CN103615967A - High-temperature foil strain gauge and method for manufacturing high-temperature foil strain gauge - Google Patents
High-temperature foil strain gauge and method for manufacturing high-temperature foil strain gauge Download PDFInfo
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- CN103615967A CN103615967A CN201310638817.7A CN201310638817A CN103615967A CN 103615967 A CN103615967 A CN 103615967A CN 201310638817 A CN201310638817 A CN 201310638817A CN 103615967 A CN103615967 A CN 103615967A
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- strain gauge
- sensitive grid
- foil strain
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Abstract
The invention discloses a high-temperature foil strain gauge and a method for manufacturing the high-temperature foil strain gauge. The high-temperature foil strain gauge comprises a sensitive grid (2), a lead (4) and a temporary frame (5). Heat-seal lamination is carried out on a temporary base (1) and a metal alloy foil through a tackiness agent or hot melting, and formed by the adoption of photoetching or chemical etching or laser etching, and the resistance value of the sensitive grid (2) is adjusted to reach the target resistance value in modes such as the mechanical mode or the chemical mode or the laser mode. The temporary substrate (1) is dissolved or removed through the chemical mode to be turned to the temporary frame (5), and the sensitive grid of the strain gauge is exposed partially. Finally, a welding disc and the lead (4) are fused and tightly connected by the adoption of the modes such as thermofussion welding, electric resistance welding and ultrasonic welding, and the high-temperature foil strain gauge is formed. The high-temperature foil strain gauge has various resistance values, the dispersibility of the resistance is not larger than +/-1%, the high-temperature foil strain gauge is of the single-axis, double-axis and multi-axis sensitive grid structure, and the stress-strain stable and reliable measuring within the 400-1100 DEG C is achieved.
Description
Technical field
The present invention relates to a kind of strainometer and manufacture method thereof, particularly a kind of high temperature foil strain gauge and manufacture method thereof.
Background technology
Generally, strainometer, as the measurement sensitive element of ess-strain, is widely used in the every field such as the energy, traffic, civil engineering work, electronics, chemical industry, Aero-Space, military affairs.Along with technology develop rapidlys such as Aero-Space, the energy, nuclear industry, military affairs, safety and Health monitoring to aircraft, engine, genset, reaction unit, smelting device has proposed requirements at the higher level, also wish truly to reflect running status, configuration state, safe condition, design point, failure mode etc., being applied to the feature that the strainometer in these fields has is can (more than 400 ℃) normal operation under harsh hot environment.
The manufacture method of tradition foil strain gauge is:
1, at constantan or Karma metal paper tinsel surface, directly apply one deck strain gage adhesive, by the substrate of heating cure moulding strainometer.
2, clean Alloy Foil surface, at its surface coating one deck photoresist, use mask plate by uviol lamp sensitization moulding strainometer sensitive grid figure, then by chemical dissolution mode, photoresist sensitization is partly dissolved to removal, manifest the metal alloy paper tinsel of mask plate patterns shape.
3, by method for chemially etching, the metal alloy paper tinsel etching manifesting in figure is removed, shaping strainometer sensitive grid, now the resistance of strainometer is initial value.
4, use banana oil that the photoresist of Alloy Foil protection zone is removed, manifest whole sensitive grids.
5, use mechanical grinding mode, reduce strainometer sensitive grid cross-sectional area and increase resistance, make it reach strainometer nominal value (desired value).
6,, in order to protect strainometer sensitive grid, the strain gage adhesive at sensitive grid surface coating one deck with the identical material of strainometer substrate, forms strainometer cap rock by heating cure.
7, use electric soldering iron fusing scolding tin that strainometer test lead and strainometer pad are connected.
Yet the maximum temperature that above-mentioned foil strain gauge can bear is 250 ℃, can not adapt to far away (more than 400 ℃) under harsh hot environment.
Summary of the invention
The invention provides a kind of high temperature foil strain gauge and manufacture method thereof that can adapt to 400 ℃ of above hot environments.
