CN103645531A - Large-area grating ruling cutter frame system - Google Patents

Large-area grating ruling cutter frame system Download PDF

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Publication number
CN103645531A
CN103645531A CN201310606301.4A CN201310606301A CN103645531A CN 103645531 A CN103645531 A CN 103645531A CN 201310606301 A CN201310606301 A CN 201310606301A CN 103645531 A CN103645531 A CN 103645531A
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China
Prior art keywords
shoes
slide block
glass guide
rail
frame system
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CN201310606301.4A
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CN103645531B (en
Inventor
李晓天
于海利
唐玉国
杨超
齐向东
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Publication of CN103645531A publication Critical patent/CN103645531A/en
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Abstract

The invention discloses a large-area grating ruling cutter frame system, relates to the technical field of grating ruling, and solves a problem that the long-term operation stability of a cutter is difficult to be ensured because connection between a sliding block and a cutter frame mounting plate is of a hinge structure and an axial gap error exists between a rotating shaft and a shaft sleeve of the hinge structure. The large-area grating ruling cutter frame system comprises a glass guide rail, a sliding block, a connecting rod, a ruling cutter frame and a cutter frame mounting frame, wherein the sliding block slides along the glass guide rail, the sliding block is of an all-closed hollow shape, sleeved on the glass guide rail and provided with guide sliding feet and elastic sliding feet, and the guide sliding feet and the elastic sliding feet are all contacted with the external surface of the glass guide rail; the connecting rod is connected with an external driving mechanism and the sliding block, and the driving mechanism pushes and pulls the connecting rod so as to drive the sliding block to slide along the glass guide rail; and the cutter mounting plate is used for mounting a cutter frame, the upper end of the cutter frame mounting plate is fixedly connected with the sliding block, and the lower end of the cutter frame mounting plate is provided with the guide sliding feet. The large-area grating ruling cutter frame system is conducive to reducing the scribed line position error during grating ruling and improving the large-area grating ruling precision.

