CN106950629A - A kind of grating ruling device and the optical grating graduating machine with the device - Google Patents
A kind of grating ruling device and the optical grating graduating machine with the device Download PDFInfo
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- CN106950629A CN106950629A CN201710239731.5A CN201710239731A CN106950629A CN 106950629 A CN106950629 A CN 106950629A CN 201710239731 A CN201710239731 A CN 201710239731A CN 106950629 A CN106950629 A CN 106950629A
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- Prior art keywords
- hall switch
- pinboard
- grating
- sliding sleeve
- delineation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
Abstract
Grating ruling device and rose engine that the present invention is provided, including delineation motor 1, driving wheel 2, guide rail 3, transmission belt 4, support 5, crossbeam 6, first pinboard 7, second pinboard 8, 3rd pinboard 9, 4th pinboard 10, first proximity switch 11, first Hall switch 12, second Hall switch 13, 3rd Hall switch 14, 4th Hall switch 15, knife rest 16, second proximity switch 19, sliding sleeve 20 and base 20, by adjusting the position that the position of the 3rd pinboard 9 and the 4th pinboard 10 is the 3rd Hall switch 14 of regulation and the 4th Hall switch 15, and then the scribe length of the second grating blank 18 can be adjusted；By controlling lift roll setting number of times of the knife rest 16 between the first Hall switch 12 and the second Hall switch 13 and between the 3rd Hall switch 14 and the 4th Hall switch 15, two pieces of grating blank difference delineation width of regulation, the parallel delineation of different delineation area gratings is realized, the adaptability of grating ruling device is improved.
Description
Technical field
The present invention relates to the mechanical field of grating ruling, and in particular to a kind of grating ruling device and the grating with the device
Rose engine.
Background technology
Diffraction grating ruling engines are to develop the machine tool of ruled grating, general to use rowland working method, mainly include driving
The indexing system of grating blank linear motion and the scoring system two parts for driving diamond icking tool to move reciprocatingly.Mechanical scratching
It is to be plated on the grating base for be coated with aluminium film or golden film to be squeezed into a series of rule using diamond icking tool that method, which makes diffraction grating,
The then equidistant grating line of groove profile.For low echelette of all echelle grating and incisure density etc., due to it
It is strict to the requirement such as groove profile, groove depth and diffraction efficiency, generally made using mechanical scribing method.
Existing optical grating graduating machine scoring system is single-tool holder one-stroke scoring system, i.e. scoring system and there was only a set of knife rest
Mechanism, drives a diamond icking tool to carry out grating ruling, delineation every time can only delineate one block of grating.For developing same groove
The grating motherboard of density difference delineation area, the requirement of groove groove profile are severe compared with the grating and grating index request of higher duplication more difficulty
Relatively low grating of delineation qualification rate etc., delineation required for the single-tool holder one-stroke scoring system of prior art often, light
The development time length of grid, efficiency are low, and then influence the development efficiency of grating.
The content of the invention
In view of this, it is an object of the invention to propose a kind of grating ruling device and grating ruling with the device
Machine, solves the problem of prior art described above is present.
In a first aspect, the present invention provides a kind of grating ruling device, described device includes：
Base；
Guide rail on the base；
On the guide rail and the sliding sleeve that can be reciprocatingly slided along the guide rail, it is used on the sliding sleeve at least provided with one group
The knife rest of delineation；
It is connected to provide the drive component that the sliding sleeve reciprocatingly slides driving force with the sliding sleeve；
At least two groups the first positioning components and the second positioning component for being positioned to the sliding sleeve sliding position；
When first positioning component or second positioning component detect the sliding sleeve, the knife rest is controlled to carry out
Scoring operation.
Alternatively, it is additionally provided with support, the support and is additionally provided with for installing first positioning component on the base
With the crossbeam of second positioning component, first positioning component includes the first Hall switch and the second Hall switch, described
Second positioning component include the 3rd Hall switch and the 4th Hall switch, the crossbeam provided with the first pinboard, the second pinboard,
First proximity switch is installed on the 3rd pinboard and the 4th pinboard, first pinboard and first Hall is opened
Close, second pinboard is provided with second Hall switch, and the 3rd pinboard is provided with the 3rd Hall switch,
4th pinboard is provided with the second proximity switch and the 4th Hall switch, first Hall switch and described second
The distance between Hall switch can be adjusted, and the distance between described 3rd Hall switch and the 4th Hall switch can be adjusted
It is whole.
