CN103639601A - Three-dimensional periodic structure processing method based on electronic dynamic control - Google Patents

Three-dimensional periodic structure processing method based on electronic dynamic control Download PDF

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CN103639601A
CN103639601A CN201310706949.9A CN201310706949A CN103639601A CN 103639601 A CN103639601 A CN 103639601A CN 201310706949 A CN201310706949 A CN 201310706949A CN 103639601 A CN103639601 A CN 103639601A
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periodic structure
pulse
femto
laser
electronic dynamic
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CN103639601B (en
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姜澜
史雪松
李欣
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Beijing Institute of Technology BIT
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)

Abstract

The invention relates to a three-dimensional periodic structure processing method based on electronic dynamic control and belongs to the technical field of femto-second laser application. For material behavior, an electronic dynamic controlled femto-second laser sequence replaces the traditional monopulse, so that the purpose of controlling local instant electronic dynamic and follow-up phase change process in the laser and material interaction process is completely achieved. The three-dimensional periodic structure processing method based on electronic dynamic control can more accurately acquire a three-dimensional conic periodic structure or a one-dimensional grating structure, and solves the problem that in traditional processing, the precision in adjusting energy or the number of pulses is low.

Description

Three-dimensional periodic structure processing method based on electronic Dynamic regulation and control
Technical field
The present invention relates to a kind of three-dimensional periodic structure processing method based on electronic Dynamic regulation and control, belong to femtosecond laser applied technical field.
Background technology
For metal, semiconductor,, under Gold Films Irradiated by Femtosecond Laser, can there is permanent surface periodic structure in dielectric substance.Femtosecond laser induced surface periodic structure has a wide range of applications in fields such as breaking through the nanometer grating of diffraction limit, micro-optical device, functional surface preparation (changing surface optical, photoelectricity, imbibition characteristic etc.).
Long Pulse LASER (nanosecond, psec etc.) there will be the periodic structure of approximate lambda1-wavelength of cycle after material surface irradiation.After femtosecond laser occurs, the sub-wavelength surface periodic structure that the cycle is significantly less than incident light wave starts be it is found that.By changing pulsewidth, energy density and the pulse number etc. of incident light, all can effects on surface periodic structure exert an influence.E.M.Hsu, T.H.R.Crawford, H.F.TiedjeandH.K.Haugen, Appl.Phys.Lett.91, in 111102 (2007), the pulsewidth of author's alteration femtosecond laser, in the scope of 150fs-7ns, finds it when pulsewidth is greater than 80ps, is substantially all nearly wavelength period structure, and sub-wavelength periodic structure only comes across the situation that pulsewidth is less than 80ps.But the parameter variation range of this method is larger, is unfavorable for the size in control structure cycle accurately, and is only confined to the cycle of change structure.A.Rosenfeld, M.Rohloff, S.Hohm, J.Kruger, J.Bonse, Appl.Sur.Sci.258, in 9233 (2012), author adopts the method for dipulse, and the pulse spacing, while being 40ps, sub-wavelength periodic structure replaced nearly wavelength period structure completely.Same, this method has only changed the cycle of surface periodic structure, and resulting structures is still the optical grating construction of one dimension.
Summary of the invention
The object of the invention is in order to overcome the low problem of femtosecond laser induced surface periodic structure controllability, propose a kind of three-dimensional periodic structure processing method based on electronic Dynamic regulation and control, by the Temporal pulse shaping technology of femto-second laser pulse sequence, improve the controllability of surface periodic structure.
The object of the invention is to realize by following technology:
Step 1, design femto-second laser pulse sequence.
Specific design method is: by pulse shaper, carry out femto-second laser pulse shaping, the laser pulse that is nfs by a pulsewidth is divided into the subpulse that three pulsewidths are nfs in time domain, wherein 30fs < n < 200fs.Two interpulse pulse daleys of these three sons are respectively t 1and t 2, and t 1and t 2be femtosecond magnitude, independent adjustable respectively, thus obtain one group of femto-second laser pulse sequence; Then in femtosecond rescaling pulse daley parameter, make can change in femto-second laser pulse sequence and rapidoprint interaction process the Local Instantaneous electronic Dynamic of material.
Described Local Instantaneous electronic Dynamic comprises electron excitation, ionization, recombination process and free electron density, temperature.
The time interval between two adjacent groups femto-second laser pulse sequence is ms-s magnitude.
Described rapidoprint is insulator.
Step 2, the femto-second laser pulse sequence that step 1 is obtained, incide in processing object lens and focus on, and keep laser spot to focus on sample surfaces.
Step 3, by being placed in optics before pulse shaper entrance, adjust the gross energy of pulse train, make it the ablation threshold higher than specimen material.
Step 4, by the femto-second laser pulse sequence of adjusting after energy, according to drawing, process, by pulse shaper, control t 1and t 2size, obtain different periodic structures.