For achieving the above object, the present invention is by the following technical solutions:
A manufacture method for high temperature foil strain gauge, comprises the following steps: (1) sensitive grid manufacture: metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together, then by plane chemical etching, laser-induced thermal etching technique, form sensitive grid part; (2) resistance trimming: adjust sensitive grid resistance value by machinery, chemistry, laser mode and reach target resistance; (3) reversion temporary frame work: by chemical mode, interim substrate is dissolved or removed and be turned on temporary frame work, make strainometer sensitive grid part exposed; (4) welding fabrication: the pad of sensitive grid is closely connected with lead-in wire melting, finally by mistake sorting, test, sensitive grid, temporary frame work, lead-in wire is fixed on and forms high temperature foil strain gauge on package carrier.
In described step (1), adopt tackifier or hot melt that metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together.
The material of described tackifier is polyester, acrylate, epoxy resin or photosensitive resin.
In described step (4), adopt thermofussion welding, electric resistance welding, ultrasonic bond mode that pad is closely connected with lead-in wire melting.
A high temperature foil strain gauge of manufacturing according to said method, described high temperature foil strain gauge can meet the ess-strain steady testing within the scope of 400～1100 ℃.
Nickel-chrome, Karma metal, Aludirome, platinum-tungsten alloys or platinumiridio that described metal alloy paper tinsel is thickness 1～30 μ m.
The composition of described Aludirome is: Cr22%, Al5.5～5.8%, remain as Fe.
The thickness of described interim substrate is 0.03～0.3mm, and material is polyimide, epoxy or polyester.
Described temporary frame work material is that Kapton Tape or glass wool cloth strengthen Teflon adhesive tape.
Compared with prior art, high temperature foil strain gauge of the present invention and manufacture method thereof at least have following beneficial effect:
1, selecting sensitive grid material is resistant to elevated temperatures nickel-chrome, Karma metal, Aludirome, platinum-tungsten alloys or platinumiridio.Wherein, nickel-chrome, Karma metal make strainometer sensitive grid heatproof can be to 400 ℃.The oxide film compact structure of Aludirome, platinum-tungsten alloys or platinumiridio Surface Creation, good with matrix adhesiveness, there is good inoxidizability, anti-carburizing energy, has good resistance to fouling to sulfur-bearing atmosphere relatively preferably, and heatproof can be to more than 1000 ℃.
2, the high temperature foil strain gauge sensitive grid that above-mentioned material is made is naked grid, without machine substrate, directly sensitive grid is sticked on to resistant to elevated temperatures inorganic ceramic glue surface during use.
3, above-mentioned high temperature resistant inorganic ceramic glue is phosphoric acid salt, and heatproof can be to more than 1000 ℃.
Accompanying drawing explanation
Fig. 1 is the structural representation of figure moulding embodiment of the present invention.
Fig. 2 is product essential structure schematic diagram of the present invention.
Fig. 3 is scheme of installation.
In figure: 1. interim substrate, 2. sensitive grid, 3. temporary frame work, 4. lead-in wire, 5. inorganic high-temp glue, 6. test specimen.
Embodiment
Refer to shown in Fig. 1 and Fig. 2, paper tinsel formula high temperature strain gauge provided by the invention, is mainly comprised of paper tinsel formula sensitive grid 2, pad, lead-in wire 4, temporary frame work 3 according to high temperature test characteristics design.Paper tinsel formula sensitive grid comprises sensitive grid main body, limit grid, pad, adopts the techniques such as plane chemical etching, laser-induced thermal etching to form.Sensitive grid figure can need to be designed to different structures according to function, at least includes sensitive grid and termination.Pad is closely connected both meltings by modes such as thermofussion welding, electric resistance welding, ultrasonic bonds with lead-in wire, reliable and stable to guarantee that signal transmits.By selecting metal alloy foil material and graphic designs to control etched resistance value, in conjunction with conductor resistance, resistance adjustment, realize resistance value 120 Ω, 350 Ω, the even selection of 1000 Ω, resistance decentralised control is ± 1%.Also can realize single shaft, twin shaft, even the paper tinsel formula high temperature strain gauge moulding of triaxial diagram shape structure.Meanwhile, design as required termination shape and size, reduce to greatest extent transversal effect.