Alternatively, the drive component includes delineation motor, the driving wheel on the delineation machine shaft and twined
The transmission belt for being wound on the driving wheel and being connected with the sliding sleeve, the driving rotation is driven in the rotation of the delineation motor
Dynamic, the driving wheel, which is rotated, drives the transmission belt to do linear movement, is slided over described in the transmission belt traction on the guide rail
Move reciprocatingly.
Alternatively, the guide rail is double guide rail air-float guide rails.
Alternatively, the knife rest includes diamond icking tool and for realizing that it is reciprocal that the diamond icking tool carries out vertical direction
The drive mechanism of motion, the drive mechanism is fixedly mounted on the sliding sleeve.
Alternatively, the blade and horizontal direction parallel of the diamond icking tool.
Alternatively, the central axes of the transmission belt and the sliding sleeve.
Alternatively, the transmission belt is steel wire rope.
Alternatively, face where the sliding sleeve sets the knife rest is provided with balancing weight or another group of knife on relative side
Frame.
Second aspect, the present invention provides a kind of optical grating graduating machine, and the optical grating graduating machine includes grating ruling described above
Device.
As can be seen from the above technical solutions, the embodiment of the present invention has advantages below：
Grating ruling device and rose engine that the present invention is provided, including delineation motor, driving wheel, guide rail, transmission belt, bottom
Seat, crossbeam, the first pinboard, the second pinboard, the 3rd pinboard, the 4th pinboard, the first proximity switch, the first Hall are opened
Pass, the second Hall switch, the 3rd Hall switch, the 4th Hall switch, knife rest, the second proximity switch and sliding sleeve, pass through regulation the
The position of three pinboards and the 4th pinboard is the position for adjusting the 3rd Hall switch and the 4th Hall switch, and then can be adjusted
The scribe length of second grating blank；By controlling knife rest between the first Hall switch and the second Hall switch and the 3rd suddenly
You switch the lift roll setting number of times between the 4th Hall switch, and two pieces of grating blanks difference delineation width of regulation realize different quarters
Cuttings accumulates the parallel delineation of grating, improves the adaptability of grating ruling device.
Brief description of the drawings
Fig. 1 is that a kind of a kind of structure chart at visual angle of grating ruling device is provided in the embodiment of the present invention；
Fig. 2 is that a kind of structure chart at another visual angle of grating ruling device is provided in the embodiment of the present invention.
Embodiment
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment that member is obtained under the premise of creative work is not made, should all belong to the model that the present invention is protected
Enclose.
Term " first ", " second ", " the 3rd " in description and claims of this specification and above-mentioned accompanying drawing, "
The (if present)s such as four " are for distinguishing similar object, without for describing specific order or precedence.It should manage
The data that solution is so used can be exchanged in the appropriate case, so that the embodiments described herein can be with except illustrating herein
Or the order beyond the content of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Covering is non-exclusive to be included, for example, containing process, method, system, product or the equipment of series of steps or unit need not limit
In those steps or unit for clearly listing, but may include not list clearly or for these processes, method, production
Product or the intrinsic other steps of equipment or unit.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, the every other implementation that those skilled in the art are obtained under the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
With reference to shown in Fig. 1, the present invention provides a kind of grating ruling device, and described device includes：
Base 21；
Guide rail 3 on the base 21；
On the guide rail 3 and the sliding sleeve 20 that can be reciprocatingly slided along the guide rail 3, at least provided with one on the sliding sleeve 20
Knife rest 16 of the group for delineation；
It is connected to provide the drive component that the sliding sleeve 20 reciprocatingly slides driving force with the sliding sleeve 20；
At least two groups the first positioning components and the second positioning component for being positioned to the sliding sleeve sliding position；
When first positioning component or second positioning component detect the sliding sleeve 20, the knife rest 16 is controlled
Carry out scoring operation.