Described periodic structure is the structure with specific period obtaining after laser ablation causes surfacing to be removed, comprise the one dimension class optical grating construction (wherein the distance between two adjacent grooves is one-period) being formed by a series of grooves and projection, and three-dimensional coniform periodic structure (wherein the distance between two adjacent cones is one-period).
Concrete control method is as follows:
When regulating one of them pulse daley t 1or t 2while being less than nfs, it is that (cycle is less than wavelength to nearly wavelength that femto-second laser pulse sequence irradiation sample surface obtains the cycle, be greater than half of wavelength) one dimension class optical grating construction, now regulate another pulse daley can not exert an influence to the type of periodic structure, only change the cycle of one dimension class optical grating construction.
When regulating one of them pulse daley t 1or t 2be more than or equal to nfs and be less than 2nfs, regulate another pulse daley when being greater than 2nfs, obtain three-dimensional coniform periodic structure.
When regulating t 1and t 2while being all more than or equal to 2n fs, obtain the one dimension class optical grating construction of sub-wavelength (cycle is less than half of wavelength), now one dimension class optical grating construction direction is vertical with the one dimension class optical grating construction of nearly wavelength.
Step 5, control irradiation to the pulse train number of sample surfaces, make total number be less than 50, to obtain uniform periodic structure.
Beneficial effect
1, in the present invention, adopt the femto-second laser pulse sequence for material behavior modulation to replace traditional pulse, fundamentally realized and controlled Local Instantaneous electronic Dynamic and the follow-up phase transition process in Reciprocity of Laser & Materials process, therefore the method can obtain required periodic structure more accurately, has overcome adjusting energy or the low problem of pulse number precision in traditional processing.
2, using the pulse train of the present invention's design can obtain diameter for 100-150nm, be highly the coniform periodic structure of three-dimensional of 200nm, and traditional femtosecond laser pulse processing method cannot obtain this structure under the same conditions.
3, the present invention can carry out in air, auxiliary without vacuum environment or liquid, gas, has saved processing cost, has improved working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is femto-second laser pulse sequences Design figure of the present invention;
Fig. 2 is in specific embodiment, the coniform periodic structure experiment effect of the three-dimensional figure that adopts the inventive method to obtain;
Label declaration: 1-pulse daley t 1, 2-pulse daley t 2, 3-pulse sequence interval.
The specific embodiment
The present invention proposes a kind of femto-second laser pulse sequence based on electronic Dynamic regulation and control to improve the method for periodic structure processing controllability, below in conjunction with embodiment, the present invention will be further described:
The laser instrument that fs-laser system adopts U.S.'s spectrum physics (SpectrumPhysics) company to produce, femtosecond laser is linear polarization, centre wavelength 800nm, pulse width 35fs, repetition rate 1KHz, pulse ceiling capacity 3mJ, light distribution is Gaussian.
Pulse shaper is the MIIPSbox that U.S. Biophotonic company produces, it can be shaped to the pulse train being comprised of several subpulses a traditional femto-second laser pulse, as shown in Figure 1, wherein the pulsewidth of each pulse train neutron pulse is 50fs, and the parameters such as the pulse daley between subpulse number, subpulse, energy distribution ratio are all adjustable.
Test specimen is vitreous silica, is of a size of 1cm * 1cm * 0.5mm, two-sidedly carries out optical grade polishing, and surface roughness is less than 5 dusts.
Step 1: femto-second laser produces traditional femtosecond laser pulse, and the time interval between each femto-second laser pulse is the time 3, utilizes the combination of half-wave plate and polarizer to regulate pulsed laser energy below 200mw, to meet the entrance power of pulse shaper;
Step 2: set pulse shaper parameter, the femtosecond laser pulse that enters pulse shaper is modulated to pulse train, in each pulse train, comprise three subpulses, energy distribution ratio is 1:1:1, two pulse delay times 1 and 2 are independent adjustable respectively in the scope of 0-1ps, by pulse shaper, controlled, utilize the gross energy of the continuous regulating impulse sequence of combination of half-wave plate and polarizer;
Step 3: with double faced adhesive tape, vitreous silica sample is fixed on slide, then slide is fixed on automatically controlled sextuple mobile platform, and platform is adjusted to level;
Step 4: the resulting femto-second laser pulse sequence of step 2 is incided by light path in five times of object lens of vertical placement and focus on, make laser spot focus on sample surfaces by illumination and CCD imaging system, formation vertical incidence;
Step 5: reduce the repetition rate of laser, make the time interval 3 between each pulse train be greater than 15ms, the mechanical switch of controlling by a computer is accurately controlled irradiation to the pulse train number of sample surfaces.
Under the gross energy of 15 μ J and the irradiation of 10 pulse trains,
(1) pulse daley is t 1=0 & t 2=0-1ps, t 1=0-1ps & t 2the cycle that can obtain under=0 condition is～600nm that direction is parallel to the nearly wavelength One Dimension Periodic structure of laser polarization.
(2) pulse daley is t 1=50fs & t 2=100fs-1ps and t 1=100fs-500fs & t 2under the condition of=50fs, can obtain diameter is 100-150nm, is highly the coniform periodic structure of three-dimensional of 200nm; As shown in Figure 2.
(3) pulse daley is t 1=150-400fs & t 2=100fs and t 1=100fs & t 2the cycle that can obtain under the condition of=150-400fs is～200nm that direction is perpendicular to the sub-wavelength One Dimension Periodic structure of laser polarization.