The present invention also provides the manufacture method of paper tinsel formula high temperature strain gauge, comprises following master operation, the manufacture of strainometer sensitive grid, resistance trimming, reversion temporary frame work, welding fabrication.(1) sensitive grid manufacture: sensitive grid manufacture adopts special adhesive (material of special adhesive is polyester, acrylate, epoxy resin or photosensitive resin) or hot melt that metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together, then by techniques such as plane chemical etching, laser-induced thermal etchings, form sensitive grid part, sensitive grid part at least includes sensitive grid main body, Shan, termination, limit, pad.(2) resistance trimming: adjust its resistance value by modes such as machinery, chemistry, laser and reach target resistance.(3) reversion temporary frame work: by chemical mode, interim substrate is dissolved or removed and be turned on temporary frame work, make strainometer sensitive grid part exposed.(4) welding fabrication: adopt the modes such as thermofussion welding, electric resistance welding, ultrasonic bond that pad is closely connected with lead-in wire melting.Finally by crossing sorting, test, sensitive grid, temporary frame work, lead-in wire are fixed on and on package carrier, form high temperature foil strain gauge.
Described metal alloy paper tinsel is having compared with high-temperature resistant characteristic, the nickel-chrome that accurately transmits stress-strain measurement, Karma metal, Aludirome, platinum-tungsten alloys, platinumiridio etc. of thickness 1～30 μ m.These alloys can meet the ess-strain steady testing within the scope of 400～1100 ℃.
Described interim base material has polyimide, epoxy, polyester etc.Described lead material is nickel-chrome, Aludirome.Described temporary frame work material has Kapton Tape, glass wool cloth to strengthen Teflon (English Teflon also claims teflon) adhesive tape.
It is a kind of for pasting the inorganic high-temp substrate glue of high temperature foil strain gauge that the present invention also provides, its objective is by strainometer close and firm be arranged on measured piece surface, Measurement accuracy ess-strain.The percentage composition of described inorganic high-temp substrate glue: Al(H
2pO
4)
3be 20～30%; CrO
3be 5～10%; Silane treatment SiO
2be 20～40%; Al
2o
3be 5～10%; TiO
2be 10～20%; Deionized water is 5～10%.
Below in conjunction with accompanying drawing, the present invention is made further instructions.
Fig. 1 is the structural representation of figure moulding embodiment of the present invention.In Fig. 1, interim substrate 1 is mylar, by film forming, processes, and thickness 0.03～0.3mm, utilizes tackifier or the hot melts such as polyester, acrylate, epoxy resin or photosensitive resin, together with mylar is pressed onto with alloying metal paper tinsel thermal synthesis layer.Interim substrate 1 can be also the materials such as polyimide, epoxy.Then adopt the techniques such as plane chemical etching, laser-induced thermal etching to form sensitive grid 2 figures, sensitive grid 2 figures can need to be designed to different structures according to function, at least include sensitive grid and termination.The present embodiment structure is BB structure (also claiming T-shape structure).In the present embodiment, sensitive grid 2 material metal alloy paper tinsel used is having compared with high-temperature resistant characteristic, the nickel-chrome that accurately transmits stress-strain measurement, Karma metal, Aludirome, platinum-tungsten alloys, platinumiridio etc. of thickness 1～30 μ m.
Fig. 2 is product essential structure schematic diagram of the present invention.Mainly by sensitive grid 2, temporary frame work 3, going between 4 forms.Adopt special adhesive or hot melt that metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together, by techniques such as plane chemical etching, laser-induced thermal etchings, form sensitive grid 2 parts, sensitive grid 2 parts at least include sensitive grid 2 main bodys, Shan, termination, limit, pad.In the present embodiment, sensitive grid 2 materials adopt Aludirome paper tinsel (composition Cr22%, Al5.5～5.8% of stablizing physicochemical property and excellent electrical, residue is Fe), also can adopt nickel-chrome, Karma metal, platinum-tungsten alloys, platinumiridio etc., thickness range 0.005～0.03mm.Then by modes such as machinery, chemistry, laser, adjust its resistance value and reach target resistance, by chemical mode, interim substrate 1 is dissolved or removed and be turned on temporary frame work 3, make strainometer sensitive grid part exposed, temporary frame work is that glass wool cloth strengthens Teflon (English Teflon, also claim teflon) adhesive tape, thickness is 0.05～0.3mm, also can adopt Kapton Tape, and surface glue stick is silicone.Adopt the modes such as thermofussion welding, electric resistance welding, ultrasonic bond that pad is closely connected with lead-in wire 4 meltings, form high temperature foil strain gauge.The high temperature strain gauge resistance value that the present embodiment forms is 350 Ω, and sensitive grid length is 2mm, resistance dispersion degree≤± 1%.