With reference to shown in Fig. 2, support 5 is additionally provided with the base 21, support and guiding for transmission belt, the support 5
On be additionally provided with crossbeam 6 for installing first positioning component and second positioning component, the first positioning component includes the
One Hall switch 12 and the second Hall switch 13, the second positioning component include the 3rd Hall switch 14 and the 4th Hall switch 15,
The crossbeam 6 is provided with the first pinboard 7, the second pinboard 8, the 3rd pinboard 9 and the 4th pinboard 10, first switching
First proximity switch 11 and the first Hall switch 12 are installed, second pinboard 8 is provided with the second Hall switch on plate 7
13, the 3rd pinboard 9 is provided with the 3rd Hall switch 14, and the 4th pinboard 10 is provided with the He of the second proximity switch 19
4th Hall switch 15, the distance between the first Hall switch 12 and the second Hall switch 13 can be adjusted, it is possible to achieve first
Plant the regulation of delineation width；The distance between 3rd Hall switch 14 and the 4th Hall switch 15 can be adjusted, it is possible to achieve the
The regulation of two kinds of delineation width, can so delineate at least two delineation width in the once linear motion of sliding sleeve, improve and carve
Draw the adaptation occasion of device, the distance between the first Hall switch 12 and the second Hall switch 13 and the 3rd Hall switch 14 and the
The distance between four Hall switch 15 be able to can also be differed with identical, and those of ordinary skill in the art can flexibly select to adjust
It is whole, this is not limited.
It should be noted that parallel delineation refers to once delineate n (n >=2) block diffraction grating, in the present invention it is possible to
The delineation width of at least two groups of realization, once when two width of linear motion delineation, knife rest rises twice；Straight line
When motion three width of delineation, knife rest rises three times, can be used for as needed in six Hall switch of setting of crossbeam 6
The position of sliding sleeve is detected, by that analogy, n blocks is delineated, then 2n Hall switch can be set on the cross beam 6, improve the adaptation of device
Ability.
Alternatively, the drive component include delineation motor 1, installed in it is described delineation the rotating shaft of motor 1 on driving wheel 2 and
The transmission belt 4 for being wrapped on the driving wheel 2 and being connected with the sliding sleeve 20, drives described in the rotation of the delineation motor 1
Driving wheel 2 is rotated, and the driving wheel 2, which is rotated, drives the transmission belt 4 to do linear movement, and the transmission belt 3 draws the sliding sleeve
20 move reciprocatingly on the guide rail.
Alternatively, the guide rail 3 is double guide rail air-float guide rails, and double guide rail mechanisms, load capacity is big, operates steadily.
Alternatively, the knife rest 16 includes diamond icking tool (not shown) and for realizing that the diamond icking tool enters
The reciprocating drive mechanism (not shown) of row vertical direction, the drive mechanism is fixedly mounted on the sliding sleeve 20.
Alternatively, the blade and horizontal direction parallel of the diamond icking tool.
Alternatively, the central axes of the transmission belt 4 and the sliding sleeve 20, the two ends of transmission belt 4 are connected to cunning
At the geometric center of set 20.
Alternatively, the transmission belt 4 can be balata belt or steel wire rope, preferably by steel wire rope.
Alternatively, the sliding sleeve 20 to set and be provided with balancing weight or another group on the relative side in the place face of knife rest 16
Knife rest, can be better balanced counterweight or improve delineation efficiency.
Alternatively, first pinboard 7, second pinboard 8, the 3rd pinboard 9 and the 4th switching
Plate 10 is nylon, in order to prevent electromagnetic interference interference to first proximity switch 11, the second proximity switch 19, described first suddenly
You switch the influence of 12, second Hall switch 13, the 3rd Hall switch 14 and the 4th Hall switch 15.
