CN103615967B - A kind of high temperature foil strain gauge and manufacture method thereof - Google Patents
A kind of high temperature foil strain gauge and manufacture method thereof Download PDFInfo
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- CN103615967B CN103615967B CN201310638817.7A CN201310638817A CN103615967B CN 103615967 B CN103615967 B CN 103615967B CN 201310638817 A CN201310638817 A CN 201310638817A CN 103615967 B CN103615967 B CN 103615967B
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- strain gauge
- high temperature
- sensitive grid
- foil strain
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Abstract
The invention discloses a kind of high temperature foil strain gauge and manufacture method thereof, including sensitive grid (2), lead-in wire (4), temporary frame work (5) three part.By adhesive or hot melt, temporary substrate (1) is laminated with metal alloy foil heat seal, utilizes photoetching, chemical etching or laser-induced thermal etching to form.Adjust sensitive grid (2) resistance value by the mode such as machinery, chemistry, laser and reach target resistance.By chemical mode temporary substrate (1) dissolved or remove and be turned on temporary frame work (3), make strain gauge sensitive grid partial denudation.Finally use the modes such as thermofussion welding, electric resistance welding, ultrasonic bond by melted to pad and lead-in wire (4) closely coupled, form high temperature foil strain gauge.High temperature foil strain gauge of the present invention has multiple resistance value, and resistance dispersibility is not more than ± 1%, has single shaft, twin shaft and multiaxis sensitive grid structure, meets 400 ~ 1100 DEG C of scope reliable and stable measurements of class ess-strain.
Description
Technical field
The present invention relates to a kind of strain gauge and manufacture method thereof, particularly to a kind of high temperature foil strain gauge
And manufacture method.
Background technology
Under normal circumstances, strain gauge, as the measurement sensing element of ess-strain, is widely used in energy
The every field such as source, traffic, civil engineering, electronics, chemical industry, Aero-Space, military affairs.Along with boat
The technology such as empty space flight, the energy, nuclear industry, military affairs develop rapidly, to aircraft, electromotor, generating
Unit, reaction unit, the safety and Health monitoring of smelting device propose requirements at the higher level, it is also desirable to can
Truly reflect running status, configuration state, safe condition, design point, failure mode etc., application
Strain gauge in these fields has the special feature that it is can be under harsh hot environment (more than 400 DEG C)
Normal work.
The manufacture method of tradition foil strain gauge is:
1, it is directly coated with a ply strain glue, by heating cure molding at constantan or Karma metal paper tinsel surface
Strain gauge substrate.
2, clean Alloy Foil surface, apply a layer photoetching glue on its surface, use mask plate to pass through ultraviolet
Lamp photosensitive molding strain gauge sensitive grid figure, then by chemolysis mode by photosensitive for photoresist part
Dissolve and remove, manifest the metal alloy foil of mask plate patterns shape.
3, the metal alloy foil etching manifested in figure being removed by method for chemially etching, shaping should
Becoming meter sensitive grid, now the resistance of strain gauge is initial value.
4, use banana oil to be removed by the photoresist of Alloy Foil protection zone, manifest whole sensitive grid.
5, use mechanical grinding mode, reduce strain gauge sensitive grid cross-sectional area and increase resistance so that it is reach
To strain gauge nominal value (desired value).
6, in order to protect strain gauge sensitive grid, identical with strain gauge substrate sensitive grid surface coating one layer
The strain gage adhesive of material, forms strain gauge cap rock by heating cure.
7, electric cautery fusing scolding tin is used to be connected with strain gauge pad by strain gauge test lead.
But, the maximum temperature that above-mentioned foil strain gauge can bear is 250 DEG C, far from adapts to tight
Under cruel hot environment (more than 400 DEG C).
Summary of the invention
The present invention provide a kind of high temperature foil strain gauge being adapted to 400 DEG C of high temperature above environment and
Manufacture method.
For achieving the above object, the present invention is by the following technical solutions:
The manufacture method of a kind of high temperature foil strain gauge, comprises the following steps: (1) sensitive grid manufacture:
Metal alloy foil is forced together with temporary substrate thermal synthesis layer, then by plane chemical etching, laser
Etch process forms sensitive grid part；(2) resistance trimming: adjust quick by machinery, chemistry, laser mode
Sense gate resistance value reaches target resistance；(3) reversion temporary frame work: by chemical mode by temporary substrate
Dissolve or remove and be turned on temporary frame work, make strain gauge sensitive grid partial denudation；(4) welding fabrication:
By melted closely coupled to the pad of sensitive grid and lead-in wire, eventually pass sorting, test, by sensitive grid,
Temporary frame work, lead-in wire are fixed on package carrier formation high temperature foil strain gauge.