Description

A kind of large-area grating notching knife frame system
Technical field
The present invention relates to grating ruling technical field, particularly relate to a kind of large-area grating notching knife frame system.
Background technology
Mechanical scratching method is one of main method of making on grating, the method requires adamas icking tool to squeeze out a series of equally spaced grooves at aluminium film surface, the ideal form of every groove is straight line, therefore high to the long-time running accuracy requirement of the tool holder system of installation adamas icking tool.
In existing large-area grating delineation technology, tool holder system adopts the slide block of spill to run on glass guide-rail; Because slide block lower end does not have confining force, cause slide block easily to rotate, thereby affect the running precision of adamas icking tool; And the connecting link of existing tool holder system is fixedly connected with slide block, when extraneous driving force direction and slide block movement direction are when inconsistent, cause glass guide-rail distortion to make more greatly and easily slide block actual motion track and ideal trajectory generation relatively large deviation; In addition, connected mode between existing slide block and knife rest installing plate is hinge structure, owing to there is axial play error between hinge structure rotation axis and axle sleeve, be difficult to guarantee the long-time stability of icking tool operation, be unfavorable for scribing the uniform large-area grating of grooved and ruling span.
Given this, overcoming the existing defect of the prior art is the art problem demanding prompt solution.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of large-area grating notching knife frame system that contributes to reduce grating line site error.
A large-area grating notching knife frame system, described large-area grating notching knife frame system comprises:
One glass guide-rail; The slide block sliding along described glass guide-rail, described slide block is circumferential closed hollow form and is set on glass guide-rail, on slide block, be coated with at least three guiding shoes and at least three elasticity shoes, described guiding shoes all contacts with described glass guide-rail outside surface with elasticity shoes; The connecting link being connected with described slide block with extraneous driving mechanism respectively, connecting link is to drive slide block to slide along glass guide-rail described in driving mechanism push-and-pull; One delineation knife rest; For the knife rest installing plate of described delineation knife rest is installed, the upper end of described knife rest installing plate is fixedly connected with slide block, and the lower end of knife rest installing plate is provided with described guiding shoes, and described guiding shoes contacts with glass guide-rail.
Further, described slide block is the hollow structure of hollow, the hollow space of slide block is provided with upper horizontal surface, horizontal surface, the first side surface and the second side surface, two guiding shoes are installed between described upper horizontal surface and glass guide-rail, two elasticity shoes are installed between described horizontal surface and glass guide-rail, three elasticity shoes are installed between described the first side surface and glass guide-rail, three guiding shoes are installed between described the second side surface and glass guide-rail.
Further, described large-area grating notching knife frame system also comprises a flexible Coupling Shaft, and described flexible Coupling Shaft one end is fixedly connected with connecting link, and the other end is fixedly connected with slide block by an adaptor.
Further, the two ends of described connecting link are spherical plain bearing rod end.
Further, the middle part of described flexible Coupling Shaft is spring leaf.
Further, described large-area grating notching knife frame system also comprises a flexible card extender, described flexible card extender connection sliding block and knife rest installing plate, the upside of described flexible card extender is fixedly connected with slide block, and the downside of described flexible card extender is fixedly connected with knife rest installing plate.
Further, described flexible card extender is flexible hinge structure.
Further, described elasticity shoes comprises successively along the direction from slide block inner side to slide block outside: elasticity shoes contact, contact shoe, contact fixing plate, stage clip, vernier adjustment knob and pressing plate; Wherein, described pressing plate is fixed on slide block; Described elasticity shoes contact contacts with glass guide-rail, and is fixedly installed in contact shoe by contact fixing plate, and contact fixing plate and contact shoe are threaded connection; Described stage clip one end contacts with contact fixing plate, and the stage clip other end contacts with vernier adjustment knob; Vernier adjustment knob and pressing plate are threaded connection.
Further, described guiding shoes comprises successively along the direction from slide block inner side to slide block outside: guiding shoes contact, shoes trim ring and shoes seat; Wherein, described shoes seat is fixedly connected with by screw thread with knife rest installing plate; Described guiding shoes contact contacts with glass guide-rail, and guiding shoes contact is fixedly mounted on shoes seat;
Described shoes trim ring is set on guiding shoes contact and is threaded connection with shoes seat; Described shoes seat is comprised of head and body, and head dimensions is greater than body dimension diametrically, forms a step trough, in described step trough, between shoes seat and knife rest installing plate, is provided with a pad.