The grating ruling device provided referring to attached Fig. 1 and 2, the present invention, including delineation motor 1, driving wheel 2, guide rail 3, biography
Dynamic band 4, support 5, crossbeam 6, the first pinboard 7, the second pinboard 8, the 3rd pinboard 9, the 4th pinboard 10, first are close to be opened
Close the 11, first Hall switch 12, the second Hall switch 13, the 3rd Hall switch 14, the 4th Hall switch 15, knife rest 16, second
Proximity switch 19, sliding sleeve 20 and base 21, the driving wheel 2 are arranged in the rotating shaft of the delineation motor 1, and the support 5 is used
Support and guiding in transmission belt；The crossbeam 6 is installed on the support 5；First pinboard 7, second switching
Plate 8, the 3rd pinboard 9 and the 4th pinboard 10 are installed on the crossbeam 6, and in the length direction of crossbeam 6
The position of upper Hall switch is adjustable, and first proximity switch 11 has two to be respectively arranged in first pinboard 7, and second connects
Nearly switch 19 is arranged on the 4th pinboard 10, and the proximity switch 19 of the first proximity switch 11 and second is used to communicate institute
The switching of delineation motor positive and inverse is stated, so as to realize the reciprocating motion of scoring system；First Hall switch 12, described second
Hall switch 13, the 3rd Hall switch 14 and the 4th Hall switch 15 are respectively arranged in first pinboard 7, institute
State on the second pinboard 8, the 3rd pinboard 9 and the 4th pinboard 10, the communication for lifting roll setting, wherein described
13 1 groups of one Hall switch 12 and second Hall switch are used to communicate roll setting campaign when the first grating blank 17 is delineated
With cutter lifting motion, 15 1 groups of the 3rd Hall switch 14 and the 4th Hall switch is used for the quarter of the second grating blank 18
Communication roll setting campaign and cutter lifting motion when drawing；The knife rest 16 is fixed on the sliding sleeve 20, for carrying diamond icking tool；Institute
State the first grating blank 17 and the second grating blank 18 the grating blank that to be two pieces of areas to be delineated different.
The present invention operation principle be：The delineation motor 1 of the driving wheel 2 is installed, passes through the band of transmission belt 4
When the sliding sleeve 20 for moving the guide rail 3 passes through first proximity switch 11 being arranged on first pinboard 7, motor is delineated
1 turns to counterclockwise movement by clockwise movement, and sliding sleeve 20 is by the Buddha's warrior attendant on the knife rest 16 during first Hall switch 12
Stone inscription knife is fallen in the delineation of the first grating blank 17 enterprising line raster, and sliding sleeve 20 is by second Hall switch 13 when institute
The diamond icking tool stated on knife rest 16 is lifted, and sliding sleeve 20 is by the diamond on the knife rest 16 during three Hall switch 14
Icking tool is fallen in the delineation of the second grating blank 18 enterprising line raster, described in during process four Hall switch 15 of sliding sleeve 20
Diamond icking tool on knife rest 16 is lifted, and sliding sleeve 20 is by second proximity switch 19 on the 4th pinboard 10
When, delineation motor 1 turns to counterclockwise movement by clockwise movement, until sliding sleeve 20 is by being arranged on first pinboard 7
First proximity switch 11 start next scoring process；By adjusting first pinboard 7 and second switching
The position of plate 8 is the position for adjusting first Hall switch 12 and second Hall switch 13, and then can adjust first
The scribe length of grating blank 17；Institute is adjusted by the position for adjusting the 3rd pinboard 9 and the 4th pinboard 10
The position of the 3rd Hall switch 14 and the 4th Hall switch 15 is stated, and then it is long to adjust the groove of the second grating blank 18
Degree；It is between first Hall switch 12 and second Hall switch 13 and described by knife rest described in programme-control 16
Lift roll setting number of times between 3rd Hall switch 14 and the 4th Hall switch 15, and then adjust two pieces of grating blank difference quarters
Width is drawn, and then realizes the parallel delineation of different delineation area gratings, the adaptability of grating ruling device is improved.
A kind of optical grating graduating machine is also provided in the embodiment of the present invention, the optical grating graduating machine includes grating ruling described above
Device, optical grating graduating machine can realize the parallel delineation of different delineation area gratings, improve the adaptability of grating ruling device.