In described step (1), use adhesive or hot melt by metal alloy foil and temporary substrate thermal synthesis layer
Force together.
The material of described adhesive is polyester, acrylate, epoxy resin or photosensitive resin.
In described step (4), thermofussion welding, electric resistance welding, ultrasonic bond mode is used to be melted with lead-in wire by pad
Melt closely coupled.
A kind of high temperature foil strain gauge manufactured according to said method, described high temperature foil strain gauge is permissible
Ess-strain steady testing in the range of meeting 400～1100 DEG C.
Described metal alloy foil be the nichrome of thickness 1～30 μm, Karma metal, Aludirome,
Platinum-tungsten alloys or platinumiridio.
The composition of described Aludirome is: Cr22%, Al5.5～5.8%, remaining as Fe.
The thickness of described temporary substrate is 0.03～0.3mm, and material is polyimides, epoxy or polyester.
Described temporary frame work material is Kapton Tape or glass wool cloth enhancing Teflon adhesive tape.
Compared with prior art, high temperature foil strain gauge of the present invention and manufacture method thereof at least have following
Beneficial effect:
1, selecting sensitive grid material is resistant to elevated temperatures nichrome, Karma metal, Aludirome, platinum
Tungsten alloy or platinumiridio.Wherein, nichrome, Karma metal make strain gauge sensitive grid heatproof can
To 400 DEG C.The oxide-film compact structure of Aludirome, platinum-tungsten alloys or platinumiridio Surface Creation,
Good with matrix adhesiveness, there is good non-oxidizability, relatively good anti-carburizing energy, to sulfur-bearing
Atmosphere has good corrosion resistance, and heatproof can be to more than 1000 DEG C.
2, the high temperature foil strain gauge sensitive grid that above-mentioned material makes is naked grid, without organic substrate, makes
Sensitive grid is directly pasted onto resistant to elevated temperatures inorganic ceramic glue surface by the used time.
3, above-mentioned high temperature resistant inorganic ceramic glue is phosphoric acid salt, and heatproof can be to more than 1000 DEG C.
Accompanying drawing explanation
Fig. 1 is the structural representation of figure formed embodiment of the present invention.
Fig. 2 is product essential structure schematic diagram of the present invention.
Fig. 3 is scheme of installation.
In figure: 1. temporary substrate, 2. sensitive grid, 3. temporary frame work, 4. lead-in wire, 5. inorganic high-temp glue, 6.
Test specimen.
Detailed description of the invention
Referring to shown in Fig. 1 and Fig. 2, the foil high temperature strain gauge that the present invention provides, mainly by according to height
The foil sensitive grid 2 of temperature test characteristic design, pad, lead-in wire 4, temporary frame work 3 form.Foil is sensitive
Grid include sensitive grid main body, limit grid, pad, use the technique shapes such as plane chemical etching, laser-induced thermal etching
Become.Sensitive grid figure can need to be designed to different structures according to function, including at least there being sensitive grid
And termination.Pad and lead-in wire are melted closely by both by modes such as thermofussion welding, electric resistance welding, ultrasonic bonds
It is connected, reliable and stable to ensure that signal transmits.By selecting metal alloy foil material and graphic designs
Control the resistance value of etching, adjust realize resistance value 120 Ω, 350 Ω in conjunction with conductor resistance, resistance,
The selection of even 1000 Ω, resistance decentralised control is ± 1%.Single shaft, twin shaft can also be realized, even
The foil high temperature strain gauge molding of triaxial diagram shape structure.Meanwhile, tip shapes and chi are designed as required
Very little, reduce transversal effect to greatest extent.
The present invention also provides for the manufacture method of foil high temperature strain gauge, comprises following master operation, strain
Meter sensitive grid manufacture, resistance trimming, reversion temporary frame work, welding fabrication.(1) sensitive grid manufacture: sensitive
Grid manufacture uses special adhesive, and (material of special adhesive is polyester, acrylate, epoxy resin
Or photosensitive resin) or hot melt metal alloy foil is forced together with temporary substrate thermal synthesis layer, then pass through
The techniques such as plane chemical etching, laser-induced thermal etching form sensitive grid part, and sensitive grid part is including at least having
Sensitive grid main body, limit grid, termination, pad.(2) resistance trimming: by the side such as machinery, chemistry, laser
Formula adjusts its resistance value and reaches target resistance.(3) reversion temporary frame work: will be interim by chemical mode
Substrate is dissolved or is removed and is turned on temporary frame work, makes strain gauge sensitive grid partial denudation.(4) welding
Molding: use the modes such as thermofussion welding, electric resistance welding, ultrasonic bond by melted to pad and lead-in wire closely coupled.