Further, on described slide block, the opposite side relative with knife rest installing plate one side is fixedly connected with a counterweight.
Beneficial effect of the present invention: adopt and be circumferential closed hollow form slide block, this slide block set is loaded on glass guide-rail, and between slide block and glass guide-rail, be provided with guiding shoes and elasticity shoes, guiding shoes all contacts with glass guide-rail intimate with elasticity shoes, the movement locus of the two common constraint slide block on glass guide-rail, slide block is moved by straight path with less position deviation, contribute to improve icking tool running precision and reduce grating line site error.
Accompanying drawing explanation
Fig. 1 is the front view of a kind of large-area grating notching knife frame system of the present invention;
Fig. 2 is the rear view of Fig. 1;
Fig. 3 is the side view of a kind of large-area grating notching knife frame system of the present invention;
Fig. 4 is a kind of large-area grating notching knife frame system Elastic shoes enlarged drawing of the present invention;
Fig. 5 is the guiding shoes enlarged drawing on a kind of large-area grating notching knife frame system intermediate slide installing plate of the present invention.
Reference numeral is as follows:
100-connecting link, the flexible Coupling Shaft of 200-,
300-slide block, the 400-shoes that leads,
The 401-shoes contact of leading, 402-shoes trim ring,
403-shoes seat, 500-elasticity shoes,
501-elasticity shoes contact, 502-contact shoe,
503-contact fixing plate, 504-stage clip,
505-vernier adjustment knob, 506-pressing plate,
600-glass guide-rail, A-upper horizontal surface,
B-horizontal surface, C-the first side surface,
D-the second side surface, the flexible card extender of 700-,
800-knife rest installing plate, 900-delineates knife rest,
1000-counterweight, 1100-adaptor,
1200-pad.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
In addition,, in each embodiment of described the present invention, involved technical characterictic just can not combine mutually as long as do not form each other conflict.
In description of the invention, term " interior ", " outward ", " longitudinally ", " laterally ", " on ", orientation or the position relationship of the indication such as D score, " top ", " end " be based on orientation shown in the drawings or position relationship, be only the present invention for convenience of description rather than require the present invention with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.
The embodiment of the present invention provides a kind of large-area grating notching knife frame system.As depicted in figs. 1 and 2, the slide block 300 that this system is provided with a glass guide-rail 600 and slides along glass guide-rail 600, at slide block 300 and extraneous driving mechanism, (scheme not show, can adopt the mechanisms such as crank connecting link or linear electric motors) between by connecting link 100, connect, extraneous driving mechanism to drive slide block 300 to slide along glass guide-rail 600, is realized the to-and-fro movement of slide block 300 on glass guide-rail 600 by push-and-pull connecting link 100.The extraneous driving mechanism of the present embodiment is set to being connected of doublejointed bearing-type with the connected mode of slide block 300, specific implementation is for being arranged on two spherical plain bearing rod ends the both sides of connecting link 100, one end of connecting link 100 is connected with extraneous driving mechanism by spherical plain bearing rod end, the other end of connecting link 100 is connected in a flexible Coupling Shaft 200 by spherical plain bearing rod end, flexible Coupling Shaft 200 one end are fixedly connected with connecting link 100, the other end is fixedly connected with slide block 300 by an adaptor 1100, thereby reduced the impact of extraneous driving mechanism on slide block 300 robust motions and glass guide-rail 600 distortion.
The middle part of flexible Coupling Shaft 200 is chip architecture of the spring, and material can adopt 65 manganese.The chip architecture of the spring at flexible Coupling Shaft 200 middle parts makes flexible Coupling Shaft 200 have good rigidity in slide block 300 direction of motion, and there is good elastic deformability on perpendicular to slide block 300 direction of motion, in order to discharge extraneous driving mechanism, by connecting link 100, transmit transient torque and the side force come.
Slide block 300 is circumferential closed hollow form and is set on glass guide-rail 600, is coated with at least three guiding shoes 400 and at least three elasticity shoes 500 on slide block 300, and guiding shoes 400 all contacts with glass guide-rail 600 outside surfaces with elasticity shoes 500.Because guiding shoes 400 all contacts with glass guide-rail 600 intimate with elasticity shoes 500, the movement locus of the two common constraint slide block 300 on glass guide-rail 600, slide block 300 is moved by straight path with less position deviation, contribute to improve icking tool running precision and reduce grating line site error.