Grating ruling device and rose engine that the present invention is provided, including delineation motor 1, driving wheel 2, guide rail 3, transmission belt 4,
Support 5, crossbeam 6, the first pinboard 7, the second pinboard 8, the 3rd pinboard 9, the 4th pinboard 10, the first proximity switch 11,
First Hall switch 12, the second Hall switch 13, the 3rd Hall switch 14, the 4th Hall switch 15, knife rest 16, second are close to be opened
19, sliding sleeve 20 and base 21 are closed, is the 3rd Hall switch of regulation by adjusting the position of the 3rd pinboard 9 and the 4th pinboard 10
14 and the 4th Hall switch 15 position, and then the scribe length of the second grating blank 18 can be adjusted；By controlling knife rest 16
Between the first Hall switch 12 and the second Hall switch 13 and between the 3rd Hall switch 14 and the 4th Hall switch 15
Roll setting number of times is lifted, two pieces of grating blank difference delineation width of regulation realize the parallel delineation of different delineation area gratings, improve light
The adaptability of grid scoring device.
It is apparent to those skilled in the art that, for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, may be referred to the corresponding process in preceding method embodiment, will not be repeated here.
In several embodiments provided herein, it should be understood that disclosed system, apparatus and method can be with
Realize by another way.For example, device embodiment described above is only schematical, for example, the unit
Divide, only a kind of division of logic function there can be other dividing mode when actually realizing, such as multiple units or component
Another system can be combined or be desirably integrated into, or some features can be ignored, or do not perform.It is another, it is shown or
The coupling each other discussed or direct-coupling or communication connection can be the indirect couplings of device or unit by some interfaces
Close or communicate to connect, can be electrical, machinery or other forms.
The unit illustrated as separating component can be or may not be it is physically separate, it is aobvious as unit
The part shown can be or may not be physical location, you can with positioned at a place, or can also be distributed to multiple
On NE.Some or all of unit therein can be selected to realize the mesh of this embodiment scheme according to the actual needs
's.
In addition, each functional unit in each embodiment of the invention can be integrated in a processing unit, can also
That unit is individually physically present, can also two or more units it is integrated in a unit.Above-mentioned integrated list
Member can both be realized in the form of hardware, it would however also be possible to employ the form of SFU software functional unit is realized.
One of ordinary skill in the art will appreciate that all or part of step in the various methods of above-described embodiment is can
To instruct the hardware of correlation to complete by program, the program can be stored in a computer-readable recording medium, storage
Medium can include：Read-only storage (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
Can be with one of ordinary skill in the art will appreciate that realizing that all or part of step in above-described embodiment method is
The hardware of correlation is instructed to complete by program, described program can be stored in a kind of computer-readable recording medium, on
It can be read-only storage, disk or CD etc. to state the storage medium mentioned.
The optical grating graduating machine to a kind of grating ruling device provided by the present invention and with the device has been carried out in detail above
It is thin to introduce, for those of ordinary skill in the art, according to the thought of the embodiment of the present invention, in embodiment and apply model
Place and will change, in summary, this specification content should not be construed as limiting the invention.
Claims (10)
1. a kind of grating ruling device, it is characterised in that described device includes：
Base；
Guide rail on the base；
On the guide rail and the sliding sleeve that can reciprocatingly slide along the guide rail, it is used to delineate at least provided with one group on the sliding sleeve
Knife rest；
It is connected to provide the drive component that the sliding sleeve reciprocatingly slides driving force with the sliding sleeve；
At least two groups the first positioning components and the second positioning component for being positioned to the sliding sleeve sliding position；
When first positioning component or second positioning component detect the sliding sleeve, the knife rest is controlled to be delineated
Operation.
2. grating ruling device according to claim 1, it is characterised in that support, the branch are additionally provided with the base
The crossbeam for installing first positioning component and second positioning component, the first positioning component bag are additionally provided with frame
The first Hall switch and the second Hall switch are included, second positioning component includes the 3rd Hall switch and the 4th Hall switch,
The crossbeam, which is provided with the first pinboard, the second pinboard, the 3rd pinboard and the 4th pinboard, first pinboard, pacifies
Equipped with the first proximity switch and first Hall switch, second pinboard is provided with second Hall switch, described
3rd pinboard is provided with the 3rd Hall switch, and the 4th pinboard is provided with the second proximity switch and the described 4th suddenly
You are switched, and the distance between first Hall switch and second Hall switch can be adjusted, the 3rd Hall switch
It can be adjusted with the distance between the 4th Hall switch.