Fig. 3 is scheme of installation.Adopt inorganic high-temp glue 5 that high temperature foil strain gauge is sticked on test specimen 6, then measure test specimen ess-strain.The percentage composition of inorganic high-temp glue 5 is: Al(H
2pO
4)
3be 20～30%; CrO
3be 5～10%; Silane treatment SiO
2be 20～40%; Al
2o
3be 5～10%; TiO
2be 10～20%; Deionized water is 5～10%.
Claims (9)
1. a manufacture method for high temperature foil strain gauge, is characterized in that: comprise the following steps:
(1) sensitive grid manufacture: metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together, then form sensitive grid part by techniques such as plane chemical etching, laser-induced thermal etchings;
(2) resistance trimming: adjust sensitive grid resistance value by machinery, chemistry, laser mode and reach target resistance;
(3) reversion temporary frame work: by chemical mode, interim substrate is dissolved or removed and be turned on temporary frame work, make strainometer sensitive grid part exposed;
(4) welding fabrication: the pad of sensitive grid is closely connected with lead-in wire melting, finally by mistake sorting, test, sensitive grid, temporary frame work, lead-in wire is fixed on and forms high temperature foil strain gauge on package carrier.
2. manufacture method according to claim 1, is characterized in that: in described step (1), adopt tackifier or hot melt that metal alloy paper tinsel and interim substrate thermal synthesis layer are forced together.
3. manufacture method according to claim 2, is characterized in that: the material of described tackifier is polyester, acrylate, epoxy resin or photosensitive resin.
4. manufacture method according to claim 1, is characterized in that: in described step (4), adopt thermofussion welding, electric resistance welding, ultrasonic bond mode that pad is closely connected with lead-in wire melting.
5. the high temperature foil strain gauge that manufacture method according to claim 1 is manufactured, is characterized in that: described high temperature foil strain gauge can meet the ess-strain steady testing within the scope of 400～1100 ℃.
6. high temperature foil strain gauge according to claim 5, is characterized in that: nickel-chrome, Karma metal, Aludirome, platinum-tungsten alloys or platinumiridio that described metal alloy paper tinsel is thickness 1～30 μ m.
7. high temperature foil strain gauge according to claim 6, is characterized in that: the composition of described Aludirome is: Cr22%, Al5.5～5.8%, remain as Fe.
8. high temperature foil strain gauge according to claim 5, is characterized in that: the thickness of described interim substrate is 0.03～0.3mm, and material is polyimide, epoxy or polyester.