Eventually pass sorting, test, sensitive grid, temporary frame work, lead-in wire are fixed on package carrier formation
High temperature foil strain gauge.
Described metal alloy foil is having relatively high-temperature resistant characteristic, accurately transmitting stress of thickness 1～30 μm
The nichrome of strain measurement, Karma metal, Aludirome, platinum-tungsten alloys, platinumiridio etc..
These alloys can meet the ess-strain steady testing in the range of 400～1100 DEG C.
Described temporary substrate material has polyimides, epoxy, polyester etc..Described lead material is nickel chromium triangle
Alloy, Aludirome.Described temporary frame work material has Kapton Tape, glass wool cloth to strengthen spy
Fluorine dragon (English Teflon, also referred to as politef) adhesive tape.
The present invention also provides for a kind of inorganic high-temp substrate glue for pasting high temperature foil strain gauge, its mesh
Be that strain gauge is fitted snugly on measured piece surface, accurately measure ess-strain.Described nothing
The percentage composition of machine high temperature substrate glue: Al(H2PO4)3It is 20～30%；CrO3It is 5～10%；Silicon
Alkane processes SiO2It is 20～40%；Al2O3It is 5～10%；TiO2It is 10～20%；Deionized water is 5～10%.
Below in conjunction with the accompanying drawings the present invention is made further instructions.
Fig. 1 is the structural representation of figure formed embodiment of the present invention.In Fig. 1, temporary substrate 1 is poly-
Ester film, is processed by film forming, thickness 0.03～0.3mm, utilizes polyester, acrylate, asphalt mixtures modified by epoxy resin
The adhesive such as fat or photosensitive resin or hot melt, be forced together mylar with alloying metal paper tinsel thermal synthesis layer.
Temporary substrate 1 can also be the material such as polyimides, epoxy.Then use plane chemical etching, swash
The techniques such as photoetch form sensitive grid 2 figure, and sensitive grid 2 figure can need to be designed to according to function
Different structures, including at least having sensitive grid and termination.The present embodiment structure be BB structure (also referred to as " T "
Type structure).In the present embodiment, metal alloy foil used by sensitive grid 2 material is having of thickness 1～30 μm
Relatively high-temperature resistant characteristic, accurately the transmission nichrome of stress-strain measurement, Karma metal, ferrum-chromium-aluminum are closed
Gold, platinum-tungsten alloys, platinumiridio etc..
Fig. 2 is product essential structure schematic diagram of the present invention.Mainly by sensitive grid 2, temporary frame work 3, draw
Line 4 forms.Use special adhesive or hot melt that metal alloy foil and temporary substrate thermal synthesis layer are pressed in one
Rise, form sensitive grid 2 part, sensitive grid 2 by techniques such as plane chemical etching, laser-induced thermal etchings
Divide including at least having sensitive grid 2 main body, limit grid, termination, pad.Sensitive grid 2 material in the present embodiment
Material use stablize physicochemical property and excellent electrical Aludirome paper tinsel (composition Cr22%,
Al5.5～5.8%, remaining as Fe), it would however also be possible to employ nichrome, Karma metal, platinum-tungsten alloys, platinum
Iridium alloy etc., thickness range 0.005～0.03mm.Then adjusted by the mode such as machinery, chemistry, laser
Its resistance value whole reaches target resistance, by chemical mode temporary substrate 1 is dissolved or is removed and is turned to
On temporary frame work 3, making strain gauge sensitive grid partial denudation, temporary frame work is that glass wool cloth strengthens Teflon
Dragon (English Teflon, also referred to as politef) adhesive tape, thickness is 0.05～0.3mm, it is possible to use
Kapton Tape, surface adhesive is silicone.Use the sides such as thermofussion welding, electric resistance welding, ultrasonic bond
Pad is melted closely coupled with lead-in wire 4 by formula, forms high temperature foil strain gauge.The present embodiment is formed
High temperature strain gauge resistance value is 350 Ω, a length of 2mm of sensitive grid, resistance dispersion≤± 1%.
Fig. 3 is scheme of installation.Inorganic high-temp glue 5 is used to be pasted onto tested by high temperature foil strain gauge
On test specimen 6, then measure test specimen ess-strain.The percentage composition of inorganic high-temp glue 5 is: Al
(H2PO4)3It is 20～30%；CrO3It is 5～10%；Silane treatment SiO2It is 20～40%；Al2O3
It is 5～10%；TiO2It is 10～20%；Deionized water is 5～10%.
