CN103639601B - Three-dimensional periodic structure processing method based on electronic dynamic control - Google Patents

Three-dimensional periodic structure processing method based on electronic dynamic control Download PDF

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CN103639601B
CN103639601B CN201310706949.9A CN201310706949A CN103639601B CN 103639601 B CN103639601 B CN 103639601B CN 201310706949 A CN201310706949 A CN 201310706949A CN 103639601 B CN103639601 B CN 103639601B
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periodic structure
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dimensional
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CN103639601A (en
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姜澜
史雪松
李欣
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Beijing Institute of Technology BIT
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

The invention relates to a three-dimensional periodic structure processing method based on electronic dynamic control and belongs to the technical field of femto-second laser application. For material behavior, an electronic dynamic controlled femto-second laser sequence replaces the traditional monopulse, so that the purpose of controlling local instant electronic dynamic and follow-up phase change process in the laser and material interaction process is completely achieved. The three-dimensional periodic structure processing method based on electronic dynamic control can more accurately acquire a three-dimensional conic periodic structure or a one-dimensional grating structure, and solves the problem that in traditional processing, the precision in adjusting energy or the number of pulses is low.

Description

Based on the three-dimensional periodic structure processing method of dynamic control
Technical field
The present invention relates to a kind of three-dimensional periodic structure processing method based on dynamic control, belong to femtosecond laser applied technical field.
Background technology
For metal, semiconductor, can there is permanent surface periodic structure in dielectric substance under Gold Films Irradiated by Femtosecond Laser.Femtosecond laser induced surface periodic structure has a wide range of applications in fields such as breaking through the nanometer grating of diffraction limit, micro-optical device, functional surface preparation (changing surface optical, photoelectricity, imbibition characteristic etc.).
Long Pulse LASER (nanosecond, psec etc.) there will be the periodic structure that the cycle is similar to lambda1-wavelength after material surface irradiation.After femtosecond laser occurs, the sub-wavelength surface periodic structure that the cycle is significantly less than incident light wave starts be it is found that.By changing the pulsewidth of incident light, energy density and pulse number etc., all can effects on surface periodic structure have an impact.E.M.Hsu, T.H.R.Crawford, H.F.TiedjeandH.K.Haugen, Appl.Phys.Lett.91, in 111102 (2007), the pulsewidth of author's alteration femtosecond laser is in the scope of 150fs-7ns, and find it is substantially all nearly wavelength period structure when pulsewidth is greater than 80ps, sub-wavelength period structure only comes across the situation that pulsewidth is less than 80ps.But the parameter variation range of this method is comparatively large, is unfavorable for the size in control structure cycle accurately, and is only confined to the cycle of change structure.A.Rosenfeld, M.Rohloff, S.Hohm, J.Kruger, J.Bonse, Appl.Sur.Sci.258, in 9233 (2012), author adopts the method for dipulse, and when the pulse spacing is 40ps, sub-wavelength period structure instead of nearly wavelength period structure completely.Same, this method only changes the cycle of surface periodic structure, and resulting structures is still the optical grating construction of one dimension.
Summary of the invention
The object of the invention is to overcome the low problem of femtosecond laser induced surface periodic structure controllability, propose a kind of three-dimensional periodic structure processing method based on dynamic control, improved the controllability of surface periodic structure by the Temporal pulse shaping technology of femto-second laser pulse sequence.
The object of the invention is to be realized by following technology:
Step one, design femto-second laser pulse sequence.
Specific design method is: carry out femto-second laser pulse shaping by pulse shaper, the laser pulse being nfs by a pulsewidth is divided into the subpulse that three pulsewidths are nfs in time domain, wherein 30fs < n < 200fs.Interpulse two pulse daleys of these three sons are respectively t 1and t 2, and t 1and t 2be femtosecond magnitude, independently adjustable, thus obtain one group of femto-second laser pulse sequence; Then in femtosecond rescaling pulse daley parameter, the Local Instantaneous electronic Dynamic that can change material in femto-second laser pulse sequence and rapidoprint interaction process is made.
Described Local Instantaneous electronic Dynamic comprises electron excitation, ionization, recombination process and free electron density, temperature.
The time interval between two adjacent groups femto-second laser pulse sequence is ms-s magnitude.
Described rapidoprint is insulator.
Step 2, femto-second laser pulse sequence step one obtained, incide in processing object lens and focus on, and keep laser spot to focus on sample surfaces.
Step 3, by be placed in the optics before pulse shaper entrance adjustment pulse train gross energy, make it the ablation threshold higher than specimen material.
Step 4, with adjustment energy after femto-second laser pulse sequence process according to drawing, by pulse shaper control t 1and t 2size, obtain different periodic structures.
Described periodic structure is the structure with specific period obtained after laser ablation causes surfacing to be removed, comprise by a series of groove and the protruding one dimension class optical grating construction (distance wherein between two adjacent grooves is one-period) formed, and the coniform periodic structure of three-dimensional (distance wherein between two adjacent vertebral is one-period).