9. high temperature foil strain gauge according to claim 5, is characterized in that: described temporary frame work material is that Kapton Tape or glass wool cloth strengthen Teflon adhesive tape.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106271424A (en) * | 2016-08-26 | 2017-01-04 | 中航电测仪器股份有限公司 | Strain ga(u)ge sealant forming method |
| CN108328561A (en) * | 2018-01-10 | 2018-07-27 | 上海交通大学 | Glassy metal micron foil resistance strain and preparation method thereof |
| CN109059747A (en) * | 2018-07-04 | 2018-12-21 | 北京科技大学 | A kind of temporary frame work wire grid formula high temperature strain gauge and its manufacture and use method |
| CN109141697A (en) * | 2017-06-15 | 2019-01-04 | 上海微创电生理医疗科技股份有限公司 | Foil gauge, pressure sensor and intervention catheter |
| CN109987577A (en) * | 2019-03-18 | 2019-07-09 | 西安中星测控有限公司 | A kind of ceramic insulating layer of pressure sensor and preparation method thereof |
| CN111303773A (en) * | 2019-12-10 | 2020-06-19 | 中航电测仪器股份有限公司 | Inorganic high-temperature patch adhesive material and preparation method thereof |
| CN112410744A (en) * | 2020-11-09 | 2021-02-26 | 浙江工业大学 | Sputtering film sensitive element used in coal gas environment |
| CN112629402A (en) * | 2020-12-31 | 2021-04-09 | 厦门市诺盛测控技术有限公司 | Preparation method and template for strain gauge coated with welding spot |
| CN112833770A (en) * | 2021-02-26 | 2021-05-25 | 中航电测仪器股份有限公司 | Compound full-bridge strain gauge |
| CN114606545A (en) * | 2022-02-24 | 2022-06-10 | 东南数字经济发展研究院 | Electrochemical method for surface treatment of strain gauge bonding pad |
| CN116086663A (en) * | 2023-02-13 | 2023-05-09 | 无锡胜脉电子有限公司 | Preparation method of high-temperature-resistant high-reliability force sensor |
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Cited By (17)
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| CN106271424B (en) * | 2016-08-26 | 2018-08-24 | 中航电测仪器股份有限公司 | Strain ga(u)ge sealant forming method |
| CN106271424A (en) * | 2016-08-26 | 2017-01-04 | 中航电测仪器股份有限公司 | Strain ga(u)ge sealant forming method |
| US11596493B2 (en) | 2017-06-15 | 2023-03-07 | Shanghai Microport Ep Medtech Co., Ltd. | Strain gauge, pressure sensor, and interventional medical catheter |
| CN109141697A (en) * | 2017-06-15 | 2019-01-04 | 上海微创电生理医疗科技股份有限公司 | Foil gauge, pressure sensor and intervention catheter |
| CN109141697B (en) * | 2017-06-15 | 2020-04-10 | 上海微创电生理医疗科技股份有限公司 | Strain gauge, pressure sensor and interventional medical catheter |
| CN108328561A (en) * | 2018-01-10 | 2018-07-27 | 上海交通大学 | Glassy metal micron foil resistance strain and preparation method thereof |
| CN109059747A (en) * | 2018-07-04 | 2018-12-21 | 北京科技大学 | A kind of temporary frame work wire grid formula high temperature strain gauge and its manufacture and use method |
| CN109987577A (en) * | 2019-03-18 | 2019-07-09 | 西安中星测控有限公司 | A kind of ceramic insulating layer of pressure sensor and preparation method thereof |
| CN111303773A (en) * | 2019-12-10 | 2020-06-19 | 中航电测仪器股份有限公司 | Inorganic high-temperature patch adhesive material and preparation method thereof |
| CN112410744A (en) * | 2020-11-09 | 2021-02-26 | 浙江工业大学 | Sputtering film sensitive element used in coal gas environment |
| CN112410744B (en) * | 2020-11-09 | 2022-10-04 | 浙江工业大学 | Sputtering film sensitive element used in coal gas environment |
| CN112629402A (en) * | 2020-12-31 | 2021-04-09 | 厦门市诺盛测控技术有限公司 | Preparation method and template for strain gauge coated with welding spot |
| CN112833770A (en) * | 2021-02-26 | 2021-05-25 | 中航电测仪器股份有限公司 | Compound full-bridge strain gauge |
| CN112833770B (en) * | 2021-02-26 | 2022-12-13 | 中航电测仪器股份有限公司 | Compound full-bridge strain gauge |
| CN114606545A (en) * | 2022-02-24 | 2022-06-10 | 东南数字经济发展研究院 | Electrochemical method for surface treatment of strain gauge bonding pad |
| CN116086663A (en) * | 2023-02-13 | 2023-05-09 | 无锡胜脉电子有限公司 | Preparation method of high-temperature-resistant high-reliability force sensor |
| CN116086663B (en) * | 2023-02-13 | 2024-01-30 | 无锡胜脉电子有限公司 | Preparation method of force sensor |
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