3. grating ruling device according to claim 1, it is characterised in that the drive component includes delineation motor, peace
Driving wheel and the transmission belt that is wrapped on the driving wheel and is connected with the sliding sleeve on the delineation machine shaft,
The rotation of the delineation motor drives the driving wheel to rotate, and the driving wheel, which is rotated, drives the transmission belt to do linear movement,
Slide over and moved reciprocatingly on the guide rail described in the transmission belt traction.
4. grating ruling device according to claim 1, it is characterised in that the guide rail is double guide rail air-float guide rails.
5. grating ruling device according to claim 1, it is characterised in that the knife rest includes diamond icking tool and is used for
Realize that the diamond icking tool carries out the reciprocating drive mechanism of vertical direction, the drive mechanism is fixedly mounted on the cunning
Put.
6. grating ruling device according to claim 5, it is characterised in that the blade of the diamond icking tool and level side
To parallel.
7. grating ruling device according to claim 1, it is characterised in that the central shaft of the transmission belt and the sliding sleeve
Line is overlapped.
8. grating ruling device according to claim 3, it is characterised in that the transmission belt is steel wire rope.
9. grating ruling device according to claim 1, it is characterised in that the sliding sleeve sets knife rest place face phase
To side on be provided with balancing weight or another group of knife rest.
10. a kind of optical grating graduating machine, it is characterised in that the optical grating graduating machine is included as any one of claim 1 to 9
Grating ruling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710239731.5A CN106950629B (en) | 2017-04-13 | 2017-04-13 | A kind of grating ruling device and the optical grating graduating machine with the device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710239731.5A CN106950629B (en) | 2017-04-13 | 2017-04-13 | A kind of grating ruling device and the optical grating graduating machine with the device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106950629A true CN106950629A (en) | 2017-07-14 |
| CN106950629B CN106950629B (en) | 2019-08-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710239731.5A Active CN106950629B (en) | 2017-04-13 | 2017-04-13 | A kind of grating ruling device and the optical grating graduating machine with the device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109307900A (en) * | 2018-11-26 | 2019-02-05 | 中国科学院长春光学精密机械与物理研究所 | A method of plane double balzed grating is made using rose engine |
| CN110716254A (en) * | 2019-09-26 | 2020-01-21 | 中国科学院长春光学精密机械与物理研究所 | Grating ruling machine indexing system macro-positioning actuating mechanism adopting ultrasonic antifriction technology |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645531A (en) * | 2013-11-25 | 2014-03-19 | 中国科学院长春光学精密机械与物理研究所 | Large-area grating ruling cutter frame system |
| CN106066502A (en) * | 2016-08-09 | 2016-11-02 | 中国科学院长春光学精密机械与物理研究所 | Optical grating graduating machine and scoring system thereof |
-
2017
- 2017-04-13 CN CN201710239731.5A patent/CN106950629B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645531A (en) * | 2013-11-25 | 2014-03-19 | 中国科学院长春光学精密机械与物理研究所 | Large-area grating ruling cutter frame system |
| CN106066502A (en) * | 2016-08-09 | 2016-11-02 | 中国科学院长春光学精密机械与物理研究所 | Optical grating graduating machine and scoring system thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109307900A (en) * | 2018-11-26 | 2019-02-05 | 中国科学院长春光学精密机械与物理研究所 | A method of plane double balzed grating is made using rose engine |
| CN110716254A (en) * | 2019-09-26 | 2020-01-21 | 中国科学院长春光学精密机械与物理研究所 | Grating ruling machine indexing system macro-positioning actuating mechanism adopting ultrasonic antifriction technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106950629B (en) | 2019-08-23 |
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Inventor after: Tang Yuguo Inventor after: Mi Xiaotao Inventor after: Yu Hongzhu Inventor after: Yu Haili Inventor after: Li Xiaotian Inventor after: Cong Min Inventor after: Qi Xiangdong Inventor after: Bayin Hexige Inventor before: Mi Xiaotao Inventor before: Tang Yuguo Inventor before: Yu Hongzhu Inventor before: Yu Haili Inventor before: Li Xiaotian Inventor before: Cong Min Inventor before: Qi Xiangdong Inventor before: Bayin Hexige |
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