In the present embodiment, slide block 300 is the hollow structure of hollow, glass guide-rail 600 is enclosed in wherein, the hollow space of slide block 300 is provided with upper horizontal surface A, horizontal surface B, the first side surface C and the second side surface D, guiding shoes 400 and elasticity shoes 500 that the inside surface of slide block 300 is installed are limiting the movement locus of slide block 300 on glass guide-rail 600, and it is moved by straight path with less position deviation.Guiding shoes 400 can be installed between upper horizontal surface A and the second side surface D and glass guide-rail 600, between horizontal surface B and the first side surface C and glass guide-rail 600, elasticity shoes 500 be installed.Particularly, the present embodiment is provided with two guiding shoes 400 between upper horizontal surface A and glass guide-rail 600, two elasticity shoes 500 are installed between horizontal surface B and glass guide-rail 600, three elasticity shoes 500 are installed between the first side surface C and glass guide-rail 600, three guiding shoes 400 are installed between the second side surface D and glass guide-rail 600.Certainly, the quantity of guiding shoes 400 and elasticity shoes 500 with and setting between slide block 300 and glass guide-rail 600 be not limited to the mode that the present embodiment provides, can also adopt other can realize the scheme of the object of the invention.
Knife rest installing plate 800 is for installing delineation knife rest 900, and delineation knife rest 900 is for diamond graver is installed, and diamond graver is for ruling grating.Knife rest installing plate 800 has relative top and bottom, and the upper end of knife rest installing plate 800 is fixedly connected with slide block 300.The present embodiment is provided with a flexible card extender 700 between the second side surface D of knife rest installing plate 800 and slide block 300, and the upside of flexible card extender 700 is fixedly connected with slide block 300, and the downside of flexible card extender 700 is fixedly connected with knife rest installing plate 800.Flexible card extender 700 is flexible hinge structure, and material can adopt 65 manganese, and this structure has guaranteed that flexible card extender 700 has good rigidity being parallel in slide block 300 direction of motion, and has good elastic deformability on perpendicular to slide block 300 direction of motion.
The lower end of knife rest installing plate 800 is provided with at least one guiding shoes 400, has installed one in the present embodiment, guiding shoes 400 and glass guide-rail 600 close contacts.
As mentioned above, flexible card extender 700 and knife rest installing plate 800 have formed take the leverage that the guiding shoes 400 of knife rest installing plate 800 is fulcrum, in order to dwindle the displacement error of the off-straight movement locus that derives from extraneous driving mechanism and slide block 300, reduce the impact on the kinetic stability of delineation knife rest 900.
Respectively the concrete structure of elasticity shoes 500 and guiding shoes 400 is described in detail below:
As shown in Figure 3, elasticity shoes 500 comprises successively along the direction from slide block 300 inner sides to slide block 300 outsides: elasticity shoes contact 501, contact shoe 502, contact fixing plate 503, stage clip 504, vernier adjustment knob 505 and pressing plate 506; Wherein, pressing plate 506 is fixed on slide block 300; Elasticity shoes contact 501 contacts with glass guide-rail 600, and is fixedly installed in contact shoe 502 by contact fixing plate 503, and contact fixing plate 503 is threaded connection with contact shoe 502; Stage clip 504 one end contact with contact fixing plate 503, and stage clip 504 other ends contact with vernier adjustment knob 505; Vernier adjustment knob 505 is threaded connection with pressing plate 506.By rotary fine adjustment knob 505, can adjust the initial confining force size of stage clip 504.
As shown in Figure 4, guiding shoes 400 comprises successively along the direction from slide block 300 inner sides to slide block 300 outsides: guiding shoes contact 401, shoes trim ring 402 and shoes seat 403; Wherein, shoes seat 403 is fixedly connected with by screw thread with knife rest installing plate 800; Guiding shoes contact 401 contacts with glass guide-rail 600, and guiding shoes contact 401 is fixedly mounted on shoes seat 403; Shoes trim ring 402 is set on guiding shoes contact 401 and is threaded connection with shoes seat 403; Shoes seat 403 is comprised of head and body, and head dimensions is greater than body dimension diametrically, forms a step trough, in step trough, between shoes seat 403 and knife rest installing plate 800, is provided with a pad 1200.Flexible card extender 700 and knife rest installing plate 800 under the effect of pad 1200 for the guiding shoes 400 on knife rest installing plate 800 and the contact between glass guide-rail 600 provide initial confining force, thereby guarantee guiding shoes 400 and glass guide-rail 600 close contacts on knife rest installing plate 800, and then guarantee the long-term motion stationarity of delineation knife rest 900, reduced the groove site error of grating.
In a preferred embodiment, opposite side relative with knife rest installing plate 800 1 sides on slide block 300 is fixedly connected with counterweight 1000, and the robust motion of 1000 pairs of slide blocks 300 of counterweight plays the effect of balancing.In the present embodiment, the weight of counterweight 1000 equals the weight summation of flexible card extender 700, knife rest installing plate 800 and delineation knife rest 900.
The large-area grating notching knife frame system that the present invention proposes has good kinetic stability, reduced the not steadily impact on the groove position of grating ruling diamond tool of extraneous driving mechanism and slide block movement, groove site error while having reduced grating ruling, has improved large-area grating dividing precision.And this large-area grating notching knife frame system structure is less, can be in the situation that the machined surface type of assurance glass guide-rail be used this structure to carry out the delineation of large-area grating.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.