Claims (4)

1. the three-dimensional periodic structure processing method regulating and controlling based on electronic Dynamic, is characterized in that: by following technology, realize:
Step 1, design femto-second laser pulse sequence;
Specific design method is: by pulse shaper, carry out femto-second laser pulse shaping, the laser pulse that is nfs by a pulsewidth is divided into the subpulse that three pulsewidths are nfs in time domain, wherein 30fs < n < 200fs; Three two interpulse pulse daleys of son are respectively t 1and t 2, and t 1and t 2be femtosecond magnitude, independent adjustable respectively, thus obtain one group of femto-second laser pulse sequence; Then in femtosecond rescaling pulse daley parameter, make can change in femto-second laser pulse sequence and rapidoprint interaction process the Local Instantaneous electronic Dynamic of material;
Step 2, the femto-second laser pulse sequence that step 1 is obtained, incide in processing object lens and focus on, and keep laser spot to focus on sample surfaces;
Step 3, by being placed in optics before pulse shaper entrance, adjust the gross energy of pulse train, make it the ablation threshold higher than specimen material;
Step 4, by the femto-second laser pulse sequence of adjusting after energy, according to drawing, process, by pulse shaper, control t 1and t 2size, obtain different periodic structures;
Described periodic structure is the structure with specific period obtaining after laser ablation causes surfacing to be removed, and is the one dimension class optical grating construction being comprised of groove and projection, or three-dimensional coniform periodic structure;
Concrete control method is as follows:
When regulating one of them pulse daley t 1or t 2while being less than nfs, femto-second laser pulse sequence irradiation sample surface obtains the one dimension class optical grating construction that the cycle is nearly wavelength, now regulates another pulse daley can not exert an influence to the type of periodic structure, only changes the cycle of one dimension class optical grating construction;
When regulating one of them pulse daley t 1or t 2be more than or equal to nfs and be less than 2nfs, regulate another pulse daley when being greater than 2nfs, obtain three-dimensional coniform periodic structure;
When regulating t 1and t 2while being all more than or equal to 2nfs, obtain the one dimension class optical grating construction of sub-wavelength, and one dimension class optical grating construction direction is vertical with the one dimension class optical grating construction of nearly wavelength;
Step 5, control irradiation to the pulse train number of sample surfaces, make total number be less than 50, to obtain uniform periodic structure.
2. the three-dimensional periodic structure processing method based on electronic Dynamic regulation and control according to claim 1, is characterized in that: described Local Instantaneous electronic Dynamic comprises electron excitation, ionization, recombination process and free electron density, temperature.
3. the three-dimensional periodic structure processing method based on electronic Dynamic regulation and control according to claim 1, is characterized in that: the time interval between two adjacent groups femto-second laser pulse sequence is ms-s magnitude.
4. the three-dimensional periodic structure processing method based on electronic Dynamic regulation and control according to claim 1, is characterized in that: described rapidoprint is insulator.
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Cited By (7)

