CN103635780A - 用于测量输入电流的系统 - Google Patents

用于测量输入电流的系统 Download PDF

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Publication number
CN103635780A
CN103635780A CN201280032498.9A CN201280032498A CN103635780A CN 103635780 A CN103635780 A CN 103635780A CN 201280032498 A CN201280032498 A CN 201280032498A CN 103635780 A CN103635780 A CN 103635780A
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CN
China
Prior art keywords
current
voltage
current measurement
power supply
measurement circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201280032498.9A
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English (en)
Chinese (zh)
Inventor
C.沃伯格
R.莫赛尔
K.P.帕德耶
E.德科克
W.维斯
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Mapper Lithopraphy IP BV
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Mapper Lithopraphy IP BV
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Filing date
Publication date
Application filed by Mapper Lithopraphy IP BV filed Critical Mapper Lithopraphy IP BV
Publication of CN103635780A publication Critical patent/CN103635780A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201280032498.9A 2011-06-30 2012-07-02 用于测量输入电流的系统 Pending CN103635780A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161503555P 2011-06-30 2011-06-30
US61/503,555 2011-06-30
PCT/EP2012/062854 WO2013001100A1 (en) 2011-06-30 2012-07-02 System for measuring an input electrical current

Publications (1)

Publication Number Publication Date
CN103635780A true CN103635780A (zh) 2014-03-12

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201280032498.9A Pending CN103635780A (zh) 2011-06-30 2012-07-02 用于测量输入电流的系统
CN201280032762.9A Active CN103649688B (zh) 2011-06-30 2012-07-02 用于电容式测量系统的有源屏蔽

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201280032762.9A Active CN103649688B (zh) 2011-06-30 2012-07-02 用于电容式测量系统的有源屏蔽

Country Status (8)

Country Link
US (3) US9644995B2 (enExample)
EP (2) EP2726822B1 (enExample)
JP (2) JP2014527616A (enExample)
KR (3) KR101875415B1 (enExample)
CN (2) CN103635780A (enExample)
RU (1) RU2610221C2 (enExample)
TW (2) TWI564543B (enExample)
WO (2) WO2013001098A2 (enExample)

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CN108808685A (zh) * 2018-03-26 2018-11-13 北京航天发射技术研究所 一种电源电压数字式补偿系统及方法
CN109791168A (zh) * 2016-05-31 2019-05-21 意大利电信股份公司 用于测量电量的参数的计量器设备
CN110470878A (zh) * 2018-05-09 2019-11-19 弗兰克公司 用于非接触式电压测量设备的多传感器配置
CN110967536A (zh) * 2018-10-01 2020-04-07 基思利仪器有限责任公司 具有保护驱动电路的源测量单元
CN113533908A (zh) * 2020-04-15 2021-10-22 雅马哈精密科技株式会社 检查装置以及检查方法

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JP7122687B2 (ja) * 2018-03-30 2022-08-22 パナソニックＩｐマネジメント株式会社 静電容量検出装置
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US11141767B2 (en) * 2018-07-30 2021-10-12 Raytheon Technologies Corporation Forging assembly having capacitance sensors
US10837803B2 (en) * 2019-04-12 2020-11-17 Kla Corporation Inspection system with grounded capacitive sample proximity sensor
JP7281124B2 (ja) * 2019-07-29 2023-05-25 国立研究開発法人量子科学技術研究開発機構 角度センサ、マウント装置、及び測定方法
US11874423B2 (en) 2019-10-25 2024-01-16 Witricity Corporation Circuit for object detection and vehicle position determination
CN114121374B (zh) * 2020-08-27 2023-01-13 华为技术有限公司 一种同轴电缆和终端
US11784482B2 (en) * 2020-10-20 2023-10-10 Apple Inc. Electrical connection monitoring using cable shielding
WO2022164558A1 (en) * 2021-01-26 2022-08-04 Witricity Corporation Wire-wound structures for electromagnetic sensing of objects
US11750041B2 (en) * 2021-01-26 2023-09-05 Witricity Corporation Wire-wound structures for electromagnetic sensing of objects
EP4050353A1 (en) * 2021-02-25 2022-08-31 Infineon Technologies AG An apparatus and a method for measuring a device current of a device under test
CN114812618B (zh) * 2021-12-24 2023-03-07 中国科学院长春光学精密机械与物理研究所 频点噪声抑制系统
CN114966169B (zh) * 2022-06-02 2025-06-20 江苏省送变电有限公司 一种试验用感应电压测量装置
CN116338142B (zh) * 2023-02-28 2024-02-27 浙江大学 一种超重力实验中水合物储层表面变形测量装置和方法
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CN101490642A (zh) * 2006-07-18 2009-07-22 Iee国际电子工程股份公司 输入设备

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109791168A (zh) * 2016-05-31 2019-05-21 意大利电信股份公司 用于测量电量的参数的计量器设备
CN109791168B (zh) * 2016-05-31 2021-12-10 意大利电信股份公司 用于测量电量的参数的计量器设备
CN108808685A (zh) * 2018-03-26 2018-11-13 北京航天发射技术研究所 一种电源电压数字式补偿系统及方法
CN108808685B (zh) * 2018-03-26 2020-12-11 北京航天发射技术研究所 一种电源电压数字式补偿系统及方法
CN110470878A (zh) * 2018-05-09 2019-11-19 弗兰克公司 用于非接触式电压测量设备的多传感器配置
CN110967536A (zh) * 2018-10-01 2020-04-07 基思利仪器有限责任公司 具有保护驱动电路的源测量单元
CN113533908A (zh) * 2020-04-15 2021-10-22 雅马哈精密科技株式会社 检查装置以及检查方法

Also Published As

Publication number Publication date
TW201307804A (zh) 2013-02-16
WO2013001098A3 (en) 2013-03-07
KR101875415B1 (ko) 2018-07-06
KR20140058525A (ko) 2014-05-14
WO2013001098A4 (en) 2013-05-02
WO2013001100A4 (en) 2013-02-14
WO2013001098A2 (en) 2013-01-03
JP6463793B2 (ja) 2019-02-06
US9400195B2 (en) 2016-07-26
TW201319523A (zh) 2013-05-16
TWI568990B (zh) 2017-02-01
USRE48901E1 (en) 2022-01-25
EP2726822B1 (en) 2016-11-09
US9644995B2 (en) 2017-05-09
US20130009626A1 (en) 2013-01-10
EP2726823B1 (en) 2017-06-21
WO2013001100A1 (en) 2013-01-03
US20130003034A1 (en) 2013-01-03
KR20180081155A (ko) 2018-07-13
KR102152297B1 (ko) 2020-09-07
TWI564543B (zh) 2017-01-01
JP2017201306A (ja) 2017-11-09
JP2014527616A (ja) 2014-10-16
RU2610221C2 (ru) 2017-02-08
KR102236200B1 (ko) 2021-04-06
KR20200105964A (ko) 2020-09-09
RU2014102968A (ru) 2015-08-10
CN103649688B (zh) 2017-02-22
CN103649688A (zh) 2014-03-19
EP2726822A2 (en) 2014-05-07
EP2726823A1 (en) 2014-05-07

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Application publication date: 20140312