Claims (8)
1. the manufacture method of a high temperature foil strain gauge, it is characterised in that: comprise the following steps:
(1) sensitive grid manufacture: use adhesive or hot melt by metal alloy foil and temporary substrate thermal synthesis layer
Force together, then form sensitive grid part by plane chemical etching, laser etch process；
(2) resistance trimming: adjust sensitive grid resistance value reach target resistance by machinery, chemistry, laser mode
Value；
(3) reversion temporary frame work: by chemical mode temporary substrate dissolved or removes and be turned to temporarily
On framework, make strain gauge sensitive grid partial denudation；
(4) welding fabrication: by melted closely coupled to the pad of sensitive grid and lead-in wire, eventually pass sorting,
Test, is fixed on package carrier formation high temperature foil strain gauge by sensitive grid, temporary frame work, lead-in wire.
Manufacture method the most according to claim 1, it is characterised in that: the material of described adhesive
For polyester, acrylate, epoxy resin or photosensitive resin.
Manufacture method the most according to claim 1, it is characterised in that: in described step (4),
Use thermofussion welding, electric resistance welding, ultrasonic bond mode by melted to pad and lead-in wire closely coupled.
4. the high temperature foil strain gauge that manufacture method according to claim 1 manufactures, it is special
Levy and be: it is stable that described high temperature foil strain gauge can meet the ess-strain in the range of 400～1100 DEG C
Test.
High temperature foil strain gauge the most according to claim 4, it is characterised in that: described metal closes
Native gold is nichrome, Karma metal, Aludirome, platinum-tungsten alloys or the platinum of thickness 1～30 μm
Iridium alloy.
High temperature foil strain gauge the most according to claim 5, it is characterised in that: described ferrum-chromium-aluminum
The composition of alloy is: Cr22%, Al5.5～5.8%, remaining as Fe.
High temperature foil strain gauge the most according to claim 4, it is characterised in that: described interim base
The thickness at the end is 0.03～0.3mm, and material is polyimides or mylar.
High temperature foil strain gauge the most according to claim 4, it is characterised in that: described interim frame
Frame material is Kapton Tape or glass wool cloth enhancing Teflon adhesive tape.
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| CN201310638817.7A CN103615967B (en) | 2013-11-30 | 2013-11-30 | A kind of high temperature foil strain gauge and manufacture method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310638817.7A CN103615967B (en) | 2013-11-30 | 2013-11-30 | A kind of high temperature foil strain gauge and manufacture method thereof |
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| CN103615967A CN103615967A (en) | 2014-03-05 |
| CN103615967B true CN103615967B (en) | 2016-09-21 |
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Cited By (1)
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| CN109752148A (en) * | 2018-12-29 | 2019-05-14 | 中航电测仪器股份有限公司 | A kind of aircraft high temperature conduit junction gas leakage detection sensor |
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| CN106271424B (en) * | 2016-08-26 | 2018-08-24 | 中航电测仪器股份有限公司 | Strain ga(u)ge sealant forming method |
| CN109141697B (en) * | 2017-06-15 | 2020-04-10 | 上海微创电生理医疗科技股份有限公司 | Strain gauge, pressure sensor and interventional medical catheter |
| CN108328561A (en) * | 2018-01-10 | 2018-07-27 | 上海交通大学 | Glassy metal micron foil resistance strain and preparation method thereof |
| CN109059747A (en) * | 2018-07-04 | 2018-12-21 | 北京科技大学 | A kind of temporary frame work wire grid formula high temperature strain gauge and its manufacture and use method |
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| CN114606545A (en) * | 2022-02-24 | 2022-06-10 | 东南数字经济发展研究院 | Electrochemical method for surface treatment of strain gauge bonding pad |
| CN116086663B (en) * | 2023-02-13 | 2024-01-30 | 无锡胜脉电子有限公司 | Preparation method of force sensor |
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| JP2539639B2 (en) * | 1987-10-28 | 1996-10-02 | 株式会社共和電業 | High temperature strain gauge and its attachment structure |
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| CN85104178A (en) * | 1985-09-28 | 1987-04-08 | 成都科技大学 | A kind of high temperature grid base bended strain ga(u)ge and using method thereof |
| CN102661752A (en) * | 2012-04-25 | 2012-09-12 | 中航电测仪器股份有限公司 | Foil type strain gauge and manufacturing method thereof |
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| CN103615967A (en) | 2014-03-05 |
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