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CN104028777A (en) * 2014-06-23 2014-09-10 北京理工大学 Method for manufacturing surface enhanced Raman substrate on basis of electronic dynamic control of femtosecond laser
CN104625422A (en) * 2014-12-29 2015-05-20 北京理工大学 Method for assisting metal processing based on electronic dynamic control of ethanol solution
CN104625417A (en) * 2014-12-29 2015-05-20 北京理工大学 Method for controlling topography of nickel surface through femtosecond laser based on electronic dynamic control
CN104985323A (en) * 2015-07-21 2015-10-21 武汉帝尔激光科技有限公司 System and method for synchronously and directionally capturing laser pulse signals
CN108788472A (en) * 2018-05-24 2018-11-13 清华大学 Titanium dioxide surface periodic structure processing method based on dynamic control
CN110039205A (en) * 2019-04-30 2019-07-23 大族激光科技产业集团股份有限公司 The processing method of LED wafer
CN112355483A (en) * 2020-10-30 2021-02-12 北京理工大学 Method for preparing submicron concentric rings on silicon surface by femtosecond laser

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104028777A (en) * 2014-06-23 2014-09-10 北京理工大学 Method for manufacturing surface enhanced Raman substrate on basis of electronic dynamic control of femtosecond laser
CN104028777B (en) * 2014-06-23 2016-02-10 北京理工大学 The method of surface enhanced Raman substrate is prepared based on femtosecond laser dynamic control
CN104625422A (en) * 2014-12-29 2015-05-20 北京理工大学 Method for assisting metal processing based on electronic dynamic control of ethanol solution
CN104625417A (en) * 2014-12-29 2015-05-20 北京理工大学 Method for controlling topography of nickel surface through femtosecond laser based on electronic dynamic control
CN104625422B (en) * 2014-12-29 2016-08-24 北京理工大学 Based on dynamic control ethanol solution assistant metal processing method
CN104985323A (en) * 2015-07-21 2015-10-21 武汉帝尔激光科技有限公司 System and method for synchronously and directionally capturing laser pulse signals
CN108788472A (en) * 2018-05-24 2018-11-13 清华大学 Titanium dioxide surface periodic structure processing method based on dynamic control
CN110039205A (en) * 2019-04-30 2019-07-23 大族激光科技产业集团股份有限公司 The processing method of LED wafer
CN110039205B (en) * 2019-04-30 2021-07-20 大族激光科技产业集团股份有限公司 Processing method of LED wafer
CN112355483A (en) * 2020-10-30 2021-02-12 北京理工大学 Method for preparing submicron concentric rings on silicon surface by femtosecond laser

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