Claims (10)

1. a large-area grating notching knife frame system, is characterized in that, described large-area grating notching knife frame system comprises:
Glass guide-rail (600);
The slide block (300) sliding along described glass guide-rail (600), described slide block (300) is circumferential closed hollow form and is set on glass guide-rail (600), on slide block (300), be coated with at least three guiding shoes (400) and at least three elasticity shoes (500), described guiding shoes (400) all contacts with described glass guide-rail (600) outside surface with elasticity shoes (500);
The connecting link (100) being connected with described slide block (300) with extraneous driving mechanism respectively, connecting link (100) is to drive slide block (300) to slide along glass guide-rail (600) described in driving mechanism push-and-pull;
Delineation knife rest (900);
Be used for installing the knife rest installing plate (800) of described delineation knife rest (900), the upper end of described knife rest installing plate (800) is fixedly connected with slide block (300), the lower end of knife rest installing plate (800) is provided with guiding shoes (400), and described guiding shoes (400) contacts with glass guide-rail (600).
2. large-area grating notching knife frame system according to claim 1, it is characterized in that, described slide block (300) is the hollow structure of hollow, the hollow space of slide block (300) is provided with upper horizontal surface (A), horizontal surface (B), the first side surface (C) and the second side surface (D), two guiding shoes (400) are installed between described upper horizontal surface (A) and glass guide-rail (600), between described horizontal surface (B) and glass guide-rail (600), two elasticity shoes (500) are installed, between described the first side surface (C) and glass guide-rail (600), three elasticity shoes (500) are installed, three guiding shoes (400) are installed between described the second side surface (D) and glass guide-rail (600).
3. large-area grating notching knife frame system according to claim 1, it is characterized in that, described large-area grating notching knife frame system also comprises flexible Coupling Shaft (200), described flexible Coupling Shaft (200) one end is fixedly connected with connecting link (100), and the other end is fixedly connected with slide block (300) by an adaptor (1100).
4. large-area grating notching knife frame system according to claim 3, is characterized in that, the two ends of described connecting link (100) are spherical plain bearing rod end.
5. large-area grating notching knife frame system according to claim 3, is characterized in that, the middle part of described flexible Coupling Shaft (200) is spring leaf.
6. large-area grating notching knife frame system according to claim 1, it is characterized in that, described large-area grating notching knife frame system also comprises flexible card extender (700), described flexible card extender (700) connection sliding block (300) and knife rest installing plate (800), the upside of described flexible card extender (700) is fixedly connected with slide block (300), and the downside of described flexible card extender (700) is fixedly connected with knife rest installing plate (800).
7. large-area grating notching knife frame system according to claim 6, is characterized in that, described flexible card extender (700) is flexible hinge structure.
8. according to the large-area grating notching knife frame system described in claim 1-7 any one, it is characterized in that, described elasticity shoes (500) comprises successively along the direction from slide block (300) inner side to slide block (300) outside: elasticity shoes contact (501), contact shoe (502), contact fixing plate (503), stage clip (504), vernier adjustment knob (505) and pressing plate (506); Wherein,
Described pressing plate (506) is fixed on slide block (300);
Described elasticity shoes contact (501) contacts with glass guide-rail (600), and is fixedly installed in contact shoe (502) by contact fixing plate (503), and contact fixing plate (503) is threaded connection with contact shoe (502);
Described stage clip (504) one end contacts with contact fixing plate (503), and stage clip (504) other end contacts with vernier adjustment knob (505);
Vernier adjustment knob (505) is threaded connection with pressing plate (506).
9. according to the large-area grating notching knife frame system described in claim 1-7 any one, it is characterized in that, described guiding shoes (400) comprises successively along the direction from slide block (300) inner side to slide block (300) outside: guiding shoes contact (401), shoes trim ring (402) and shoes seat (403); Wherein,
Described shoes seat (403) is fixedly connected with by screw thread with knife rest installing plate (800);
Described guiding shoes contact (401) contacts with glass guide-rail (600), and guiding shoes contact (401) is fixedly mounted on shoes seat (403);
Described shoes trim ring (402) is set in guiding shoes contact (401) above and is threaded connection with shoes seat (403);
Described shoes seat (403) is comprised of head and body, and head dimensions is greater than body dimension diametrically, forms a step trough, in described step trough, between shoes seat (403) and knife rest installing plate (800), is provided with a pad (1200).
10. according to the large-area grating notching knife frame system described in claim 1-7 any one, it is characterized in that, at the upper opposite side relative with knife rest installing plate (800) one sides of described slide block (300), be fixedly connected with a counterweight (1000).
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104237987A (en) * 2014-08-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 Grating groove bending automatic control and correcting method
CN104516037A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Mechanical ruling method for aberration-reducing plane diffraction grating
CN104536073A (en) * 2014-12-17 2015-04-22 中国科学院长春光学精密机械与物理研究所 Grating ruling tool initiative adjusting device having abbe error correcting function
CN106225649A (en) * 2016-08-09 2016-12-14 中国科学院长春光学精密机械与物理研究所 The measurement apparatus of the ruling tool for grating angle of pitch and measuring method thereof
CN106247907A (en) * 2016-09-07 2016-12-21 中国科学院长春光学精密机械与物理研究所 The measurement apparatus of grating scribing cutter orientation angle and measuring method thereof
CN104237987B (en) * 2014-08-27 2017-01-04 中国科学院长春光学精密机械与物理研究所 A kind of grating line bending automatically controls bearing calibration
CN106950629A (en) * 2017-04-13 2017-07-14 中国科学院长春光学精密机械与物理研究所 A kind of grating ruling device and the optical grating graduating machine with the device
CN109491034A (en) * 2018-10-11 2019-03-19 上海荣高电子科技有限公司 A kind of grating adjustment mechanism

