CN103643222B - 一种基于双层膜多晶太阳能电池pecvd钝化镀膜的工艺 - Google Patents
一种基于双层膜多晶太阳能电池pecvd钝化镀膜的工艺 Download PDFInfo
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- CN103643222B CN103643222B CN201310694330.0A CN201310694330A CN103643222B CN 103643222 B CN103643222 B CN 103643222B CN 201310694330 A CN201310694330 A CN 201310694330A CN 103643222 B CN103643222 B CN 103643222B
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- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 23
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000002161 passivation Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 238000002310 reflectometry Methods 0.000 abstract description 3
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005457 optimization Methods 0.000 description 4
- 241001269238 Data Species 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- DGLFSNZWRYADFC-UHFFFAOYSA-N chembl2334586 Chemical compound C1CCC2=CN=C(N)N=C2C2=C1NC1=CC=C(C#CC(C)(O)C)C=C12 DGLFSNZWRYADFC-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
Description
实例名称 | 反射率 | 钝化效果 | 折射率 |
实施例1 | 5.65% | 非常好 | 2.06 |
实施例2 | 5.53% | 非常好 | 2.07 |
实施例3 | 5.79% | 非常好 | 2.08 |
实施例4 | 6.14% | 较好 | 2.08 |
对比例 | 7.12% | 一般 | 2.06 |
类型 | 实验数量 | Voc(mV) | Isc(A) | FF | Eta(%) | 钝化效果 |
实施例1 | 240 | 630.5 | 8.758 | 78.34 | 17.75 | 非常好 |
实施例2 | 240 | 630.6 | 8.762 | 78.40 | 17.80 | 非常好 |
实施例3 | 240 | 630.2 | 8.755 | 78.36 | 17.78 | 非常好 |
实施例4 | 240 | 630.0 | 8.738 | 78.31 | 17.71 | 较好 |
对比例 | 240 | 629.5 | 8.724 | 78.26 | 17.66 | 一般 |
推广 | 数量 | 对比例常规效率(%) | 本发明钝化工艺效率(%) | 差异 |
第1天 | 32000 | 17.65 | 17.79 | 0.14 |
第2天 | 32000 | 17.61 | 17.73 | 0.12 |
第3天 | 32000 | 17.60 | 17.71 | 0.11 |
第4天 | 32000 | 17.58 | 17.73 | 0.15 |
第5天 | 32000 | 17.63 | 17.77 | 0.14 |
第6天 | 32000 | 17.65 | 17.82 | 0.17 |
气体名称 | 对比例常规工艺 | 本发明钝化工艺 | 节约 |
SiH4单耗 | 0.04208 | 0.03553 | 15.57% |
SiH4价格 | 890元/kg | NH3价格 | 87元/kg |
Claims (2)
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CN201310694330.0A CN103643222B (zh) | 2013-12-18 | 2013-12-18 | 一种基于双层膜多晶太阳能电池pecvd钝化镀膜的工艺 |
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CN201310694330.0A CN103643222B (zh) | 2013-12-18 | 2013-12-18 | 一种基于双层膜多晶太阳能电池pecvd钝化镀膜的工艺 |
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Publication Number | Publication Date |
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CN103643222A CN103643222A (zh) | 2014-03-19 |
CN103643222B true CN103643222B (zh) | 2017-08-18 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102130212A (zh) * | 2010-12-31 | 2011-07-20 | 常州天合光能有限公司 | 一种太阳能电池制作方法 |
CN102315283A (zh) * | 2010-06-30 | 2012-01-11 | 比亚迪股份有限公司 | 一种太阳能电池片的减反射膜及其制备方法 |
CN102339872A (zh) * | 2011-09-28 | 2012-02-01 | 湖南红太阳新能源科技有限公司 | 一种晶体硅太阳能电池多层氮化硅减反射膜及其制备方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102315283A (zh) * | 2010-06-30 | 2012-01-11 | 比亚迪股份有限公司 | 一种太阳能电池片的减反射膜及其制备方法 |
CN102130212A (zh) * | 2010-12-31 | 2011-07-20 | 常州天合光能有限公司 | 一种太阳能电池制作方法 |
CN102339872A (zh) * | 2011-09-28 | 2012-02-01 | 湖南红太阳新能源科技有限公司 | 一种晶体硅太阳能电池多层氮化硅减反射膜及其制备方法 |
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Address after: 334100 Shangrao Shangrao Economic Development Zone, Jiangxi Patentee after: JIANGXI UNIEX NEW ENERGY CO.,LTD. Address before: 334100 Shangrao Shangrao Economic Development Zone, Jiangxi Patentee before: SRPV High-tech Co.,Ltd. |
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