Concrete control method is as follows:
As one of them pulse daley of adjustment t 1or t 2when being less than nfs, it is that (cycle is less than wavelength to nearly wavelength that femto-second laser pulse sequence irradiation sample surface obtains the cycle, be greater than the half of wavelength) one dimension class optical grating construction, now regulate another pulse daley can not have an impact to the type of periodic structure, only change the cycle of one dimension class optical grating construction.
As one of them pulse daley of adjustment t 1or t 2be more than or equal to nfs and be less than 2nfs, regulating another pulse daley to when being greater than 2nfs, obtaining three-dimensional coniform periodic structure.
As adjustment t 1and t 2when being all more than or equal to 2n fs, obtain the one dimension class optical grating construction of the sub-wavelength half of wavelength (cycle be less than), now one dimension class optical grating construction direction is vertical with the one dimension class optical grating construction of nearly wavelength.
Step 5, control irradiation, to the pulse train number of sample surfaces, make total number be less than 50, to obtain uniform periodic structure.
Beneficial effect
1, the femto-second laser pulse sequence for material behavior modulation is adopted to replace traditional pulse in the present invention, fundamentally achieve the Local Instantaneous electronic Dynamic in control Reciprocity of Laser & Materials process and follow-up phase transition process, therefore the method can obtain required periodic structure more accurately, overcomes adjusting energy or the low problem of pulse number precision in tradition processing.
2, using the pulse train of the present invention's design can obtain diameter for 100-150nm, be highly the coniform periodic structure of three-dimensional of 200nm, and traditional femtosecond laser pulse processing method cannot obtain this structure under the same conditions.
3, the present invention can carry out in atmosphere, assists, saved processing cost, improve working (machining) efficiency without the need to vacuum environment or liquid, gas.
Accompanying drawing explanation
Fig. 1 is femto-second laser pulse sequences Design figure of the present invention;
Fig. 2 is in specific embodiment, adopts the three-dimensional coniform periodic structure experiment effect figure that the inventive method obtains;
Label declaration: 1-pulse daley t 1, 2-pulse daley t 2, 3-pulse sequence interval.
Detailed description of the invention
The present invention proposes a kind of femto-second laser pulse sequence based on dynamic control to improve the method for periodic structure processing controllability, below in conjunction with embodiment, the present invention will be further described:
The laser instrument that fs-laser system adopts spectrum physics (SpectrumPhysics) company of the U.S. to produce, femtosecond laser is linear polarization, centre wavelength 800nm, pulse width 35fs, repetition rate 1KHz, pulse ceiling capacity 3mJ, and light distribution is Gaussian.
Pulse shaper is the MIIPSbox that Biophotonic company of the U.S. produces, it can be shaped to the pulse train be made up of several subpulse a traditional femto-second laser pulse, as shown in Figure 1, wherein the pulsewidth of each pulse train neutron pulse is 50fs, and the parameters such as the pulse daley between subpulse number, subpulse, energy distribution ratio are all adjustable.
Test specimen is vitreous silica, is of a size of 1cm × 1cm × 0.5mm, two-sidedly carries out optical grade polishing, and surface roughness is less than 5 dusts.
Step one: femto-second laser produces traditional femtosecond laser pulse, and the time interval between each femto-second laser pulse is the time 3, utilizes the combination of half-wave plate and polarizer to regulate pulsed laser energy to below 200mw, to meet the entrance power of pulse shaper;
Step 2: setting pulse shaper parameter, the femtosecond laser pulse entering pulse shaper is modulated to pulse train, three subpulses are comprised in each pulse train, energy distribution ratio is 1:1:1, two pulse delay times 1 and 2 are independently adjustable in the scope of 0-1ps, controlled by pulse shaper, utilize the gross energy of the continuous regulating impulse sequence of the combination of half-wave plate and polarizer;
Step 3: vitreous silica sample is fixed on slide with double faced adhesive tape, then slide is fixed on automatically controlled sextuple mobile platform, and platform is adjusted to level;
Step 4: the femto-second laser pulse sequence that step 2 is obtained is incided by light path in the five times of object lens vertically placed and focuses on, and makes laser spot focus on sample surfaces by illumination and CCD imaging system, formation vertical incidence;
Step 5: the repetition rate reducing laser, makes the time interval 3 between each pulse train be greater than 15ms, accurately control the pulse train number of irradiation to sample surfaces by the mechanical switch of a conputer controlled.
Under the gross energy of 15 μ J and the irradiation of 10 pulse trains,
(1) pulse daley is t 1=0 & t 2=0-1ps, t 1=0-1ps & t 2the cycle that can obtain under the condition of=0 is ~ 600nm, and direction is parallel to the nearly wavelength One Dimension Periodic structure of laser polarization.
(2) pulse daley is t 1=50fs & t 2=100fs-1ps and t 1=100fs-500fs & t 2can obtain diameter under the condition of=50fs is 100-150nm, is highly the coniform periodic structure of three-dimensional of 200nm; As shown in Figure 2.
(3) pulse daley is t 1=150-400fs & t 2=100fs and t 1=100fs & t 2the cycle that can obtain under the condition of=150-400fs is ~ 200nm, and direction is perpendicular to the sub-wavelength One Dimension Periodic structure of laser polarization.