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CN1727921A (en) * 2004-11-30 2006-02-01 中国科学院长春光学精密机械与物理研究所 A kind of large-area grating delineation machine knife bridge that has guiding closed force
CN102205440A (en) * 2010-03-30 2011-10-05 发那科株式会社 Linear groove processing method and device
CN103257384A (en) * 2013-06-03 2013-08-21 中国科学院长春光学精密机械与物理研究所 Cutter frame system of grating ruling engine

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US4219933A (en) * 1978-07-10 1980-09-02 Hitachi, Ltd. Diffraction grating ruling engine
CN1727921A (en) * 2004-11-30 2006-02-01 中国科学院长春光学精密机械与物理研究所 A kind of large-area grating delineation machine knife bridge that has guiding closed force
CN102205440A (en) * 2010-03-30 2011-10-05 发那科株式会社 Linear groove processing method and device
CN103257384A (en) * 2013-06-03 2013-08-21 中国科学院长春光学精密机械与物理研究所 Cutter frame system of grating ruling engine

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104237987A (en) * 2014-08-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 Grating groove bending automatic control and correcting method
CN104237987B (en) * 2014-08-27 2017-01-04 中国科学院长春光学精密机械与物理研究所 A kind of grating line bending automatically controls bearing calibration
CN104536073B (en) * 2014-12-17 2017-06-23 中国科学院长春光学精密机械与物理研究所 A kind of grating icking tool active accommodation device with Abbe error calibration function
CN104516037A (en) * 2014-12-17 2015-04-15 中国科学院长春光学精密机械与物理研究所 Mechanical ruling method for aberration-reducing plane diffraction grating
CN104536073A (en) * 2014-12-17 2015-04-22 中国科学院长春光学精密机械与物理研究所 Grating ruling tool initiative adjusting device having abbe error correcting function
CN104516037B (en) * 2014-12-17 2017-07-14 中国科学院长春光学精密机械与物理研究所 A kind of mechanical scribing method of anaberration plane diffraction grating
CN106225649A (en) * 2016-08-09 2016-12-14 中国科学院长春光学精密机械与物理研究所 The measurement apparatus of the ruling tool for grating angle of pitch and measuring method thereof
CN106225649B (en) * 2016-08-09 2018-10-19 中国科学院长春光学精密机械与物理研究所 The measuring device and its measurement method of ruling tool for grating pitch angle
CN106247907A (en) * 2016-09-07 2016-12-21 中国科学院长春光学精密机械与物理研究所 The measurement apparatus of grating scribing cutter orientation angle and measuring method thereof
CN106247907B (en) * 2016-09-07 2018-10-19 中国科学院长春光学精密机械与物理研究所 The measuring device and its measurement method of grating scribing knife orientation angle
CN106950629A (en) * 2017-04-13 2017-07-14 中国科学院长春光学精密机械与物理研究所 A kind of grating ruling device and the optical grating graduating machine with the device
CN106950629B (en) * 2017-04-13 2019-08-23 中国科学院长春光学精密机械与物理研究所 A kind of grating ruling device and the optical grating graduating machine with the device
CN109491034A (en) * 2018-10-11 2019-03-19 上海荣高电子科技有限公司 A kind of grating adjustment mechanism
CN109491034B (en) * 2018-10-11 2023-04-18 烟台荣高数字科技有限公司 Grating adjusting mechanism

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