | 2012-09-04 | 2012-09-04 | Vacuum film-plating device having three-section shell and alternate plating piece turners |
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| CN103668074A true CN103668074A (en) | 2014-03-26 |
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| CN201210324191.8A Pending CN103668074A (en) | 2012-09-04 | 2012-09-04 | Vacuum film-plating device having three-section shell and alternate plating piece turners |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020020179A1 (en) * | 2018-07-23 | 2020-01-30 | 北京铂阳顶荣光伏科技有限公司 | Coating apparatus and coating method |
Citations (5)
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| US5061356A (en) * | 1989-02-28 | 1991-10-29 | Hitachi, Ltd. | Vacuum treatment apparatus and vacuum treatment method |
| CN2374553Y (en) * | 1997-07-29 | 2000-04-19 | 肇庆市腾胜真空技术工程有限公司 | Mussel dual-chamber column arc source multi-arc ion film coating machine |
| CN101949000A (en) * | 2010-09-17 | 2011-01-19 | 温州市佳能真空电镀设备科技有限公司 | Vacuum magnetron sputtering multi-arc ion composite coating machine |
| CN102053554A (en) * | 2009-10-26 | 2011-05-11 | 布朗潘有限公司 | Tourbillon mechanism and clockwork including a tourbillon mechanism |
| CN203034083U (en) * | 2012-09-04 | 2013-07-03 | 深圳市特艺实业有限公司 | Vacuum coating device with three-flap housing attached with alternate coating piece rotating stands |
-
2012
- 2012-09-04 CN CN201210324191.8A patent/CN103668074A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5061356A (en) * | 1989-02-28 | 1991-10-29 | Hitachi, Ltd. | Vacuum treatment apparatus and vacuum treatment method |
| CN2374553Y (en) * | 1997-07-29 | 2000-04-19 | 肇庆市腾胜真空技术工程有限公司 | Mussel dual-chamber column arc source multi-arc ion film coating machine |
| CN102053554A (en) * | 2009-10-26 | 2011-05-11 | 布朗潘有限公司 | Tourbillon mechanism and clockwork including a tourbillon mechanism |
| CN101949000A (en) * | 2010-09-17 | 2011-01-19 | 温州市佳能真空电镀设备科技有限公司 | Vacuum magnetron sputtering multi-arc ion composite coating machine |
| CN203034083U (en) * | 2012-09-04 | 2013-07-03 | 深圳市特艺实业有限公司 | Vacuum coating device with three-flap housing attached with alternate coating piece rotating stands |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020020179A1 (en) * | 2018-07-23 | 2020-01-30 | 北京铂阳顶荣光伏科技有限公司 | Coating apparatus and coating method |
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Application publication date: 20140326 |