Claims (4)

1. based on the three-dimensional periodic structure processing method of dynamic control, it is characterized in that: realized by following technology:
Step one, design femto-second laser pulse sequence;
Specific design method is: carry out femto-second laser pulse shaping by pulse shaper, and the laser pulse being n fs by a pulsewidth is divided into the subpulse that three pulsewidths are n fs in time domain, wherein interpulse two pulse daleys of three sons are respectively t 1and t 2, and t 1and t 2be femtosecond magnitude, independently adjustable, thus obtain one group of femto-second laser pulse sequence; Then in femtosecond rescaling pulse daley parameter, the Local Instantaneous electronic Dynamic that can change material in femto-second laser pulse sequence and rapidoprint interaction process is made;
Step 2, femto-second laser pulse sequence step one obtained, incide in processing object lens and focus on, and keep laser spot to focus on sample surfaces;
Step 3, by be placed in the optics before pulse shaper entrance adjustment pulse train gross energy, make it the ablation threshold higher than specimen material;
Step 4, with adjustment energy after femto-second laser pulse sequence process according to drawing, by pulse shaper control t 1and t 2size, obtain different periodic structures;
Described periodic structure is the structure with specific period obtained after laser ablation causes surfacing to be removed ; The described structure with specific periodfor the one dimension class optical grating construction be made up of groove and projection, or three-dimensional coniform periodic structure;
Concrete control method is as follows:
As one of them pulse daley of adjustment t 1or t 2when being less than n fs, femto-second laser pulse sequence irradiation sample surface obtains the one dimension class optical grating construction that the cycle is nearly wavelength, now regulates another pulse daley can not have an impact to the type of periodic structure, only changes the cycle of one dimension class optical grating construction;
As one of them pulse daley of adjustment t 1or t 2be more than or equal to n fs and be less than 2n fs, regulating another pulse daley to when being greater than 2n fs, obtain three-dimensional coniform periodic structure;
As adjustment t 1and t 2when being all more than or equal to 2n fs, obtain the one dimension class optical grating construction of sub-wavelength, and one dimension class optical grating construction direction is vertical with the one dimension class optical grating construction of nearly wavelength;
Step 5, control irradiation, to the pulse train number of sample surfaces, make total number be less than 50, to obtain uniform periodic structure.
2. the three-dimensional periodic structure processing method based on dynamic control according to claim 1, is characterized in that: described Local Instantaneous electronic Dynamic comprises electron excitation, ionization, recombination process and free electron density, temperature.
3. the three-dimensional periodic structure processing method based on dynamic control according to claim 1, is characterized in that: the time interval between two adjacent groups femto-second laser pulse sequence is ms-s magnitude.
4. the three-dimensional periodic structure processing method based on dynamic control according to claim 1, is characterized in that: described rapidoprint is insulator.
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CN104028777B (en) * 2014-06-23 2016-02-10 北京理工大学 The method of surface enhanced Raman substrate is prepared based on femtosecond laser dynamic control
CN104625417B (en) * 2014-12-29 2016-08-17 北京理工大学 The method of optimal control nickel surface pattern based on dynamic control
CN104625422B (en) * 2014-12-29 2016-08-24 北京理工大学 Based on dynamic control ethanol solution assistant metal processing method
CN104985323B (en) * 2015-07-21 2017-03-01 武汉帝尔激光科技股份有限公司 A kind of laser pulse signal method that synchronously orientation captures
CN108788472A (en) * 2018-05-24 2018-11-13 清华大学 Titanium dioxide surface periodic structure processing method based on dynamic control
CN110039205B (en) * 2019-04-30 2021-07-20 大族激光科技产业集团股份有限公司 Processing method of LED wafer
CN112355483B (en) * 2020-10-30 2021-08-24 北京理工大学 Method for preparing submicron concentric rings on silicon surface by femtosecond laser

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